Polishing method of Cu film and method for manufacturing semiconductor device
    71.
    发明申请
    Polishing method of Cu film and method for manufacturing semiconductor device 有权
    Cu膜的抛光方法及半导体器件的制造方法

    公开(公告)号:US20070093064A1

    公开(公告)日:2007-04-26

    申请号:US11540707

    申请日:2006-10-02

    摘要: A method for polishing a Cu film comprises contacting a Cu film formed above a semiconductor substrate with a polishing pad attached to a turntable, and supplying a first chemical liquid which promotes the polishing of the Cu film and a second chemical liquid which contains a surfactant, to the polishing pad while the turntable being rotated, thereby polishing the Cu film, while monitoring at least one of a table current of the turntable and a surface temperature of the polishing pad to detect a change in at least one of the table current of the turntable and the surface temperature of the polishing pad. The supply of the second chemical liquid is controlled in conformity with the change.

    摘要翻译: 一种用于抛光Cu膜的方法包括使形成在半导体衬底上的Cu膜与附着在转盘上的抛光垫接触,并提供促进Cu膜抛光的第一种化学液体和含有表面活性剂的第二种化学液体, 在转盘旋转的同时向抛光垫移动,由此抛光Cu膜,同时监测转台的工作台电流和抛光垫的表面温度中的至少一个,以检测抛光垫的表电流中的至少一个的变化 转盘和抛光垫的表面温度。 根据变化来控制第二化学液体的供给。

    Disk drive apparatus and motor
    73.
    发明授权

    公开(公告)号:US06566827B2

    公开(公告)日:2003-05-20

    申请号:US10005955

    申请日:2001-11-08

    IPC分类号: H02K2300

    CPC分类号: G11B19/20 H02P6/085

    摘要: In a disk drive apparatus of the present invention, power transistors of a power supplying part execute high-frequency switching operation and form current paths to three-phase windings so as to rotate a disk, a position detecting part produces a position signal which responds with terminal voltages of the three-phase windings, an activation operation part controls active periods of the power transistors in response to an output signal of the position detecting part, a commanding part produces a command signal in response to an output pulse signal of the position detecting part, and a switching operation block produces a switching pulse signal in response to a comparison result of a current detection signal with the command signal. The activation operation part produces a slew-rate switching signal which responds with the switching pulse signal, and causes at least a power transistor of the power supplying part to follow the slew-rate switching signal, thereby executing high-frequency switching of the power transistor in response to the slew-rate switching signal.

    Method of producing dialkylcarbonate
    76.
    发明授权
    Method of producing dialkylcarbonate 失效
    生产碳酸二烷基酯的方法

    公开(公告)号:US5436362A

    公开(公告)日:1995-07-25

    申请号:US152691

    申请日:1993-12-16

    IPC分类号: C07C68/06 C07C69/96

    CPC分类号: C07C68/065

    摘要: In a method of producing dialkylcarbonate, alcoholic compound and cyclo-carbonate are subjected to a catalytic reaction each other at a reaction temperature of 20.degree. to 200.degree. C. and under a pressure of 0 to 40 kg/cm.sup.2 G, which keeps the reaction system liquid, in the presence of ion exchanged zeolite which is ion-exchanged with alkali metal ion and/or alkaline earth metal ion.

    摘要翻译: 在制备碳酸二烷基酯的方法中,醇化合物和环碳酸酯在20〜200℃的反应温度和0〜40kg / cm2G的压力下进行催化反应,保持反应体系 在与碱金属离子和/或碱土金属离子进行离子交换的离子交换沸石存在下进行。

    Facsimile apparatus having a memory erase function
    77.
    发明授权
    Facsimile apparatus having a memory erase function 失效
    具有存储器擦除功能的传真装置

    公开(公告)号:US5220438A

    公开(公告)日:1993-06-15

    申请号:US765190

    申请日:1991-09-25

    申请人: Susumu Yamamoto

    发明人: Susumu Yamamoto

    IPC分类号: H04N1/21 H04N1/32

    摘要: A facsimile apparatus having a memory for storing received data therein and a recorder for printing out image signals, comprises a retaining unit for causing the memory to retain the received data after the image signal has been printed out, an operation unit for instructing to erase the stored data in the memory, and a deletion order storage unit for storing an order of deletion of the stored data, whereby the received data stored in the memory is retained until the operation unit instructs to erase the received data.

