公开(公告)号：US20090049200A1

公开(公告)日：2009-02-19

申请号：US11838537

申请日：2007-08-14

Applicant: David Cheng-Fang Lin ,  Mark Edward Wilcox

Inventor： David Cheng-Fang Lin ,  Mark Edward Wilcox

IPC: G06F15/16

CPC classification number: G06F17/30569

Abstract: A system manages information exchanges between components of the system so that information is provided in a format expected by each particular component. In a specific implementation, a translation service provider intercepts information exchanges between client and data sources or data services and translates of converts software identifiers (e.g., UUIDs or GUIDs) as needed so that the client or data source can properly process the data. For example, a client may use GUIDs in a first format, and when information is requested is presented using a GUID in a second format, different from the first, the translation service provider translates a GUID to the first format. The translation service provider may be transparent to the other components of the system.

Abstract translation: 系统管理系统的组件之间的信息交换，使得以每个特定组件期望的格式提供信息。 在具体实现中，翻译服务提供商拦截客户端和数据源或数据服务之间的信息交换，并根据需要翻译转换软件标识符（例如，UUID或GUID），以便客户端或数据源可以正确处理数据。 例如，客户端可以以第一格式使用GUID，并且当使用不同于第一格式的第二格式的GUID呈现请求信息时，翻译服务提供商将GUID转换为第一格式。 翻译服务提供商可能对系统的其他组件是透明的。

公开(公告)号：US20070203927A1

公开(公告)日：2007-08-30

申请号：US11361324

申请日：2006-02-24

Applicant: Ellis Cave ,  David Cheng

Inventor： Ellis Cave ,  David Cheng

IPC: G06F7/00

CPC classification number: G06F16/14

Abstract: In one embodiment, file attributes of a desired file are sent along with the URL to the storing server and the attributes are used for subsequent retrieval of the file. Attributes, such as the text or title of the file, the language of the file, the creator of the file, etc, can all be added to the file in the form of metadata. Files that are recorded without metadata can have metadata attached thereto and can be retrieved using the metadata. The URL initially carries the metadata to the server and the server then both uses the metadata for indexing purposes and, if desired, adds the metadata to the file for storage with the file. In one embodiment, the files are media files used in an IVR system.

Abstract translation: 在一个实施例中，期望文件的文件属性与URL一起被发送到存储服务器，并且这些属性被用于文件的后续检索。 诸如文件的文本或标题，文件的语言，文件的创建者等的属性都可以以元数据的形式添加到文件中。 没有元数据记录的文件可以附加元数据，并且可以使用元数据来检索。 该URL首先将元数据携带到服务器，然后服务器然后使用元数据进行索引，如果需要，将元数据添加到该文件中以与该文件一起存储。 在一个实施例中，这些文件是在IVR系统中使用的媒体文件。

公开(公告)号：US06987676B2

公开(公告)日：2006-01-17

申请号：US10704623

申请日：2003-11-12

Applicant: Ki-Wai David Cheng ,  Yim-Shu Lee ,  Dah-Chuan Dylan Lu

Inventor： Ki-Wai David Cheng ,  Yim-Shu Lee ,  Dah-Chuan Dylan Lu

IPC: H02M3/335

CPC classification number: H02M1/4258 ,  Y02B70/126 ,  Y02P80/112

Abstract: A power converter for operating with an alternate current power source, including a storage capacitive means and a transformer, said storage capacitive means being adapted for power factor correction, said transformer including an input for connecting to an alternating current power source and at least a first output and a second output respectively for connecting to said storage capacitive means and the load, said transformer including input windings, first output windings and second output windings which are respectively connected to said input, said first and second outputs wherein said transformer and said storage capacitive means being adapted that the voltage across said storage capacitive means being related to the voltage of said first output of said transformer.

Abstract translation: 一种用于使用包括存储电容装置和变压器的交流电源操作的电力转换器，所述存储电容装置适于功率因数校正，所述变压器包括用于连接到交流电源的输入端和至少第一 输出和第二输出，用于连接到所述存储电容装置和负载，所述变压器包括分别连接到所述输入的所述输入绕组，第一输出绕组和第二输出绕组，所述第一和第二输出，其中所述变压器和所述存储电容 意味着适于使所述存储电容性装置两端的电压与所述变压器的所述第一输出的电压相关。

公开(公告)号：US20050194096A1

公开(公告)日：2005-09-08

申请号：US10927703

申请日：2004-08-27

Applicant: J.B. Price ,  Jed Keller ,  Laurence Dulmage ,  David Cheng

Inventor： J.B. Price ,  Jed Keller ,  Laurence Dulmage ,  David Cheng

IPC: C23F1/00 ,  H01L20060101 ,  H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67178 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S414/139

Abstract: A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.

