摘要:
Methods and apparatus for remedying arc-related damage to the substrate during plasma bevel etching. A plasma shield is disposed above the substrate to prevent plasma, which is generated in between two annular grounded plates, from reaching the exposed metallization on the substrate. Additionally or alternatively, a carbon-free fluorinated process source gas may be employed and/or the RF bias power may be ramped up gradually during plasma generation to alleviate arc-related damage during bevel etching. Also additionally or alternatively, helium and/or hydrogen may be added to the process source gas to alleviate arc-related damage during bevel etching.
摘要:
A microfabricated temperature sensor. The sensor comprises a polymer-based substrate and a resistance temperature device (RTD) disposed on the substrate. The RTD comprises a thin-film metal.
摘要:
A method for calculating a process center for a chuck in a processing chamber is provided. The method includes generating pre-processing and post-processing measurement data points, which is perform by measuring thickness of a film substrate at a set of orientations and a set of distances from a geometric center of the substrate. The method also includes comparing the pre-processing and post-processing measurement data points to calculate a set of etch depth numbers. The method further includes generating etch profiles for the set of orientations. The method yet also includes extrapolating a set of radiuses, which is associated with a first etch depth, from the etch profiles. The method yet further includes generating an off-centered plot, which is a graphical representation of the set of radiuses versus the set of orientations. The method more over includes calculating the process center by applying a curve-fitting equation to the off-centered plot.
摘要:
An artificial sensor comprises at least one substrate, and a plurality of flow sensors disposed on the at least one substrate for providing a plurality of spatial-temporally varying signals representing a hydrodynamic stimulus. The plurality of flow sensors are spatially distributed on the at least one substrate. A processor is coupled to the plurality of flow sensors for receiving the signals and determining spatial-temporal information from the received signals.
摘要:
The wiring needed to control all the functions in a vehicle is reduced, especially where the input source for operating a given function is remote from the function. A control member is provided that receives the input signal and converts it to a coded message that is applied to the power line. A function controller includes a coded reader and a control circuit for reading the code applicable to its associated function and controlling the function as instructed from the input signal. The control member also monitors the power line to insure that the message has been properly sent, and the message is repeated until proper transmission is confirmed.
摘要:
A water pump is arranged at a predetermined position along a drainage pipeline of a foot bubbler or a massage bathtub, and comprises: a motor connected to a suction housing, a rotary shaft of the motor extending into the suction housing and being provided with an impeller, an inlet pipe and an outlet pipe being connected to the suction housing. The water pump is characterized in that: an air exit connector is arranged in a circumferential surface of the inlet pipe for connecting an air exit pipe, a check valve is disposed in the outlet pipe to prevent the occurrence of reversal flow of dirty water, thus preventing the water in the tub from contamination.
摘要:
A method and system is disclosed for adaptively refreshing a data using system. The data using system includes a data source and a data using device for utilizing data from the data source. The data using device has an initial refresh interval. A communication link is provided between the data source and the data using device. A criteria monitor is provided for monitoring at least one criteria related to the refresh interval. A processor is provided for generating an updated data refresh interval based at least in part on the monitored criteria. The data using device is updated based on the data refresh interval.
摘要:
The pneumatic tool has a check valve placed inside that includes an internal and external valve base and traveling valve. The internal valve base has an inlet hole, and an enlarged slot is formed on the external end of the inlet hole. An annular oblique edge is formed between the enlarged slot and inlet hole, and an air hole is placed on the enlarged slot. The external valve base has an outlet hole that is connected to the outside of the pneumatic tool. A protruding tube is formed inside the outlet hole. Interval space is formed between the inside of the protruding tube and the inlet hole for the internal valve base; and the traveling valve can be traveling inside the interval space. The built-in check valve can avoid external force, which extends the shelf life and makes appearance of the product look neater and practical.
摘要:
The present invention provides a way to measure the position of an instrument that is mounted on an instrument shaft within a clutched mounting system, the instrument shaft being driven through a reduction gearbox by a motor shaft. The position of the instrument is measured as a function of the position of the motor shaft and the position of the instrument shaft, the measurement of the position of the motor shaft providing greater precision than the position of the instrument shaft. Because the mounting system is clutched, it is necessary to check at intervals whether the measurement of the motor shaft position no longer accurately represents the position of the instrument, in which case the measurement of the motor shaft position is resynchronized to the measurement of the instrument shaft.
摘要:
Systems and methods for providing registration at a remote site that may include, for example, a monitoring module that may communicate with a remote site. A registration protocol may be used by the monitoring module and the remote site in generating the messages communicated during the registration process. The monitoring module may gather and generate various identification information to be included in the registration protocol messages. The registration information provided by the monitoring module may be stored at the remote site in a database server having a database. A confirmation message may be communicated from the remote site to the monitoring module that may either acknowledge successful registration or report that an error occurred during the registration process.