GaN vertical bipolar transistor
    4.
    发明授权
    GaN vertical bipolar transistor 有权
    GaN垂直双极晶体管

    公开(公告)号:US08823140B2

    公开(公告)日:2014-09-02

    申请号:US13675916

    申请日:2012-11-13

    申请人: Avogy, Inc.

    IPC分类号: H01L29/66

    摘要: An embodiment of a semiconductor device includes a III-nitride base structure of a first conductivity type, and a III-nitride emitter structure of a second conductivity type having a first surface and a second surface. The second surface is substantially opposite the first surface. The first surface of the III-nitride emitter structure is coupled to a surface of the III-nitride base structure. The semiconductor also includes a first dielectric layer coupled to the second surface of the III-nitride emitter structure, and a spacer coupled to a sidewall of the III-nitride emitter structure and the surface of the III-nitride base structure. The semiconductor also includes a base contact structure with a III-nitride material coupled to the spacer, the surface of the III-nitride base structure, and the first dielectric layer, such that the first dielectric layer and the spacer are disposed between the base contact structure and the III-nitride emitter structure.

    摘要翻译: 半导体器件的实施例包括第一导电类型的III族氮化物基底结构和具有第一表面和第二表面的第二导电类型的III族氮化物发射极结构。 第二表面基本上与第一表面相对。 III族氮化物发射极结构的第一表面耦合到III族氮化物基底结构的表面。 半导体还包括耦合到III族氮化物发射极结构的第二表面的第一电介质层和耦合到III族氮化物发射极结构的侧壁和III族氮化物基底结构的表面的间隔物。 该半导体还包括具有连接到间隔物,III族氮化物基底结构的表面和第一介电层的III族氮化物材料的基底接触结构,使得第一介电层和间隔物设置在基底触点 结构和III族氮化物发射极结构。

    Method of forming pattern in substrate
    6.
    发明授权
    Method of forming pattern in substrate 有权
    在基材中形成图案的方法

    公开(公告)号:US08697538B1

    公开(公告)日:2014-04-15

    申请号:US13670477

    申请日:2012-11-07

    发明人: Lu-Ping Chiang

    摘要: A method of forming a pattern in a substrate is provided, in which the substrate having a pattern region is provided first. A plurality of stripe-shaped mask layers is formed on the substrate in the pattern region. Each of at least two adjacent stripe-shaped mask layers among the stripe-shaped mask layers has a protrusion portion and the protrusion portions face to each other. A spacer is formed on sidewalls of the stripe-shaped mask layers, wherein a thickness of the spacer is greater than a half of a distance between two of the protrusion portions. Subsequently, the stripe-shaped mask layers are removed. An etching process is performed by using the spacer as a mask to form trenches in the substrate. Thereafter, the trenches are filled with a material.

    摘要翻译: 提供了一种在基板中形成图案的方法,其中首先提供具有图案区域的基板。 在图案区域中的基板上形成多个条形掩模层。 条状掩模层中的至少两个相邻的条形掩模层中的每一个具有突出部分,并且突出部分彼此面对。 间隔件形成在条形掩模层的侧壁上,其中间隔物的厚度大于两个突出部分之间的距离的一半。 随后,去除条形掩模层。 通过使用间隔物作为掩模来进行蚀刻工艺,以在衬底中形成沟槽。 此后,沟槽被填充材料。

    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    9.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME 失效
    半导体器件及其制造方法

    公开(公告)号:US20130137253A1

    公开(公告)日:2013-05-30

    申请号:US13705610

    申请日:2012-12-05

    IPC分类号: H01L21/04

    摘要: A semiconductor device includes: a silicon carbide substrate having first and second main surfaces; a first silicon carbide layer provided on the first main surface of the silicon carbide substrate; first silicon carbide regions formed on a surface of the first silicon carbide layer; second and third silicon carbide regions formed on respective surfaces of the first silicon carbide regions; a fourth silicon carbide region formed between facing first silicon carbide regions with the first silicon carbide layer therebetween; a gate insulating film formed continuously on surfaces of the first silicon carbide regions, the first silicon carbide layer, and the fourth silicon carbide region; a gate electrode formed on the gate insulating film; an interlayer insulating film covering the gate electrode; a first electrode electrically connected to the second and third silicon carbide regions; and a second electrode formed on the second main surface of the silicon carbide substrate.

    摘要翻译: 半导体器件包括:具有第一和第二主表面的碳化硅衬底; 设置在所述碳化硅衬底的所述第一主表面上的第一碳化硅层; 第一碳化硅区域形成在第一碳化硅层的表面上; 形成在第一碳化硅区域的相应表面上的第二和第三碳化硅区域; 形成在面对的第一碳化硅区域之间的第四碳化硅区域,其间具有第一碳化硅层; 在第一碳化硅区域,第一碳化硅层和第四碳化硅区域的表面上连续形成的栅极绝缘膜; 形成在栅极绝缘膜上的栅电极; 覆盖栅电极的层间绝缘膜; 电连接到第二和第三碳化硅区域的第一电极; 以及形成在碳化硅衬底的第二主表面上的第二电极。