Automated process control using parameters determined with approximation and fine diffraction models
    81.
    发明授权
    Automated process control using parameters determined with approximation and fine diffraction models 失效
    使用近似和精细衍射模型确定的参数进行自动过程控制

    公开(公告)号:US07627392B2

    公开(公告)日:2009-12-01

    申请号:US11848214

    申请日:2007-08-30

    IPC分类号: G06F19/00

    摘要: Provided is a method of controlling a fabrication cluster using a machine learning system, the machine learning system trained developed using an optical metrology model. A simulated approximation diffraction signal is generated based on an approximation diffraction model of the structure. A set of difference diffraction signal is obtained by subtracting the simulated approximation diffraction signal from each of simulated fine diffraction signals and paired with the corresponding profile parameters. A first machine learning system is trained using the pairs of difference diffraction signal and corresponding profile parameters. A library of simulated fine diffraction signals and profile parameters is generated using the trained first machine learning system and using ranges and corresponding resolutions of the profile parameters. A measured diffraction signal is input into the trained second machine learning system to determine at least one profile parameter. The at least one profile parameter is used to adjust at least one process parameter or equipment setting of the fabrication cluster.

    摘要翻译: 提供了一种使用机器学习系统来控制制造集群的方法,使用光学计量学模型训练的机器学习系统。 基于结构的近似衍射模型生成模拟近似衍射信号。 通过从每个模拟的细衍射信号中减去模拟近似衍射信号并与相应的轮廓参数配对来获得差分衍射信号。 使用差分衍射信号和相应的轮廓参数对来训练第一机器学习系统。 使用训练有素的第一机器学习系统并使用轮廓参数的范围和相应的分辨率来生成模拟的细衍射信号和轮廓参数的库。 测量的衍射信号被输入到训练有素的第二机器学习系统中以确定至少一个轮廓参数。 至少一个轮廓参数用于调整至少一个制造集群的过程参数或设备设置。

    METHOD OF CORRECTING BASELINE SKEW BY A NOVEL MOTORIZED SOURCE COIL ASSEMBLY
    84.
    发明申请
    METHOD OF CORRECTING BASELINE SKEW BY A NOVEL MOTORIZED SOURCE COIL ASSEMBLY 有权
    通过新型电动机线圈组件校正基线的方法

    公开(公告)号:US20090159425A1

    公开(公告)日:2009-06-25

    申请号:US11960246

    申请日:2007-12-19

    IPC分类号: H05H1/24

    摘要: The present invention generally provides apparatus and method for adjusting plasma density distribution in an inductively coupled plasma chamber. One embodiment of the present invention provides an apparatus configured for processing a substrate. The apparatus comprises a chamber body defining a process volume configured to process the substrate therein, and a coil assembly coupled to the chamber body outside the process volume, wherein the coil assembly comprises a coil mounting plate, a first coil antenna mounted on the coil mounting plate, and a coil adjusting mechanism configured to adjust the alignment of the first coil antenna relative to the process volume.

    摘要翻译: 本发明通常提供了用于调整电感耦合等离子体室中的等离子体密度分布的装置和方法。 本发明的一个实施例提供了一种被配置用于处理衬底的装置。 该装置包括限定被配置成在其中处理衬底的处理体积的室主体和耦合到处理体积外的室主体的线圈组件,其中线圈组件包括线圈安装板,安装在线圈安装件上的第一线圈天线 板和线圈调整机构,被配置为调节第一线圈天线相对于处理体积的对准。

    METHOD AND APPARATUS FOR SEGMENTING AN OBJECT REGION OF INTEREST FROM AN IMAGE
    86.
    发明申请
    METHOD AND APPARATUS FOR SEGMENTING AN OBJECT REGION OF INTEREST FROM AN IMAGE 有权
    用于从图像中分配对象区域的方法和装置

    公开(公告)号:US20090154808A1

    公开(公告)日:2009-06-18

    申请号:US12331160

    申请日:2008-12-09

    IPC分类号: G06K9/34

    摘要: A method for segmenting an object region of interest from an image includes detecting each corner in a captured image; acquiring edges of the object from the captured image based on the detected corners; clustering the detected corners based on corners on the acquired edges; and segmenting the image region in the captured image formed by the clustered corners as a region of interest that likely includes the object. With this method and apparatus for the method, an object region of interest may be segmented from an image without utilizing features such as an object shadow and edges.

