Integrated circuit substrate material and method
    2.
    发明授权
    Integrated circuit substrate material and method 失效
    集成电路基板材料及方法

    公开(公告)号:US07135767B2

    公开(公告)日:2006-11-14

    申请号:US10629271

    申请日:2003-07-29

    IPC分类号: H01L23/08 B32B18/00

    摘要: A semiconductor substrate is presented which is manufactured from hollow, gas-filled glass or ceramic microspheres, which are bound together in a dried or fired matrix. The microspheres may be glass-coated microspheres, which are bound together by sintering the outer layers of glass together. The semiconductor surface may be smoothed by glazing the surface.

    摘要翻译: 提出了一种半导体衬底,其由中空的充气玻璃或陶瓷微球制成,其在干燥或烧制的基质中结合在一起。 微球可以是玻璃涂覆的微球,其通过将玻璃的外层烧结在一起而结合在一起。 半导体表面可以通过玻璃表面而平滑。

    Solid slug longitudinal piezoelectric latching relay
    3.
    发明授权
    Solid slug longitudinal piezoelectric latching relay 失效
    固体块纵向压电闭锁继电器

    公开(公告)号:US06927529B2

    公开(公告)日:2005-08-09

    申请号:US10137692

    申请日:2002-05-02

    摘要: In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a solid slug and liquid metal is disclosed. The relay operates by means of a longitudinal displacement of a piezoelectric element in extension mode displacing a liquid metal drop and causing it to wet between at least one contact pad on the piezoelectric element or substrate and at least one other fixed pad to close the switch contact. This motion of the piezoelectric element is rapid and causes the imparted momentum of the solid slug and liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

    摘要翻译: 根据本发明,公开了一种通过固体块和液态金属来切换和锁定的压电致动继电器。 继电器通过在延伸模式中的压电元件的纵向移位来移动液体金属液滴并使其在压电元件或衬底上的至少一个接触焊盘和至少一个其它固定焊盘之间湿润以闭合开关触点 。 压电元件的这种运动是快速的并且引起固体块和液态金属液滴的赋予的动量来克服表面张力,这些表面张力将使液体金属液滴的大部分与接触垫或靠近致动压电元件的焊盘接触 。 开关通过表面张力锁定,液体金属润湿到接触垫。

    Insertion-type liquid metal latching relay array
    4.
    发明授权
    Insertion-type liquid metal latching relay array 失效
    插入式液态金属闭锁继电器阵列

    公开(公告)号:US06879088B2

    公开(公告)日:2005-04-12

    申请号:US10412880

    申请日:2003-04-14

    摘要: An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator. When the switch actuator retracts away from the static switch contact structure, the available volume for conducting liquid inside the fixed switch contact structure increases and the combination of the movement of the conducting liquid into the cavity and the contact pad on the switch actuator moving away from the bulk of the conducting liquid causes the conducting liquid connection between the fixed and moving contact pads to be broken. When the switch actuator returns to its rest position, the contact remains electrically open because there is not enough conducting liquid to bridge the gap without being disturbed. The high frequency capability is provided by the additional conductors in the assembly, which act to make the switch a coaxial structure.

    摘要翻译: 在开关机构中使用导电液体的继电器阵列。 继电器阵列适用于通过微加工技术制造。 继电器阵列的每个元件使用诸如压电元件的致动器来使开关致动器插入到静态开关接触结构中的空腔中。 空腔具有侧面和其端部上的垫,其可被导电液体润湿。 空腔填充有可能是液态金属的导电液体。 将开关致动器插入空腔使得导电液体向外移位并与开关致动器上的接触垫接触。 选择导电液体的体积,使得当致动器返回到其静止位置时,通过表面张力和通过润湿静电开关接触结构和致动器上的接触垫来维持电接触。 当开关致动器从静态开关接触结构退出时,用于在固定开关接触结构内部导电液体的可用体积增加,并且导电液体进入空腔的运动和开关致动器上的接触垫的组合远离 导电液体的大部分导致固定和移动接触垫之间的导电液体连接被破坏。 当开关致动器返回到其静止位置时,由于没有足够的导电液体来桥接间隙而没有被干扰,所以触点保持电气打开。 高频能力由组件中的附加导体提供,其用于使开关成为同轴结构。

    Damped longitudinal mode latching relay
    5.
    发明授权
    Damped longitudinal mode latching relay 失效
    阻尼纵模闭锁继电器

    公开(公告)号:US06876130B2

    公开(公告)日:2005-04-05

    申请号:US10412914

    申请日:2003-04-14

    摘要: A piezoelectric relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An electrical circuit passing between fixed contact pads in the switching channel is completed or broken by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by an electrically conductive liquid, such as a liquid metal, that wets between the solid slug and the contact pad in the switching channel. The surface tension of the, liquid provides a latching mechanism for the relay.