    摘要翻译: 一种具有用于存储接收到的数据的存储器的传真装置和用于打印图像信号的记录器,包括:保持单元,用于在图像信号被打印出之后使存储器保持接收到的数据;操作单元,用于指示擦除 存储数据存储在存储器中,以及删除顺序存储单元,用于存储所存储的数据的删除顺序,从而保留存储在存储器中的接收数据,直到操作单元指示擦除接收到的数据。

    Halogeno-4-methylpyrazoles
    78.
    发明授权
    Halogeno-4-methylpyrazoles 失效
    卤代-4-甲基吡唑

    公开(公告)号:US5220028A

    公开(公告)日:1993-06-15

    申请号:US869046

    申请日:1992-04-14

    IPC分类号: C07D231/16 C07D401/04

    CPC分类号: C07D401/04 C07D231/16

    摘要: There are disclosed halogeno-4-methylpyrazoles represented by the formula (I): ##STR1## wherein R represents an alkyl group having 1 to 4 carbon atoms, a substituted or unsubstituted phenyl group or a substituted or unsubstituted pyridyl group; X represents a hydrogen atom or a halogen atom; and Y represents a halogen atom, and a process for preparing the same which comprises reacting 1-substituted-4-methylpyrazoles of the formula (II): ##STR2## wherein R has the same meaning as defined above, with a halogen.

    摘要翻译: 公开了由式(I)表示的卤代-4-甲基吡唑:其中R表示碳原子数1〜4的烷基,取代或未取代的苯基或取代或未取代的吡啶基; X表示氢原子或卤原子; 和Y表示卤素原子,及其制备方法,其包括使式(II)的1-取代-4-甲基吡唑:其中R具有与上述定义相同的含义与卤素 。

    System for driving a brushless motor
    79.
    发明授权
    System for driving a brushless motor 失效
    无刷电机驱动系统

    公开(公告)号:US4958948A

    公开(公告)日:1990-09-25

    申请号:US416538

    申请日:1989-10-03

    IPC分类号: H02P6/06 H02P6/18

    摘要: A system for driving a brushless motor comprises motor drive coils belonging to a plurality of phases respectively, a plurality of pairs of drive transistors connected to the drive coils respectively, a distribution circuit for sequentially distributing drive-coil energization switching signals to the plural drive transistors respectively, a slope synthesizer for smoothing leading and trailing slope portions of the drive-coil energization switching signals so as to apply the smoothed energization switching signals to the drive transistors respectively through the distribution circuit, a voltage-controlled oscillator for supplying a signal having a suitable frequency as an input to the slope synthesizer, a phase error detector for detecting the phase difference between counter-electromotive voltages induced in the drive coils and the drive-coil energization switching signals in a driver-coil energization pause period, and an error amplifier for amplifying the output signal of the phase error detector and applying the amplified phase error signal as an input to the voltage-controlled oscillator.

    Metal and composite material made of the metal and rubber
    80.
    发明授权
    Metal and composite material made of the metal and rubber 失效
    金属和复合材料由金属和橡胶制成

    公开(公告)号:US4929512A

    公开(公告)日:1990-05-29

    申请号:US362416

    申请日:1989-04-14

    摘要: A composite material made of metal and rubber for use in automotive tires, hoses, conveyor belts and the like. Its object is to increase its durability by improving the adhesion properties between the metal and the rubber. To accomplish this object, a metal provided with an improved plating layer is used in combination with a rubber having such a composition as to be suitable for use with the metal. More specifically, the composite material of metal and rubber contains as basic ingredients a metal plated with a copper-zinc-nickel ternary alloy and natural rubber or synthetic isoplene rubber containing sulfer and adhesion promotors such as cobalt salt of organic acid or silica, resorcin and hexamethylenetetramine. The rubber is vulcanized to be bonded to the metal.

    摘要翻译: PCT No.PCT / JP88 / 01081 Sec。 371日期:1989年4月14日 102(e)日期1989年4月14日PCT提交1988年10月25日PCT公布。 WO89 / 03901 PCT出版物 日期:1989年5月5日。用于汽车轮胎,软管,输送带等的由金属和橡胶制成的复合材料。 其目的是通过改善金属和橡胶之间的粘附性来提高其耐久性。 为了实现该目的,具有改进的镀层的金属与具有适于与金属一起使用的组成的橡胶组合使用。 更具体地说,金属和橡胶的复合材料包含镀有铜 - 锌 - 镍三元合金的金属和天然橡胶或含有硫化物和粘附促进剂的合成等
    橡胶,例如有机酸或二氧化硅的钴盐,间苯二酚和 六亚甲基四胺。 将橡胶硫化成与金属结合。