摘要:
A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheric pressure level, and including a first transfer device that is movable and transfers the object into/from the load port, the first transfer device being disposed within the internal space; and a process unit having one process chamber for subjecting the object to a predetermined process, and a vacuum transfer chamber connected to the process chamber, having an internal space set at a vacuum pressure level, and including a second transfer device for transferring the object into/from the process chamber, the second transfer device being disposed within the internal space. The process units are individually connected to the common transfer chamber such that the process units are substantially parallel to each other. The vacuum chamber of each process unit is connected to the common transfer chamber. Each process unit extends linearly in a direction substantially perpendicular to the common transfer chamber. The object is transferred into/from the vacuum transfer chamber by means of the first transfer device.
摘要:
There is provided a watching support apparatus and a program recording system which can support easily recording a currently broadcasted program or a program to be broadcasted by an in-home recording apparatus set in a user's residential area even in the case where the user goes to a different location from the user's residential area. A watching support apparatus (100) includes: a recording apparatus position obtainment unit (101) which obtains information indicating a location where the recording apparatus is positioned; a recordable-program guide obtainment unit (102) which obtains a program guide (recordable-program guide) including broadcast content of the recording apparatus setting position; a watching possible program guide obtainment unit (103) which obtains a program guide (watching possible program guide) including broadcast content in the current location; a same program judgment unit (104) which compares a program included in the watching possible program guide with a program included in the recordable-program guide, and judges sameness of the respective programs; and a display unit (105) which displays whether or not the currently watched program can be recorded by the recording apparatus based on the sameness judged by the sameness judgment unit (104).
摘要:
The present invention provides a process apparatus including an airtight process vessel, an exhaust system for exhausting gas from the process vessel, and a baffle plate for partitioning the process vessel into a process chamber for processing an object and an exhaust passage communicating with the exhaust system, the baffle plate has a plurality of slits through which the process chamber and the exhaust passage communicate with each other, and each of the slits has a tapered surface on an inner surface toward the process chamber, the tapered surface corresponding to not less than ¼ of a depth of the slit.
摘要:
A one-way data transmission method is disclosed for transmitting a set of rules to data receiving apparatuses that each control a controlled apparatus. Also, a method is disclosed for controlling a controlled apparatus according to a specific rule and a specific parameter of the controlled apparatus, such specific rule being one of a set of rules provided for control over the predetermined kind of controlled apparatuses. Further, a transmission method is disclosed for transmitting a program including a set of rules to at least one reception side having plural kinds of controlled apparatuses, over a network, via a receiving device, or memory device. Further still, a reception method is disclosed for receiving a program including a set of rules on a reception side having plural kinds of controlled apparatuses through a network or memory device. The predetermined controlled apparatuses have a common, primary operation function but different specific parameters.
摘要:
In a method of manufacturing a glass substrate for an information recording medium including a step for chemically strengthening the glass substrate by contacting the glass substrate with chemical strengthening processing liquid containing chemical strengthening salt, concentration of Fe and Cr is 500 ppb or less in said chemical strengthening salt, respectively. The concentration may be detected by the use of an ICP (Inductively Coupled Plasma) emission spectrometry analyzing method or a fluorescent X-ray spectroscopy analyzing method.
摘要:
An apparatus is disclosed to include a transmission device 151 having a rule generation device 101 for generating rules, and a data transmission device 102 for converting rules generated by the rule generation device 101 into rule data and for transmitting the rule data. The apparatus also includes a receiving device 152 having a data receiving device 103 for receiving rule data transmitted by the data transmission device 102, a rule conversion device 104 for converting the rule data received by the data receiving device 103 into rules, a rule storage device 105 for storing rules converted by the rule conversion device 104, and a control device 106 for controlling a controlled apparatus, such as a microwave oven, in accordance with the rules stored in the rule storage device 105.
摘要:
A transfer system 7 for carrying a wafer W into/out of a process chamber 4 is provided in a box 10 defining a load-lock chamber 3. The box 10 is divided into a first chamber 11 and a second chamber 12. A transfer arm 21 for carrying the wafer W is provided in the first chamber 11. A linearly moving system 14 for linearly moving the transfer arm 21 is provided in the second chamber 12. The internal pressure in the first chamber is set to be higher than the internal pressure in the second chamber.
摘要:
A grounding tank type arrester comprises a plurality of columns sorted into current folding columns and current pass columns. Each current folding column includes a plurality of stack sets of an element unit, having a plurality of zinc oxide elements, and an insulating spacer and the plural stack sets are stacked in regular sequence so that one element unit and one insulating spacer are stacked alternately. Each current pass column includes a plurality of stack sets of a zinc oxide element and an insulating spacer and the plural stack sets are stacked in regular sequence so that one zinc oxide element and one insulating spacer are stacked alternately. Individual zinc oxide elements on one level of individual current folding columns and individual zinc oxide elements on the one level of individual current pass columns are interconnected together by bridge conductor plates. The direction of current flowing through bridge conductor plates for connecting together zinc oxide elements on the one level of the current folding columns and current pass columns is inverse to the direction of current flowing through bridge conductor plates for connecting together zinc oxide elements on the neighboring level of the current folding columns and current pass columns and hence the residual inductance of the arrester can be reduced.
摘要:
A light source for forming an optical path extending across a closed vessel and a light receiving unit for receiving light from the light source are disposed outside the closed vessel. A portion to have its temperature measured as lies in the closed vessel is provided with a temperature detecting device which consists of a temperature sensor and a light interceptive plate. The temperature sensor is formed to be downwardly convex by sticking two members of different coefficients of thermal expansion one over the other (the member of the larger coefficient of thermal expansion being arranged over the member of the smaller coefficient of thermal expansion). The light interceptive plate is arranged over the member of the larger coefficient of thermal expansion. When the portion to have its temperature measured has reached a predetermined temperature, the temperature sensor inverts the downwardly convex state into an upwardly convex state. Owing to the inversion of the state of the temperature sensor, the light interceptive plate is turned into the optical path extending across the closed vessel, from outside the same and intercepts part of the light from the light source. Thus, the quantity of the light to be received by the light receiving unit changes, and the temperature of the portion is measured through a light quantity--temperature conversion.
摘要:
In order to achieve secure provision of appropriate information according to the status of a plurality of terminal apparatuses, a status detecting section detects the status of a cellular mobile phone, and the like, and a communication destination apparatus determining section selects a terminal apparatus with which communication can be established and at which received information can be presented according to the priority for transmission of the provided information. A content DB retrieves information to be provided. A server communication section transmits retrieved provided information to the selected terminal apparatus. With such a structure, the provided information is presented at another terminal apparatus when a terminal apparatus having a high priority is impossible to establish communication or is unsuitable for presentation of the provided information. Thus, provision of information is securely achieved.