公开(公告)号：US5955858A

公开(公告)日：1999-09-21

申请号：US801076

申请日：1997-02-14

申请人： Tony Kroeker ,  Jeffrey C. Hudgens

发明人： Tony Kroeker ,  Jeffrey C. Hudgens

IPC分类号： B25J18/02 ,  B25J9/10 ,  H01L21/677 ,  H01L21/687 ,  B25J15/00

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/141

摘要： The present invention generally provides a robot that can transfer a workpiece, such as a silicon wafer, at increased speeds and accelerations/decelerations. More particularly, the present invention provides a robot wrist for mechanically clamping a workpiece to a workpiece handling member of an extendable robot arm. The wafer clamp selectively applies sufficient force to center the workpiece and prevent slippage and damage to the workpiece during rapid rotation and radial movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two independent clamp fingers to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except during full extension of the wafer handling member to deliver or pickup a wafer.

摘要翻译： 本发明通常提供一种可以以增加的速度和加速度/减速度传送诸如硅晶片的工件的机器人。 更具体地说，本发明提供了一种用于机械地将工件夹紧到可延伸机器人臂的工件处理构件上的机械手腕。 晶片夹具选择性地施加足够的力以使工件居中并防止在处理构件的快速旋转和径向运动期间滑动和损坏工件。 在一个实施例中，用于固定硅晶片的夹具使用两个独立的夹钳来以最小的颗粒产生和晶片损坏来定位和保持晶片。 夹具被设计成使得晶片通常被夹紧，除了晶片处理构件的完全延伸以递送或拾取晶片之外。

公开(公告)号：US20100178146A1

公开(公告)日：2010-07-15

申请号：US12684672

申请日：2010-01-08

申请人： Izya Kremerman ,  Jeffrey C. Hudgens

发明人： Izya Kremerman ,  Jeffrey C. Hudgens

IPC分类号： B25J17/02 ,  B25B11/00

CPC分类号： B65G47/904 ,  B25J9/042 ,  B25J18/00 ,  H01L21/67742 ,  Y10S414/135 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/16 ,  Y10S901/21 ,  Y10S901/28 ,  Y10S901/29 ,  Y10T74/20335

摘要： A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects.

摘要翻译： 公开了一种基板传送机器人装置，其适于将基板输送到电子设备处理系统的室和从电子设备处理系统的室传送。 该装置可以包括可在XY平面中旋转的上臂，可相对于XY平面中的上臂旋转的前臂，以及可相对于XY平面中的前臂旋转的腕部构件，所述腕构件包括适于携带的末端执行器 底物。 手腕构件可以经受独立的旋转，使得可以将不同程度的偏转赋予手腕构件。 在一些方面，提供独立的旋转，而不需要在臂或腕构件上设置动力装置（例如，马达），即可以远程地驱动腕部件。 还提供了使用机器人装置的系统和方法以及许多其它方面。

公开(公告)号：US20090101483A1

公开(公告)日：2009-04-23

申请号：US12254839

申请日：2008-10-21

申请人： Vinay K. Shah ,  Jeffrey C. Hudgens

发明人： Vinay K. Shah ,  Jeffrey C. Hudgens

IPC分类号： B65G15/22 ,  B65G15/60 ,  B65G47/00

CPC分类号： B65G15/44 ,  B65G15/56

摘要： A conveyor apparatus adapted to transport and article is provided. The conveyor apparatus has a belt section including a plurality of slots and a plurality of T-shaped stiffeners extending in the slots. Respective belt sections may be spliced together using a plurality of T-shaped stiffeners extending through slots in diagonally-formed ends of each belt section. Methods of the invention are described as are numerous other aspects.

摘要翻译： 提供适于运输和物品的输送设备。 输送装置具有带部分，该带部分包括多个槽和在槽中延伸的多个T形加强件。 可以使用多个T形加强筋将相应的带部分拼接在一起，每个T形加强件穿过每个带部分的对角线形成的端部中的槽。 本发明的方法被描述为许多其它方面。

公开(公告)号：US20080298945A1

公开(公告)日：2008-12-04

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B66C23/18

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。

公开(公告)号：US6056504A

公开(公告)日：2000-05-02

申请号：US92626

申请日：1998-06-05

申请人： Jeffrey C. Hudgens ,  Tony R. Kroeker

发明人： Jeffrey C. Hudgens ,  Tony R. Kroeker

IPC分类号： B25J9/10 ,  H01L21/687 ,  B25J18/04

CPC分类号： H01L21/68707 ,  B25J9/107

摘要： An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position and an extended position, and/or the upper portion may extend between an normal position and a compressed position. The adjusted positions (i.e., extended or compressed) are assumed as the wafer handler moves through a center position. Thus, the inventive wafer handler has a normally smaller arm length (as compared to conventional frog leg configurations) which in turn allows a smaller core axis of rotation (i.e., a smaller bladeless arm length). Therefore the blade used with the adjustable wafer handler may be longer by an amount equal to the difference between the normal and the adjusted arm lengths, without increasing the overall (i.e., the length of the arm and blade) retracted axis of rotation. The longer blade allows wafer placement within a processing chamber without requiring the wafer handler itself to enter the processing chamber.

