Novel photoresist monomers and polymers
    82.
    发明申请
    Novel photoresist monomers and polymers 审中-公开
    新型光致抗蚀剂单体和聚合物

    公开(公告)号:US20060008731A1

    公开(公告)日:2006-01-12

    申请号:US10888746

    申请日:2004-07-09

    IPC分类号: G03C1/492

    摘要: Monomers and polymers useful for forming photoresists. More particularly, photoresists, as well as monomers and polymers for photoresists useful in micro-lithography, specifically monomers bearing acid-labile groups of reduced optical density. The resulting photoresists exhibit improved transparency to 157 nm light. The photoresist compositions are composed of a mixture of at least one water insoluble, acid decomposable polymer which is prepared from at least one monomer having a monomeric unit structure which comprises: where Hal=F, Cl or Br and X=H or F; and which is substantially transparent to ultraviolet radiation at a wavelength of about 157 nm, and at least one photoacid generator capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 157 nm.

    摘要翻译: 用于形成光致抗蚀剂的单体和聚合物。 更具体地,光致抗蚀剂以及用于微光刻的光致抗蚀剂的单体和聚合物,特别是带有降低光密度的酸不稳定基团的单体。 所得到的光致抗蚀剂显示出对157nm光的改善的透明度。 光致抗蚀剂组合物由至少一种不溶于水的可酸分解聚合物的混合物组成,该聚合物由至少一种具有单体单元结构的单体制备,其中Hal = F,Cl或Br,X = H或F; 并且其对于约157nm的波长的紫外线辐射是基本上透明的,以及至少一种能够在暴露于约157nm的波长的足够活化能时产生酸的光酸产生剂。

    Continuous production of chlorodifluoroacetyl fluoride via chlorotrifluoroethylene oxidation
    84.
    发明申请
    Continuous production of chlorodifluoroacetyl fluoride via chlorotrifluoroethylene oxidation 审中-公开
    通过氯三氟乙烯氧化连续生产氯二氟乙酰氟

    公开(公告)号:US20050113606A1

    公开(公告)日:2005-05-26

    申请号:US10718475

    申请日:2003-11-20

    IPC分类号: C07C51/21 C07C51/58

    CPC分类号: C07C51/58 C07C53/48

    摘要: The invention pertains to a process for preparing chlorodifluoroacetyl fluoride (CDAF) by oxidation of chlorotrifluoroethylene (CTFE) in a solvent using a continuously stirred tank reactor. It provides a process for the production of chlorodifluoroacetyl fluoride by comprises reacting a solvent solution of chlorotrifluoroethylene with oxygen in a reactor to form a product which comprises chlorodifluoroacetyl fluoride. The reacting may be conducted in a continuous or batch mode.

    摘要翻译: 本发明涉及通过使用连续搅拌釜式反应器在溶剂中氧化三氟氯乙烯(CTFE)来制备氯二氟乙酰氟(CDAF)的方法。 它提供了一种生产氯二氟乙酰氟的方法,包括在反应器中使氯三氟乙烯的溶剂溶液与氧反应形成包含氯二氟乙酰氟的产物。 反应可以以连续或间歇的方式进行。

    Process of making fluorinated alcohols
    87.
    发明授权
    Process of making fluorinated alcohols 失效
    制备氟化醇的方法

    公开(公告)号:US06673976B1

    公开(公告)日:2004-01-06

    申请号:US10247383

    申请日:2002-09-19

    IPC分类号: C07C3134

    CPC分类号: C07C29/44 C07C31/34 C07C31/38

    摘要: Provided are methods of producing fluorinated alcohols from non-perfluorinated fluoroolefins and methanol. Certain preferred embodiments of such methods involve advantageously reacting a non-perfluorinated fluoroolefin with methanol under ambient-pressure and/or low-temperature conditions.

    摘要翻译: 提供从非全氟化氟烯烃和甲醇制备氟化醇的方法。 这些方法的某些优选实施方案涉及在环境压力和/或低温条件下有利地使非全氟化氟烯烃与甲醇反应。

    Process for producing fluoroolefins
    88.
    发明授权
    Process for producing fluoroolefins 有权
    制备氟烯烃的方法

    公开(公告)号:US06548719B1

    公开(公告)日:2003-04-15

    申请号:US09962974

    申请日:2001-09-25

    IPC分类号: C07C1725

    摘要: A process for producing a fluoroolefin of the formula: CF3CY═CXnHp wherein Y is a hydrogen atom or a halogen atom (i.e., fluorine, chlorine, bromine or iodine); X is a hydrogen atom or a halogen atom (i.e., fluorine, chlorine, bromine or iodine); n and p are integers independently equal to 0, 1 or 2, provided that (n+p)=2; comprising contacting, in the presence of a phase transfer catalyst, a compound of the formula: CF3C(R1aR2b)C(R3cR4d), wherein R1, R2, R3, and R4 are independently a hydrogen atom or a halogen selected from the group consisting of fluorine, chlorine, bromine and iodine, provided that at least one of R1, R2, R3, and R4 is halogen and there is at least one hydrogen and one halogen on adjacent carbon atoms; a and b are independently=0, 1 or 2 and (a+b)=2; and c and d are independently=0, 1, 2 or 3 and (c+d)=3; and at least one alkali metal hydroxide. The alkali metal hydroxide can be, for example, potassium or sodium hydroxide and the phase transfer catalyst can be, for example, at least one: crown ether such as 18-crown-6 and 15-crown-5; or onium salt such as, quaternary phosphonium salt and quaternary ammonium salt. The olef in is useful, for example, as an intermediate for producing other industrial chemicals and as a monomer for producing oligomers and polymers.

    摘要翻译: 制备下式的氟代烯烃的方法:CF 3 CY = CXnHp其中Y是氢原子或卤素原子(即氟,氯,溴或碘); X是氢原子或卤素原子(即氟,氯,溴或碘); n和p是独立地等于0,1或2的整数,条件是(n + p)= 2; 包括在相转移催化剂存在下使下式化合物:其中R 1,R 2,R 3和R 4独立地为氢原子或选自以下的卤素:式中:CF 3 C(R 1a R 2b)C(R 3 c R 4d) 氟,氯,溴和碘,条件是R 1,R 2,R 3和R 4中的至少一个是卤素,并且在相邻碳原子上具有至少一个氢和一个卤素; a和b独立地为0,1或2,(a + b)= 2; 且c和d独立地为0,1,2或3和(c + d)= 3; 和至少一种碱金属氢氧化物。 碱金属氢氧化物可以是例如氢氧化钾或氢氧化钠,相转移催化剂可以是例如至少一种:冠醚如18-冠-6和15-冠-5; 或鎓盐如季鏻盐和季铵盐。 烯烃可用作例如生产其它工业化学品的中间体,以及用作生产低聚物和聚合物的单体。