公开(公告)号：US6141812A

公开(公告)日：2000-11-07

申请号：US189985

申请日：1998-11-12

申请人： Naoki Matsuda ,  Kenya Ito

发明人： Naoki Matsuda ,  Kenya Ito

IPC分类号： B24B55/12 ,  B08B3/04 ,  H01L21/00

CPC分类号： H01L21/67051 ,  B08B1/007 ,  B08B3/04 ,  H01L21/67046

摘要： A rinsing apparatus comprising a rinsing sink for rinsing an article brought thereinto with a rinsing liquid which is continuously supplied thereinto, and a carrier for carrying an article to be rinsed. The rinsing sink is provided with a drain hole in the bottom wall of the sink. The carrier is adapted to move between a rinsing position where the article is positioned close to an inlet of the drain hole, thereby restricting a flow path from the sink to the drain hole so that the rinsing liquid continuously supplied into the sink fills and then overflows from the sink while a flow of the rinsing liquid through the restricted flow path is maintained, and a retracted position where the article is positioned out of the sink to allow the rinsing liquid to flow through the flow path into the drain hole without the restriction by the article.

摘要翻译： 一种漂洗装置，包括用于冲洗其中连续供应的冲洗液体的物品的冲洗槽和用于承载要冲洗的物品的载体。 冲洗槽在水槽底壁设有排水孔。 载体适于在物品靠近排水孔的入口定位的冲洗位置之间移动，从而限制从水槽到排水孔的流动路径，使得连续供应到水槽中的冲洗液体填满然后溢出 从冲洗液体流过限制流路的同时保持冲洗液体的流动以及物品位于水槽外的缩回位置，以使冲洗液体能够通过流路流入排水孔，而不受 文章。

公开(公告)号：US6116994A

公开(公告)日：2000-09-12

申请号：US58163

申请日：1998-04-10

申请人： Kenya Ito ,  Hideo Aizawa

发明人： Kenya Ito ,  Hideo Aizawa

IPC分类号： B24B37/34 ,  B24B47/20 ,  B24B5/00

CPC分类号： B24B37/345 ,  B24B47/20

摘要： A compact polishing apparatus has been developed which can be installed in a relatively small space, and is highly rigid without increasing the weight of the apparatus. The polishing apparatus comprises a polishing table, a top ring head for rotatably holding a substrate, a substrate transfer device for transferring the substrate to and from a substrate storage section, a substrate delivery device for delivery of the substrate between the top ring head and the substrate transfer device at a delivery position outside of the polishing table. A guide rail device is laid between the polishing table and the substrate delivery device, and a carriage device movable along the guide rail device is provided for carrying the top ring device thereon.

摘要翻译： 已经开发了一种紧凑的抛光装置，其可以安装在相对较小的空间中，并且高度刚性，而不增加装置的重量。 抛光装置包括抛光台，用于可旋转地保持基板的顶环头，用于将基板转移到基板存储部分的基板转移装置，用于将基板输送到顶环头部和 在抛光台外的输送位置处的基板转印装置。 导轨装置被放置在抛光台和基板输送装置之间，并且可沿着导轨装置移动的支架装置用于在其上承载顶环装置。

公开(公告)号：US6083599A

公开(公告)日：2000-07-04

申请号：US922763

申请日：1997-09-03

申请人： Yoshiyuki Hirayama ,  Masaaki Futamoto ,  Yukio Honda ,  Kazusuke Yamanaka ,  Kenya Ito

发明人： Yoshiyuki Hirayama ,  Masaaki Futamoto ,  Yukio Honda ,  Kazusuke Yamanaka ,  Kenya Ito

IPC分类号： G11B5/64 ,  G11B5/66

CPC分类号： G11B5/656 ,  G11B5/64 ,  G11B5/66 ,  Y10S428/90 ,  Y10T428/265

摘要： A perpendicular magnetic recording medium is provided by using a ferromagnetic polycrystalline thin film having main components of cobalt and chromium in which the coercivity is 1500 oersted or more and the fluctuation field of magnetic viscosity is 30 oersted or more; the film thickness is controlled within a range from 30 nm to 100 nm. A perpendicular magnetic recording medium with low noise and high output which is suited for high density recording can be obtained and a large capacity magnetic recording and reproducing apparatus can be provided by using this medium.

