CHEMICAL MECHANICAL POLISHING METHOD AND CHEMICAL MECHANICAL POLISHING DEVICE
    1.
    发明申请
    CHEMICAL MECHANICAL POLISHING METHOD AND CHEMICAL MECHANICAL POLISHING DEVICE 失效
    化学机械抛光方法和化学机械抛光装置

    公开(公告)号:US20090170323A1

    公开(公告)日:2009-07-02

    申请号:US12340208

    申请日:2008-12-19

    IPC分类号: H01L21/304

    摘要: A chemical mechanical polishing method including a step of forming a plurality of interlayer insulating films so as to coat a plurality of projecting patterns, at least one of the plurality of projecting patterns being formed on each of a plurality of substrates, whereby the plurality of projection patterns have different area ratios R with respect to the corresponding substrates, and performing a flattening process on the interlayer insulating films before linear approximation; a step of obtaining a linear approximation formula R=aT+b expressing a relationship between the area ratio R and a polishing time T, where R1, R2, R3, . . . , Rx represent the area ratio R of each of the projecting patterns with respect to the corresponding substrates, and T1, T2, T3, . . . , Tx represent the polishing time T required for achieving a target film thickness when performing the flattening process by polishing each of the interlayer insulating films coating the projecting patterns; and a step of calculating, with the use of a formula T=(R−b)/a, the polishing time T for the interlayer insulating films coating the projecting patterns having the area ratio R.

    摘要翻译: 一种化学机械抛光方法,包括形成多个层间绝缘膜以涂覆多个突起图案的步骤,所述多个突起图案中的至少一个形成在多个基板中的每一个上,由此所述多个突起 图案相对于相应的基板具有不同的面积比R,并且在线性近似之前对层间绝缘膜进行平坦化处理; 获得表示面积比R和研磨时间T之间的关系的线性近似公式R = aT + b的步骤,其中R1,R2,R3,...。 。 。 ,Rx表示每个投影图案相对于相应基板的面积比R,以及T1,T2,T3。 。 。 Tx表示通过抛光涂覆突出图案的每个层间绝缘膜进行平坦化处理时达到目标膜厚所需的抛光时间T; 以及使用公式T =(R-b)/ a计算涂覆具有面积比R的投影图案的层间绝缘膜的研磨时间T的步骤。

    IMAGING LENS AND CAMERA APPARATUS AND MOBILE OBJECT

    公开(公告)号:US20210231917A1

    公开(公告)日:2021-07-29

    申请号:US17095798

    申请日:2020-11-12

    申请人: Akinori SUZUKI

    发明人: Akinori SUZUKI

    IPC分类号: G02B13/00 H04M1/02

    摘要: An imaging lens includes a first group, a second group, an aperture stop, a third group, and a fourth group. The second group includes one positive lens. The third group includes two positive lenses and one negative lens. At least two of the third group are joined together to form a compound lens. The imaging lens has a fixed focal length and an angle of view of 120 degrees or more. Conditional expressions (1), (2), (3), and (4) below are satisfied: −2.7≤f1/f≤−0.7  (1) 2.2≤f2/f≤6.6  (2) 3.9≤f3/f≤14.3  (3) 2.8≤f4/f≤11.0  (4) where fi denotes focal length of i-th group with respect to a d-line, i denotes one of 1 to 4, and f denotes focal length of an entirety of the imaging lens with respect to the d-line.

    HEADRESTS FOR VEHICULAR SEATS
    6.
    发明申请
    HEADRESTS FOR VEHICULAR SEATS 有权
    车道座椅

    公开(公告)号:US20090160226A1

    公开(公告)日:2009-06-25

    申请号:US12259612

    申请日:2008-10-28

    IPC分类号: B60N2/48 B60N2/30

    CPC分类号: B60N2/3011 B60N2/856

    摘要: A headrest for a vehicular seat has a base member, a headrest main body and a cable. The base member has a stay held by a side of a seat back. The headrest main body is movably attached to the base member. The cable is pulled when the headrest main body is moved relative to the base member. The cable includes an outer cable and an inner cable inserted to the outer cable. The outer cable is attached with a cap at an end portion thereof. A fixing structure for fixing the cap to an end portion of the stay is provided between the cap and the end portion of the stay. And the inner cable penetrates a shaft hole of the stay by exceeding the outer cable and is moved relative to the outer cable and the stay by being pulled when the headrest main body is moved.

    摘要翻译: 用于车辆座椅的头枕具有基座部件,头枕主体和电缆。 基座部件具有由座椅靠背侧面保持的停留位置。 头枕主体可移动地附接到基座构件。 当头枕主体相对于基座部件移动时,电缆被拉动。 电缆包括外部电缆和插入外部电缆的内部电缆。 外部电缆在其端部附接有帽。 用于将盖固定到托架的端部的固定结构设置在盖和托架的端部之间。 并且内部电缆穿过外部电缆穿过支柱的轴孔,并且当头枕主体移动时通过被拉动而相对于外部电缆移动并保持停留。