公开(公告)号：US06671078B2

公开(公告)日：2003-12-30

申请号：US09863654

申请日：2001-05-23

申请人： Dale C. Flanders ,  Martin A. Schmidt

发明人： Dale C. Flanders ,  Martin A. Schmidt

IPC分类号： G02B2600

CPC分类号： B81B3/0021 ,  B81B2201/045 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358 ,  G02B26/02

摘要： A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.

公开(公告)号：US06424466B1

公开(公告)日：2002-07-23

申请号：US09847685

申请日：2001-05-02

申请人： Dale C. Flanders

发明人： Dale C. Flanders

IPC分类号： G02B2700

CPC分类号： G01J3/26

摘要： A multi-cavity micro-optical Fabry-Perot filter uses electrostatically deflected MEMS membranes. The filter comprises a first electrostatically deflectable membrane device. A curved mirror structure is formed on its optical membrane. Similarly, a second electro-statically deflectable membrane device is provided, which has a second curved mirror structure on the membrane. The spacer is used to separate the first membrane device from the second membrane device. The spacer supports a mirror between the first and second curved mirror structures. Wafer-level and device level assembly techniques are also described.

摘要翻译： 多腔微光法布里 - 珀罗滤光片使用静电偏转的MEMS膜。 该过滤器包括第一静电偏转膜装置。 在其光学膜上形成弯曲的镜子结构。 类似地，提供了第二静电可偏转膜装置，其在膜上具有第二弯曲镜结构。 间隔物用于将第一膜装置与第二膜装置分开。 间隔件在第一和第二弯曲镜结构之间支撑反射镜。 还描述了晶片级和器件级组装技术。

公开(公告)号：US06339603B1

公开(公告)日：2002-01-15

申请号：US09696055

申请日：2000-10-25

申请人： Dale C. Flanders ,  Mark E. Kuznetsov

发明人： Dale C. Flanders ,  Mark E. Kuznetsov

IPC分类号： H01S310

CPC分类号： H01S5/141 ,  H01S5/02248 ,  H01S5/0264 ,  H01S5/0617 ,  H01S5/0687 ,  H01S5/142

摘要： A semiconductor tunable laser system includes a tunable Fabry-Perot cavity and a cavity length modulator, which controls an optical length of the cavity at least over a distance corresponding to the spacings between the longitudinal modes of the laser cavity. Thus, the tunable Fabry-Perot cavity allows the laser cavity to have gain at the desired wavelength of operation while the cavity length modulator tunes the cavity length such that a longitudinal cavity mode exists at the desired wavelength of operation. Also, in one embodiment, a wavelength locker system is further provides that has a differential wavelength filter, e.g., stepped etalon, and a multi-element detector, e.g., a quad-detector. The controller then modulators the Fabry-Perot cavity to control the wavelength in response to the signal received from the multi-element detector.

摘要翻译： 半导体可调谐激光器系统包括可调谐的法布里 - 珀罗腔和空腔长度调制器，其控制空腔的光学长度至少在与激光腔的纵向模式之间的间隔相对应的距离上。 因此，可调谐法布里 - 珀罗腔允许激光腔在所需的操作波长下具有增益，而空腔长度调制器调谐腔长度，使得在期望的操作波长处存在纵向腔模式。 而且，在一个实施例中，还提供波长锁存器系统，其具有差分波长滤波器，例如阶梯式标准具，以及多元件检测器，例如四检测器。 然后，控制器调制法布里 - 珀罗腔，以响应于从多元件检测器接收到的信号来控制波长。

公开(公告)号：US06271052B1

公开(公告)日：2001-08-07

申请号：US09692639

申请日：2000-10-19

申请人： Michael F. Miller ,  Minh Van Le ,  Christopher C. Cook ,  Dale C. Flanders

发明人： Michael F. Miller ,  Minh Van Le ,  Christopher C. Cook ,  Dale C. Flanders

IPC分类号： H01L2100

CPC分类号： B81B3/0083 ,  B81B2201/042 ,  B81C1/00476 ,  B81C1/00666 ,  B81C2201/0109 ,  B81C2201/053 ,  G02B26/001

摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.

