摘要:
This invention relates to an optical recording method and apparatus, in which the intensity of a laser beam to be radiated onto an optical recording medium is raised from an intensity P.sub.pre for maintaining a pre-heat state in which the temperature of the medium surface becomes a predetermined temperature, to P.sub.W1 higher than P.sub.pre, the intensity is reduced to an intensity P.sub.LT lower than P.sub.W1 after P.sub.W1 is maintained for a time T.sub.W1, and thereafter, the laser beam is intensity-modulated between P.sub.LT and an intensity P.sub.W2 higher than P.sub.LT so as to form a mark on the optical recording medium. When at least one of P.sub.W2, P.sub.LT, and a time T.sub.W2 for maintaining P.sub.W2 is controlled, the medium temperature, after an elapse of T.sub.W1, at the peak temperature position or the spot center position of the laser beam radiated onto the medium surface is equal to the medium temperature after an elapse of T.sub.W2.
摘要:
A plasma welding method has successive steps including pre-heating of members to be welded, tack welding of the members for tentatively fixing these members, keyhole welding for completely welding the members to each other, and finish padding. These steps are automatically conducted by a single plasma welding apparatus operative in accordance with a programmed sequence including data concerning the optimum conditions of operation in each step in relation to the conditions such as sizes and materials of the members to be welded. The apparatus has a welding torch, a welding head on which the welding torch is mounted for rotation, a controller adapted for storing the optimum welding conditions for successive steps of the welding process in relation to the conditions of the members to be welded, a power supply system for transmitting welding current and welding speed signal to the welding head in accordance with a command provided by the controller, and a gas supply system for supplying a plasma gas at a rate determined in accordance with a command from the controller.
摘要:
A piping travelling apparatus having a plurality of continuous treads driven by motors through transmission gearing. The continuous treads are mounted to a frame and spaced apart a predetermined distance peripherally of the inner wall surface of the piping. At least one of the continuous treads is kept in contact with the inner wall surface of the piping no matter what the posture of the apparatus may be, so that the apparatus can travel without any trouble even if its posture undergoes a change when it moves along elevations and depressions on the inner wall surface of the piping or negotiates the boundary between different levels of the inner wall surface or bends of the piping. The apparatus enables a travel through piping of relatively small diameter having vertical or steeply slanted pipes to be made without any trouble.
摘要:
A system and method for encapsulating an organic light-emitting diode (OLED) device by enabling a substrate and a plurality of masks to be efficiently received into a vacuum processing environment, transferred between one or more process chambers for the deposition of encapsulating layers, and removed from the processing system. A method of encapsulating an organic light-emitting diode (OLED) device includes positioning one or more masks over a substrate to deposit encapsulating layers on an OLED device disposed on the substrate. A processing system for encapsulating an organic light-emitting diode (OLED) device includes one or more transfer chambers, one or more load lock chambers coupled to each transfer chamber and operable to receive a mask into a vacuum environment, and one or more process chambers coupled to each transfer chamber and operable to deposit an encapsulating layer on a substrate.
摘要:
The present invention generally relates to methods and apparatus for handling of substrates in a thermal treatment chamber. In one embodiment, an apparatus is provided. The apparatus includes a chamber body having sidewalls, a substrate support assembly disposed in the chamber body, the substrate support assembly movable in a first direction within the chamber body, and two or more support fingers coupled to the sidewalls, the two or more support fingers being movable in a second direction within the chamber body, the second direction being transverse to the first direction.
摘要:
A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要:
A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
摘要:
Embodiments disclosed herein generally relate to methods for sealing a processing chamber with a slit valve door. The door initially raises from a position below the opening for the processing chamber to a raised position. The door then expands until an O-ring that is on the door just touches the sealing surface. Then, the door expands again to compress the O-ring against the sealing surface. The door expands by flowing a gas into the interior volume of the door. By controlling the pressure buildup within the door, the speed with which the door expands is controlled to ensure that the door gently contacts the sealing surface and then compresses against the sealing surface. Thus, the door may be prevented from contacting the sealing surface with too great a force that may jolt or shake the processing chamber and produce undesired particles that may contaminate the process.
摘要:
Methods and systems for improving the alignment between a previously formed feature and a subsequently formed feature are provided. An exemplary method can include laser scribing a workpiece (104, 550) having a previously formed first feature. The exemplary method includes imaging the workpiece (104, 550) with an imaging device (320, 420, 554, 640) so as to capture a plurality of positions of the first feature on the workpiece (104, 550) relative to the laser-scribing device (100). The exemplary method further includes using the captured positions to align output from the laser-scribing device (100) in order to form a second feature on the workpiece (104, 550) at a controlled distance from the first feature.