Scanning electron microscope
    82.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号:US07705302B2

    公开(公告)日:2010-04-27

    申请号:US12021810

    申请日:2008-01-29

    IPC分类号: H01J37/28 H01J37/26 G01N23/00

    摘要: An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

    摘要翻译: 本发明的目的是提供一种扫描电子显微镜,其包括用于降低到达样品的电子束的能量的减速电场形成装置,并且能够以高效率选择性地检测BSE。 为此,包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分,并且远离SE的轨迹远离电子束的光轴 。

    Optical system with objective lens having diffraction structure
    83.
    发明授权
    Optical system with objective lens having diffraction structure 有权
    具有衍射结构物镜的光学系统

    公开(公告)号:US07411884B2

    公开(公告)日:2008-08-12

    申请号:US10643899

    申请日:2003-08-20

    申请人: Shuichi Takeuchi

    发明人: Shuichi Takeuchi

    IPC分类号: G11B7/135

    摘要: An optical system for an optical disc drive includes a light source, an objective lens and a collimator lens. The light source emits first and second light beams. The first light beam is for reproducing data from a digital versatile disc while the second light beam is for a compact disc. The objective lens is provided with a diffraction structure which is designed to focus the first light beam on a recording layer of the digital versatile disc and the second light beam on a recording layer of the compact disc. The collimator lens is disposed between the light source and the objective lens. The collimator lens adjusts the diverging/converging angle of the first and second light beams entering the objective lens. The change in spherical aberration of the first light beam caused by wavelength deviation from a design wavelength due to individual specificity of the light source is corrected by adjusting the diverging/converging angle of the first light beam emerging from the collimator lens.

    摘要翻译: 用于光盘驱动器的光学系统包括光源,物镜和准直透镜。 光源发射第一和第二光束。 第一光束用于从数字通用光盘再现数据,而第二光束用于光盘。 该物镜设置有衍射结构,该衍射结构被设计成将第一光束聚焦在数字通用盘的记录层上,而第二光束聚焦在光盘的记录层上。 准直透镜设置在光源和物镜之间。 准直透镜调节进入物镜的第一和第二光束的发散/会聚角度。 通过调整从准直透镜出射的第一光束的发散/收敛角度来校正由于光源的个体特异性而导致的与设计波长的波长偏差引起的第一光束的球面像差的变化。

    APPARATUS FOR OBSERVING AN ASSEMBLED STATE OF COMPONENTS AND METHOD OF OBSERVING AN ASSEMBLED STATE OF COMPONENTS USING SUCH APPARATUS
    84.
    发明申请
    APPARATUS FOR OBSERVING AN ASSEMBLED STATE OF COMPONENTS AND METHOD OF OBSERVING AN ASSEMBLED STATE OF COMPONENTS USING SUCH APPARATUS 失效
    用于观察组装状态的装置和使用这种装置观察组装状态的组件的方法

    公开(公告)号:US20080129303A1

    公开(公告)日:2008-06-05

    申请号:US11849069

    申请日:2007-08-31

    IPC分类号: G01R31/26

    摘要: When bonding a workpiece to a substrate, processed parts of the substrate and the workpiece are observed and behavior such as the production of voids and the flowing of resin is observed. An apparatus for observing an assembled state of components includes: a stage on which a substrate is set; a head mechanism that bonds, by applying heat and pressure, an observation workpiece made of a transparent material to the substrate via resin supplied between the substrate and the observation workpiece; a light source that irradiates an observed part of the substrate and the observation workpiece mounted on the stage with light; and a camera that takes, from the observation workpiece side, an image of the observed part when the observation workpiece is bonded to the substrate set on the stage.

