公开(公告)号：US20050073675A1

公开(公告)日：2005-04-07

申请号：US10677587

申请日：2003-10-02

Applicant: William Lo

Inventor： William Lo

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/956 ,  G01N2201/0853 ,  G01N2201/10 ,  G01N2201/101 ,  G01N2201/103

Abstract: A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.

Abstract translation: 用于光学探测应用的扫描光学系统为具有高数值孔径（NA）的物镜（例如固体浸没透镜（SIL））提供了大视场（FOV）。 这样可实现用于激光探测，TIVA / LIVA，OBIRCH和光子发射时序分析等半导体器件的高分辨率成像。 公开了一种混合扫描光学配置，以在大面积上提供在小区域上的高分辨率成像以及低分辨率成像。

公开(公告)号：US20040218040A1

公开(公告)日：2004-11-04

申请号：US10764098

申请日：2004-01-23

Inventor： Yoshihiro Akiyama

IPC: H04N007/18 ,  H04N009/47

CPC classification number: G01N21/95684 ,  G01J2003/2866 ,  G01N21/8806 ,  G01N2021/8812 ,  G01N2021/8816 ,  G01N2021/8825 ,  G01N2021/8908 ,  G01N2021/95646 ,  G01N2201/101 ,  H04N7/18

Abstract: The present invention is an appearance inspection apparatus and method utilizing multiple light sources in a lighting unit 30 to alternately irradiate, line by line, side light from a side light source and slit light from a slit light source onto board 1 to be inspected. A correction value memory unit stores digital correction values required for correcting shadings for the side light source and the slit light source and an analysis unit utilizes these digital correction values to correct shadings on the image data. A highly accurate image is thus obtained.

Abstract translation: 本发明是一种在照明单元30中利用多个光源将来自侧光源的侧光和来自狭缝光源的狭缝光交替地照射到待检查的基板1上的外观检查装置和方法。 校正值存储单元存储用于校正侧光源和狭缝光源的阴影所需的数字校正值，分析单元利用这些数字校正值来校正图像数据上的阴影。 因此获得高精度的图像。

公开(公告)号：US06399952B1

公开(公告)日：2002-06-04

申请号：US09569963

申请日：2000-05-12

Applicant: Kevin Maher ,  Timothy F. Smith ,  Torleif Ove Bjornson

Inventor： Kevin Maher ,  Timothy F. Smith ,  Torleif Ove Bjornson

IPC: G01N2164

CPC classification number: G01N21/6452 ,  B01L3/5027 ,  B01L2200/14 ,  G01N21/6428 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2021/6478 ,  G01N2201/101

Abstract: An optical detection and orientation device is provided comprising housing having an excitation light source, an optical element for reflecting the excitation light to an aspherical lens and transmitting light emitted by a fluorophore excited by said excitation light, a focussing lens for focusing the emitted light onto the entry of an optical fiber, which serves as a confocal aperture, and means for accurately moving said housing over a small area in relation to a channel in a microfluidic device. The optical detection and orientation device finds use in identifying the center of the channel and detecting fluorophores in the channel during operations involving fluorescent signals.

Abstract translation: 提供了一种光学检测和取向装置，包括具有激发光源的壳体，用于将激发光反射到非球面透镜并透射由所述激发光激发的荧光团发射的光的光学元件，用于将发射的光聚焦到聚焦透镜 用作共焦孔的光纤的进入以及用于相对于微流体装置中的通道在小的区域上精确地移动所述壳体的装置。 光学检测和取向装置用于识别通道的中心并且在涉及荧光信号的操作期间检测通道中的荧光团。

公开(公告)号：US06024920A

公开(公告)日：2000-02-15

申请号：US291787

申请日：1999-04-14

Applicant: Chris Cunanan

Inventor： Chris Cunanan

IPC: G01N15/06 ,  G01N21/03 ,  G01N21/25 ,  G01N21/27 ,  G01N21/64 ,  G01N21/01 ,  G01N21/59

CPC classification number: G01N21/6452 ,  G01N21/253 ,  G01N2021/6419 ,  G01N2021/6471 ,  G01N21/0332 ,  G01N2201/0618 ,  G01N2201/101 ,  G01N35/028

Abstract: A scanning head assembly is provided, the scanning head suited for use with instruments that characterize the absorption, fluorescence, and/or luminescence properties of one or more samples contained within a sample plate or microplate. The scanning head assembly is coupled to a pair of scanning mechanisms, thereby allowing the head assembly to be raster scanned along both the x- and y-axis. Although the scanning preferably follows a serpentine pattern, other scan patterns can be utilized. Single or multiple measurements can be made per sample well, multiple measurements either being reported individually or averaged together. Although the scanning head assembly can utilize a variety of configurations, in the preferred embodiment the scanning head assembly has a C-shape with the light source and associated optics mounted in the lower arm of the assembly and the detector and associated optics mounted in the upper arm. Preferably the optics associated with the source include one or more optical filters that regulate the wavelength of light radiating the sample.

Abstract translation: 提供扫描头组件，扫描头适用于表征样品板或微板中所含的一种或多种样品的吸收，荧光和/或发光特性的仪器。 扫描头组件耦合到一对扫描机构，从而允许头部组件沿x轴和y轴沿光栅扫描。 虽然扫描优选地遵循蛇形图案，但是可以利用其他扫描图案。 可以对每个样品进行单次或多次测量，多次测量单独报告或一起平均。 尽管扫描头组件可以利用各种配置，但是在优选实施例中，扫描头组件具有C形，其中光源和相关联的光学器件安装在组件的下臂中，并且检测器和相关联的光学器件安装在上部 臂。 优选地，与源相关联的光学器件包括调节辐射样品的光的波长的一个或多个滤光器。

公开(公告)号：US5094535A

公开(公告)日：1992-03-10

申请号：US417961

申请日：1989-10-06

Applicant: John A. Dahlquist ,  Joseph F. Binkowski

Inventor： John A. Dahlquist ,  Joseph F. Binkowski

IPC: F16F15/023 ,  G01B9/02 ,  G01B11/06 ,  G01N21/35 ,  G01N21/86

CPC classification number: F16F15/023 ,  G01B11/0691 ,  G01J3/0202 ,  G01J3/0297 ,  G01J3/45 ,  G01N21/86 ,  G01N2021/3595 ,  G01N2201/101

Abstract: An on-line scanning sensor system includes first and second horizontally extending guide members connected by side members to define a rigid box-like frame, and a support structure for suspending the box-like frame via vibration-absorbing devices such that vibrations are substantially attenuated before reaching the guide members. Further, the system includes a carriage mounted on the first guide member for scanning motion across a traveling web of sheet of material, and interferometer components mounted to the carriage for splitting and recombining infrared light and for directing a collimated beam of the recombined light onto the traveling sheet. Still further, the system includes a detector for receiving light from the interferometer components during scanning.

Abstract translation: 在线扫描传感器系统包括通过侧面构件连接以限定刚性盒状框架的第一和第二水平延伸的引导构件，以及用于通过振动吸收装置悬挂盒状框架使得振动基本上衰减的支撑结构 在到达指导成员之前。 此外，该系统包括安装在第一引导构件上的滑架，用于跨越材料片的移动腹板扫描运动，以及安装到滑架上的干涉仪组件，用于分离和重新组合红外光并将重组光的准直束引导到 旅行单 此外，该系统包括用于在扫描期间从干涉仪部件接收光的检测器。