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公开(公告)号:US20180269229A1
公开(公告)日:2018-09-20
申请号:US15761426
申请日:2016-09-21
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H01L27/118
Abstract: A multilevel semiconductor device, the device including: a first level including a first array of first programmable cells and a first control line; a second level including a second array of second programmable cells and a second control line; and a third level including a third array of third programmable cells and a third control line, where the second level overlays the first level, where the third level overlays the second level, where the first programmable cells are self-aligned to the second programmable cells, and where a programmable logic cell includes a plurality of the first programmable cells and a plurality of the second programmable cells.
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公开(公告)号:US20180261600A1
公开(公告)日:2018-09-13
申请号:US15911071
申请日:2018-03-02
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H01L27/108 , H01L27/11573 , H01L27/11578 , G11C16/10 , G11C16/04
CPC classification number: H01L27/10802 , G11C16/0416 , G11C16/0458 , G11C16/0483 , G11C16/10 , H01L27/10897 , H01L27/11565 , H01L27/11568 , H01L27/11573 , H01L27/11578 , H01L29/7831 , H01L29/792 , H01L29/7923
Abstract: A semiconductor device, including: a plurality of non-volatile memory cells including a first memory cell and a second memory cell, where the plurality of non-volatile memory cells includes source diffusion lines and drain diffusion lines, at least one of the source diffusion lines and drain diffusion lines are shared by the first memory cell and the second memory cell, where the first memory cell includes a thin tunneling oxide of less than 1 nm thickness, and where the second memory cell includes a thick tunneling oxide of greater than 2 nm thickness.
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公开(公告)号:US20250098182A1
公开(公告)日:2025-03-20
申请号:US18963630
申请日:2024-11-28
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H10B80/00 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor device including: a first level including at least four independently controlled first memory arrays, where the first level includes first transistors; a second level disposed on top of the first level, where the second level includes second memory arrays; and a third level disposed on top of the second level, where the third level includes third transistors, at least one metal layer, and third memory arrays; a fourth level disposed on top of the third level, where the fourth level includes fourth transistors, another at least one metal layer, and is bonded to the third level, where the bonded includes metal-to-metal bonding regions, where the first level includes first filled holes, where the second level includes second filled holes; and a via connection through the second level and the third level, and where the fourth level includes at least one SRAM memory array.
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公开(公告)号:US12225727B2
公开(公告)日:2025-02-11
申请号:US18738967
申请日:2024-06-10
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
IPC: H10B43/27 , H01L23/00 , H01L25/065 , H01L25/18 , H10B80/00
Abstract: A 3D memory device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel, where the memory cell includes at least one charge trap structure, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the control level includes a plurality of latch sense amplifiers, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
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公开(公告)号:US12219769B2
公开(公告)日:2025-02-04
申请号:US18738721
申请日:2024-06-10
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B43/27 , H01L23/528 , H01L27/02 , H01L29/167 , H01L29/47 , H01L29/78 , H01L29/792 , H10B41/10 , H10B41/20 , H10B43/10 , H10B43/20 , H10B53/20
Abstract: A 3D semiconductor device including: a first level including a single crystal layer and a memory control circuit including first transistors and at least one cache memory unit; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors disposed atop the third metal layer with at least one including a metal gate; third transistors disposed atop the second transistors; a fourth metal layer atop the third transistors; a memory array including word-lines and at least four memory mini arrays, each including at least four rows by four columns of memory cells, each of the memory cells includes at least one of the second transistors or at least one of the third transistors; a connection path from the fourth metal to the third metal including a via disposed through the memory array.
