公开(公告)号：US20070041004A1

公开(公告)日：2007-02-22

申请号：US10556712

申请日：2004-05-06

申请人： Kenji Suzuki

发明人： Kenji Suzuki

IPC分类号： G03B27/54

CPC分类号： B82Y10/00 ,  G03F7/70075 ,  G03F7/70083 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/702 ,  G21K1/06

摘要： An object of this invention is to reduce even slight irregularities in illumination that occur after assembly of an optical system. To this end, in an exemplary illumination-optical system, a light source that emits extreme ultraviolet (EUV) light, a collimator, a fly's-eye mirror, and a condenser are positioned, in this stated order. A prescribed illumination area on the emission side of the condenser is irradiated with Köhler illumination. At least one unit mirror, among multiple unit mirrors of the fly's-eye mirror, is a correction mirror that has reflectivity irregularities. The reflectivity irregularities correct a portion of, or all, the illumination irregularities in the illumination area.

摘要翻译： 本发明的一个目的是减少在组装光学系统之后发生的照明中的均匀轻微的不规则性。 为此，在示例性照明光学系统中，按照该顺序定位发射极紫外（EUV）光的光源，准直仪，飞眼镜和冷凝器。 用Köhler照明照射冷凝器出射侧的规定照明区域。 在飞眼镜的多个单元反射镜中，至少有一个单元镜是具有反射率不均匀性的校正镜。 反射率不规则校正照明区域中的照明不规则部分或全部。

公开(公告)号：US07179672B2

公开(公告)日：2007-02-20

申请号：US10976987

申请日：2004-11-01

申请人： Koji Asakawa ,  Akira Fujimoto ,  Hitoshi Sugiyama ,  Kenichi Ohashi ,  Kenji Suzuki ,  Junichi Tonotani

发明人： Koji Asakawa ,  Akira Fujimoto ,  Hitoshi Sugiyama ,  Kenichi Ohashi ,  Kenji Suzuki ,  Junichi Tonotani

IPC分类号： H01L21/00

CPC分类号： H01L33/22 ,  H01L21/0271

摘要： A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved.The roughened structure on the surface of the light-emitting element of the invention is formed into the following shape such that the refractive index smoothly changes: (1) the mean diameter of projections on the roughened surface is smaller than the light wavelength; (2) a pitch of the roughened surface is irregular; and (3) positions of the top and bottom of the roughened surface are distributed from their mean values within the light wavelength in order to give a smooth gradient of the refractive index. The surface of such light-emitting element is obtained by forming a thin film on the surface of the light-emitting element using a resin composition which contains a block copolymer or graft copolymer and forms a micophase-separated structure in a self-organization manner; selectively removing at least one phase of the microphase-separated structure of the thin film formed on the surface; and etching the surface of the light-emitting element using the remaining phase as an etching mask.

摘要翻译： 在发光元件的表面上形成纳米尺寸的粗糙结构，并提高发光效率。 本发明的发光元件表面上的粗糙结构形成为以下形状，使得折射率平滑地变化：（1）粗糙面上的突起的平均直径小于光波长; （2）粗糙表面的间距不规则; 和（3）粗糙表面的顶部和底部的位置从其在光波长内的平均值分布，以便给出折射率的平滑梯度。 这种发光元件的表面通过使用含有嵌段共聚物或接枝共聚物的树脂组合物在发光元件的表面上形成薄膜而以自组织形式形成微晶相分离结构而获得; 选择性地除去形成在表面上的薄膜的微相分离结构的至少一个相; 并使用剩余的相作为蚀刻掩模蚀刻发光元件的表面。

公开(公告)号：US07178419B2

公开(公告)日：2007-02-20

申请号：US10489107

申请日：2003-03-27

申请人： Naotaka Murakami ,  Naoto Ogasawara ,  Kenji Suzuki ,  Atsushi Fukuta ,  Jun Takamatsu

发明人： Naotaka Murakami ,  Naoto Ogasawara ,  Kenji Suzuki ,  Atsushi Fukuta ,  Jun Takamatsu

IPC分类号： F16H59/00 ,  H01H9/06

CPC分类号： H05K7/02 ,  F16H59/105 ,  F16H61/0006 ,  H05K5/0026 ,  H05K5/0082 ,  Y10T74/19251

摘要： A control apparatus includes a shift position detecting device for detecting a shift position that is changed by manual operation of the vehicle driver, an ECU for controlling an A/T based on a signal for a detected vehicle running state, and connectors that connect to an electrical unit outside the casing. Further, the shift position detecting device, the connectors, and the electronic control unit are electrically connected through a connecting board. Consequently, the shift position detecting device, the ECU, and the connectors can be freely laid out.

