Electrostatic chuck
    81.
    发明授权
    Electrostatic chuck 失效
    静电吸盘

    公开(公告)号:US5607541A

    公开(公告)日:1997-03-04

    申请号:US857848

    申请日:1992-03-26

    摘要: An improvement is proposed in an electrostatic chuck, which is used in holding and transporting, for example, a semiconductor silicon wafer under processing in the manufacture of electronic devices, having an internal electrode layer sandwiched between two dielectric layers of a ceramic material. The disadvantage caused by the inherent porosity of the ceramic material can be dissolved by the invention according to which the pores are filled with a thermally decomposable liquid compound of silicon, aluminum and the like and then the ceramic material is heated in an oxidizing atmosphere so as to decompose and oxidise the impregnant compound into the oxide formed in situ and filling the pores so that the electrostatic attractive force can be increased as a consequence of the increase in the effective dielectric constant along with high resistance against any corrosive gaseous atmosphere as compared with conventional pore-filling materials such as epoxy resins.

    摘要翻译: 在静电卡盘中提出了一种改进,其用于保持和输送例如在电子器件的制造中正在加工的半导体硅晶片,其具有夹在陶瓷材料的两个电介质层之间的内部电极层。 由陶瓷材料的固有孔隙率引起的缺点可以通过本发明溶解,根据该发明,用硅,铝等可热分解的液体化合物填充孔,然后将陶瓷材料在氧化气氛中加热,以便 将浸渍剂化合物分解并氧化成原位形成的氧化物并填充孔,使得由于有效介电常数的增加以及与任何腐蚀性气体气氛的高电阻相比,静电吸引力可以增加,与常规 孔填充材料如环氧树脂。

    Electrostatic chuck
    82.
    发明授权
    Electrostatic chuck 失效
    静电吸盘

    公开(公告)号:US5324053A

    公开(公告)日:1994-06-28

    申请号:US2925

    申请日:1993-01-11

    摘要: An improvement is proposed in an electrostatic chuck having a chuck head comprising an electrode layer sandwiched between a backing insulating layer and a frontal insulating layer, which comes into contact with a work piece when the electrostatic chuck is working, by which the electrostatic chuck can exhibit a large electrostatic attractive force by increasing the voltage applied between the electrodes without the problem of dielectric breakdown in the insulating layer and a leak current occurring on the surface of the work piece. The improvement can be obtained by forming the frontal insulating layer in a two-layered structure consisting of a high-dielectric layer made from a material having a dielectric constant of at least 50 at a temperature of 20.degree. C. and a frequency of 1 MHz and a high-resistivity layer made from a material having a volume resistivity of at least 1.times.10.sup.12 ohm.cm at 20.degree. C., the high-dielectric layer being interposed between the electrode layer and the high-resistivity layer.

    摘要翻译: 在具有卡盘头的静电卡盘中提出了一种改进,该卡盘头包括夹在背衬绝缘层和正面绝缘层之间的电极层,当静电卡盘工作时与工件接触,静电卡盘可以显现 通过增加施加在电极之间的电压而没有绝缘层中的电介质击穿的问题和在工件的表面上产生的漏电流的大的静电吸引力。 可以通过将正面绝缘层形成为由在20℃的温度下介电常数至少为50的材料制成的高介电层和1MHz的频率的两层结构 以及由在20℃下体积电阻率至少为1×10 12欧姆·厘米的材料制成的高电阻率层,高电介质层介于电极层和高电阻率层之间。

    Electrode mounting structure of surface treatment apparatus
    85.
    发明授权
    Electrode mounting structure of surface treatment apparatus 有权
    表面处理装置的电极安装结构

    公开(公告)号:US08057647B2

    公开(公告)日:2011-11-15

    申请号:US12490034

    申请日:2009-06-23

    IPC分类号: C25B9/02 C25C7/02 C25D17/06

    摘要: An electrode mounting structure of a surface treatment apparatus in which a metal electrode is disposed so as to oppose to an inner-peripheral surface of a cylinder, the electrode and the cylinder are energized in a state where treatment liquid is interposed between the electrode and the cylinder inner-peripheral surface so as to perform pre-plating or plating to the cylinder inner-peripheral surface, and the metal electrode is detachably attached to a metal electrode holder member. The structure includes a resin coupler having a threaded portion engaged with a threaded portion formed on the electrode holder member.