Abstract translation: 公开了一种用于半导体处理的方法和装置。 在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。 使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

公开(公告)号：US20050151123A1

公开(公告)日：2005-07-14

申请号：US10974021

申请日：2004-10-27

Applicant: Ka Cheng ,  Chak Tang ,  David Cheng ,  Hang Wu

Inventor： Ka Cheng ,  Chak Tang ,  David Cheng ,  Hang Wu

IPC: C08K3/08 ,  H01C1/00

CPC classification number: C08K3/08 ,  C08K2003/0843 ,  C08K2003/0862

Abstract: A magnetic core is made of a composite magnetic material having a relative permeability of between 1 and 29 at a frequency range from 20 kHz to 2.5 MHz. The composite magnetic material consists of cobalt and nickel particles having an average diameter in the range of 1 to 100 micrometers, and a polymer base binding the particles to form a core.

Abstract translation: 磁芯由在20kHz至2.5MHz的频率范围内具有介于1和29之间的相对磁导率的复合磁性材料制成。 复合磁性材料由平均直径在1至100微米范围内的钴和镍颗粒组成，并且聚合物基团与颗粒结合形成核心。

公开(公告)号：US6053688A

公开(公告)日：2000-04-25

申请号：US920210

申请日：1997-08-25

Applicant: David Cheng

Inventor： David Cheng

IPC: B65G49/07 ,  H01L21/677

CPC classification number: H01L21/67772 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/141 ,  Y10T29/53022

Abstract: A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided between the carrier station and a clean testing or processing environment. A z-movement mechanism moves the carrier station and the wafer carrier in a z-direction. A door opening mechanism removes a door from said carrier through a door opening in the interface panel. A handler mechanism includes a wafer holding device, such as a flat end effector, that moves into the wafer carrier at a separate access opening to load or unload a wafer to or from the wafer carrier. Wafer carriers holding different amounts of wafers can be used with no major structural changes to the apparatus.

Abstract translation: 晶片处理装置和方法包括用于支撑保持一个或多个晶片的晶片载体（例如封闭的盒）的晶片载体台。 在承载站和干净的测试或处理环境之间提供接地接口面板。 z移动机构使载体台和晶片载体沿z方向移动。 门打开机构通过接口面板中的门开口从所述托架移除门。 处理机构包括诸如扁平末端执行器的晶片保持装置，其在单独的进入开口处移动到晶片载体中，以将晶片加载或从晶片载体卸载晶片。 可以使用保持不同数量的晶片的晶片载体，而不会对装置造成重大的结构变化。

公开(公告)号：US5851299A

公开(公告)日：1998-12-22

申请号：US218209

申请日：1994-03-25

Applicant: David Cheng ,  Mei Chang

Inventor： David Cheng ,  Mei Chang

IPC: C23C14/50 ,  C23C16/00 ,  C23C16/04 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  C23C14/00 ,  C23F1/00 ,  H01L21/00

CPC classification number: C23C16/45521 ,  C23C16/04 ,  C23C16/042 ,  C23C16/4585

Abstract: An improved apparatus for CVD processing is described wherein a wafer mounted on a vertically movable susceptor beneath a gas outlet or showerhead is raised into contact with a shield ring which normally rests on a ring support in the chamber. The shield ring engages the frontside edge of the wafer, lifting the shield ring off its support, when the susceptor and the wafer are raised to a deposition position in the chamber. The shield ring, by engaging the frontside edge of the wafer, shields the edge of the top surface of the wafer, as well as the end edge and the backside of the wafer, during the deposition. Matching tapered edges, respectively, on the susceptor and the shield ring permit alignment of the shield ring with respect to the susceptor, and alignment of the wafer to the susceptor and the shield ring. Alignment means are also disclosed to circularly align the shield ring to its support in the chamber. Multi-unit shield rings permit the use of wider shield rings and prevent cracking of the shield ring due to thermal stresses caused by temperature differences near and away from the wafer during processing. These shield rings may also have tapered edges to ensure alignment of the rings with respect to each other.

Abstract translation: 描述了用于CVD处理的改进的装置，其中安装在气体出口或喷头下方的可垂直移动的基座上的晶片升高成与屏蔽环接触，屏蔽环通常位于室中的环支撑件上。 当基座和晶片升高到腔室中的沉积位置时，屏蔽环接合晶片的前边缘，将屏蔽环从支撑件上提起。 通过接合晶片的前边缘的屏蔽环在沉积期间屏蔽晶片的顶表面的边缘以及晶片的端边缘和后侧。 在基座和屏蔽环上分别配合锥形边缘允许屏蔽环相对于基座对准，并且将晶片对准基座和屏蔽环。 还公开了对准装置，以将屏蔽环圆形对准其室中的支撑件。 多单元屏蔽环允许使用更宽的屏蔽环，并防止由于在处理期间靠近和远离晶片的温度差引起的热应力而导致的屏蔽环的开裂。 这些屏蔽环也可以具有锥形边缘以确保环相对于彼此的对准。