摘要翻译： 通过使用其中矫顽力为1500奥斯特或更高矫顽磁力的主要成分为钴和铬的铁磁性多晶薄膜，并且磁粘度的波动场为30奥斯特或更高，提供垂直磁记录介质; 膜厚控制在30nm至100nm的范围内。 可以获得适合于高密度记录的具有低噪声和高输出的垂直磁记录介质，并且可以通过使用该介质来提供大容量磁记录和再现装置。

公开(公告)号：US5923485A

公开(公告)日：1999-07-13

申请号：US811570

申请日：1997-03-05

申请人： Kenya Ito

发明人： Kenya Ito

IPC分类号： G11B5/027 ,  G06F12/08 ,  G11B5/012 ,  G11B5/86 ,  G11B19/04 ,  G11B19/06 ,  G11B19/12 ,  G11B20/00 ,  G11B20/18 ,  G11B27/36 ,  G11B33/14

CPC分类号： G06F12/0866 ,  G11B19/04 ,  G11B19/06 ,  G11B19/12 ,  G11B20/00 ,  G11B27/36 ,  G11B5/012 ,  G06F2212/312 ,  G11B20/18 ,  G11B33/14

摘要： A time counting device, a cache memory and a copy control circuit are added to a conventional disk drive so that recorded information is copied periodically and automatically. Alternatively, a cache memory, a copy control circuit, a reference control circuit, a first time counting device and a second time counting device are added to the conventional disk drive so that information which remains recorded for a predetermined period of time after its last recording date is automatically copied. According to another embodiment, a reference signal is recorded in advance and a reproduced output is periodically measured. If the reproduced output is lower than a reference value, recorded information is automatically copied. According to yet another embodiment, the temperature in the disk drive is measured by a thermometer 18, and if the temperature is higher than a reference value, information is automatically copied at shorter intervals than when the temperature is less than the reference value. Other embodiments are also disclosed with the aim of ensuring that information recorded on a magnetic media can always be reproduced reliably, even in the case of high density recording.

公开(公告)号：US07964692B2

公开(公告)日：2011-06-21

申请号：US12318733

申请日：2009-01-07

申请人： Mikio Yamahiro ,  Hisao Oikawa ,  Kenya Ito ,  Yasuhiro Yamamoto ,  Masami Tanaka ,  Nobumasa Ootake ,  Kenichi Watanabe ,  Kohji Ohno ,  Yoshinobu Tsujii ,  Takeshi Fukuda

发明人： Mikio Yamahiro ,  Hisao Oikawa ,  Kenya Ito ,  Yasuhiro Yamamoto ,  Masami Tanaka ,  Nobumasa Ootake ,  Kenichi Watanabe ,  Kohji Ohno ,  Yoshinobu Tsujii ,  Takeshi Fukuda

IPC分类号： C08G77/04

CPC分类号： C08G77/04 ,  C07F7/21 ,  C08F10/00 ,  C08F30/08 ,  C08F2500/03

摘要： A polymer represented by Formula (7): wherein all variables are defined in the specification, including P1 which is a polymer chain obtained by polymerizing an addition-polymerizable monomer, which makes it possible to control the structure of the polymer as a molecular aggregate.

摘要翻译： 由式（7）表示的聚合物：其中所有变量在本说明书中定义，包括P1是通过聚合可加聚单体获得的聚合物链，其可以将聚合物的结构控制为分子聚集体。

公开(公告)号：US07868112B2

公开(公告)日：2011-01-11

申请号：US12519347

申请日：2007-12-17

申请人： Hisao Oikawa ,  Koji Ohguma ,  Kenya Ito ,  Minoru Nakayama ,  Shin Koga ,  Mikio Yamahiro ,  Hiroyuki Sato

发明人： Hisao Oikawa ,  Koji Ohguma ,  Kenya Ito ,  Minoru Nakayama ,  Shin Koga ,  Mikio Yamahiro ,  Hiroyuki Sato