摘要翻译： 一种控制装置，包括用于检测通过车辆驾驶员的手动操作而改变的换档位置的变速位置检测装置，基于检测到的车辆行驶状态的信号来控制A / T的ECU，以及连接到 外壳外的电气单元。 此外，变速位置检测装置，连接器和电子控制单元通过连接板电连接。 因此，可以自由地布置换档位置检测装置，ECU和连接器。

公开(公告)号：US20060266696A1

公开(公告)日：2006-11-30

申请号：US11289763

申请日：2005-11-29

申请人： Takao Masuda ,  Teruoki Tago ,  Shuichi Yoshida ,  Toshihiro Tomita ,  Kenji Suzuki

发明人： Takao Masuda ,  Teruoki Tago ,  Shuichi Yoshida ,  Toshihiro Tomita ,  Kenji Suzuki

IPC分类号： B01D71/04

CPC分类号： B01D71/04 ,  B01D67/0051 ,  B01D69/02 ,  B01D69/12 ,  B01D2325/04 ,  B01D2325/30 ,  B01D2325/36

摘要： The present invention provides an inorganic separation membrane including a silicalite nanocrystalline layer formed on a porous ceramic substrate, and a porous inorganic protective layer is formed on the nanocrystalline layer. The crystal grain diameter of the silicalite nanocrystal is preferably 150 nm or less, and the thickness of the silicalite nanocrystalline layer is preferably 1.0 to 4.0 μm. The separation membrane may be manufactured by: immersing a porous ceramic substrate in a dispersion solution of silicalite nanocrystals; laminating the silicalite nanocrystals on the surface of the porous ceramic substrate by evacuating the insider of the porous ceramic substrate; forming a porous inorganic protective layer on the silicalite nanocrystalline layer by a hydrothermal synthesis by heating after immersing the porous substrate in a zeolite synthesis solution containing a silica source; and removing organic components in the silicalite nanocrystal by liquid phase oxidation.

摘要翻译： 本发明提供一种无机分离膜，其包括在多孔陶瓷基板上形成的硅沸石纳米晶层，在纳米晶层上形成多孔无机保护层。 硅沸石纳米晶体的晶粒直径优选为150nm以下，并且硅沸石纳米晶层的厚度优选为1.0〜4.0μm。 分离膜可以通过以下步骤制造：将多孔陶瓷基材浸渍在硅沸石纳米晶体的分散溶液中; 通过抽真空多孔陶瓷基板的内部，在多孔陶瓷基板的表面层叠硅沸石纳米晶体; 在将多孔基材浸入含有二氧化硅源的沸石合成溶液中之后通过加热通过水热合成在硅沸石纳米晶层上形成多孔无机保护层; 并通过液相氧化除去硅沸石纳米晶体中的有机成分。

公开(公告)号：US20060236213A1

公开(公告)日：2006-10-19

申请号：US11237765

申请日：2005-09-29

申请人： Yasufumi Honda ,  Kenji Suzuki ,  Takashi Koguchi

发明人： Yasufumi Honda ,  Kenji Suzuki ,  Takashi Koguchi

IPC分类号： H03M13/00

CPC分类号： G06F11/1044

摘要： The present invention provides a control method for an error detection & correction apparatus, comprising a plurality of data processing apparatuses which reside in a data communications path and partake in exchanging data by the unit of error correcting code, and a plurality of information exchange paths which are installed between the plurality of data processing apparatuses; and generating a true syndrome by exchanging a partial syndrome relating to a part of the data partaken by each of the data processing apparatuses by way of the information exchange paths, comprising the step of exchanging renewal information relating to a part of the data partaken by each of the data processing apparatuses with the other data processing apparatus by way of the information exchange path.

摘要翻译： 本发明提供了一种用于错误检测和校正装置的控制方法，包括驻留在数据通信路径中的多个数据处理装置，并且通过纠错码单元交换数据，以及多个信息交换路径， 安装在所述多个数据处理装置之间; 以及通过与信息交换路径中的每一个数据处理装置所共享的数据的一部分相关的部分综合信息产生真正的综合征，其中包括以下步骤：交换与每个 的数据处理装置与其他数据处理装置通过信息交换路径。

公开(公告)号：US20060230757A1

公开(公告)日：2006-10-19

申请号：US11389501

申请日：2006-03-27

申请人： Kazuhiro Tagata ,  Koji Sakai ,  Takaomi Shirase ,  Yasushi Aoki ,  Kenji Suzuki ,  Hiroshi Nakano

发明人： Kazuhiro Tagata ,  Koji Sakai ,  Takaomi Shirase ,  Yasushi Aoki ,  Kenji Suzuki ,  Hiroshi Nakano

IPC分类号： B60T13/00

CPC分类号： B60T11/224

摘要： A fluid pressure booster includes: a control piston in which brake operation input acts in an advancing direction, and reaction based on fluid pressure of a booster fluid pressure generation chamber that generates fluid pressure for actuating a master piston acts in a retracting direction; a pressure increasing valve provided between the booster fluid pressure generation chamber and a fluid pressure generation source so as to open at the time of advance of the control piston and close at the time of retraction of the control piston; and a pressure reducing valve provided between a release chamber and the booster fluid pressure generation chamber so as to close at the time of the advance of the control piston and open at the time of the retraction of the control piston. The pressure increasing valve includes first valve means and second valve means that sequentially open according to an increase in the brake operation input, and a seal diameter of the second valve means is larger than that of the first valve means. Thus, it is possible to enhance initial response of the pressure increasing valve, and also enhance response of the pressure increasing valve when a brake operation member is strongly operated.