摘要翻译： 从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。 凹陷蚀刻到牺牲层中。 然后在牺牲层上形成多晶硅膜层。 随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。 最后，去除牺牲层以释放膜。 牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。 在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。

公开(公告)号：US4722092A

公开(公告)日：1988-01-26

申请号：US696648

申请日：1985-01-30

申请人： Zong-Long Liau ,  Dale C. Flanders ,  James N. Walpole

发明人： Zong-Long Liau ,  Dale C. Flanders ,  James N. Walpole

IPC分类号： H01S5/042 ,  H01S5/12 ,  H01S5/187 ,  H01S5/227 ,  H01L21/208

CPC分类号： H01S5/187 ,  H01S5/1228 ,  H01S5/227 ,  H01S5/0425 ,  H01S5/2275

摘要： A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side wallsGOVERNMENT SUPPORTThe Government has rights in this invention pursuant to Contract No. F19628-85C-0002, awarded by the Department of the Air Force.

摘要翻译： 一种分布式反馈（DFB）型激光器及其形成方法和装置，其中材料的四分半导体有源激光条被掩埋在一种导电材料的二元化合物的衬底和具有相反导电性的台面二元化合物体之间， 周期性光栅结构被蚀刻到台面的平台中。 在一个实施例中，欧姆接触提供在光栅结构的任一侧上，并且台面在有源条附近被切削，以部分地将欧姆接触与当有源带被埋入时形成的均质结合部分地隔离，优选使用质量传输过程。 在另一个实施例中，欧姆接触形成在深蚀刻的光栅结构的顶部。 还描述了掩埋层双异质结构（DH）激光器，其中形成在层的侧壁上的DFB光栅。 另外，描述了具有DFB的表面发射二极管激光器。

公开(公告)号：US4618261A

公开(公告)日：1986-10-21

申请号：US570918

申请日：1984-01-16

申请人： Dale C. Flanders ,  Theodore M. Lyszczarz

发明人： Dale C. Flanders ,  Theodore M. Lyszczarz

IPC分类号： G01B11/14 ,  G03F9/00 ,  G01B9/02

CPC分类号： G03F9/7026 ,  G01B11/14 ,  G03F9/7049

摘要： A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a substrate closely adjacent to the mask after passing through the mask upon the photodetector array to produce an interference pattern that is sensed and characterized by a spatial frequency representative of the distance between the mask and substrate.

摘要翻译： 透镜或光纤电缆将来自准直的氦氖激光束的能量聚焦在掩模上的点上。 一些聚焦能量从掩模在图像平面中的光电检测器阵列上被反射，并且这些能量中的一些在通过光电检测器阵列上的掩模之后从与掩模紧密相邻的基板反射，以产生干涉图案， 感测并表征为代表掩模和衬底之间的距离的空间频率。

公开(公告)号：US09337619B2

公开(公告)日：2016-05-10

申请号：US13271388

申请日：2011-10-12

申请人： Walid Atia ,  Mark E. Kuznetsov ,  Dale C. Flanders

发明人： Walid Atia ,  Mark E. Kuznetsov ,  Dale C. Flanders

IPC分类号： G01N21/47 ,  H01S5/14 ,  H01S5/022 ,  H01S5/0683 ,  H01S5/0687

CPC分类号： H01S5/141 ,  G01N21/4795 ,  H01S5/02284 ,  H01S5/0683 ,  H01S5/0687

摘要： A frequency swept laser source that generates an optical signal that is tuned over a spectral scan band at single discrete wavelengths associated with longitudinal modes of the swept laser source. Laser hopping over discrete single cavity modes allows long laser coherence length even under dynamic very high speed tuning conditions. A ramp drive to the laser is used to linearize laser frequency tuning. A beam splitter is used to divide the optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample. A detector system detects the optical signal from the reference arm and the sample arm for generating depth profiles and images of the sample.

摘要翻译： 频率扫描激光源，其产生在与扫描的激光源的纵向模式相关联的单独离散波长下在光谱扫描带上调谐的光信号。 在离散单腔模式下的激光跳跃即使在动态非常高速的调谐条件下也能实现长激光相干长度。 激光器的斜坡驱动用于线性化激光频率调谐。 分束器用于将通向参考反射器的参考臂和通向样品的样品臂之间的光信号分开。 检测器系统检测来自参考臂和样品臂的光信号，用于产生样品的深度分布和图像。

公开(公告)号：US20120300216A1

公开(公告)日：2012-11-29

申请号：US13568717

申请日：2012-08-07

申请人： Bartley C. Johnson ,  Dale C. Flanders

发明人： Bartley C. Johnson ,  Dale C. Flanders

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  A61B5/0066 ,  A61B5/0073 ,  G01B9/02004 ,  G01B9/0205 ,  G01B9/02091 ,  G01B2290/70 ,  G01N21/4795

摘要： Optical coherence tomography (OCT) probe and system designs are disclosed that minimize the effects of mechanical movement and strain to the probe to the OCT analysis. It also concerns optical designs that are robust against noise from the OCT laser source. Also integrated OCT system-probes are included that yield compact and robust electro-opto-mechanical systems along with polarization sensitive OCT systems.

