METHOD AND APPARATUS FOR WAFER EDGE PROCESSING
    81.
    发明申请
    METHOD AND APPARATUS FOR WAFER EDGE PROCESSING 审中-公开
    WAF边缘加工方法与装置

    公开(公告)号:US20080156772A1

    公开(公告)日:2008-07-03

    申请号:US11618572

    申请日:2006-12-29

    IPC分类号: H01L21/306 C23F1/02

    摘要: Methods and apparatus for remedying arc-related damage to the substrate during plasma bevel etching. A plasma shield is disposed above the substrate to prevent plasma, which is generated in between two annular grounded plates, from reaching the exposed metallization on the substrate. Additionally or alternatively, a carbon-free fluorinated process source gas may be employed and/or the RF bias power may be ramped up gradually during plasma generation to alleviate arc-related damage during bevel etching. Also additionally or alternatively, helium and/or hydrogen may be added to the process source gas to alleviate arc-related damage during bevel etching.

    摘要翻译: 在等离子体斜面蚀刻期间用于补救对基板的电弧相关损伤的方法和装置。 等离子体屏蔽设置在衬底之上,以防止在两个环形接地板之间产生的等离子体到达衬底上暴露的金属化。 另外或替代地,可以采用无碳氟化处理源气体和/或在等离子体产生期间逐渐斜升RF偏置功率以减轻斜面蚀刻期间的电弧相关损伤。 另外或替代地,可以将氦和/或氢加入到工艺源气体中以减轻斜面蚀刻期间的电弧相关损伤。

    OFFSET CORRECTION TECHNIQUES FOR POSITIONING SUBSTRATES
    83.
    发明申请
    OFFSET CORRECTION TECHNIQUES FOR POSITIONING SUBSTRATES 有权
    用于定位基板的偏移校正技术

    公开(公告)号:US20080081383A1

    公开(公告)日:2008-04-03

    申请号:US11612355

    申请日:2006-12-18

    IPC分类号: H01L21/66 G06F19/00

    摘要: A method for calculating a process center for a chuck in a processing chamber is provided. The method includes generating pre-processing and post-processing measurement data points, which is perform by measuring thickness of a film substrate at a set of orientations and a set of distances from a geometric center of the substrate. The method also includes comparing the pre-processing and post-processing measurement data points to calculate a set of etch depth numbers. The method further includes generating etch profiles for the set of orientations. The method yet also includes extrapolating a set of radiuses, which is associated with a first etch depth, from the etch profiles. The method yet further includes generating an off-centered plot, which is a graphical representation of the set of radiuses versus the set of orientations. The method more over includes calculating the process center by applying a curve-fitting equation to the off-centered plot.

    摘要翻译: 提供了一种用于计算处理室中的卡盘的处理中心的方法。 该方法包括产生预处理和后处理测量数据点,其通过以一组取向和距衬底的几何中心的一组距离测量薄膜衬底的厚度来执行。 该方法还包括比较预处理和后处理测量数据点以计算一组蚀刻深度数。 该方法还包括为该组取向生成蚀刻轮廓。 该方法还包括从蚀刻轮廓推断与第一蚀刻深度相关联的一组半径。 该方法还包括生成偏心图,其是该组半径与该组取向的图形表示。 更多的方法包括通过对偏心图应用曲线拟合方程来计算过程中心。

    Artificial lateral line
    84.
    发明申请
    Artificial lateral line 有权
    人造侧线

    公开(公告)号:US20080072682A1

    公开(公告)日:2008-03-27

    申请号:US11824042

    申请日:2007-06-29

    IPC分类号: G01L7/00

    摘要: An artificial sensor comprises at least one substrate, and a plurality of flow sensors disposed on the at least one substrate for providing a plurality of spatial-temporally varying signals representing a hydrodynamic stimulus. The plurality of flow sensors are spatially distributed on the at least one substrate. A processor is coupled to the plurality of flow sensors for receiving the signals and determining spatial-temporal information from the received signals.

