公开(公告)号：US09318997B2

公开(公告)日：2016-04-19

申请号：US14034398

申请日：2013-09-23

申请人： NXP B.V.

发明人： Casper van der Avoort ,  Andreas Bernardus Maria Jansman ,  Robert James Pascoe Lander

IPC分类号： H03B5/30 ,  H03B1/00 ,  H03H9/00 ,  H03H9/02 ,  H03H9/24

CPC分类号： H03B1/00 ,  H03B5/30 ,  H03B2202/00 ,  H03H9/00 ,  H03H9/02338 ,  H03H9/02433 ,  H03H9/2452 ,  H03H2009/02307 ,  H03H2009/02456 ,  H03H2009/02496

摘要： A resonator has a main resonator body and a secondary resonator structure. The resonator body has a desired mode of vibration of the resonator alone, and a parasitic mode of vibration, wherein the parasitic mode comprises vibration of the resonator body and the secondary resonator structure as a composite body. In this way, unwanted vibrational modes are quenched by the second suspended body.

摘要翻译： 谐振器具有主谐振器体和次谐振器结构。 谐振器本体具有谐振器单独的期望的振动模式和寄生振动模式，其中寄生模式包括作为复合体的谐振器体和辅助谐振器结构的振动。 以这种方式，不需要的振动模式被第二悬挂体淬火。

公开(公告)号：US08614609B2

公开(公告)日：2013-12-24

申请号：US12936773

申请日：2009-04-06

申请人： Chady Kharrat ,  Eric Colinet

发明人： Chady Kharrat ,  Eric Colinet

IPC分类号： H03H9/00 ,  H03H9/13

CPC分类号： H03H9/02433 ,  H03H9/2447 ,  H03H9/525 ,  H03H2009/02456

摘要： A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.

摘要翻译： 一种谐振滤波器，包括N / m m型谐振器的矩阵，每个谐振器包括致动机构和检测机构。 被配置为接收电输入信号的滤波器的输入电连接到谐振器致动机构。 谐振器检测机构的输出电连接到滤波器的输出端，使得作为滤波器的输出获得的信号是谐振器的机械响应之和的图像。 谐振器不是机械耦合在一起的。

公开(公告)号：US11894831B2

公开(公告)日：2024-02-06

申请号：US17174792

申请日：2021-02-12

申请人： Murata Manufacturing Co., Ltd.

发明人： Yuichi Goto ,  Ryota Kawai

IPC分类号： H03H9/17 ,  H03H15/00 ,  H03H9/02 ,  H03H9/15

CPC分类号： H03H9/17 ,  H03H9/02433 ,  H03H2009/02456 ,  H03H2009/155 ,  H03H2015/005

摘要： A resonance device is provided that includes a resonator including upper electrodes, a lower electrode, and a piezoelectric thin film formed therebetween. An upper cover is provided with a first surface facing the upper electrodes of the resonator. A power supply terminal is provided on a second surface of the upper cover with the power supply terminal electrically connected to the upper electrodes. Another power supply terminal is on the second surface of the upper cover and is electrically connected to the upper electrodes. A ground terminal is provided on the second surface of the upper cover and is electrically connected to the lower electrode. An area of each power supply terminal are different from one other such that a capacitance formed between the first power supply terminal and the ground terminal is approximately equal to a capacitance formed between the second power supply terminal and the ground terminal.

公开(公告)号：US20150288301A1

公开(公告)日：2015-10-08

申请号：US14437591

申请日：2013-10-25

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

发明人： Gerard Billiot

IPC分类号： H02N11/00

CPC分类号： H02N11/002 ,  H03H9/02259 ,  H03H2009/02456

摘要： A NEMS including a network of tracks and/or conducting lines on which symmetric excitation signals are applied, the network having a symmetry about an axis passing through a conducting detection line or track carrying a detection signal from the NEMS, the symmetry of the network and the signal providing a solution to a problem of parasitic capacitances generated between the network and the detection line.

摘要翻译： 包括轨道和/或导线的网络的NEMS，其上施加对称激励信号，网络具有对应于穿过通过NEMS的导电检测线或轨道的轨道的对称，网络的对称性 该信号提供了在网络和检测线之间产生的寄生电容问题的解决方案。

公开(公告)号：US20120262242A1

公开(公告)日：2012-10-18

申请号：US13446894

申请日：2012-04-13

申请人： Casper van der Avoort ,  Jozef Thomas Martinus Van Beek

发明人： Casper van der Avoort ,  Jozef Thomas Martinus Van Beek

IPC分类号： H03B28/00

CPC分类号： H03H9/02433 ,  H03H9/02338 ,  H03H9/2452 ,  H03H2009/02456 ,  H03H2009/02488

摘要： A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.

