公开(公告)号：US08907442B2

公开(公告)日：2014-12-09

申请号：US13492382

申请日：2012-06-08

Applicant: Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong ,  Deepak C. Sekar ,  Zeev Wurman

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong ,  Deepak C. Sekar ,  Zeev Wurman

IPC: H01L21/50 ,  H01L21/98 ,  H01L21/822 ,  G03F9/00 ,  H01L21/762 ,  H01L21/84 ,  H01L23/544 ,  H01L27/02 ,  H01L27/06 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/115 ,  H01L27/118 ,  H01L27/12 ,  H01L23/48

CPC classification number: H01L27/0688 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/268 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823871 ,  H01L21/84 ,  H01L23/367 ,  H01L23/481 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L24/73 ,  H01L27/0207 ,  H01L27/088 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/42392 ,  H01L29/458 ,  H01L29/66272 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66848 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/78639 ,  H01L29/78642 ,  H01L29/78645 ,  H01L29/808 ,  H01L29/812 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2224/80001 ,  H01L2924/00012 ,  H01L2924/01015

Abstract: A semiconductor device, including: a first layer including first transistors; an interconnection layer overlying the first transistors, the interconnection layer providing interconnection for the first transistors; a bonding layer overlying the interconnection layer; a second layer overlying the bonding layer; and a carrier substrate for the transferring of the second layer, where the second layer includes at least one through second layer via, where the at least one through second layer via has a diameter of less than 100 nm, where the second layer includes a plurality of second transistors, and where the second layer is transferred from a donor wafer.

Abstract translation: 一种半导体器件，包括：包括第一晶体管的第一层; 覆盖所述第一晶体管的互连层，所述互连层为所述第一晶体管提供互连; 覆盖所述互连层的接合层; 覆盖结合层的第二层; 以及用于转移第二层的载体衬底，其中第二层包括至少一个贯穿第二层通孔，其中至少一个贯穿第二层通孔具有小于100nm的直径，其中第二层包括多个 的第二晶体管，并且其中第二层从施主晶片转移。