摘要翻译： 提供了一种可调长度的蛙腿型晶片处理器。 晶片处理器具有两个臂，每个臂具有上部和下部。 下部可以在正常位置和延伸位置之间延伸，和/或上部可以在正常位置和压缩位置之间延伸。 当晶片处理器移动通过中心位置时，假设调整位置（即扩展或压缩）。 因此，本发明的晶片处理器具有通常较小的臂长度（与传统的青蛙腿构型相比），这又允许较小的芯轴旋转轴（即，较小的无臂臂长度）。 因此，与可调节的晶片处理器一起使用的刀片可以比通常和调节的臂长度之间的差值更长，而不增加总体（即臂和刀片的长度）缩回的旋转轴线。 更长的刀片允许晶片放置在处理室内，而不需要晶片处理器本身进入处理室。

公开(公告)号：US08870512B2

公开(公告)日：2014-10-28

申请号：US12257376

申请日：2008-10-23

申请人： Michael Robert Rice ,  Jeffrey C. Hudgens

发明人： Michael Robert Rice ,  Jeffrey C. Hudgens

IPC分类号： H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67763 ,  B65D85/70 ,  H01L21/67386 ,  H01L21/67393 ,  H01L21/67775 ,  Y10S414/137

摘要： An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing process on one or more substrates; a substrate carrier adapted to couple to the system and carry one or more substrates; and a component adapted to create a sealed environment relative to at least a portion of the substrate carrier and to substantially equalize the sealed environment with an environment within the substrate carrier. Methods of the invention are described as are numerous other aspects.

摘要翻译： 公开了一种电子设备制造系统。 该系统包括具有一个或多个处理室的处理工具，每个处理室适于在一个或多个基板上执行电子设备制造过程; 衬底载体，其适于耦合到所述系统并携带一个或多个衬底; 以及适于相对于所述衬底载体的至少一部分产生密封环境并且基本上使所述密封环境与所述衬底载体内的环境相等的部件。 本发明的方法被描述为许多其它方面。

公开(公告)号：US08599531B2

公开(公告)日：2013-12-03

申请号：US12684733

申请日：2010-01-08

申请人： Satish Sundar ,  Jeffrey C. Hudgens ,  Prudhvi R. Chintalapati ,  William Nixon Taylor, Jr. ,  William P. Laceky ,  Jeffrey A. Brodine ,  Dean C. Hruzek ,  Mario Dave Silvetti

发明人： Satish Sundar ,  Jeffrey C. Hudgens ,  Prudhvi R. Chintalapati ,  William Nixon Taylor, Jr. ,  William P. Laceky ,  Jeffrey A. Brodine ,  Dean C. Hruzek ,  Mario Dave Silvetti

IPC分类号： H01L21/683 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/6833 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/683 ,  H01L21/6831 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/30 ,  Y10S901/40

摘要： Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

摘要翻译： 提供了用于在电子设备制造系统的系统部件之间传送基板的系统，设备和方法。 该系统和装置包括具有基座的静电末端执行器，基座上的电极对和用于将基板与电极对间隔开的隔离构件，以在电极对和基板之间提供间隙。 提供了本发明的方法以及许多其它方面。

公开(公告)号：US20130039726A1

公开(公告)日：2013-02-14

申请号：US13205116

申请日：2011-08-08

申请人： Jeffrey A. Brodine ,  Jeffrey C. Hudgens ,  Izya Kremerman

发明人： Jeffrey A. Brodine ,  Jeffrey C. Hudgens ,  Izya Kremerman

IPC分类号： B25J9/04 ,  B25J9/00 ,  B25J18/00

CPC分类号： H01L21/67742 ,  B25J9/04 ,  B25J9/041 ,  B25J9/042 ,  H01L21/67766

摘要： Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.

摘要翻译： 描述了基底输送系统，装置和方法。 这些系统适于通过将动臂连杆机构旋转到与目的地相邻的位置而有效地放置或拾取目的地的基板，然后独立地致动上臂连杆壳体和一个或多个腕部构件以将一个或多个基板放置在 目的地，其中手腕构件相对于前臂连杆壳体独立地致动，并且前臂连杆构件的运动与上臂连杆壳体的运动相关联。 提供了许多其他方面。

公开(公告)号：US20120325328A1

公开(公告)日：2012-12-27

申请号：US13605927

申请日：2012-09-06

申请人： Vinay K. Shah ,  Eric Englhardt ,  Jeffrey C. Hudgens ,  Martin Elliott

发明人： Vinay K. Shah ,  Eric Englhardt ,  Jeffrey C. Hudgens ,  Martin Elliott

IPC分类号： F17D3/00

CPC分类号： H01L21/67393 ,  H01L21/67017 ,  H01L21/67353 ,  Y10S414/135 ,  Y10S414/137 ,  Y10T137/0318 ,  Y10T137/0396

摘要： In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种衬底载体，其包括适于可密封的壳体并容纳至少一个衬底。 衬底载体包括通向壳体的第一端口，并且适于在衬底载体关闭的同时允许气体流入外壳。 提供了许多其他方面。

公开(公告)号：US08016542B2

公开(公告)日：2011-09-13

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B25J18/00

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。