    摘要翻译: 公开了一种压电继电器,其中固体块塞在形成在继电器壳体中的开关通道内移动。 通过切换通道中的固定接触焊盘之间的电路由固体块塞的运动完成或破坏。 固体块的运动由切换通道内的至少两个压电致动器控制。 固体块塞的运动被诸如液体金属的导电液体抵抗,其在切换通道中的固体块和接触垫之间润湿。 液体的表面张力为继电器提供了一个闭锁机构。

    Fluid-based switch
    6.
    发明授权
    Fluid-based switch 失效
    基于流体的开关

    公开(公告)号:US06872904B2

    公开(公告)日:2005-03-29

    申请号:US10941353

    申请日:2004-09-14

    IPC分类号: H01H29/28 H01H29/00

    CPC分类号: H01H29/28 H01H2029/008

    摘要: Fluid-based switches and a method for producing the same are disclosed. In one embodiment, a switch is provided with first and second mated substrates that define therebetween at least portions of a number of cavities. A plurality of wettable pads is exposed within one or more of the cavities. A switching fluid is held within one or more of the cavities, and is wetted to the wettable pads. The switching fluid serves to open and block light paths through one or more of the cavities, in response to forces that are applied to the switching fluid. Forces are applied to the switching fluid by an actuating fluid that is held within one or more of the cavities. At least a portion of the switching fluid is coated with a surface tension modifier.

    摘要翻译: 公开了基于流体的开关及其制造方法。 在一个实施例中,开关设置有在其间限定多个空腔的至少一部分的第一和第二配合基板。 多个可湿性垫片暴露在一个或多个空腔内。 开关流体保持在一个或多个空腔内,并被润湿到可湿性垫。 响应于施加到开关流体的力,开关流体用于打开和阻挡穿过一个或多个空腔的光路。 力通过保持在一个或多个空腔内的致动流体施加到开关流体。 开关流体的至少一部分涂覆有表面张力调节剂。

    Integrated circuit substrate material and method
    7.
    发明申请
    Integrated circuit substrate material and method 失效
    集成电路基板材料及方法

    公开(公告)号:US20050022905A1

    公开(公告)日:2005-02-03

    申请号:US10629271

    申请日:2003-07-29

    摘要: A semiconductor substrate is presented which is manufactured from hollow, gas-filled glass or ceramic microspheres, which are bound together in a dried or fired matrix. The microspheres may be glass-coated microspheres, which are bound together by sintering the outer layers of glass together. The semiconductor surface may be smoothed by glazing the surface.

    摘要翻译: 提出了一种半导体衬底,其由中空的充气玻璃或陶瓷微球制成,其在干燥或烧制的基质中结合在一起。 微球可以是玻璃涂覆的微球,其通过将玻璃的外层烧结在一起而结合在一起。 半导体表面可以通过玻璃表面而平滑。

    Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
    8.
    发明授权
    Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch 失效
    一种助推式推压式压电式液态金属光开关的方法和结构

    公开(公告)号:US06818844B2

    公开(公告)日:2004-11-16

    申请号:US10413070

    申请日:2003-04-14

    IPC分类号: H01H2900

    摘要: A method and structure for an optical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of seal belts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber, and a plurality of optical waveguides are coupled to the liquid-filled chamber. The plurality of seal belts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. According to the method, one or more piezoelectric elements are actuated, causing one or more corresponding membrane elements to be deflected. The deflection of the membrane element changes a pressure of actuator liquid and the change in pressure of the actuator liquid breaks a liquid metal connection between a first contact and a second contact of the electrical switch and breaks a slug connection between the first contact and the second contact. The breaking of the liquid metal connection and a movement of the slug is operable to block or unblock one or more of the plurality of optical waveguides.

    摘要翻译: 一种光开关的方法和结构。 根据本发明的结构,将液体填充室容纳在固体材料内。 液体填充室内的多个密封带与固体材料相连,而多个压电元件与多个膜耦合。 多个膜耦合到液体填充室,并且多个光波导耦合到充满液体的室。 多个密封带耦合到多个液体金属球,其中多个液态金属球中的一个或多个耦合到块状物。 根据该方法,致动一个或多个压电元件,导致一个或多个相应的膜元件偏转。 膜元件的偏转改变致动器液体的压力,并且致动器液体的压力变化破坏了电气开关的第一接触件和第二接触件之间的液态金属连接,并且破坏了第一接触件和第二接头件之间的塞子连接 联系。 液态金属连接的断裂和芯块的移动可操作以阻挡或解除多个光波导中的一个或多个。

