公开(公告)号：US5231751A

公开(公告)日：1993-08-03

申请号：US784281

申请日：1991-10-29

申请人： Krishna G. Sachdev ,  Benedikt M. J. Kellner ,  Kathleen M. McGuire ,  Peter J. Sorce

发明人： Krishna G. Sachdev ,  Benedikt M. J. Kellner ,  Kathleen M. McGuire ,  Peter J. Sorce

IPC分类号： H01L23/522 ,  C08G73/10 ,  H01L21/48 ,  H01L21/768 ,  H01L23/538 ,  H05K1/05 ,  H05K3/00 ,  H05K3/38 ,  H05K3/40 ,  H05K3/42 ,  H05K3/44 ,  H05K3/46

CPC分类号： H01L23/5384 ,  H01L21/486 ,  H01L23/5383 ,  H05K3/445 ,  H05K3/4641 ,  H01L2924/0002 ,  H05K2201/0154 ,  H05K2201/068 ,  H05K2201/09554 ,  H05K2201/09563 ,  H05K2201/096 ,  H05K2203/0152 ,  H05K3/0032 ,  H05K3/0035 ,  H05K3/0061 ,  H05K3/007 ,  H05K3/388 ,  H05K3/4076 ,  H05K3/423 ,  H05K3/4614 ,  H05K3/4617 ,  Y10T29/49165 ,  Y10T428/12361 ,  Y10T428/12382 ,  Y10T428/12556 ,  Y10T428/12569 ,  Y10T428/12806 ,  Y10T428/12812 ,  Y10T428/24777 ,  Y10T428/31678 ,  Y10T428/31681

摘要： This invention relates generally to a structure and process for thin film interconnect, and more particularly to a structure and process for a multilayer thin film interconnect structure with improved dimensional stability and electrical performance. The invention further relates to a process of fabrication of the multilayer thin film structures. The individual thin film structure is termed a compensator, and functions as both a ground/reference plane and as a stabilizing entity with regard to dimensional integrity. The compensator is comprised primarily of a metal sheet having a metallized via pattern and high-temperature stable polymer as an insulator.

公开(公告)号：US4808365A

公开(公告)日：1989-02-28

申请号：US199214

申请日：1988-05-26

申请人： Benedikt M. J. Kellner ,  Salvatore J. Scilla

发明人： Benedikt M. J. Kellner ,  Salvatore J. Scilla

IPC分类号： C04B35/632 ,  C04B35/64 ,  H05K1/03 ,  H05K3/46 ,  B29C71/00 ,  C04B41/81 ,  F26B21/08 ,  F27D7/02

CPC分类号： C04B35/632 ,  C04B35/64 ,  H05K1/0306 ,  H05K3/4611 ,  H05K3/4629 ,  Y10S264/39

摘要： A process for reducing edge curl in green sheets in which the sheets are first placed in a chamber at about 95% relative humidity for a period of about 2 weeks at room temperature. In this part of the process, the sheets absorb water which causes the internal stresses in the green sheet to relax. Thereafter, the sheets are dried by placing them in a chamber at about 35% relative humidity for a period of about 1 week at room temperature. In this period, the absorbed water evaporates and the green sheets become firm with less edge curl than they exhibited prior to the treatment.

摘要翻译： 一种用于减少生坯中边缘卷曲的方法，其中片材首先在室温下以约95％相对湿度放置在室中约2周的时间。 在该部分工艺中，片材吸收水，导致生片中的内部应力松弛。 此后，通过将片材在室温下以约35％的相对湿度放置在室中干燥约1周的时间。 在这个时期，吸收的水蒸发，绿色片材变得坚固，边缘卷曲比治疗前显示的少。