Thin-film electron emitter device having a multi-layer top electrode for
suppressing degradation of an insulating layer and application
apparatus using the same
    81.
    发明授权
    Thin-film electron emitter device having a multi-layer top electrode for suppressing degradation of an insulating layer and application apparatus using the same 失效
    具有用于抑制绝缘层劣化的多层顶电极的薄膜电子发射体装置及使用其的涂敷装置

    公开(公告)号:US5936257A

    公开(公告)日:1999-08-10

    申请号:US822924

    申请日:1997-03-21

    CPC classification number: B82Y10/00 H01J1/312 H01J2237/31783 H01J2329/00

    Abstract: A thin-film electron emitter device is provided with a multilayer structure including upper and lower electrodes with an insulative or dielectric layer being sandwiched therebetween. The upper or "top" electrode is itself formed as a multilayer structure. For example, in one embodiment, the upper electrode is formed as a three layer lamination of an interface layer formed on the insulative layer, an intermediate or "middle" layer stacked on the interface layer and a surface layer stacked on or above the middle layer. The middle layer is made of a chosen material which is greater in sublimation enthalpy than the surface layer and yet less than the interface layer. When appropriate, the surface layer may be omitted providing two-layer structure rather than the three-layer structure.

    Abstract translation: 薄膜电子发射器件具有包括上下电极的多层结构,绝缘或电介质层夹在其间。 上部或“顶部”电极本身形成为多层结构。 例如,在一个实施例中,上电极形成为形成在绝缘层上的界面层,层叠在界面层上的中间层或“中间”层和层叠在中间层上或上层的表层的三层层叠 。 中间层由选择的材料制成,其在升华焓比表面层更大并且还小于界面层。 适当时,可以省略提供两层结构而不是三层结构的表面层。

    Electron-optical terminal image device based on a cold cathode
    82.
    发明授权
    Electron-optical terminal image device based on a cold cathode 失效
    基于冷阴极的电子 - 光学终端图像器件

    公开(公告)号:US5489817A

    公开(公告)日:1996-02-06

    申请号:US137030

    申请日:1994-03-31

    Abstract: A cold cathode (3) in the form of a solid thin film component is the basis for electron-optical terminal image devices. The thin-film structure is made up of a base electrode (5), e.g., in the form of a bundle of parallel strips, an insulating film (6), a semiconductor film (7) and a covering electrode (8), e.g., also a bundle of parallel strips but running perpendicularly to the base electrode (5) bundle. This set of layers borne on a substrate plate (4), is in an evacuated casing (2) and is opposite a fluorescent screen (12) or a light emitter (15), the metalized coating (11) of which forms the counter-pole for the electron acceleration chamber (9). The main applications of such electron-optical terminal image devices are embodiments as matrix-addressed flat displays, image converters or write/read lines.

    Abstract translation: PCT No.PCT / DE92 / 00313 Sec。 371日期1994年3月31日 102(e)1994年3月31日PCT PCT 1992年4月15日提交PCT公布。 公开号WO92 / 19005 日期:1992年04月15日。以固体薄膜成分形式的冷阴极(3)是电子 - 光学终端图像器件的基础。 薄膜结构由基极(5)构成,例如以平行条状束的形式形成绝缘膜(6),半导体膜(7)和覆盖电极(8),例如 ,也是一束平行条带,但是垂直于基极(5)束行进。 承载在基板(4)上的这组层位于抽真空的外壳(2)中,与荧光屏(12)或发光体(15)相对,金属化涂层(11) 用于电子加速室(9)的极。 这种电子 - 光学终端图像装置的主要应用是作为矩阵寻址平板显示器,图像转换器或写/读线的实施例。

    Thin film ferroelectric flat panel display devices, and methods for
operating and fabricating same
    83.
    发明授权
    Thin film ferroelectric flat panel display devices, and methods for operating and fabricating same 失效
    薄膜铁电平板显示装置及其操作和制造方法

    公开(公告)号:US5453661A

    公开(公告)日:1995-09-26

    申请号:US228116

    申请日:1994-04-15

    Abstract: A flat panel display includes a ferroelectric thin film between first and second spaced apart electrodes. The ferroelectric thin film emits electrons upon application of a predetermined voltage between the first and second spaced apart electrodes. The electrons are emitted in an electron emission path and impinge upon a luminescent layer such as a phosphor layer, which produces luminescence upon impingement upon the emitter electrodes. The ferroelectric thin film is preferably about 2 .mu.m or less in thickness and is preferably a polycrystalline ferroelectric thin film. More preferably, the thin ferroelectric film is a highly oriented, polycrystalline thin ferroelectric film. Most preferably, highly oriented ferroelectric thin film has a preferred (001) crystal orientation and is about 2 .mu.m or less in thickness. A flat panel display may be formed of arrays of such display elements. Top and bottom electrodes or side electrodes may be used. The display may be formed using conventional microelectronic fabrication steps.

