Room temperature hydrogen sensor
    71.
    发明授权
    Room temperature hydrogen sensor 有权
    室温氢气传感器

    公开(公告)号:US07791150B1

    公开(公告)日:2010-09-07

    申请号:US10949600

    申请日:2004-09-25

    IPC分类号: H01L29/06

    CPC分类号: G01N33/005 G01N27/127

    摘要: A sensor for selectively determining the presence and measuring the amount of hydrogen in the vicinity of the sensor. The sensor comprises a MEMS device coated with a nanostructured thin film of indium oxide doped tin oxide with an over layer of nanostructured barium cerate with platinum catalyst nanoparticles. Initial exposure to a UV light source, at room temperature, causes burning of organic residues present on the sensor surface and provides a clean surface for sensing hydrogen at room temperature. A giant room temperature hydrogen sensitivity is observed after making the UV source off. The hydrogen sensor of the invention can be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently used at room temperature.

    摘要翻译: 用于选择性地确定传感器附近的存在和测量氢的量的传感器。 该传感器包括涂覆有掺杂氧化铟的氧化锡的纳米结构薄膜的MEMS器件,其具有铂层催化剂纳米颗粒的纳米结构的钡铈盐层。 初始暴露在紫外线光源下,在室温下,导致传感器表面存在的有机残留物燃烧,并提供了一个清洁的表面,用于在室温下感测氢。 在使紫外线熄灭后观察到巨大的室温氢敏感性。 本发明的氢传感器可有效地用于在易于入侵或产生氢的环境中检测氢气,并且可以方便地在室温下使用。

    Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas
    72.
    发明授权
    Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas 失效
    具有氧化锌或铟/锌混合氧化物的纳米线的气体传感器和NOx气体的检测方法

    公开(公告)号:US07631540B2

    公开(公告)日:2009-12-15

    申请号:US11898677

    申请日:2007-09-14

    IPC分类号: G01N27/12

    摘要: A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a mixed oxide of zinc and indium, and the zinc oxide or the mixed oxide of zinc and indium are in the form of nanowires which constitute a gas-sensing surface of the semiconductor thin film. The nanowires have a diameter of 50-900 nm. The present invention also discloses a method for detecting the presence of a NOx gas.

    摘要翻译: 公开了一种气体传感器,其包括在基板的表面上的两个分离的金属电极和沉积在基板的表面上并连接两个金属电极的半导体薄膜。 半导体薄膜含有氧化锌或锌和铟的混合氧化物,氧化锌或锌和铟的混合氧化物是构成半导体薄膜的气体感测表面的纳米线的形式。 纳米线的直径为50-900nm。 本发明还公开了一种用于检测NOx气体的存在的方法。

    Nanorod sensor with single-plane electrodes
    76.
    发明申请
    Nanorod sensor with single-plane electrodes 有权
    具有单面电极的纳米棒传感器

    公开(公告)号:US20080290431A1

    公开(公告)日:2008-11-27

    申请号:US11805011

    申请日:2007-05-22

    IPC分类号: H01L29/84 H01L21/20

    摘要: A nanorod sensor with a single plane of horizontally-aligned electrodes and an associated fabrication method are provided. The method provides a substrate and forms an intermediate electrode overlying a center region of the substrate. The intermediate electrode is a patterned bottom noble metal/Pt/Ti multilayered stack. TiO2 nanorods are formed over the substrate and intermediate electrode, and a TiO2 film may be formed overlying the TiO2 nanorods. The TiO2 nanorods and TiO2 film are formed in-situ, in the same process, by varying the substrate temperature. In other aspects, the TiO2 film is formed between the nanorods and the intermediate electrode. In yet another aspect, the TiO2 film is formed both above and below the nanorods. A single plane of top electrodes is formed overlying the TiO2 film from a top noble metal/Pt/Ti multilayered stack overlying the TiO2 film, which has been selectively etched to form separate top electrodes.

