OPTICAL ELEMENT HOLDING APPARATUS AND EXPOSURE APPARATUS
    75.
    发明申请
    OPTICAL ELEMENT HOLDING APPARATUS AND EXPOSURE APPARATUS 失效
    光学元件保持装置和曝光装置

    公开(公告)号:US20080117534A1

    公开(公告)日:2008-05-22

    申请号:US11925373

    申请日:2007-10-26

    IPC分类号: G02B7/04

    摘要: A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.

    摘要翻译: 用于保持光学元件的保持装置包括被配置为测量光学元件的坐标的测量部件和被配置为基于由测量部件测量的坐标来移动光学元件的驱动部件,其中测量部件包括第一传感器 被配置为检测所述光学元件的一部分的位移量;以及第二传感器,被配置为检测所述光学元件的一部分位于预定位置。

    Printing apparatus
    78.
    发明申请
    Printing apparatus 审中-公开

    公开(公告)号:US20070242996A1

    公开(公告)日:2007-10-18

    申请号:US11808689

    申请日:2007-06-12

    IPC分类号: G03G15/00

    摘要: An electrophotographic printing apparatus comprises a paper-conveying device conveying a continuous paper sheet in a definite conveyance direction, a plurality of photoreceptors disposed downstream from the paper-conveying device at regular intervals in the conveyance direction of the continuous paper sheet, and one or more idler rollers that are disposed between the paper-conveying device and the most upstream photoreceptor and that rotate passively while contacting the continuous paper sheet wrapping around the rollers. The idler roller that the continuous paper sheet is in contact with at the largest wrap angle has a circumference that is equal to the whole or a fractional length of the interval between the axes of two adjacent photoreceptors.

    Program conversion program, program conversion apparatus and program conversion method
    79.
    发明申请
    Program conversion program, program conversion apparatus and program conversion method 有权
    程序转换程序,程序转换装置和程序转换方法

    公开(公告)号:US20070089099A1

    公开(公告)日:2007-04-19

    申请号:US11336917

    申请日:2006-01-23

    IPC分类号: G06F9/45

    CPC分类号: G06F8/74

    摘要: A program conversion program, a program conversion apparatus and a program conversion method that conversions a program having different process according to the content of an argument into a program which facilitate the analysis are provided. The program conversion apparatus includes a dedicated call destination program generating unit that detects the call destination program, an argument for differentiating the processes of the call destination program and the content of the argument from the program group and generates a program for executing only a process according to the content of the argument of the processes of the call destination program as the dedicated call destination program for each argument and each content of the argument, and a call source program rewriting unit that detects the call position for calling the call destination program from the program group and rewrites the call position to call the dedicated call destination program generated by the dedicated call destination program generating unit.

    摘要翻译: 提供了一种程序转换程序,程序转换装置和程序转换方法,其将具有根据参数内容的不同进程的程序转换成便于分析的程序。 程序转换装置包括一个专用呼叫目的地程序生成单元,用于检测呼叫目的地程序,用于区分呼叫目的地程序的处理和参数内容与该程序组相关联的参数,并且生成仅执行程序 将呼叫目的地程序的处理的参数的内容作为每个参数的专用呼叫目的地程序和参数的每个内容,以及呼叫源程序重写单元,其从所述呼叫目的地程序中调用呼叫目的地程序 程序组并重写呼叫位置,以呼叫由专用呼叫目的地节目产生单元生成的专用呼叫目的地节目。

    Substrate holding apparatus, substrate holding method, and substrate processing apparatus
    80.
    发明申请
    Substrate holding apparatus, substrate holding method, and substrate processing apparatus 有权
    基板保持装置,基板保持方法和基板处理装置

    公开(公告)号:US20070070575A1

    公开(公告)日:2007-03-29

    申请号:US10578100

    申请日:2004-12-22

    IPC分类号: H01T23/00

    摘要: A substrate holding apparatus can meet the request for a smaller-sized compact apparatus while ensuring a sufficient immersion depth of a substrate in a processing liquid. The substrate holding apparatus includes: a substrate holder (84) for supporting a substrate (W) by bringing a peripheral portion of a surface of the substrate (W) into contact with a first sealing member (92); and a substrate pressing section (85) for lowering relative to the substrate holder (84) so as to press the substrate (W) held by the substrate holder (84) downward, thereby bringing the first sealing member (92) into pressure contact with the substrate (W); wherein the substrate pressing section (85) is provided with a second ring-shaped sealing member (170) which makes pressure contact with an upper surface of a ring-shaped holding section of the substrate holder (84), thereby sealing the peripheral region of the substrate pressing section (85).

    摘要翻译: 基板保持装置可以满足对较小尺寸的小型装置的要求,同时确保基板在处理液体中的足够的浸入深度。 基板保持装置包括:通过使基板(W)的表面的周边部分与第一密封构件(92)接触来支撑基板(W)的基板保持件(84); 以及用于相对于基板保持件(84)下降以便将由基板保持件(84)保持的基板(W)向下压的基板按压部(85),从而使第一密封部件(92)与 基板(W); 其中,所述基板按压部(85)设置有与所述基板保持件(84)的环状保持部的上表面压力接触的第二环状密封部件(170),从而密封所述基板保持部 基板按压部(85)。