    摘要翻译: 当将工件接合到基板时,观察基板和工件的处理部分,观察到空隙的产生和树脂的流动等行为。 用于观察组件的组装状态的装置包括:设置基板的台阶; 通过将由透明材料制成的观察工件通过加热和压力粘合在基板上的树脂机构,所述树脂供应在所述基板和所述观察工件之间; 用光照射基板的观察部分和安装在台架上的观察工件的光源; 以及摄像机,当观察工件接合到设置在台架上的基板时,从观察工件侧取出观察部分的图像。

    Scanning optical system
    85.
    发明授权
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US07106484B2

    公开(公告)日:2006-09-12

    申请号:US10890232

    申请日:2004-07-14

    IPC分类号: G02B26/08

    CPC分类号: G02B26/123

    摘要: An scanning optical system includes a light source having a plurality of light emitting points each of which emits a beam, a first optical system that collimates the beams emitted by the light emitting points in regard to a main scanning direction while converging the beams in an auxiliary scanning direction, a deflecting system that dynamically deflects the beams simultaneously in the main scanning direction, and a second optical system that converges the deflected beams on the scan target surface. Further, the second optical system includes a magnification adjustment element whose magnification mS in the main scanning direction on an optical axis thereof is approximately +1 and whose magnification mP in the auxiliary scanning direction on the optical axis thereof is approximately −1.

    摘要翻译: 扫描光学系统包括具有发射光束的多个发光点的光源,第一光学系统,其将由发光点发射的光束相对于主扫描方向准直,同时将光束会聚在辅助光 扫描方向,在主扫描方向上同时动态地偏转光束的偏转系统以及将偏转的光束会聚在扫描目标表面上的第二光学系统。 此外,第二光学系统包括其光轴上的主扫描方向上的放大率mS大约为+1并且其在其轴上的辅助扫描方向上的倍率mP大约为-1的倍率调节元件。

    Scanning electron microscope and sample observing method using it
    86.
    发明授权
    Scanning electron microscope and sample observing method using it 有权
    扫描电子显微镜和使用它的样品观察方法

    公开(公告)号:US06963067B2

    公开(公告)日:2005-11-08

    申请号:US10750838

    申请日:2004-01-05

    CPC分类号: H01J37/21 H01J37/28

    摘要: The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.

    摘要翻译: 本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。 本发明的观察方法,通过使焦点深度扩大获得的图像的整个图像的整个区域的高度(高度差)从不同的视野角的多张图像对焦在整个图像上。 功能,从而由每个像素创建高度信息的地图(Z图),并将三维图像显示为鸟瞰图。 该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射,这使得可以清楚地了解内部独特成分的物质的空间分布 例子。

    Scanning drawing apparatus
    87.
    发明授权
    Scanning drawing apparatus 失效
    扫描绘图仪

    公开(公告)号:US06326609B1

    公开(公告)日:2001-12-04

    申请号:US09414607

    申请日:1999-10-08

    申请人: Shuichi Takeuchi

    发明人: Shuichi Takeuchi

    IPC分类号: B41J247

    CPC分类号: G02B26/127 B41J2/473

    摘要: A scanning drawing apparatus includes a light source, a beam separator for dividing the laser beam into a drawing beam and a monitor beam. A drawing optical path through which the drawing beam travels, and a monitor optical path through which the monitor beam travels are defined. The drawing beam passed through the drawing optical path and the monitor beam passed through the monitor optical path are combined by a beam combiner, and then deflected by a scanning deflector. The deflected beams pass through a scanning lens to form beam spots on an image surface and a monitor scale that is equivalent to the image surface, respectively. The monitor optical path has a different optical path length from the drawing optical path and/or effective diameters of optical elements in the monitor optical path is different from effective diameters of optical elements in the drawing optical path. A deviation of the beam spot of the drawing beam on the image surface due to an inclination or a shift of the light source is equal to a deviation of the beam spot of the monitor beam on the monitor scale in terms of directions and amounts.