    摘要翻译: 提供了具有水平对准电极的单个平面的纳米棒传感器和相关联的制造方法。 该方法提供了一个衬底,并形成了覆盖衬底中心区域的中间电极。 中间电极是图案化的底部贵金属/ Pt / Ti多层叠层。 在衬底和中间电极上形成TiO 2纳米棒,并且可以在TiO 2纳米棒上形成TiO 2膜。 通过改变衬底温度,在相同的工艺中原位形成TiO 2纳米棒和TiO 2膜。 在其他方面,在纳米棒和中间电极之间形成TiO 2膜。 在另一方面,在纳米棒上方和下方形成TiO 2膜。 顶层电极的单面由覆盖在TiO 2膜上的顶部贵金属/ Pt / Ti多层叠层覆盖在TiO 2膜上,该TiO 2膜被选择性地蚀刻以形成分离的顶电极。

    Multiple stacked nanostructure arrays and methods for making the same
    77.
    发明申请
    Multiple stacked nanostructure arrays and methods for making the same 审中-公开
    多层叠纳米结构阵列及其制造方法

    公开(公告)号:US20080157354A1

    公开(公告)日:2008-07-03

    申请号:US11649523

    申请日:2007-01-03

    IPC分类号: H01L27/00 H01L21/02

    摘要: A method of fabricating a stacked nanostructure array includes preparing a substrate; forming a bottom electrode directly on the substrate; growing a first nanostructure array directly on the bottom electrode; forming an insulating layer on the first nanostructure array; exposing the upper surface of the first nanostructure array; depositing a second, and subsequent, nanostructure array on a nanostructure array immediately below the second and subsequent nanostructure array; repeating said forming, said exposing and said depositing a subsequent steps to form a stacked nanostructure array; removing an uppermost insulating layer; and forming a top electrode on an uppermost nanostructure array. A sensor incorporating the nanostructure array includes top and bottom electrodes with plural layers of nanostructure array therebetween.

    摘要翻译: 一种叠层纳米结构阵列的制造方法包括:制备衬底; 直接在基板上形成底部电极; 直接在底部电极上生长第一个纳米结构阵列; 在所述第一纳米结构阵列上形成绝缘层; 暴露第一纳米结构阵列的上表面; 在第二和随后的纳米结构阵列正下方的纳米结构阵列上沉积第二和随后的纳米结构阵列; 重复所述形成,所述曝光和沉积随后的步骤以形成堆叠的纳米结构阵列; 去除最上层绝缘层; 并在最上面的纳米结构阵列上形成顶部电极。 结合纳米结构阵列的传感器包括其间具有多层纳米结构阵列的顶部和底部电极。

    METHODS FOR FABRICATING METAL NANOWIRES
    78.
    发明申请
    METHODS FOR FABRICATING METAL NANOWIRES 有权
    制备金属纳米微粒的方法

    公开(公告)号:US20080128284A1

    公开(公告)日:2008-06-05

    申请号:US11742223

    申请日:2007-04-30

    IPC分类号: C25D1/04

    摘要: Methods for the preparation of long, dimensionally uniform, metallic nanowires that are removable from the surface on which they are synthesized. The methods include the selective electrodeposition of metal nanowires at step edges present on a stepped surface, such as graphite, from an aqueous solution containing a metal or metal oxide. Where a metal oxide is first deposited, the metal oxide nanowires are reduced via a gas phase reduction at elevated temperatures to metal nanowires. Alternatively, beaded or hybrid nanowires comprising a metal A into which nanoparticles of a metal B have been inserted may be prepared by first electrodepositing nanoparticles of metal B selectively along step edges of a stepped surface, capping these nanoparticles with a molecular layer of an organic ligand, selectively electrodepositing nanowire segments of metal A between nanoparticles of metal B and then heating the surface of the hybrid nanowire under reducing conditions to remove the ligand layer. In all three methods, the nanowires may be removed from the stepped surface by embedding the wires in a polymer film, and then peeling this film containing the embedded wires off of the stepped surface.

