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71.
公开(公告)号:US5471060A
公开(公告)日:1995-11-28
申请号:US220450
申请日:1994-03-30
摘要: A pyroelectric infrared radiation detector for detecting the intensity of infrared radiation with a pyroelectric element. The pyroelectric infrared radiation detector comprises a substrate made of a single crystal material and an infrared radiation detecting structure which comprises a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation. The substrate has a recess provided in the upper surface thereof where the infrared radiation detecting structure is seated. A method of producing the pyroelectric infrared radiation detector comprises a first step of forming a first electrode on one surface of a substrate, a second step of forming a pyroelectric thin film on the first electrode, a third step of forming a second electrode on the pyroelectric thin film, a fourth step of providing etching apertures in the first electrode which is open to the substrate, and a fifth step of providing by wet etching process a recess(es) in the surface of the substrate where the first electrode is seated.
摘要翻译: 一种用热电元件检测红外辐射强度的热电红外辐射检测器。 热电红外线辐射检测器包括由单晶材料制成的基板和红外线检测结构,其包括设置在基板上的第一电极,设置在第一电极上的热电薄膜和设置在热电薄膜上的第二电极 用于吸收红外辐射。 衬底在其上表面设置有红外辐射检测结构就座的凹部。 制造热释电红外线检测器的方法包括:在基板的一个表面上形成第一电极的第一工序;在所述第一电极上形成热电薄膜的第二工序;在所述第一电极上形成第二电极的第三工序; 在第一电极中提供蚀刻孔的第四步骤,该第一电极对衬底开放;以及第五步骤,通过湿法蚀刻工艺提供第一电极所在的衬底表面中的凹部。
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公开(公告)号:US5468960A
公开(公告)日:1995-11-21
申请号:US241222
申请日:1994-05-10
IPC分类号: G01J5/34 , G08B13/191 , H01L37/02 , G01J5/06
CPC分类号: H01L37/02 , G01J5/34 , G08B13/191 , Y10S250/01
摘要: A pyroelectric infrared detector used in the intrusion detection system, the detector including a housing having an opening, at least two infrared transmissive pyroelectric layers spaced to be mutually free from thermal influence; and a plurality of electrodes formed on the surfaces of each of the pyroelectric layer, the electrodes electrically connected to each other.
摘要翻译: 一种用于入侵检测系统的热释电红外探测器,所述检测器包括具有开口的壳体,至少两个间隔开以相互没有热影响的红外透射热电层; 以及形成在每个热电层的表面上的多个电极,所述电极彼此电连接。
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公开(公告)号:US5420420A
公开(公告)日:1995-05-30
申请号:US181121
申请日:1994-01-13
CPC分类号: H01L37/02
摘要: An infrared detector comprises an array of detector elements (2) of the type having a layer of pyroelectric material (4)sandwiched between upper and lower electrodes (6,8) and separated along each edge by separations (16). The electrical sheet resistance of the upper electrode array (6) is reduced by forming gold rims (24) on the edges of the electrodes (6) around the periphery of each separation (16).
摘要翻译: 红外检测器包括一组具有夹在上下电极(6,8)之间的热电材料层(4)的检测器元件(2)的阵列,并且沿着每个边缘通过间隔(16)分离。 通过在每个间隔(16)的周围的电极(6)的边缘上形成金缘(24)来减小上电极阵列(6)的电薄片电阻。
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74.
公开(公告)号:US5354732A
公开(公告)日:1994-10-11
申请号:US997187
申请日:1992-12-28
申请人: Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
发明人: Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
CPC分类号: H01L37/02 , G01J5/34 , Y10S505/701
摘要: An electrode in an electronic device using a functional thin film facilitates epitaxial growth during the functional material film-forming process and prevents the generation of cracks due to thermal stress. An oxide superconductor is using as an electrode material, thereby forming the crystal structure identical with the crystal structure of a functional thin film, and rendering their lattice constant and coefficient of thermal expansion close to the lattice constant and coefficient of thermal expansion functional thin film. According to the electrode material, high electric conductivity, low thermal conductivity and large thermal absorption coefficient characteristics can also be obtained.
