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公开(公告)号：US20210229934A1
公开(公告)日：2021-07-29
申请号：US17156007
申请日：2021-01-22
发明人： Daniel BABBS , Vincent W. TSANG , Robert C. MAY
IPC分类号： B65G47/90 , H01L21/687 , H01L21/67
摘要： A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.
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公开(公告)号：US20210175096A1
公开(公告)日：2021-06-10
申请号：US17108473
申请日：2020-12-01
发明人： Christopher HOFMEISTER , Martin R. ELLIOTT , Alexander KRUPYSHEV , Joseph HALLISEY , Joseph A. KRAUS , William FOSNIGHT , Craig J. CARBONE , Jeffrey C, BLAHNIK , Ho Yin Owen FONG
IPC分类号： H01L21/67
摘要： A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
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公开(公告)号：US20210146545A1
公开(公告)日：2021-05-20
申请号：US17103243
申请日：2020-11-24
发明人： Aaron GAWLIK , Jairo T. MOURA
摘要： A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.
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公开(公告)号：US20200273734A1
公开(公告)日：2020-08-27
申请号：US16872864
申请日：2020-05-12
发明人： Jairo T. MOURA , Robert T. CAVENEY , Bing YIN , Nathan SPIKER , Vincent W. TSANG
IPC分类号： H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
摘要： A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US10651067B2
公开(公告)日：2020-05-12
申请号：US15880387
申请日：2018-01-25
发明人： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC分类号： H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
摘要： A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US20200062501A1
公开(公告)日：2020-02-27
申请号：US16579628
申请日：2019-09-23
发明人： Robert T. Caveney , Frank Hunt , Lingchen Sun , Julian D. Warhurst , Bruce S. Zandi , Jeffrey S. Brooks
摘要： A configurable cryogenic storage device has a freezer and a rack carrier positioned inside of the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to the rack carrier inside the freezer and adapted to be coupled to a motor assembly. The rack carrier rests on the bearing in a manual rotation configuration and hangs from the drive shaft when the motor is connected. Coupling the drive shaft to the motor assembly lifts the rack carrier and decouples the bearing and enables automated rotation of the rack carrier by the motor. The rack carrier includes rack-mounting features holding a plurality of sample storage racks. The sample storage racks hang from the rack carrier and the rack-mounting features precisely position the end of each sample storage rack.
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公开(公告)号：US20190371641A1
公开(公告)日：2019-12-05
申请号：US16539819
申请日：2019-08-13
发明人： Jairo T. MOURA , Aaron GAWLIK , Reza SAEIDPOURAZAR
IPC分类号： H01L21/677 , H01L21/687 , H01L21/68 , H01L21/67
摘要： A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US20190304823A1
公开(公告)日：2019-10-03
申请号：US16444225
申请日：2019-06-18
IPC分类号： H01L21/677 , B25J9/04 , B25J11/00 , B25J18/04
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
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公开(公告)号：US10418261B2
公开(公告)日：2019-09-17
申请号：US15137722
申请日：2016-04-25
IPC分类号： H01L21/677 , H01L21/67
摘要： A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.
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公开(公告)号：US10406679B2
公开(公告)日：2019-09-10
申请号：US15012425
申请日：2016-02-01
IPC分类号： B25J9/04 , H01L21/677
摘要： A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
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