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公开(公告)号:US20240297169A1
公开(公告)日:2024-09-05
申请号:US18662468
申请日:2024-05-13
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H01L27/06
CPC classification number: H01L27/0688
Abstract: A 3D device including: a first level including first transistors and a first interconnect; a second level including second transistors and overlaying the first level; at least four electronic circuit units (ECUs); a redundancy circuit, where each of the at least four ECUs includes a first circuit, which includes a portion of the first transistors, where each of the at least four ECUs includes a second circuit, the second circuit including some second transistors, where each of the at least four ECUs includes a vertical connectivity structure which includes pillars, where the pillars provide electrical connections between the first circuit and the second circuit, where each of the at least four ECUs includes at least one memory control circuit and at least one memory array, where the second level is bonded to the first level, and the bonded includes oxide to oxide and metal to metal bonding regions.
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公开(公告)号:US12041792B1
公开(公告)日:2024-07-16
申请号:US18605401
申请日:2024-03-14
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
IPC: H10B80/00 , G11C16/28 , H01L23/00 , H01L25/18 , H10B41/10 , H10B41/27 , H10B43/10 , H10B43/27 , H10B51/20 , G11C16/14
CPC classification number: H10B80/00 , G11C16/28 , H01L24/08 , H01L25/18 , H10B41/10 , H10B41/27 , H10B43/10 , H10B43/27 , H10B51/20 , G11C16/14 , H01L2224/08145
Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel, where the memory cell includes at least one charge trap structure, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the control level includes a plurality of temperature sensors, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
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公开(公告)号:US20240224545A1
公开(公告)日:2024-07-04
申请号:US18605401
申请日:2024-03-14
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Eli Lusky
IPC: H10B80/00 , G11C16/14 , G11C16/28 , H01L23/00 , H01L25/18 , H10B41/10 , H10B41/27 , H10B43/10 , H10B43/27 , H10B51/20
CPC classification number: H10B80/00 , G11C16/28 , H01L24/08 , H01L25/18 , H10B41/10 , H10B41/27 , H10B43/10 , H10B43/27 , H10B51/20 , G11C16/14 , H01L2224/08145
Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel, where the memory cell includes at least one charge trap structure, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the control level includes a plurality of temperature sensors, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
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公开(公告)号:US20240179915A1
公开(公告)日:2024-05-30
申请号:US18515255
申请日:2023-11-21
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B43/27 , H01L23/528 , H01L27/02 , H01L29/167 , H01L29/47 , H01L29/78 , H01L29/792 , H10B41/10 , H10B41/20 , H10B43/10 , H10B43/20 , H10B53/20
CPC classification number: H10B43/27 , H01L23/5283 , H01L27/0207 , H01L29/167 , H01L29/47 , H01L29/7827 , H01L29/792 , H10B43/10 , H10B43/20 , H10B41/10 , H10B41/20 , H10B53/20
Abstract: A 3D semiconductor device including: a first level including a single crystal layer, a memory control circuit which includes a plurality of first transistors; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors which include a metal gate are disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; and a memory array including word-lines, the memory array includes at least four memory mini arrays, each including at least four rows by at least four columns of memory cells, where each of the memory cells includes at least one of the second transistors or at least one of the third transistors, the memory control circuit includes at least one digital to analog converter circuit.
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公开(公告)号:US11978731B2
公开(公告)日:2024-05-07
申请号:US16797231
申请日:2020-02-21
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H01L25/00 , H01L25/065 , H10B20/00 , H10B20/20 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B63/00 , H10N70/00
CPC classification number: H01L25/50 , H01L25/0657 , H10B20/20 , H10B20/65 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B63/84 , H10N70/011
Abstract: A method to process a 3D device, the method including: providing a first substrate including a first level including a first single crystal silicon layer and a plurality of first transistors; providing a second substrate including a second level including a second single crystal silicon layer; performing an epitaxial growth of a SiGe layer on top of the second single crystal silicon layer; performing an epitaxial growth of a third single crystal silicon layer on top of the SiGe layer; forming a plurality of third transistors including the third single crystal silicon layer; forming a plurality of metal layers interconnecting the plurality of third transistors; and then performing a hybrid bonding of the second level onto the first level.
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