    摘要翻译: 用于制备长的,尺寸均匀的金属纳米线的方法,其可从它们合成的表面上移除。 所述方法包括在含有金属或金属氧化物的水溶液中,存在于梯级表面(例如石墨)上的台阶边缘处的金属纳米线的选择性电沉积。 在首先沉积金属氧化物的情况下,金属氧化物纳米线通过气相在升高的温度下还原成金属纳米线而被还原。 或者,可以通过首先将金属B的纳米颗粒选择性地沿着台阶表面的台阶边缘电沉积来制备包含金属B的纳米颗粒的串珠或混合纳米线,将这些纳米颗粒用有机配体的分子层封盖 在金属B的纳米颗粒之间选择性地电沉积金属A的纳米线段,然后在还原条件下加热混合纳米线的表面以除去配体层。 在所有三种方法中,通过将线嵌入聚合物膜中,可以从台阶表面去除纳米线,然后将含有嵌入线的膜从台阶表面剥离。

    Nanostructured sensor for high temperature applications
    79.
    发明申请
    Nanostructured sensor for high temperature applications 审中-公开
    用于高温应用的纳米结构传感器

    公开(公告)号:US20080128274A1

    公开(公告)日:2008-06-05

    申请号:US11633776

    申请日:2006-12-04

    IPC分类号: B05D5/12 C25B9/00

    摘要: A gas sensor utilizes nano-sized CeO2 and doped CeO2 particles for detecting NO, NO2 and also for studying the cross sensitivity of oxygen, un-burnt hydrocarbons, CO and CO2. Nano-crystalline powders of CeO2 and doped CeO2 are employed to configure thin films on Platinum comb type electrodes preformed on alumina substrates. Various catalytic oxides are employed to convert the NO to NO2 to get equal response to NOx gas. Gas sensing properties are measured using a dynamic chamber with a constant flow of air and NOX gas in required percentage in nitrogen gas.

    摘要翻译: 气体传感器利用纳米尺度的CeO 2和掺杂的CeO 2 N 2颗粒来检测NO,NO 2,并且还用于研究氧,未燃烧的烃,CO和 CO 2 。 使用CeO 2 N 2和掺杂的CeO 2 2的纳米结晶粉末来构造在氧化铝基底上预制的铂梳型电极上的薄膜。 使用各种催化氧化物将NO转化为NO 2以获得对NOx气体的相等响应。 使用具有恒定空气流量和氮气中所需百分比的NOX气体的动态室来测量气体感测特性。

    Conducting polymer nanofiber sensors
    80.
    发明授权
    Conducting polymer nanofiber sensors 有权
    导电聚合物纳米纤维传感器

    公开(公告)号:US07226530B2

    公开(公告)日:2007-06-05

    申请号:US10735078

    申请日:2003-12-11

    IPC分类号: G01N27/04

    摘要: Polymer nanofibers, such as polyaniline nanofibers, with uniform diameters less than 500 nm can be made in bulk quantities through a facile aqueous and organic interfacial polymerization method at ambient conditions. The nanofibers have lengths varying from 500 nm to 10 μm and form interconnected networks in a thin film. Thin film nanofiber sensors can be made of the polyaniline nanofibers having superior performance in both sensitivity and time response to a variety of gas vapors including, acids, bases, redox active vapors, alcohols and volatile organic chemicals.

    摘要翻译: 具有均匀直径小于500nm的聚苯胺纳米纤维的聚合物纳米纤维可以通过在环境条件下的容易的水和有机界面聚合方法以大量方式制备。 纳米纤维具有从500nm到10um的长度,并且在薄膜中形成互连的网络。 薄膜纳米纤维传感器可以由聚苯胺纳米纤维制成,其对包括酸,碱,氧化还原活性蒸气,醇和挥发性有机化学品的各种气体蒸气的灵敏度和时间响应都具有优异的性能。