IPC分类号： C08F30/08

CPC分类号： C08F290/06 ,  C08F283/12 ,  C08F290/068 ,  C08F290/14 ,  C08F290/148 ,  C08G77/04 ,  C08G77/24 ,  C08G77/385

摘要： A polymer containing: a constitutional unit A that is derived from fluorosilsesquioxane having one addition polymerizable functional group in a molecule; a constitutional unit B that is derived from organopolysiloxane having an addition polymerizable functional group; and a constitutional unit C that is derived from an addition polymerizable monomer and has a group having a polymerizable unsaturated bond on a side chain, and optionally containing a constitutional unit D that is derived from an addition polymerizable monomer other than the fluorosilsesquioxane having one addition polymerizable functional group in a molecule, the organopolysiloxane having an addition polymerizable functional group and the addition polymerizable monomer having a functional group capable of introducing a group having a polymerizable unsaturated bond.

摘要翻译： 含有：分子内具有一个加成聚合官能团的氟代倍半硅氧烷的结构单元A的聚合物; 衍生自具有可加聚官能团的有机聚硅氧烷的结构单元B; 和由可加成聚合单体衍生的具有在侧链上具有聚合性不饱和键的基团的结构单元C，并且任选地含有来自除了具有一个可加聚可聚合的氟代倍半硅氧烷之外的可加聚单体的结构单元D 分子中的官能团，具有加聚性官能团的有机聚硅氧烷和具有能够引入具有聚合性不饱和键的基团的官能团的加成聚合性单体。

公开(公告)号：US07863396B2

公开(公告)日：2011-01-04

申请号：US10548365

申请日：2004-03-05

申请人： Mikio Yamahiro ,  Hisao Oikawa ,  Kenya Ito ,  Yasuhiro Yamamoto ,  Masami Tanaka ,  Nobumasa Ootake ,  Kenichi Watanabe ,  Kohji Ohno ,  Yoshinobu Tsujii ,  Takeshi Fukuda

发明人： Mikio Yamahiro ,  Hisao Oikawa ,  Kenya Ito ,  Yasuhiro Yamamoto ,  Masami Tanaka ,  Nobumasa Ootake ,  Kenichi Watanabe ,  Kohji Ohno ,  Yoshinobu Tsujii ,  Takeshi Fukuda

IPC分类号： C08F130/08

CPC分类号： C08G77/04 ,  C07F7/21 ,  C08F10/00 ,  C08F30/08 ,  C08F2500/03

摘要： The present invention provides a silicon compound represented by Formula (1) and a polymer obtained by using the same, and this makes it possible not only to obtain an organic-inorganic composite material having a distinct structure but also to control the structure of the above polymer as a molecular aggregate. wherein R1 is a group independently selected from hydrogen, alkyl having a carbon atom number of 1 to 40, substituted or non-substituted aryl and substituted or non-substituted arylalkyl; in this alkyl having a carbon atom number of 1 to 40, optional hydrogens may be substituted with fluorine, and optional —CH2— may be substituted with —O—, —CH═CH—, cycloalkylene or cycloalkenylene; in alkylene in this arylalkyl, optional hydrogens may be substituted with fluorine, and optional —CH2— may be substituted with —O— or —CH═CH—; and A1 is a group having an α-haloester group.

摘要翻译： 本发明提供由式（1）表示的硅化合物和使用它的聚合物，不仅可以获得具有不同结构的有机 - 无机复合材料，而且可以控制上述结构 聚合物作为分子聚集体。 其中R1是独立地选自氢，碳原子数为1至40的烷基，取代或未取代的芳基和取代或未取代的芳基烷基的基团; 在该碳原子数为1至40的烷基中，任选的氢可以被氟取代，并且任选的-CH 2 - 可以被-O - ， - CH = CH-，亚环烷基或环亚烯基取代; 在该芳烷基中的亚烷基中，任选的氢可以被氟取代，并且任选的-CH 2 - 可以被-O-或-CH = CH-取代; A1为具有α-卤代基团的基团。

公开(公告)号：US07767472B2

公开(公告)日：2010-08-03

申请号：US11882398

申请日：2007-08-01

申请人： Atsushi Shigeta ,  Gen Toyota ,  Hiroyuki Yano ,  Kunio Oishi ,  Kenya Ito ,  Masayuki Nakanishi ,  Kenji Yamaguchi

发明人： Atsushi Shigeta ,  Gen Toyota ,  Hiroyuki Yano ,  Kunio Oishi ,  Kenya Ito ,  Masayuki Nakanishi ,  Kenji Yamaguchi

