摘要:
A first control circuit section (master station) and a second control circuit section (substation) communicate with each other via series-parallel converters. The master station includes regular transmission device and transmission-permitting signal generation device; and the sub station includes regular report device, confirmation reply device relative to a transmission data from the master station, and an unprocessed data table. The unprocessed data table prevents jam-up in upstream communication from the sub station to the master station, enabling to carry out timely regular transmission and regular reporting. Transmission from the sub station to the master station is performed based on a transmission-permitting control signal that the master station generates. Consequently, it is possible to execute communication error processing and diminish communication control burden on the master station while properly performing the regular transmission and regular report between the master station and sub station.
摘要:
A Bernoulli type chucking device 2 supports the rear surface 12 of a semiconductor wafer 1. The etchant 30 turns around and reaches the portion beneath the beveled portion 13 of the semiconductor wafers 1. However, the etchant is restrained on the beveled portion by a gas flow coming from the openings 22A of the gas-expelling passages 22 in the centrifugal direction. The gas belows off the etchant, which has turned around and is going to reach the rear surface. Thus, the beveled portion 13 is mirror-finished when etching of the semiconductor wafer front surface 11 is carried out, and mirror-finishing of part of the rear surface 12 can be avoided. Furthermore, mirror-finishing can be performed without being influenced by the shape of the beveled portions of semiconductor wafers. Compared with conventional method, this invention can perform mirror-finishing more efficiently.
摘要:
A method for manufacturing semiconductor wafers is provided. According to this invention, wafers are obtained by slicing a single-crystal semiconductor ingot. The sliced wafers are beveled at their peripheral rims. The beveled wafers are flattened by a lapping process. The front and the rear surfaces of the flattened wafers are spin-etched with an acid etchant liquid. The glossiness of the rear surfaces of the spin-etched wafers is controlled to a value of 130-300 %. The front surfaces of the wafers whose rear surfaces have been spin-etched are polished, thereby obtaining mirror-polished surfaces. The front surfaces may also be spin-etched prior to polishing.
摘要:
Fluorosulfuric acid esters can be produced by reacting alcohols with sulfuryl fluoride (SO2F2) in the presence of a base and water. As a substrate thereof, optically active secondary alcohols are preferable, and optically active α-hydroxyesters and optically active 4-hydroxyprolines are particularly preferable. By performing the reaction in a two-phase system in the presence of a reaction solvent immiscible with water, a desired reaction proceeds particularly well. The present invention is a production method solving all the problems involved in conventional techniques while being industrially practicable.
摘要翻译:氟代硫酸酯可以通过在碱和水的存在下使醇与硫酰氟(SO 2 F 2)反应来制备。 作为其基材,优选光学活性仲醇,特别优选光学活性的α-羟基酯和光学活性的4-羟基脯氨酸。 通过在与水不混溶的反应溶剂的存在下在两相体系中进行反应,期望的反应进行得特别好。 本发明是在工业上可行的情况下解决常规技术中涉及的所有问题的生产方法。
摘要:
Disclosed is a method of producing an optically active fluorinated oxetane, which can be an important pharmaceutical or agricultural intermediate, by reaction of a fluorinated α-keto ester with an acyl alkenyl ether in the presence of a transition metal complex with an optically active ligand. This method utilizes a catalytic asymmetric synthesis process and does not require a stoichiometric amount of chiral source. It is thus possible to dramatically reduce the amount of use of the asymmetric catalyst especially when the reaction is performed at a high concentration of substrate (with the use of a small amount of reaction solvent) or in the absence of a reaction solvent (under neat conditions). Further, the target optically active fluorinated oxetane can be obtained with high yield and with very high optical purity. The product contains almost no difficult-to-separate impurity and shows high chemical purity.
摘要:
Disclosed is a purification method of reducing and removing fluoride ions contained in an optically active α-fluorocarboxylic acid ester represented by formula [1] [in the formula, R1 represents a C1-6 alkyl group, R2 represents a C1-4 alkyl group, and * represents an asymmetric carbon], the purification method of the optically active α-fluorocarboxylic acid ester being characterized by that a distillation is conducted in the presence of an organic base. By this method, it is possible to greatly reduce the concentration of fluoride ion traces contained in the optically active α-fluorocarboxylic acid ester by a relatively easy operation. Of the organic base, a tertiary amine is preferable, and above all tri-n-butylamine is particularly preferable.
