摘要:
An improvement is proposed in an electrostatic chuck, which is used in holding and transporting, for example, a semiconductor silicon wafer under processing in the manufacture of electronic devices, having an internal electrode layer sandwiched between two dielectric layers of a ceramic material. The disadvantage caused by the inherent porosity of the ceramic material can be dissolved by the invention according to which the pores are filled with a thermally decomposable liquid compound of silicon, aluminum and the like and then the ceramic material is heated in an oxidizing atmosphere so as to decompose and oxidise the impregnant compound into the oxide formed in situ and filling the pores so that the electrostatic attractive force can be increased as a consequence of the increase in the effective dielectric constant along with high resistance against any corrosive gaseous atmosphere as compared with conventional pore-filling materials such as epoxy resins.
摘要:
An improvement is proposed in an electrostatic chuck having a chuck head comprising an electrode layer sandwiched between a backing insulating layer and a frontal insulating layer, which comes into contact with a work piece when the electrostatic chuck is working, by which the electrostatic chuck can exhibit a large electrostatic attractive force by increasing the voltage applied between the electrodes without the problem of dielectric breakdown in the insulating layer and a leak current occurring on the surface of the work piece. The improvement can be obtained by forming the frontal insulating layer in a two-layered structure consisting of a high-dielectric layer made from a material having a dielectric constant of at least 50 at a temperature of 20.degree. C. and a frequency of 1 MHz and a high-resistivity layer made from a material having a volume resistivity of at least 1.times.10.sup.12 ohm.cm at 20.degree. C., the high-dielectric layer being interposed between the electrode layer and the high-resistivity layer.
摘要:
This invention provides compounds having antiviral activities especially inhibiting activity for influenza virus, more preferably provides substituted 3-hydroxy-4-pyridone derivatives having cap-dependent endonuclease inhibitory activity.
摘要:
This invention provides compounds having antiviral activities especially inhibiting activity for influenza virus, more preferably provides substituted 3-hydroxy-4-pyridone derivatives having cap-dependent endonuclease inhibitory activity.
摘要:
An electrode mounting structure of a surface treatment apparatus in which a metal electrode is disposed so as to oppose to an inner-peripheral surface of a cylinder, the electrode and the cylinder are energized in a state where treatment liquid is interposed between the electrode and the cylinder inner-peripheral surface so as to perform pre-plating or plating to the cylinder inner-peripheral surface, and the metal electrode is detachably attached to a metal electrode holder member. The structure includes a resin coupler having a threaded portion engaged with a threaded portion formed on the electrode holder member.
摘要:
This invention relates to compounds and methods for the treatment of a condition mediated by CB1 receptor activity in a mammalian subject including a human, which comprises administering to a mammal in need of such treatment a therapeutically effective amount of the compound of formula (I) or pharmaceutically acceptable salts thereof, wherein: A, B, R1, R2 and R3 are each as described herein. These compounds are useful in the treatment of a condition mediated by CB2 receptor binding activity such as, but not limited to, inflammatory pain, nociceptive pain, neuropathic pain, fibromyalgia, chronic low back pain, visceral pain, acute cerebral ischemia, pain, chronic pain, acute pain, post herpetic neuralgia, neuropathies, neuralgia, diabetic neuropathy, HIV-related neuropathy, nerve injury, rheumatoid arthritic pain, osteoarthritic pain, back pain, cancer pain, dental pain, fibromyalgia, neuritis, sciatica, inflammation, neurodegenerative disease, spasticity, epilepsy, Tourette's syndrome, Parkinson's disease, neuroprotection, anxiety, cough, broncho constriction, irritable bowel syndrome (IBS), inflammatory bowel disease (IBD), colitis, cerebrovascular ischemia, cachexia, nausea, emesis, chemotherapy-induced emesis, rheumatoid arthritis, asthma, Crohn's disease, ulcerative colitis, asthma, dermatitis, seasonal allergic rhinitis, gastroesophageal reflux disease (GERD), constipation, diarrhea, functional gastrointestinal disorder, cutaneous T cell lymphoma, multiple sclerosis, osteoarthritis, psoriasis, systemic lupus erythematosus, diabetes, glaucoma, osteoporosis, glomerulonephritis, renal ischemia, nephritis, hepatitis, cerebral stroke, vasodialation, hypertension, vasculitis, myocardial infarction, cerebral ischemia, reversible airway obstruction, adult respiratory disease syndrome, chronic obstructive pulmonary disease (COPD), cryptogenic fibrosing alveolitis and bronchitis.
摘要:
A method and system are provided to replay an HTTP transaction that is comprised of multiple events. Each event is identified and organized based upon transaction of events over the course of time. The events of the transaction are replayed and organized into an order dependent relationship. The number of computations increases linearly with the number of events in the transaction.
摘要:
A radio apparatus forming a radio network system calculates a calculated distance, based on a tentative self-position and tentative positions of a plurality of radio apparatuses existing in the vicinity. The radio apparatus successively and autonomously corrects the tentative self-position so that the calculated distance comes closer to the measured distance, relying more heavily on the calculated distance than the measured distance between itself and each of the plurality of radio apparatuses, and determines the position of itself. Other radio apparatuses also successively correct the tentative self-positions by the same method as the radio apparatus, and determine the positions of themselves.
摘要:
A mast cell surface antigen, DNA thereof and an antibody against the antigen are provided. The amino acid sequence of this mast cell surface antigen is the translation of the coding region of its DNA. The base sequence of this DNA has been clarified in the following manner. Namely, mast cells obtained by incubating cord blood monocular cells are co-incubated with primary culture of fibroblasts to give connective tissue type mast cells (MC-TC). Then mRNA is extracted from this MC-TC cell extraction and a cDNA library is constructed therefrom. Immunological screening is carried out with the use of anti-MC-TC antiserum and the base sequence of the positive clone thus obtained is identified. Owing to the clarification of the amino acid sequence of this mast cell antigen, it becomes possible to reveal the role of mast cells in the pathology of allergic diseases and thus an antibody against mast cells can be easily obtained.
摘要:
There is disclosed a silicon focus ring consisting of silicon single crystal used as a silicon focus ring in a plasma apparatus, wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3, and a producing method for a silicon focus ring used for a plasma apparatus, wherein a single crystal silicon wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3 is grown by a Czochralski method, the single crystal silicon is processed in a circle, and a silicon focus ring is produced. There can be provided a silicon focus ring, which can prevent disadvantage due to impurities such as heavy metal.
摘要翻译:公开了在等离子体装置中用作硅聚焦环的硅单晶组成的硅聚焦环,其中硅聚焦环中所含的间隙氧的浓度不小于5×10 17原子/ cm 3,而不是 大于1.5×10 18原子/ cm 3,以及用于等离子体装置的硅聚焦环的制造方法,其中,在硅聚焦环中包含的间隙氧的浓度为5×10 6个以上的单晶硅 通过Czochralski法生长17个原子/ cm 3以上1.5×10 18个/ cm 3以下的单晶硅,制成硅聚焦环。 可以提供硅聚焦环,其可以防止由于诸如重金属的杂质导致的不利影响。