摘要:
A micro-scale hemispherical resonator gyroscope includes a hemispherical resonator with a plurality of masses positioned around the periphery of the hemispherical resonator. At least some of the masses may be made of a heavy metal, such as tungsten, gold, platinum, or lead, and may be positioned at points of maximum deflection or velocity of the resonator. The hemispherical resonator may have a 2 mm diameter and a ring down time of at least 500 seconds.
摘要:
Hybrid power relay for making and breaking an electrical circuit which includes electromagnetically operated contacts for making and breaking the circuit, a solid state switch connected across the contacts, a control circuit responsive to a control signal for actuating the solid state switch and the contacts such that the solid state switch closes before the contacts to make the circuit and the contacts open before the solid state switch to break the circuit, and a protective circuit for monitoring the temperature of the solid state switch and opening the switch in the event of a rise in temperature produced by abnormal current flow in the switch due to failure of the contacts to make and maintain the circuit.
摘要:
Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
摘要:
Described herein is an integrated pressure sensor assembly. The integrated pressure sensor assembly includes a printed circuit board assembly comprising a plurality of boards; a pressure die mounted on at least a portion of the printed circuit board assembly; and a housing engaged to the printed circuit board assembly. The printed circuit board assembly includes at least one pressure transmission channel and at least one electrical transmission channel.
摘要:
Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A-D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31-34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes. The capacitances of two capacitors on each side of the second axis change in the same direction in response to acceleration along the first axis and in opposite directions in response to acceleration along the second axis. Signals from the capacitors that change capacitance in opposite directions both in response to acceleration along the first axis and in response to acceleration along the second axis are differentially combined to provide first and second difference signals, and the difference signals are additively and differentially combined to provide output signals corresponding to acceleration along the first and second axes.
摘要:
Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element. In the indexing embodiments, radial arms and fixed stops limit movement of the mechanism between two fixed positions, and drive signals and holding potentials are applied alternately to dither the mechanism between the two positions and to hold it alternately in those positions during successive data acquisition periods.
摘要:
A voice coil actuator having a capacitive sensor. A magnetic housing contains at least one magnet, and has a wall that defines a first cavity. A magnetic core is coupled to the magnetic housing and extend from an interior surface of the magnetic housing in a direction of a center axis of the wall of the magnetic housing. A coil assembly has a wall defining a second cavity that at least partly envelops the magnetic core, disposed at least partly inside the first cavity, and adapted to move linearly with respect to the magnetic housing. The coil assembly forms a capacitive sensor with the magnetic core, the capacitive sensor adapted to measure at least one of position, velocity and acceleration of the coil assembly with respect to the magnetic housing.
摘要:
A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.
摘要:
An angular displacement sensor. The input shaft is supported by a housing and fixed to a main gear. A plurality of secondary gears are arranged around and meshed with the primary gear. A plurality of displacement sensors are integrally coupled with the secondary gears. Advantageously, the main shaft is formed with a shear notch. Further, each of the secondary gears are coupled to the displacement sensors so as to break free in case of a jam.
摘要:
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity despite the parasitic capacitance that is created. The capacitive sensor element assembly, comprises a first semiconductive layer, and a first conductive layer, a first dielectric layer into which a cavity has been formed, the dielectric layer lying between the first semiconductive layer and the first conductive layer, wherein an electrical connection is made to the second conductive layer. A preferred method for fabricating a capacitive sensor assembly of the present invention comprises the steps of forming a dielectric layer on top of a conductive handle wafer; creating at least one cavity in the dielectric layer, bonding a thin semiconductive layer to the dielectric layer and connecting an operational amplifier to the input of the capacitive sensor assembly to overcome the parasitic capacitance formed during fabrication.