摘要:
In the presence invention, a (2R)-2-fluoro-2-C-methyl-D-ribono-γ-lactone precursor is produced in the form of a ring-opened fluorinated compound by reaction of a 1,2-diol with sulfuryl fluoride (SO2F2) in the presence of an organic base and, optionally, a fluoride ion source. The production method of the present invention secures less number of process steps as compared to the conventional production method (shortening of three steps: cyclic sulfurous esterification, oxidation and ring-opening fluorination to one step) and satisfies the requirements for industrial production (high yield and high reproductivity). The thus-obtained (2R)-2-fluoro-2-C-methyl-D-ribono-γ-lactone precursor is useful as an important intermediate for the synthesis of 2′-deoxy-2′-fluoro-2′-C-methylcytidine with antivirus activity.
摘要翻译:在本发明的存在下,通过1,2-二醇与式(Ⅱ)的反应制备开环氟化合物形式的(2R)-2-氟-2-C-甲基-D-内罗糖-γ-内酯前体 硫酰氟(SO 2 F 2)在有机碱和任选的氟离子源存在下进行。 本发明的制造方法与现有的制造方法(缩短三个步骤:环状亚硫酸酯化,氧化和开环氟化至一步)相比确保了较少的工艺步骤,并且满足了工业生产的要求(高产率 和高繁殖力)。 由此获得的(2R)-2-氟-2-C-甲基-D-内罗糖-γ-内酯前体可用作合成2'-脱氧-2'-氟-2'-碳 甲基胞苷具有抗病毒活性。
摘要:
A production method of a β-fluoroalcohol includes performing a reaction of an α-fluoroester with hydrogen gas (H2) in the presence of a specific ruthenium complex (i.e. a ruthenium complex of the general formula [2], preferably a ruthenium complex of the general formula [4]). This production method can employ a suitable hydrogen pressure of 1 MPa or less by the use of such a specific ruthenium complex and does not require a high-pressure gas production facility when put in industrial practice. In addition, this production method can remarkably reduce the amount of catalyst used therein (to e.g. a substrate/catalyst ratio of 20,000) in comparison to the substrate/catalyst ratio conventional reduction of α-fluoroalcohol. It is possible by these reduction in hydrogen pressure and catalyst amount to largely reduce the production cost of the β-fluoroalcohol.
摘要:
An α-trifluoromethyl-α,β-unsaturated ester can be produced by reacting an α-trifluoromethyl-α-hydroxy ester with sulfuryl fluoride (SO2F2) in the presence of an organic base. It is preferable that the raw substrate has a hydrogen atom as one β-position substituent group and either an alkyl group, a substituted alkyl group, an alkenyl group, a substituted alkenyl group, an aromatic ring group or a substituted aromatic ring group as the other β-position substituent group. It is more preferable that an ester moiety of the raw substrate is an alkyl ester. This raw substrate is readily available. Further, the desired reaction can proceed favorably with the use of this raw substrate. It is also preferable to use either 1,5-diazabicyclo[4.3.0]non-5-ene (DBN) or 1,8-diazabicyclo[5.4.0]undec-7-ene (DBU) as the organic base. The desired reaction can proceed more favorably with the use of this organic base.
摘要:
α-Trifluoromethyl-β-substituted-β-amino acids can be produced by allowing α-trifluoromethyl-β-substituted-α,β-unsaturated esters to react with hydroxylamine to convert α-trifluoromethyl-β-substituted-α,β-unsaturated esters into dehydrogenated closed-ring body of α-trifluoromethyl-β-substituted-β-amino acid, and by hydrogenolyzing the dehydrogenated closed-ring body. According to this production process, novel α-trifluoromethyl-β-substituted-β-amino acids which are free amino acids whose functional groups are not protected can be produced, in which β-position substituent is not limited to aromatic ring group or substituted aromatic ring group while the relative stereochemistry of α-position and β-position can be also controlled.