摘要翻译： 公开了光学相干断层扫描（OCT）探针和系统设计，其最小化机械移动和应变对OCT分析的探针的影响。 它还涉及对来自OCT激光源的噪声强大的光学设计。 还包括集成的OCT系统探针，可产生紧凑且坚固的电光机械系统以及偏振敏感OCT系统。

公开(公告)号：US20120162659A1

公开(公告)日：2012-06-28

申请号：US12980144

申请日：2010-12-28

申请人： Brian Goldberg ,  Dale C. Flanders ,  Walid A. Atia ,  Bartley C. Johnson ,  Mark E. Kuznetsov

发明人： Brian Goldberg ,  Dale C. Flanders ,  Walid A. Atia ,  Bartley C. Johnson ,  Mark E. Kuznetsov

IPC分类号： G01B9/02 ,  H01S3/081

CPC分类号： G01B9/02091 ,  A61B5/0066 ,  A61B5/0075 ,  G01N21/4795 ,  H01S5/02216 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/141 ,  H01S5/4012 ,  H01S5/4062 ,  H01S5/4068

摘要： An optical coherence analysis system comprising: a first swept source that generates a first optical signal that is tuned over a first spectral scan band, a second swept source that generates a second optical signal that is tuned over a second spectral scan band, a combiner for combining the first optical signal and the second optical signal for form a combined optical signal, an interferometer for dividing the combined optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample, and a detector system for detecting an interference signal generated from the combined optical signal from the reference arm and from the sample arm. In embodiments, the swept sources are tunable lasers that have shared laser cavities.

摘要翻译： 一种光学相干分析系统，包括：第一扫描光源，其产生在第一光谱扫描带上调谐的第一光信号，产生在第二光谱扫描带上调谐的第二光信号的第二扫描光源， 组合第一光信号和第二光信号以形成组合的光信号，用于将导通到参考反射器的参考臂与通向样本的采样臂之间的组合光信号分开的干涉仪，以及用于检测 由来自参考臂和来自采样臂的组合光信号产生的干扰信号。 在实施例中，扫描光源是具有共享激光腔的可调激光器。

公开(公告)号：US08164748B1

公开(公告)日：2012-04-24

申请号：US12115335

申请日：2008-05-05

申请人： Dale C. Flanders ,  Petros Kotidis

发明人： Dale C. Flanders ,  Petros Kotidis

IPC分类号： G01J3/00

CPC分类号： G01J3/4338 ,  G01J3/0286 ,  G01J3/108 ,  G01J3/26 ,  G01N21/3504 ,  G01N21/359 ,  G01N21/39

摘要： A near infrared (NIR) semiconductor laser system is shown for gas sensing. An embodiment is centered on the use of a system with a much wider tunable laser, which today has a scan band of more than 150 nanometers (nm) to as much as 250 nm or more. In some cases the scan band is about 400 nm or more. This is achieved in the current embodiment through the use of a widely tunable microelectromechanical system (MEMS) based Fabry-Perot filter as an integral part of the laser cavity. Using this technology, these systems are capable of capturing a variety of gases in the any of the well-known spectroscopic scan bands, such as the OH, NH or CH. For example, a single laser with a 250 nm scan band window between 1550-1800 nm can capture ten or as many as twenty hydrocarbon-based gases simultaneously.

摘要翻译： 示出了用于气体感测的近红外（NIR）半导体激光系统。 一个实施例集中于使用具有更宽可调谐激光器的系统，该激光器今天具有超过150纳米（nm）至多达250nm或更多的扫描带​​。 在某些情况下，扫描带约为400nm或更大。 这在当前的实施例中通过使用基于广泛可调谐的微机电系统（MEMS）的法布里 - 珀罗滤波器作为激光腔的组成部分来实现。 使用这种技术，这些系统能够捕获任何众所周知的光谱扫描带，例如OH，NH或CH中的各种气体。 例如，在1550-1800nm之间具有250nm扫描带窗口的单个激光器可以同时捕获十个或多达二十个基于烃的气体。