    摘要翻译: 人造传感器包括至少一个衬底和设置在所述至少一个衬底上的多个流量传感器,用于提供表示流体动力学刺激的多个空间 - 时间变化的信号。 多个流量传感器在空间上分布在至少一个基板上。 处理器耦合到多个流量传感器,用于接收信号并根据接收的信号确定空间 - 时间信息。

    Circuit for reducing the wiring needed to control the functions of a vehicle
    85.
    发明申请
    Circuit for reducing the wiring needed to control the functions of a vehicle 失效
    用于减少控制车辆功能所需的接线的电路

    公开(公告)号:US20070278858A1

    公开(公告)日:2007-12-06

    申请号:US11443583

    申请日:2006-05-31

    申请人: Jack Chen

    发明人: Jack Chen

    IPC分类号: B60L1/00

    CPC分类号: B60R16/0315 Y10T307/445

    摘要: The wiring needed to control all the functions in a vehicle is reduced, especially where the input source for operating a given function is remote from the function. A control member is provided that receives the input signal and converts it to a coded message that is applied to the power line. A function controller includes a coded reader and a control circuit for reading the code applicable to its associated function and controlling the function as instructed from the input signal. The control member also monitors the power line to insure that the message has been properly sent, and the message is repeated until proper transmission is confirmed.

    摘要翻译: 控制车辆所有功能所需的布线减少了,特别是用于操作给定功能的输入源远离功能的地方。 提供控制构件,其接收输入信号并将其转换为应用于电力线的编码消息。 功能控制器包括编码阅读器和用于读取适用于其相关功能的代码并根据输入信号指示控制功能的控制电路。 控制构件还监视电源线以确保消息已被正确发送,并且重复该消息,直到确认正确的传输。

    WATER PUMP
    86.
    发明申请
    WATER PUMP 审中-公开
    水泵

    公开(公告)号:US20070245481A1

    公开(公告)日:2007-10-25

    申请号:US11379694

    申请日:2006-04-21

    申请人: Jack Chen

    发明人: Jack Chen

    IPC分类号: A61H33/02

    CPC分类号: A61H35/006 A61H2033/0033

    摘要: A water pump is arranged at a predetermined position along a drainage pipeline of a foot bubbler or a massage bathtub, and comprises: a motor connected to a suction housing, a rotary shaft of the motor extending into the suction housing and being provided with an impeller, an inlet pipe and an outlet pipe being connected to the suction housing. The water pump is characterized in that: an air exit connector is arranged in a circumferential surface of the inlet pipe for connecting an air exit pipe, a check valve is disposed in the outlet pipe to prevent the occurrence of reversal flow of dirty water, thus preventing the water in the tub from contamination.

    摘要翻译: 水泵沿着起泡器或按摩浴缸的排水管道布置在预定位置处,并且包括:连接到吸入壳体的马达,电机的旋转轴延伸到吸入壳体中并设置有叶轮 入口管和出口管连接到抽吸壳体。 该水泵的特征在于:在入口管的圆周表面上设置一个空气出口连接器,用于连接出气管,止回阀设置在出口管中,以防止发生脏水反向流动 防止桶中的水污染。

    Method and system for adaptively setting a data refresh interval
    87.
    发明申请
    Method and system for adaptively setting a data refresh interval 审中-公开
    自适应地设置数据刷新间隔的方法和系统

    公开(公告)号:US20070192483A1

    公开(公告)日:2007-08-16

    申请号:US11637601

    申请日:2006-12-11

    IPC分类号: G06F15/173

    摘要: A method and system is disclosed for adaptively refreshing a data using system. The data using system includes a data source and a data using device for utilizing data from the data source. The data using device has an initial refresh interval. A communication link is provided between the data source and the data using device. A criteria monitor is provided for monitoring at least one criteria related to the refresh interval. A processor is provided for generating an updated data refresh interval based at least in part on the monitored criteria. The data using device is updated based on the data refresh interval.