    Method and structure for a slug caterpillar piezoelectric latching reflective optical relay
    9.
    发明授权
    Method and structure for a slug caterpillar piezoelectric latching reflective optical relay 失效
    一种塞子履带式压电闭锁反射光学继电器的方法和结构

    公开(公告)号:US06765161B1

    公开(公告)日:2004-07-20

    申请号:US10412910

    申请日:2003-04-14

    IPC分类号: H01H5100

    摘要: A method and structure for a reflective optical switch. According to the structure, a chamber is housed within a solid material. A plurality of piezoelectric elements within the chamber are coupled to the solid material. A slug within the chamber is operable to be coupled to one or more of the plurality of piezoelectric elements. A liquid metal within the chamber is coupled to the slug. One or more signals of a first one or more optical waveguides coupled to the chamber are operable to be coupled to a second one or more optical waveguides coupled to the chamber. According to the method, one or more of the plurality of piezoelectric elements are actuated, with the actuation of the one or more piezoelectric elements causing the slug coupled to the one or more piezoelectric elements to move from a first number of wetting pads to a second number of wetting pads wherein the first number of wetting pads and the second number of wetting pads are wetted by the liquid metal. The movement of the slug from the first number of wetting pads to the second number of wetting pads breaks a liquid metal surface tension between the slug and the first number of wetting pads and establishes a coupling between the slug and the second number of wetting pads. The movement of the slug and the presence of the liquid metal creates a reflective surface operable to route the one or more signals from the first one or more optical waveguides to the second one or more optical waveguides.

    摘要翻译: 反射式光开关的方法和结构。 根据该结构,将腔室容纳在固体材料内。 室内的多个压电元件被耦合到固体材料。 室内的塞子可操作以联接到多个压电元件中的一个或多个。 腔室内的液态金属联接到塞子上。 耦合到腔室的第一个或多个光波导的一个或多个信号可操作地耦合到耦合到腔室的第二个一个或多个光波导。 根据该方法,致动多个压电元件中的一个或多个,一个或多个压电元件的致动使得与一个或多个压电元件耦合的芯块从第一数量的润湿垫移动到第二个 润湿垫的数量,其中第一数量的润湿垫和第二数量的润湿垫被液态金属润湿。 塞子从第一数量的润湿垫移动到第二数量的润湿垫破坏了塞子和第一数量的润湿垫之间的液态金属表面张力,并且建立了塞子和第二数量的润湿垫之间的联接。 芯塞的移动和液态金属的存在产生可操作以将一个或多个信号从第一个一个或多个光波导路由到第二个一个或多个光波导的反射表面。

    High-frequency, liquid metal, latching relay array
    10.
    发明授权
    High-frequency, liquid metal, latching relay array 失效
    高频,液态金属,闭锁继电器阵列

    公开(公告)号:US06730866B1

    公开(公告)日:2004-05-04

    申请号:US10413278

    申请日:2003-04-14

    IPC分类号: H01H2900

    摘要: An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. In each element of the relay array, two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. An actuator, coupled to one of the electrical contacts, is energized in a first direction to reduce the gap between the electrical contacts, causing the two conducting liquid droplets to coalesce and complete an electrical circuit. The actuator is then de-energized and the contacts return to their starting position. The liquid droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing an actuator to increase the gap between the electrical contacts to break the surface tension bond between the conducting liquid droplets. The droplets remain separated when the actuator is de-energized because there is insufficient conducting liquid to bridge the gap between the contacts. Additional conductors may be included in the assembly to provide a coaxial structure and allow for high frequency switching. In an exemplary embodiment, the actuator is a piezoelectric actuator and the conducting liquid is a liquid metal.

    摘要翻译: 在开关机构中使用导电液体的继电器阵列。 继电器阵列适用于通过微加工技术制造。 在继电器阵列的每个元件中,两个电触点保持相隔较小的距离。 触头的相对表面各自支撑导电液体的液滴,例如液体金属。 耦合到电触点之一的致动器在第一方向上被激励以减小电触头之间的间隙,导致两个导电液滴聚结并完成电路。 然后致动器断电,并且触点返回到其起始位置。 由于表面张力,液滴保持聚结。 通过激励致动器以增加电触点之间的间隙以破坏导电液滴之间的表面张力接合来断开电路。 当致动器断电时,液滴保持分离,因为导电液体不足以桥接接触件之间的间隙。 附加导体可以包括在组件中以提供同轴结构并允许高频切换。 在示例性实施例中,致动器是压电致动器,并且导电液体是液态金属。