摘要翻译: 使用功能性薄膜的电子装置中的电极在功能性材料成膜过程中促进外延生长,并且防止由于热应力而产生裂纹。 使用氧化物超导体作为电极材料,由此形成与功能性薄膜的晶体结构相同的晶体结构,使其晶格常数和热膨胀系数接近晶格常数和热膨胀功能薄膜的系数。 根据电极材料,也可以获得高导电性,低导热性和大的热吸收系数特性。
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公开(公告)号:US5298333A
公开(公告)日:1994-03-29
申请号:US688380
申请日:1991-04-19
申请人: Uwe Maixner , Dieter Milferstadt
发明人: Uwe Maixner , Dieter Milferstadt
CPC分类号: H01L41/0478 , H01L37/02 , H01L2924/0002
摘要: A conductive surface layer, for example to form an electrode. For piezoelectric, pyroelectric, and ferroelectric components, as well as for piezoceramic components, the layer is formed of at least one electrically conductive hard product of at least one of the metals of at least the groups III to VIII of the periodic table of the elements.
摘要翻译: 导电表面层,例如形成电极。 对于压电,热电和铁电组分以及压电陶瓷组分,该层由至少一种元素周期表的III至VIII族的至少一种金属的导电硬产物形成 。
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公开(公告)号:US5293041A
公开(公告)日:1994-03-08
申请号:US63182
申请日:1993-05-12
申请人: Paul W. Kruse, Jr.
发明人: Paul W. Kruse, Jr.
CPC分类号: G01J5/34 , H01L37/02 , G01J2005/345
摘要: A thin film pyroelectric imaging array fabricated as a Si wafer. A thin film of PbTiO.sub.3 is deposited on a thermally isolated bridge. The bridge suspends the PbTio.sub.3 sensor over a preferentially etched cavity in the Si wafer. Improved thermal isolation increases the responsivity of the sensor to incident radiation. The pyroelectric sensor formed can operate effectively at room temperature.
摘要翻译: 作为Si晶片制造的薄膜热电成像阵列。 PbTiO3薄膜沉积在隔热桥上。 该桥将PbTio3传感器悬挂在硅晶片中优先蚀刻的腔体上。 改进的热隔离增加了传感器对入射辐射的响应性。 形成的热电传感器可以在室温下有效地工作。
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公开(公告)号:US5283438A
公开(公告)日:1994-02-01
申请号:US804747
申请日:1991-12-11
申请人: Pierre Dautriche
发明人: Pierre Dautriche
IPC分类号: G01J5/34 , H01L27/148 , H01L37/02 , H01L27/14
CPC分类号: H01L27/14875 , G01J5/34 , H01L27/14881 , H01L37/02
摘要: Infrared detectors whose detecting part consists of a layer of pyroelectric material deposited on a semiconductive substrate are disclosed. The object is to facilitate the polarization of the layer of pyroelectric material after it is deposited on the semiconductive substrate. The detector of the invention includes a semiconductive substrate (15) carrying a layer of pyroelectric material (11) in which are defined zones, each corresponding to a pixel (P1 to P9). Each pyroelectric zone is defined by an electrode known as lower electrode (EI 1 to EI 9), in contact with a face of pyroelectric layer (11) oriented toward substrate (15). According to a characteristic of the invention, a diode known as polarization diode (DP) is formed in substrate (15) for each pixel (P1 to P9). The polarization diode is connected to lower electrode (EI 1 to EI 9) to make possible the passage of a current between substrate (15) and the lower electrode.