公开(公告)号：US20060223310A1

公开(公告)日：2006-10-05

申请号：US11096095

申请日：2005-03-31

申请人： Kenji Suzuki

发明人： Kenji Suzuki

IPC分类号： H01L21/44

CPC分类号： C23C16/52 ,  C23C16/16 ,  H01L21/28556 ,  H01L21/76843 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76873 ,  H01L21/76874

摘要： A method for improving adhesion of Cu to a Ru layer in Cu metallization. The method includes providing a substrate in a process chamber of a deposition system, depositing a Ru layer on the substrate in a chemical vapor deposition process, and forming a Cu seed layer on the Ru layer to prevent oxidation of the Ru layer. The Cu seed layer is partially or completely oxidized prior to performing a Cu bulk plating process on the substrate. The oxidized portion of the Cu seed layer is substantially dissolved and removed from the substrate during interaction with a Cu plating solution, thereby forming a bulk Cu layer with good adhesion to the underlying Ru layer.

摘要翻译： Cu金属化时Cu改善Ru层的附着力的方法。 该方法包括在沉积系统的处理室中提供衬底，在化学气相沉积工艺中在衬底上沉积Ru层，以及在Ru层上形成Cu籽晶层以防止Ru层的氧化。 在对基材进行Cu块体电镀工艺之前，Cu籽晶层部分或完全氧化。 在与Cu电镀溶液相互作用的过程中，Cu籽晶层的氧化部分基本上被溶解并从衬底去除，从而形成具有与下面的Ru层具有良好粘附性的体Cu层。

公开(公告)号：US20060185598A1

公开(公告)日：2006-08-24

申请号：US11351546

申请日：2006-02-10

申请人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa ,  Tadahiro Ishizaka

发明人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa ,  Tadahiro Ishizaka

IPC分类号： C23C16/00

CPC分类号： C23C16/4481

摘要： A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing the deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system includes one or more trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.

摘要翻译： 描述了与高电导蒸气传输系统耦合的高电导多托盘膜前体蒸发系统，以通过增加膜前体的暴露表面积来增加沉积速率。 多托盘膜前体蒸发系统包括一个或多个托盘。 每个托盘被构造成支撑和保持例如固体粉末形式或固体片剂形式的膜前体。 此外，每个托盘构造成在膜前体被加热的同时提供载气在膜前体上的高电导流。 例如，载体气体向内流过膜前体，并且垂直向上流过可堆放托盘内的流动通道并通过固体前驱物蒸发系统中的出口。

公开(公告)号：US20060182886A1

公开(公告)日：2006-08-17

申请号：US11058676

申请日：2005-02-15

申请人： Emmanuel Guidotti ,  Kenji Suzuki ,  Gerrit Leusink ,  Fenton McFeely

发明人： Emmanuel Guidotti ,  Kenji Suzuki ,  Gerrit Leusink ,  Fenton McFeely

IPC分类号： C23C16/00 ,  B05C11/00

CPC分类号： C23C16/4481 ,  C23C16/16 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/45565

摘要： A method and system for improved delivery of a solid precursor. A chemically inert coating is provided on system components in a precursor delivery line to reduce decomposition of a relatively unstable precursor vapor in the precursor delivery line, thereby allowing increased delivery of the precursor vapor to a processing zone for depositing a layer on a substrate. The solid precursor can, for example, be a ruthenium carbonyl or a rhenium carbonyl. The inert coating can, for example, be a CxFy-containing polymer, such as polytetrafluoroethylene or ethylene-chlorotrifluoroethylene. Other benefits of using an inert coating include easy periodic cleaning of deposits from the precursor delivery line.

摘要翻译： 一种用于改进固体前体递送的方法和系统。 在前体输送管线中的系统组分上提供化学惰性的涂层，以减少前体输送管线中相对不稳定的前体蒸汽的分解，从而允许增加前体蒸气的输送到用于在基底上沉积层的处理区域。 固体前体可以是例如羰基钌或羰基铼。 惰性涂层可以是例如聚四氟乙烯或乙烯 - 三氟氯乙烯的聚合物。 使用惰性涂层的其他优点包括容易地从前体输送管线定期清洁沉积物。

公开(公告)号：US20060112882A1

公开(公告)日：2006-06-01

申请号：US10998420

申请日：2004-11-29

申请人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa

发明人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa

IPC分类号： C23C16/00

CPC分类号： C23C16/4481 ,  C23C16/16

摘要： A high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system includes a base tray with one or more upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.