公开(公告)号：US20080191135A1

公开(公告)日：2008-08-14

申请号：US12021810

申请日：2008-01-29

申请人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

发明人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

IPC分类号： G01N23/00

CPC分类号： G01N23/203 ,  G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

摘要： An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括用于降低到达样品的电子束的能量的减速电场形成装置，并且能够以高效率选择性地检测BSE。 为此，包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分，并且远离SE的轨迹远离电子束的光轴 。

公开(公告)号：US07705302B2

公开(公告)日：2010-04-27

申请号：US12021810

申请日：2008-01-29

申请人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

发明人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

IPC分类号： H01J37/28 ,  H01J37/26 ,  G01N23/00

CPC分类号： G01N23/203 ,  G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

摘要： An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括用于降低到达样品的电子束的能量的减速电场形成装置，并且能够以高效率选择性地检测BSE。 为此，包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分，并且远离SE的轨迹远离电子束的光轴 。

公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US20120298864A1

公开(公告)日：2012-11-29

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/26

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US07342241B2

公开(公告)日：2008-03-11

申请号：US11179628

申请日：2005-07-13

申请人： Yasuko Aoki ,  Tsutomu Tawa ,  Yoshimitsu Saze

发明人： Yasuko Aoki ,  Tsutomu Tawa ,  Yoshimitsu Saze

IPC分类号： G21K5/04 ,  H01J33/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31793

摘要： The present invention is to provide an electron-beam lithography method and an electron-beam lithography apparatus that can draw patterns with a high precision despite a change in barometric pressure, can ensure a satisfactory throughput, and are inexpensive. In the electron-beam lithography method that uses an electron beam to draw patterns on a sample, a difference between a current measured barometric pressure and a previous measured barometric pressure, and an elapsed time between their barometric pressure-measurement points in time are determined. When the rate of the difference of their barometric pressures with respect to the elapsed time is equal to or larger than a prescribed barometric pressure change rate value, a drawing precision is calibrated.

摘要翻译： 本发明是提供一种电子束光刻方法和电子束光刻设备，尽管大气压力发生变化，但能够高精度地绘制图案，可以确保令人满意的生产量，并且便宜。 在使用电子束在样品上绘制图案的电子束光刻方法中，确定当前测量的大气压力与先前测量的大气压力之间的差异以及它们在大气压力测量点之间的经过时间。 当大气压力相对于经过时间的差异的比率等于或大于规定的气压变化率值时，校准绘制精度。

公开(公告)号：US09164042B2

公开(公告)日：2015-10-20

申请号：US13984286

申请日：2012-02-01

申请人： Kenji Aiko ,  Shigeya Tanaka ,  Yasuko Aoki ,  Hiroshi Kawaguchi ,  Kei Shimura

发明人： Kenji Aiko ,  Shigeya Tanaka ,  Yasuko Aoki ,  Hiroshi Kawaguchi ,  Kei Shimura

IPC分类号： G01N21/88 ,  G01B11/30 ,  G01N21/3581 ,  G01N21/94 ,  H01M4/04 ,  H01M4/139 ,  G01N21/3563

CPC分类号： G01N21/88 ,  G01B11/303 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8806 ,  G01N21/94 ,  H01M4/0404 ,  H01M4/139 ,  Y02E60/122

摘要： The present invention provides a device for detecting foreign matter and a method for detecting foreign matter to detect a foreign matter on a surface of an object such as a film of an electrode mixture etc. or a foreign matter contained in the object, thereby to improve the reliability of the object. By irradiating an object with a terahertz illumination light 100 (wavelength of 4 μm to 10 mm) and detecting a scattered light 660 from an electrode 10 as an example of the object by a scattered light detector 200, a foreign matter on a surface of the electrode 10 or contained in the electrode 10, for example, a metal foreign matter 720, is detected. The electrode 10 is one in which electrode mixture layers 700 each including an active material 701, conductive additive and a binder as components are coated on both surfaces of a collector 710. The scattered light 660 results from a part of a transmitted light 656 reflected by the metal foreign matter 720.

摘要翻译： 本发明提供一种检测异物的装置和检测异物以检测诸如电极混合物等的膜或物体中包含的异物的物体的表面上的异物的方法，从而改善 对象的可靠性。 通过用太赫兹照明光100（波长4μm〜10mm）照射物体，并通过散射光检测器200从作为物体的一个例子的电极10检测散射光660， 检测电极10中或容纳在电极10中的金属异物720。 电极10是其中各自包含活性材料701，导电添加剂和作为组分的粘合剂的电极混合物层700涂覆在集电体710的两个表面上的。散射光660由透射光656的一部分反射， 金属异物720。

公开(公告)号：US20110233399A1

公开(公告)日：2011-09-29

申请号：US13132373

申请日：2009-11-11

申请人： Takashi Ichimura ,  Takeshi Ogashiwa ,  Yasuko Aoki

发明人： Takashi Ichimura ,  Takeshi Ogashiwa ,  Yasuko Aoki

IPC分类号： G01N23/225

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592

摘要： The present invention provides a charged particle beam device in which signal electrons (14) are generated from a sample when the sample (11) is irradiated with a primary charged particle beam (3), and then enter different positions of a position-sensitive signal detector (16) in accordance with energy of the signal electrons (14), whereby an energy distribution image of the signal electrons generated from the sample is acquired. Accordingly, it becomes possible to discriminate and select signal electrons having arbitrary energy to thereby obtain an image to which information specific to the arbitrary energy is reflected, and to acquire various characteristic information of the sample.