摘要翻译: 公开了一种红外探测器,其检测部分由沉积在半导体衬底上的热电材料层组成。 其目的是为了促进热电材料层在其沉积在半导体基板上之后的极化。 本发明的检测器包括承载热电材料层(11)的半导体基板(15),其中分别对应于像素(P1至P9)的限定区域。 每个热电区域由称为下电极(EI 1至EI 9)的电极限定,其与面向基板(15)的热电层(11)的表面接触。 根据本发明的特征,对于每个像素(P1至P9),在衬底(15)中形成称为偏振二极管(DP)的二极管。 偏振二极管连接到下电极(EI 1至EI 9),以使得能够在衬底(15)和下电极之间通过电流。
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公开(公告)号:US4956554A
公开(公告)日:1990-09-11
申请号:US302716
申请日:1989-01-26
申请人: Geoffrey Baker , Roger Pearce , Paul L. Williamson
发明人: Geoffrey Baker , Roger Pearce , Paul L. Williamson
CPC分类号: H01L37/02 , G01J5/34 , H01L2224/48091 , H01L2224/73204 , H01L2224/73265
摘要: An infra-red radiation detector has a pyroelectric element (10), comprising for example TGS material, supported in spaced relationship over a heatsink body (16) for stabilizing the temperature of the element in operation with the space between opposing faces of the element (10) and body (16) containing a thermally-conductive, non-hardening and non-gaseous gel-like medium (22) such as silicon dielectric gel which thermally couples the element with the body. A small quantity of material such as solder or epoxy may be used to bond the element to the body and fix the spacing therebetween or, alternatively, the element may be supported over and bonded to the body simply by means of the medium (22) itself. Capillary action may conveniently be used to introduce the medium into the space between the element and the body.
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公开(公告)号:US4745278A
公开(公告)日:1988-05-17
申请号:US922311
申请日:1986-10-23
申请人: Charles M. Hanson
发明人: Charles M. Hanson
摘要: The capacitive bolometer comprises a detection capacitor having a first-order phase transition ferroelectric material between two electrodes. The detection capacitor operates during a detection step and a subsequent readout step. During the detection step, a preselected electric field is applied to the detection capacitor to maximize its sensitivity to temperature. A second electric field is applied to the capacitor during the readout step in order to increase responsivity of the detection cell. The detection cells according to the invention can be assembled into disclosed detection arrays.
摘要翻译: 电容测辐射热计包括在两个电极之间具有一阶相变铁电材料的检测电容器。 检测电容器在检测步骤和随后的读出步骤期间操作。 在检测步骤期间,将预选的电场施加到检测电容器以使其对温度的敏感度最大化。 在读出步骤期间,向电容器施加第二电场,以增加检测单元的响应度。 根据本发明的检测单元可组装成所公开的检测阵列。
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公开(公告)号:US4704534A
公开(公告)日:1987-11-03
申请号:US835709
申请日:1986-03-03
申请人: Andrew A. Turnbull
发明人: Andrew A. Turnbull
摘要: A thermal radiation detector comprises detecting means supported by a flexible film.To improve the absorption of incident radiation by the thermal radiation detector, the detector comprises an electrically resistive layer which is immediately adjacent the flexible film, and to which the detecting means are thermally coupled. The optical thickness of transparent dielectric material preceding the detecting means (suitably consisting only of the flexible film) is one fourth of a selected wavelength in a given wavelength range to be detected. The wavelength is selected so that the absorption of incident radiation by the resistive layer is substantially a maximum at the selected wavelength. The resistive layer may be between the flexible film and the detecting means, or it may precede the flexible film. In the latter case, an electrically conductive, reflecting layer is disposed between the flexible film and the detecting means.
摘要翻译: 热辐射检测器包括由柔性膜支撑的检测装置。 为了改善热辐射检测器对入射辐射的吸收,检测器包括紧邻柔性膜的电阻层,并且检测装置热连接到该电阻层。 检测装置之前的透明介电材料的光学厚度(仅适合于柔性膜)在被检测的给定波长范围内的选定波长的四分之一。 选择波长使得电阻层的入射辐射的吸收在所选择的波长处基本上是最大值。 电阻层可以在柔性膜和检测装置之间,或者可以在柔性膜之前。 在后一种情况下,导电的反射层设置在柔性膜和检测装置之间。
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