    Abstract translation: 平板显示器包括在第一和第二间隔开的电极之间的铁电薄膜。 铁电薄膜在第一和第二间隔开的电极之间施加预定电压时发射电子。 电子在电子发射路径中发射并撞击在诸如荧光体层的发光层上,其在撞击发射极电极时产生发光。 铁电薄膜的厚度优选为2μm以下,优选为多晶铁电薄膜。 更优选地,薄铁电体膜是高取向多晶薄铁电体膜。 最优选地,高取向铁电薄膜具有优选的(001)晶体取向,并且厚度为约2μm或更小。 平板显示器可以由这种显示元件的阵列形成。 可以使用顶部和底部电极或侧面电极。 显示器可以使用常规的微电子制造步骤形成。

    Gas discharge tube with tunnel effect type cathode
    84.
    发明授权
    Gas discharge tube with tunnel effect type cathode 失效
    带隧道效应型阴极的气体放电管

    公开(公告)号:US5266867A

    公开(公告)日:1993-11-30

    申请号:US773489

    申请日:1991-10-09

    Inventor: Hiroshi Sakurai

    CPC classification number: B82Y10/00 H01J1/312 H01J17/066

    Abstract: A gas discharge tube using a tunnel effect type electron emitting device as a cathode is provided. The electron emitting device comprises a conductive metal base and a dielectric film formed preferably of a material containing MgO as a main component on the metal base. The dielectric film faces an anode and is exposed to a gas in the tube. In the cathode of this structure, discharge is effected at a relatively low DC voltage.

    Abstract translation: 提供了使用隧道效应型电子发射器件作为阴极的气体放电管。 电子发射器件包括导电金属基底和优选由在金属基底上含有MgO作为主要成分的材料形成的电介质膜。 电介质膜面向阳极并暴露于管中的气体。 在该结构的阴极中,在相对低的DC电压下进行放电。

    MIM cold-cathode electron emission elements
    86.
    发明授权
    MIM cold-cathode electron emission elements 失效
    MIM冷阴极电子发射元件

    公开(公告)号:US5202605A

    公开(公告)日:1993-04-13

    申请号:US429526

    申请日:1989-10-31

    CPC classification number: B82Y10/00 H01J1/312 H01J9/022

    Abstract: An MIM type of electron emission element having a thin insulating film formed below an electron emission region of a metal layer, with that electron emission region of the metal layer consisting of an array of thick and thin portions, distributed throughout the electron emission region. Improved efficiency and uniformity of of emission are obtained, due to the low resistance of the thick portions, which apply a supply voltage to the thin portions of the metal layer, while the thin portions can be made sufficiently thin to maximize the electron emission.

    Tunnel emitter photocathode
    87.
    发明授权
    Tunnel emitter photocathode 失效
    隧道发射极光电阴极

    公开(公告)号:US4005465A

    公开(公告)日:1977-01-25

    申请号:US582545

    申请日:1975-05-30

    Inventor: Brian S. Miller

    CPC classification number: B82Y10/00 H01J1/312 H01J1/34 H01J2201/3423

    Abstract: A method of producing a tunnel emitter photocathode consisting of heating aemiconductor layer and then depositing a layer of aluminum oxide on one side thereof at a rapid rate and then baking out the wafer in a hydrogen gas atmosphere. After depositing electrical contacts on each side of the wafer, a metallic emitter layer is evaporated over the aluminum oxide layer with the metallic emitter layer treated with a low work function material such as cesium and oxygen to further increase the emission efficiency.

    Abstract translation: 一种制造隧道发射光电阴极的方法,该方法包括加热半导体层,然后以一定速度沉积一侧的氧化铝层,然后在氢气气氛中烘烤晶片。 在晶片的每一侧沉积电触点之后,金属发射极层在氧化铝层上蒸发,金属发射极层用低功函数材料如铯和氧处理,以进一步提高发射效率。

    Electroemissive component
    88.
    发明授权
    Electroemissive component 失效
    电子成分

    公开(公告)号:US3921031A

    公开(公告)日:1975-11-18

    申请号:US43566674

    申请日:1974-01-23

    CPC classification number: H01J1/30 H01J9/022 H01J17/491

    Abstract: An electroemissive component having variable emissivity is made up of a conductive substrate on which at least one continuous thin film of a solid organometallic compound has been formed by electrochemical deposition and of a conductive deposit constituted by at least one thin film and deposited on said organometallic film, the substrate and the conductive deposit being electrically connected respectively to the two poles of a variable-voltage source which controls the emissivity. The component is particularly well suited to the fabrication of electronic or optoelectronic devices such as electron tubes, luminescent cells, display panels, thin television screens, and brightness amplifiers.

    Abstract translation: 具有可变发射率的电子发射部件由导电基板构成,其上通过电化学沉积形成至少一个固体有机金属化合物的连续薄膜,以及由至少一个薄膜构成并沉积在所述有机金属膜上的导电沉积物 ,基板和导电沉积物分别电连接到控制发射率的可变电压源的两极。

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