    摘要翻译: 一种表面处理装置的电极安装结构,其中金属电极设置成与气缸的内周面相对设置,电极和气缸在处理液介于电极和电极之间的状态下通电 气缸内周面,以便对气缸内周面进行预镀或电镀,并且金属电极可拆卸地安装在金属电极保持构件上。 该结构包括树脂耦合器,其具有与形成在电极保持器构件上的螺纹部分接合的螺纹部分。

    BENZIMIDAZOLONE DERIVATIVES
    86.
    发明申请

    公开(公告)号:US20090298811A1

    公开(公告)日:2009-12-03

    申请号:US12440646

    申请日:2007-09-03

    摘要: This invention relates to compounds and methods for the treatment of a condition mediated by CB1 receptor activity in a mammalian subject including a human, which comprises administering to a mammal in need of such treatment a therapeutically effective amount of the compound of formula (I) or pharmaceutically acceptable salts thereof, wherein: A, B, R1, R2 and R3 are each as described herein. These compounds are useful in the treatment of a condition mediated by CB2 receptor binding activity such as, but not limited to, inflammatory pain, nociceptive pain, neuropathic pain, fibromyalgia, chronic low back pain, visceral pain, acute cerebral ischemia, pain, chronic pain, acute pain, post herpetic neuralgia, neuropathies, neuralgia, diabetic neuropathy, HIV-related neuropathy, nerve injury, rheumatoid arthritic pain, osteoarthritic pain, back pain, cancer pain, dental pain, fibromyalgia, neuritis, sciatica, inflammation, neurodegenerative disease, spasticity, epilepsy, Tourette's syndrome, Parkinson's disease, neuroprotection, anxiety, cough, broncho constriction, irritable bowel syndrome (IBS), inflammatory bowel disease (IBD), colitis, cerebrovascular ischemia, cachexia, nausea, emesis, chemotherapy-induced emesis, rheumatoid arthritis, asthma, Crohn's disease, ulcerative colitis, asthma, dermatitis, seasonal allergic rhinitis, gastroesophageal reflux disease (GERD), constipation, diarrhea, functional gastrointestinal disorder, cutaneous T cell lymphoma, multiple sclerosis, osteoarthritis, psoriasis, systemic lupus erythematosus, diabetes, glaucoma, osteoporosis, glomerulonephritis, renal ischemia, nephritis, hepatitis, cerebral stroke, vasodialation, hypertension, vasculitis, myocardial infarction, cerebral ischemia, reversible airway obstruction, adult respiratory disease syndrome, chronic obstructive pulmonary disease (COPD), cryptogenic fibrosing alveolitis and bronchitis.

    Radio apparatus capable of autonomous position estimation and radio network system including the same
    88.
    发明申请
    Radio apparatus capable of autonomous position estimation and radio network system including the same 有权
    能够进行自主位置估计的无线电装置和包括其的无线电网络系统

    公开(公告)号:US20080014963A1

    公开(公告)日:2008-01-17

    申请号:US11730245

    申请日:2007-03-30

    IPC分类号: H04Q7/20

    CPC分类号: H04W64/00 G01S5/14

    摘要: A radio apparatus forming a radio network system calculates a calculated distance, based on a tentative self-position and tentative positions of a plurality of radio apparatuses existing in the vicinity. The radio apparatus successively and autonomously corrects the tentative self-position so that the calculated distance comes closer to the measured distance, relying more heavily on the calculated distance than the measured distance between itself and each of the plurality of radio apparatuses, and determines the position of itself. Other radio apparatuses also successively correct the tentative self-positions by the same method as the radio apparatus, and determine the positions of themselves.