摘要翻译： 一种谐振器，其中除了在节点处的正常锚固件之外，提供第二锚定装置以及在谐振器本体和第二锚定装置之间的相关联的连接臂。 连接臂在非节点处连接到谐振器体，使得它不连接到形成固定连接的正常位置。 连接臂用于抑制横向振动模式。

公开(公告)号：US08749315B2

公开(公告)日：2014-06-10

申请号：US13561862

申请日：2012-07-30

申请人： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

发明人： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

IPC分类号： H03B5/30

CPC分类号： H03H9/2405 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2457 ,  H03H9/2468 ,  H03H2009/02456 ,  H03H2009/02496

摘要： A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

摘要翻译： 一种MEMS谐振器系统，其减少由不同系统元件之间的不期望的电容耦合引起的干扰信号。 在一个实施例中，该系统包括MEMS谐振器，电极和至少一个谐振器电极屏蔽。 在某些实施例中，谐振器电极屏蔽件通过防止或减少谐振器电极与支撑和辅助元件之间的电容耦合，确保谐振器电极与一个或多个分流节点或MEMS谐振器的有源元件相互作用 的MEMS谐振器结构。 通过使用一个或多个谐振器电极屏蔽减少干扰信号的有害影响，提出了相对于现有技术方法的更简单，更低干扰和更有效的系统。

公开(公告)号：US20130027146A1

公开(公告)日：2013-01-31

申请号：US13550950

申请日：2012-07-17

申请人： Shogo INABA

发明人： Shogo INABA

IPC分类号： H03B1/00

CPC分类号： H03H9/2457 ,  B81B3/007 ,  B81B2201/014 ,  H03H3/0072 ,  H03H2009/02283 ,  H03H2009/02456 ,  H03H2009/02511

摘要： A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.

摘要翻译： MEMS振动器包括：基板; 设置在所述基板上方的第一电极; 以及第二电极，其设置在所述第二电极的至少一部分具有在所述第一电极和所述第二电极之间的空间的状态下，并且具有能够在所述基板的厚度方向上以静电力振动的光束部分， 支撑部分，其支撑梁部分的一个边缘并且设置在基板上方，其中支撑所述一个边缘的支撑部分的支撑侧面具有从基板的厚度方向在平面图中弯曲的弯曲部分，并且所述一个边缘 由包括弯曲部的支撑侧面支撑。

公开(公告)号：US20110128095A1

公开(公告)日：2011-06-02

申请号：US12936773

申请日：2009-04-06

申请人： Chady Kharrat ,  Eric Colinet

发明人： Chady Kharrat ,  Eric Colinet

IPC分类号： H03H9/52 ,  H03H9/24 ,  H03H9/125

CPC分类号： H03H9/02433 ,  H03H9/2447 ,  H03H9/525 ,  H03H2009/02456

摘要： A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.

摘要翻译： 一种谐振滤波器，包括N / m m型谐振器的矩阵，每个谐振器包括致动机构和检测机构。 被配置为接收电输入信号的滤波器的输入电连接到谐振器致动机构。 谐振器检测机构的输出电连接到滤波器的输出端，使得作为滤波器的输出获得的信号是谐振器的机械响应之和的图像。 谐振器不是机械耦合在一起的。

公开(公告)号：US20010022546A1

公开(公告)日：2001-09-20

申请号：US09805830

申请日：2001-03-14

发明人： Wilhelm Frey ,  Karsten Funk

IPC分类号： H03H009/48

CPC分类号： H03H9/02425 ,  H03H9/462 ,  H03H2009/02456 ,  H03H2009/02511

摘要： A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

摘要翻译： 用于电信号的滤波器具有基板，振动体，其能够相对于基板相对于偏转的至少两个对映体振动，并且具有连接到信号输入端的电极和用于电激励的信号输出和用于检测振动的信号 振动体。 用于检测振动的电极分别连接到信号输出的两个独立的端子上，每个分配给相位相反偏转的对映体。

公开(公告)号：US10003320B1

公开(公告)日：2018-06-19

申请号：US15595486

申请日：2017-05-15

申请人： SiTime Corporation

发明人： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

IPC分类号： H03H9/24 ,  H03H3/007

CPC分类号： H03H9/2405 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2457 ,  H03H9/2468 ,  H03H2009/02456 ,  H03H2009/02496

摘要： A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.