    摘要翻译: 从图像中分割目标区域的方法包括:检测拍摄图像中的每个角; 基于检测到的拐角从捕获的图像获取对象的边缘; 基于所获取的边缘上的角聚类检测到的角; 并且将由聚集角形成的拍摄图像中的图像区域分割为可能包括对象的感兴趣区域。 利用该方法和该方法的装置,可以从图像中分割关注的对象区域,而不利用诸如对象阴影和边缘的特征。

    Split read only memory architecture for storage option read only memories
    88.
    发明授权
    Split read only memory architecture for storage option read only memories 有权
    拆分只读存储器架构用于存储选项只读存储器

    公开(公告)号:US07519804B2

    公开(公告)日:2009-04-14

    申请号:US11351092

    申请日:2006-02-09

    申请人: Wei Liu

    发明人: Wei Liu

    IPC分类号: G06F9/24

    CPC分类号: G06F9/4403

    摘要: A method for reducing execution time for a power on self test (POST) of an information handling system which includes providing the information handling system with a split option ROM wherein the split option ROM including an initiator split option ROM and a completer split option ROM, executing the initiator split option ROM upon execution of the POST wherein the initiator split option ROM starts initialization of an option corresponding to the initiator split option ROM, executing the power on self test to initialize a remainder of the information handling system, and executing the completer split option ROM after initializing the remainder of the information handling system wherein the completer option ROM completes initialization of the option corresponding to the completer split option ROM. is disclosed.

    摘要翻译: 一种用于减少信息处理系统的上电自检(POST)的执行时间的方法,其包括向所述信息处理系统提供分割选项ROM,其中所述分割选项ROM包括启动器拆分选项ROM和完成分割选项ROM, 在执行POST时执行启动器拆分选项ROM,其中启动器拆分选项ROM开始对与启动器拆分选项ROM相对应的选项的初始化,执行上电自检以初始化信息处理系统的其余部分,并执行完成者 初始化信息处理系统的其余部分之后的分离选项ROM,其中完成选项ROM完成与完成分割选项ROM相对应的选项的初始化。 被披露。

    Method and Apparatus for Customizing a Model Entity Presentation Based on a Presentation Policy
    89.
    发明申请
    Method and Apparatus for Customizing a Model Entity Presentation Based on a Presentation Policy 失效
    基于演示策略定制模型实体呈现的方法和装置

    公开(公告)号:US20090031229A1

    公开(公告)日:2009-01-29

    申请号:US12135605

    申请日:2008-06-09

    IPC分类号: G06F3/048

    CPC分类号: G06F8/10

    摘要: A method and device are provided for customizing a model entity presentation based on a presentation policy. The method comprises: applying the presentation policy to a first model to generate a presentation model; creating a model entity thereof according to the first model; reading model content from the first model and reading presentation data from the presentation model; and applying the read model content and presentation data to the model entity. The presentation model and core model of data are separated, and their association may be configured through a presentation policy in real-time during operation. The real-time and dynamic configuration of the method and device provide enhanced flexibility for users.

    摘要翻译: 提供了一种基于呈现策略来定制模型实体呈现的方法和装置。 该方法包括:将呈现策略应用于第一模型以生成呈现模型; 根据第一模型创建其模型实体; 从第一个模型中读取模型内容,并从演示模型中读取演示数据; 并将所读取的模型内容和呈现数据应用于模型实体。 数据的呈现模型和核心模型是分开的,它们的关联可以在运行期间通过实时的呈现策略进行配置。 方法和设备的实时和动态配置为用户提供了增强的灵活性。