公开(公告)号：US5546179A

公开(公告)日：1996-08-13

申请号：US319531

申请日：1994-10-07

Applicant: David Cheng

Inventor： David Cheng

IPC: G01B11/255 ,  G01B11/30 ,  G01B11/24

CPC classification number: G01B11/255 ,  G01B11/306

Abstract: A method and apparatus for mapping the edge and other characteristics of a wafer. A method for mapping the edge of a wafer includes steps of providing a sensor device over a surface of a wafer on a testing chuck. A beam of electromagnetic energy emitted by the sensor device is reflected from the surface of the wafer and its intensity is measured by the sensor device. The sensor device is focussed and is then positioned at the edge of the wafer by measuring the intensity of the reflected beam as the sensor device is moved. A changed intensity signifies that the sensor device is located at the edge of the wafer. The wafer is incrementally rotated and the intensity of the reflected beam is measured at multiple locations on the edge of the wafer to provide datapoints used in the edge mapping. The height of the wafer is mapped by moving the sensor device in a z direction perpendicular to the surface of the wafer. A focal distance is found where the reflected beam is at a maximum intensity. Multiple focal distances taken from different locations on the wafer are compared to map the height of the wafer. The reflectivity of the wafer is also detected at the focal distance.

Abstract translation: 用于映射晶片的边缘和其它特性的方法和装置。 用于映射晶片边缘的方法包括在测试卡盘上的晶片表面上提供传感器装置的步骤。 由传感器装置发射的电磁能束从晶片的表面反射，其强度由传感器装置测量。 传感器装置被聚焦，然后通过在传感器装置移动时测量反射光束的强度来定位在晶片的边缘。 改变的强度表示传感器装置位于晶片的边缘。 晶片被递增地旋转，并且在晶片边缘上的多个位置处测量反射光束的强度，以提供在边缘映射中使用的数据点。 通过在垂直于晶片表面的z方向移动传感器装置来映射晶片的高度。 发现焦距在反射光束处于最大强度。 将取自晶片上不同位置的多个焦距进行比较，以绘制晶片的高度。 在焦距处也检测到晶片的反射率。

公开(公告)号：US5479108A

公开(公告)日：1995-12-26

申请号：US981801

申请日：1992-11-25

Applicant: David Cheng

Inventor： David Cheng

IPC: G01B7/06 ,  G01R31/26 ,  H01L21/68 ,  H01L21/683 ,  G01R1/04

CPC classification number: G01R31/2648 ,  G01B7/06 ,  H01L21/681 ,  H01L21/6838 ,  Y10S414/137 ,  Y10S414/141

Abstract: A method and apparatus for handling wafers. A wafer pick moves along a horizontal x-axis to unload a wafer from a cassette and position the wafer over a chuck. The chuck moves upwardly along a z-axis perpendicular to the surface of the wafer and lifts the wafer off the pick. The pick retracts through a slot in the chuck and a test probe moves along the x-axis to position itself over the wafer and chuck with reference to a calculated wafer center. The chuck then moves upwardly to engage the surface of the wafer with the probe. Wafer characteristics are tested at several test points located on a circle on the surface of the wafer by repeatedly lowering the chuck, rotating the chuck by a small amount, and raising the chuck to engage the wafer with the probe. The probe is then positioned to test another circle of points.

Abstract translation: 一种处理晶片的方法和装置。 晶片拾取器沿水平x轴移动以从盒子卸载晶片并将晶片定位在卡盘上。 卡盘沿垂直于晶片表面的z轴向上移动，并将晶片从拾取器上提起。 拾取器通过卡盘中的槽缩回，并且测试探针沿x轴移动，以参考计算的晶片中心自身位于晶片和卡盘上。 然后，卡盘向上移动以与探针接合晶片的表面。 通过重复地降低卡盘，使卡盘旋转少量，并且提升卡盘以使晶片与探针接合，在晶圆表面上圆的几个测试点上测试晶片特性。 然后定位探针以测试另一个圆圈。

公开(公告)号：US5452078A

公开(公告)日：1995-09-19

申请号：US78416

申请日：1993-06-17

Applicant: David Cheng

Inventor： David Cheng

IPC: G01B11/27 ,  H01L21/677 ,  H01L21/68 ,  G01N21/86 ,  G01B11/00

CPC classification number: G01B11/272 ,  H01L21/67793 ,  H01L21/681

Abstract: A method and apparatus for finding wafer index marks and centers. A wafer having a flat or notch along its edge is placed on a rotatable platform so that a portion of the wafer's edge is positioned within a sensor assembly. The wafer is rotated, and the sensor reads the distance from the center of rotation to the edge of the wafer. This distance is measured at several angles of the wafer and the data is stored in a digital computer as a series of datapoints including an angle and a distance. A computer-implemented process calculates various geometries concerning the wafer including the location of the index mark and the center of the wafer.

Abstract translation: 一种用于寻找晶片索引标记和中心的方法和装置。 沿其边缘具有平坦或凹口的晶片被放置在可旋转的平台上，使得晶片的边缘的一部分定位在传感器组件内。 晶片旋转，传感器读取从旋转中心到晶片边缘的距离。 该距离在晶片的几个角度测量，数据作为包括角度和距离的一系列数据点存储在数字计算机中。 计算机实现的过程计算关于晶片的各种几何，包括索引标记的位置和晶片的中心。