    摘要翻译: 形成无线电网络系统的无线电设备基于存在于附近的多个无线电设备的临时自身位置和临时位置来计算计算出的距离。 无线电设备相继地并且自主地校正临时自身位置,使得所计算的距离更靠近测量的距离,更依赖于所计算的距离,而不是其测量的与多个无线电设备中的每一个之间的距离,并且确定位置 本身。 其他无线电设备也通过与无线电设备相同的方法连续校正临时自身位置,并且确定其自身的位置。

    Mast cell surface antigen, DNA thereof, and antibody against the antigen
    89.
    发明授权
    Mast cell surface antigen, DNA thereof, and antibody against the antigen 失效
    肥大细胞表面抗原,其DNA,抗抗原抗体

    公开(公告)号:US07045597B2

    公开(公告)日:2006-05-16

    申请号:US10250644

    申请日:2001-01-04

    IPC分类号: C07K14/435 A61K39/00

    CPC分类号: C07K14/705 C07K16/28

    摘要: A mast cell surface antigen, DNA thereof and an antibody against the antigen are provided. The amino acid sequence of this mast cell surface antigen is the translation of the coding region of its DNA. The base sequence of this DNA has been clarified in the following manner. Namely, mast cells obtained by incubating cord blood monocular cells are co-incubated with primary culture of fibroblasts to give connective tissue type mast cells (MC-TC). Then mRNA is extracted from this MC-TC cell extraction and a cDNA library is constructed therefrom. Immunological screening is carried out with the use of anti-MC-TC antiserum and the base sequence of the positive clone thus obtained is identified. Owing to the clarification of the amino acid sequence of this mast cell antigen, it becomes possible to reveal the role of mast cells in the pathology of allergic diseases and thus an antibody against mast cells can be easily obtained.

    摘要翻译: 提供肥大细胞表面抗原,其DNA和针对抗原的抗体。 该肥大细胞表面抗原的氨基酸序列是其DNA编码区的翻译。 该DNA的碱基序列已经以下述方式进行了说明。 即,将通过孵育脐带血单核细胞获得的肥大细胞与成纤维细胞的原代培养物共温育以产生结缔组织型肥大细胞(MC-TC)。 然后从该MC-TC细胞提取中提取mRNA,并由其构建cDNA文库。 使用抗MC-TC抗血清进行免疫筛选,鉴定得到的阳性克隆的碱基序列。 由于这种肥大细胞抗原的氨基酸序列的澄清,可以揭示肥大细胞在过敏性疾病的病理学中的作用,因此可以容易地获得抗肥大细胞的抗体。

    Silicon focus ring and method for producing the same
    90.
    发明授权
    Silicon focus ring and method for producing the same 失效
    硅聚焦环及其制造方法

    公开(公告)号:US06815352B1

    公开(公告)日:2004-11-09

    申请号:US09696955

    申请日:2000-10-27

    IPC分类号: H01L21302

    摘要: There is disclosed a silicon focus ring consisting of silicon single crystal used as a silicon focus ring in a plasma apparatus, wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3, and a producing method for a silicon focus ring used for a plasma apparatus, wherein a single crystal silicon wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3 is grown by a Czochralski method, the single crystal silicon is processed in a circle, and a silicon focus ring is produced. There can be provided a silicon focus ring, which can prevent disadvantage due to impurities such as heavy metal.

    摘要翻译: 公开了在等离子体装置中用作硅聚焦环的硅单晶组成的硅聚焦环,其中硅聚焦环中所含的间隙氧的浓度不小于5×10 17原子/ cm 3,而不是 大于1.5×10 18原子/ cm 3,以及用于等离子体装置的硅聚焦环的制造方法,其中,在硅聚焦环中包含的间隙氧的浓度为5×10 6个以上的单晶硅 通过Czochralski法生长17个原子/ cm 3以上1.5×10 18个/ cm 3以下的单晶硅,制成硅聚焦环。 可以提供硅聚焦环,其可以防止由于诸如重金属的杂质导致的不利影响。