    摘要翻译: 公开了一种用于使用系统自适应刷新数据的方法和系统。 数据使用系统包括数据源和数据使用装置,用于利用来自数据源的数据。 数据使用设备具有初始刷新间隔。 在数据源和使用设备的数据之间提供通信链路。 提供了一个标准监视器,用于监视与刷新间隔相关的至少一个标准。 提供处理器用于至少部分地基于所监视的标准来生成更新的数据刷新间隔。 基于数据刷新间隔更新数据使用设备。

    Pneumatic tool
    88.
    发明申请
    Pneumatic tool 失效
    气动工具

    公开(公告)号:US20070181629A1

    公开(公告)日:2007-08-09

    申请号:US11346139

    申请日:2006-02-03

    申请人: Jack Chen Jim Wang

    发明人: Jack Chen Jim Wang

    IPC分类号: B25C1/04

    CPC分类号: B25C5/1693

    摘要: The pneumatic tool has a check valve placed inside that includes an internal and external valve base and traveling valve. The internal valve base has an inlet hole, and an enlarged slot is formed on the external end of the inlet hole. An annular oblique edge is formed between the enlarged slot and inlet hole, and an air hole is placed on the enlarged slot. The external valve base has an outlet hole that is connected to the outside of the pneumatic tool. A protruding tube is formed inside the outlet hole. Interval space is formed between the inside of the protruding tube and the inlet hole for the internal valve base; and the traveling valve can be traveling inside the interval space. The built-in check valve can avoid external force, which extends the shelf life and makes appearance of the product look neater and practical.

    摘要翻译: 气动工具具有放置在内部的止回阀,其包括内部和外部阀座和行进阀。 内部阀座具有入口孔,并且在入口孔的外端形成有扩大的槽。 在扩大的槽和入口孔之间形成环形的倾斜边缘,并且在扩大的槽上放置一个空气孔。 外部阀座具有连接到气动工具外部的出口孔。 在出口孔内形成突出的管。 在突出管的内部和内部阀座的入口孔之间形成间隔空间; 并且行进阀可以在间隔空间内行进。 内置止回阀可以避免外力,延长了保质期,使产品外观更加洁净实用。

    Instrument mounting system with dual encoders
    89.
    发明申请
    Instrument mounting system with dual encoders 有权
    带双编码器的仪器安装系统

    公开(公告)号:US20060052974A1

    公开(公告)日:2006-03-09

    申请号:US10922118

    申请日:2004-08-19

    申请人: Jack Chen Nai Liu

    发明人: Jack Chen Nai Liu

    IPC分类号: G01C17/00 G01C19/00

    CPC分类号: G02B7/1827 G02B23/16

    摘要: The present invention provides a way to measure the position of an instrument that is mounted on an instrument shaft within a clutched mounting system, the instrument shaft being driven through a reduction gearbox by a motor shaft. The position of the instrument is measured as a function of the position of the motor shaft and the position of the instrument shaft, the measurement of the position of the motor shaft providing greater precision than the position of the instrument shaft. Because the mounting system is clutched, it is necessary to check at intervals whether the measurement of the motor shaft position no longer accurately represents the position of the instrument, in which case the measurement of the motor shaft position is resynchronized to the measurement of the instrument shaft.

    摘要翻译: 本发明提供了一种测量安装在离合式安装系统中的仪表轴上的仪器的位置的方法,仪器轴通过电动机轴被驱动通过减速齿轮箱。 仪器的位置是根据电机轴的位置和仪器轴的位置来测量的,电机轴位置的测量提供比仪器轴位置更高的精度。 因为安装系统是紧固的,所以需要间隔检查电机轴位置的测量是否不再准确地表示仪器的位置,在这种情况下,电机轴位置的测量与仪器的测量重新同步 轴。