    摘要翻译: 扫描绘图装置包括光源,用于将激光束分成拉制光束的光束分离器和监视光束。 绘制光束行进的绘图光路和监视器光束通过的监视器光路被限定。 拉制光束通过绘图光路,并且通过监视器光路的监视光束通过光束组合器组合,然后由扫描偏转器偏转。 偏转的光束通过扫描透镜,以在图像表面上形成光束斑点,并分别与图像表面相当的监视器刻度。 监视光路具有与绘图光路不同的光路长度和/或监视光路中的光学元件的有效直径与绘图光路中的光学元件的有效直径不同。 由于光源的倾斜或偏移导致的图像表面上的牵引光束的光束点的偏离等于监视器光束在方向和量方面的监视器光束的偏差。

    Optical disc drive having a mechanism to reduce the noise level of a focus error signal
    89.
    发明授权
    Optical disc drive having a mechanism to reduce the noise level of a focus error signal 有权
    具有降低聚焦误差信号的噪声水平的机构的光盘驱动器

    公开(公告)号:US08264922B2

    公开(公告)日:2012-09-11

    申请号:US11696910

    申请日:2007-04-05

    申请人: Shuichi Takeuchi

    发明人: Shuichi Takeuchi

    IPC分类号: G11B7/00 G11B7/125

    摘要: There is provided an optical disc drive, which includes a light source emitting a light beam, a beam dividing element that divides the light beam into main and sub-beams, an objective lens, an astigmatism producing unit that gives astigmatism to the main and sub-beams, a signal generation unit that has sensors for the beams and generates a focus error signal based on output signals of the sensors; and an optical element that has a function of adjusting intensity distribution of the main beam such that the main beam incident on the optical disc has a predetermined intensity distribution where a maximum intensity level is positioned at a predetermined height within a range of 70% of a pupil diameter, the predetermined height is not equal to an optical axis, and an intensity of the main beam decreases gradually from the predetermined height to a peripheral portion of the pupil.

    摘要翻译: 提供了一种光盘驱动器,其包括发射光束的光源,将光束分割成主光束和子光束的光束分割元件,物镜,散光产生单元,其对主像素和子像素进行散光 波束,信号生成单元,其具有用于所述波束的传感器,并且基于所述传感器的输出信号产生聚焦误差信号; 以及光学元件,其具有调整主光束的强度分布的功能,使得入射在光盘上的主光束具有预定的强度分布,其中最大强度水平位于预定高度的70%的范围内 瞳孔直径,预定高度不等于光轴,并且主光束的强度从预定高度逐渐减小到瞳孔的周边部分。

    Optical information recording/reproducing apparatus and objective lens for the same
    90.
    发明授权
    Optical information recording/reproducing apparatus and objective lens for the same 有权
    光信息记录/再现装置和物镜相同

    公开(公告)号:US08107350B2

    公开(公告)日:2012-01-31

    申请号:US12972790

    申请日:2010-12-20

    IPC分类号: G11B7/00

    摘要: An objective lens including: a first region to respectively converge first and second light beams onto recording surfaces of first and second optical discs; and a second region located outside of the first region and configured to converge the first light beam onto the recording surface of the first optical disc and not to converge the second light beam onto the recording surface of each of the first and second optical discs, and wherein the first region is divided into a plurality of refractive surface zones concentrically formed about an optical axis and has a first step, a diffraction order at which a diffraction efficiency is maximized for each of the first and second light beams passing through the first step in the first region is a first order, and the objective lens satisfies a condition: 0.80

    摘要翻译: 一种物镜,包括:第一区域,用于分别将第一和第二光束会聚到第一和第二光盘的记录表面上; 以及第二区域,位于所述第一区域的外部并且被配置为将所述第一光束会聚到所述第一光盘的记录表面上,并且不将所述第二光束会聚到所述第一和第二光盘中的每一个的记录表面上,以及 其中所述第一区域被分成围绕光轴同心地形成的多个折射表面区域,并且具有第一步骤,通过所述第一步骤中的每个所述第一和第二光束的衍射效率最大化的衍射级别 第一区域是第一级,并且物镜满足<1.45(1)中的0.80 <((Sout-Sd)/ Sout)2 /&eegr的条件。