IPC分类号： H01L21/00

CPC分类号： B24B37/013 ,  B24B9/065

摘要： A substrate processing method is used to polish a substrate. The substrate processing method includes rotating a substrate 13 by a motor 12, polishing a first surface of a peripheral portion of the substrate 13 by pressing a polishing surface of a polishing mechanism 20 against the first surface, determining a polishing end point of the first surface by monitoring a polished state of the first surface, stopping the polishing according to the determining the polishing end point, determining a polishing time spent for the polishing, determining a polishing time for a second surface of the peripheral portion based on the polishing time of the first surface, and polishing the second surface for the determined polishing time.

摘要翻译： 基板处理方法用于抛光基板。 基板处理方法包括通过马达12旋转基板13，通过将研磨机构20的研磨面压在第一面上来研磨基板13的周边部的第一面，确定第一面的研磨终点 通过监测第一表面的抛光状态，根据确定抛光终点停止抛光，确定抛光所用的抛光时间，基于抛光时间确定周边部分的第二表面的抛光时间 第一表面，并抛光第二表面以确定抛光时间。

公开(公告)号：US20100136886A1

公开(公告)日：2010-06-03

申请号：US12699318

申请日：2010-02-03

申请人： Akihisa Hongo ,  Kenya Ito ,  Kenji Yamaguchi ,  Masayuki Nakanishi

发明人： Akihisa Hongo ,  Kenya Ito ,  Kenji Yamaguchi ,  Masayuki Nakanishi

IPC分类号： B24B49/04 ,  B24B49/12 ,  B24B21/18 ,  B24B9/02

CPC分类号： B24B37/02 ,  B24B9/065 ,  B24B21/002

摘要： The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.

摘要翻译： 本发明涉及一种用于去除在基板的周边部分产生的表面粗糙度或用于去除形成在基板的周边部分上的膜的抛光装置。 抛光装置包括：用于在其中形成抛光室的壳体，用于保持和旋转基板的旋转台;抛光带供给机构，用于将研磨带供给到抛光室中并且吸收已经被供给到抛光的研磨带 用于将抛光带压靠在基板的斜面部分上的抛光头，用于将液体供应到基板的前表面和后表面的液体供应源，以及用于使抛光室的内部压力的调节机构 被设定为低于抛光室的外部压力。

公开(公告)号：US20100093951A1

公开(公告)日：2010-04-15

申请号：US12519354

申请日：2007-12-17

申请人： Hisao Oikawa ,  Koji Ohguma ,  Kenya Ito ,  Mikio Yamahiro

发明人： Hisao Oikawa ,  Koji Ohguma ,  Kenya Ito ,  Mikio Yamahiro

IPC分类号： C08L83/06 ,  C08G77/04 ,  C08G77/14

CPC分类号： C08F283/12 ,  C08F290/00 ,  C08F290/06 ,  C08F290/068 ,  C08F290/14 ,  C08F290/148 ,  C08G77/385 ,  C08G77/442 ,  C08L55/00 ,  C09D155/00 ,  C08L2666/02

摘要： A polymer containing: a constitutional unit A that is derived from fluorosilsesquioxane having one addition polymerizable functional group in a molecule; a constitutional unit B that is derived from organopolysiloxane having an addition polymerizable functional group; and a constitutional unit C that is derived from an addition polymerizable functional monomer containing a group having active hydrogen, and optionally containing a constitutional unit D that is derived from an addition polymerizable monomer other than the fluorosilsesquioxane having one addition polymerizable functional group in a molecule, the organopolysiloxane having an addition polymerizable functional group and the addition polymerizable monomer containing a group having active hydrogen.

摘要翻译： 含有：分子内具有一个加成聚合官能团的氟代倍半硅氧烷的结构单元A的聚合物; 衍生自具有可加聚官能团的有机聚硅氧烷的结构单元B; 和由含有具有活性氢的基团的加成聚合性官能单体衍生的结构单元C，并且任选地含有来自除了在分子中具有一个加成聚合官能团的氟代倍半硅氧烷以外的加聚性单体的结构单元D， 具有加聚性官能团的有机聚硅氧烷和含有具有活性氢的基团的加成聚合性单体。