摘要翻译： 本发明提供了一种带电粒子束装置，其中当样品（11）被初级带电粒子束（3）照射时，从样品产生信号电子（14），然后进入位置敏感信号的不同位置 检测器（16）根据信号电子（14）的能量，从而获得从样品产生的信号电子的能量分布图像。 因此，可以区分和选择具有任意能量的信号电子，从而获得反映任意能量特有的信息的图像，并获取样本的各种特征信息。

公开(公告)号：US5398268A

公开(公告)日：1995-03-14

申请号：US960847

申请日：1992-10-14

申请人： Hidefumi Ibe ,  Masanori Takahashi ,  Yasuko Aoki ,  Yamato Asakura ,  Makoto Nagase ,  Noriyuki Ohnaka ,  Masanori Sakai ,  Takashi Saito ,  Katsumi Ohsumi ,  Kazuhiko Akamine ,  Makoto Hayashi ,  Kiyotomo Nakata

发明人： Hidefumi Ibe ,  Masanori Takahashi ,  Yasuko Aoki ,  Yamato Asakura ,  Makoto Nagase ,  Noriyuki Ohnaka ,  Masanori Sakai ,  Takashi Saito ,  Katsumi Ohsumi ,  Kazuhiko Akamine ,  Makoto Hayashi ,  Kiyotomo Nakata

IPC分类号： G21C17/02 ,  G21C17/022 ,  G21D1/00 ,  G21D3/08 ,  G21C9/00

CPC分类号： G21C17/0225 ,  G21C17/022 ,  G21Y2002/304 ,  G21Y2004/40

摘要： A water chemistry factor which is specific to a specific portion of a primary cooling system and universal is decided to be a standard target. The concentration of an agent for mitigating corrosion damage of structural material of the primary cooling system is controlled so that the target will be in a desirable range. All sensor groups provided in the primary cooling system are separated into sensor groups in different lines, of which a specific sensor group are connected to an arithmetic unit and a data base and are for always monitoring a plant process. For example, concentration distribution agreed with measured value oxidation component in the reactor water at the measurement points is selected from the data base, and it is used to estimate the standard target.

摘要翻译： 特定于主冷却系统和通用特定部分的水化学因子决定为标准目标。 减轻主冷却系统结构材料的腐蚀损伤的试剂的浓度被控制，使得靶在期望的范围内。 主冷却系统中提供的所有传感器组分为不同的传感器组，其中特定传感器组连接到算术单元和数据库，并用于始终监测工厂过程。 例如，从数据库中选择测量点的反应堆水中测量值氧化成分的浓度分布，并用于估计标准目标。

公开(公告)号：US08455823B2

公开(公告)日：2013-06-04

申请号：US13132373

申请日：2009-11-11

申请人： Takashi Ichimura ,  Takeshi Ogashiwa ,  Yasuko Aoki

发明人： Takashi Ichimura ,  Takeshi Ogashiwa ,  Yasuko Aoki

IPC分类号： H01J37/244 ,  H01J37/28 ,  G01N23/225

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592

摘要： The present invention provides a charged particle beam device in which signal electrons (14) are generated from a sample when the sample (11) is irradiated with a primary charged particle beam (3), and then enter different positions of a position-sensitive signal detector (16) in accordance with energy of the signal electrons (14), whereby an energy distribution image of the signal electrons generated from the sample is acquired. Accordingly, it becomes possible to discriminate and select signal electrons having arbitrary energy to thereby obtain an image to which information specific to the arbitrary energy is reflected, and to acquire various characteristic information of the sample.

摘要翻译： 本发明提供了一种带电粒子束装置，其中当样品（11）被初级带电粒子束（3）照射时，从样品产生信号电子（14），然后进入位置敏感信号的不同位置 检测器（16）根据信号电子（14）的能量，从而获得从样品产生的信号电子的能量分布图像。 因此，可以区分和选择具有任意能量的信号电子，从而获得反映任意能量特有的信息的图像，并获取样本的各种特征信息。

公开(公告)号：US20060011080A1

公开(公告)日：2006-01-19

申请号：US11179628

申请日：2005-07-13

申请人： Yasuko Aoki ,  Tsutomu Tawa ,  Yoshimitsu Saze

发明人： Yasuko Aoki ,  Tsutomu Tawa ,  Yoshimitsu Saze

IPC分类号： B41F33/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31793

摘要： The present invention is to provide an electron-beam lithography method and an electron-beam lithography apparatus that can draw patterns with a high precision despite a change in barometric pressure, can ensure a satisfactory throughput, and are inexpensive. In the electron-beam lithography method that uses an electron beam to draw patterns on a sample, a difference between a current measured barometric pressure and a previous measured barometric pressure, and an elapsed time between their barometric pressure-measurement points in time are determined. When the rate of the difference of their barometric pressures with respect to the elapsed time is equal to or larger than a prescribed barometric pressure change rate value, a drawing precision is calibrated.

摘要翻译： 本发明是提供一种电子束光刻方法和电子束光刻设备，尽管大气压力发生变化，但能够高精度地绘制图案，可以确保令人满意的生产量，并且便宜。 在使用电子束在样品上绘制图案的电子束光刻方法中，确定当前测量的大气压力与先前测量的大气压力之间的差异以及它们在大气压力测量点之间的经过时间。 当大气压力相对于经过时间的差异的比率等于或大于规定的气压变化率值时，校准绘制精度。