公开(公告)号：US08679873B2

公开(公告)日：2014-03-25

申请号：US12653349

申请日：2009-12-11

Applicant: Jin Shan Pan ,  Cheng Ju Wu ,  I Han Wu ,  Kuo Fong Tseng

Inventor： Jin Shan Pan ,  Cheng Ju Wu ,  I Han Wu ,  Kuo Fong Tseng

IPC: H01L21/00 ,  H01L33/00 ,  H01S3/04 ,  H01S5/00

CPC classification number: H01S5/18313

Abstract: The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer.

Abstract translation: 本发明公开了一种通过在VCSEL氧化过程中减慢氧化速率来制造耐热，耐湿氧化物的垂直腔表面发射激光器（VCSEL）的方法，从而降低氧化层的应力集中， 通过使用设置在激光窗口上的钝化层防止水分侵入。 这样制造的VCSEL器件是耐热，耐湿和高可靠性的。 在优选的实施方案中，氧化过程以小于0.4μm/ min的氧化速率进行，钝化层是SiON钝化层。

公开(公告)号：US20090279894A1

公开(公告)日：2009-11-12

申请号：US12432935

申请日：2009-04-30

Applicant: Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu

Inventor： Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu

IPC: H04J14/02 ,  H04B10/04 ,  H04B10/06

CPC classification number: G02B6/4246 ,  H04B10/40

Abstract: A triple wavelength bidirectional optical communication system includes an optical fiber, a transmitter optical subassembly and a receiver optical subassembly. The transmitter optical subassembly includes a first filter, a dual wavelength laser device and a first detector device. The dual wavelength laser device emits a first and a second laser beam to the optical fiber. The first detector device receives a third laser beam emitted from the optical fiber and propagated via the first filter. The receiver optical subassembly includes a second filter, a transceiver device and a second detector device. The transceiver device emits the third laser beam propagated via the second filter and reached to the optical fiber and also receives the first laser beam emitted from the optical fiber and propagated via the second filter. The second detector device receives the second laser beam emitted from the second facet and propagated via the second filter.

Abstract translation: 三波长双向光通信系统包括光纤，发射机光学子组件和接收机光学子组件。 发射机光学子组件包括第一滤光器，双波长激光器件和第一检测器器件。 双波长激光装置向光纤发射第一和第二激光束。 第一检测器装置接收从光纤发射并经由第一滤波器传播的第三激光束。 接收机光学子组件包括第二滤波器，收发器设备和第二检测器设备。 收发器装置发射通过第二滤波器传播的第三激光束并到达光纤并且还接收从光纤发射并经由第二滤波器传播的第一激光束。 第二检测器装置接收从第二小面发射并经由第二滤波器传播的第二激光束。

公开(公告)号：US08530358B2

公开(公告)日：2013-09-10

申请号：US13231904

申请日：2011-09-13

Applicant: Po-Han Chen ,  Cheng-Ju Wu ,  Jin-Shan Pan

Inventor： Po-Han Chen ,  Cheng-Ju Wu ,  Jin-Shan Pan

IPC: H01L21/302

CPC classification number: H01S5/18313 ,  H01S5/18344 ,  H01S5/2063

Abstract: The present invention discloses a manufacturing method of vertical cavity surface emitting laser. The method includes following steps: providing a substrate; forming an epitaxial layer stack including an aluminum-rich layer; forming an ion-doping mask including a ring-shaped opening; doping ions in the epitaxial layer stack through the ring-shaped opening and forming a ring-shaped ion-doped region over the aluminum-rich layer; forming an etching mask on the ion-doping mask for covering the ring-shaped opening of the ion-doping mask; etching the epitaxial layer stack through the etching mask and ion-doping mask for forming an island platform; oxidizing the aluminum-rich layer for forming a ring-shaped oxidized region. In addition, the present invention also discloses a vertical cavity surface emitting laser manufactured by the above mentioned method.

Abstract translation: 本发明公开了一种垂直腔面发射激光器的制造方法。 该方法包括以下步骤：提供衬底; 形成包含富铝层的外延层堆叠; 形成包括环形开口的离子掺杂掩模; 通过环形开口在外延层堆叠中掺杂离子，并在富铝层上形成环状离子掺杂区域; 在所述离子掺杂掩模上形成用于覆盖所述离子掺杂掩模的环形开口的蚀刻掩模; 通过蚀刻掩模蚀刻外延层堆叠和用于形成岛平台的离子掺杂掩模; 氧化富铝层以形成环形氧化区。 此外，本发明还公开了通过上述方法制造的垂直腔面发射激光器。

公开(公告)号：US08324722B2

公开(公告)日：2012-12-04

申请号：US12657161

申请日：2010-01-14

Applicant: Cheng Ju Wu ,  Hung-Che Chen ,  I Han Wu ,  Shang-Cheng Liu ,  Jin Shan Pan

Inventor： Cheng Ju Wu ,  Hung-Che Chen ,  I Han Wu ,  Shang-Cheng Liu ,  Jin Shan Pan

IPC: H01L23/12

CPC classification number: H01L33/486 ,  H01L27/156 ,  H01L33/64 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2224/49111 ,  H01L2924/19107 ,  H01S5/02216 ,  H01S5/423 ,  H01L2924/00

Abstract: A packaging device for matrix-arrayed semiconductor light-emitting elements of high power and high directivity comprises a metal base, an array chip and a plurality of metal wires. The metal base is of highly heat conductive copper or aluminum, and a first electrode area and at least one second electrode area which are electrically isolated are disposed on the metal base. The array chip is disposed on the first electrode area, on which multiple matrix-arranged semiconductor light-emitting elements and at least one wire bond pad adjacent to the light-emitting elements are disposed. The light-emitting element is a VCSEL element, an HCSEL element or an RCLED element. The metal wires are connected between the wire bond pad and the second electrode area to transmit power signals. Between the bottom surface and the first electrode area is disposed a conductive adhesive to bond and facilitate electrical connection between the two.

Abstract translation: 用于矩阵排列的高功率和高方向性的半导体发光元件的封装装置包括金属基底，阵列芯片和多个金属线。 金属基底是高度导热的铜或铝，并且电绝缘的第一电极区域和至少一个第二电极区域设置在金属基底上。 阵列芯片设置在第一电极区域上，多个矩阵排列的半导体发光元件和与发光元件相邻的至少一个引线接合焊盘设置在该第一电极区域上。 发光元件是VCSEL元件，HCSEL元件或RCLED元件。 金属线连接在引线接合焊盘和第二电极区之间以传输功率信号。 在底表面和第一电极区域之间设置导电粘合剂以结合并促进两者之间的电连接。

公开(公告)号：US20120256084A1

公开(公告)日：2012-10-11

申请号：US13242203

申请日：2011-09-23

Applicant: Jia-Yush Yen ,  Yung-Yaw Chen ,  Yi-Hung Kuo ,  Cheng-Ju Wu

Inventor： Jia-Yush Yen ,  Yung-Yaw Chen ,  Yi-Hung Kuo ,  Cheng-Ju Wu

IPC: H01J37/26

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/20292 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24578 ,  H01J2237/31793

Abstract: An electron beam drift detection device and a method for detecting electron beam drift are provided in which the method includes placing a predetermined characteristic identification pattern on a surface of a workpiece; emitting an electron beam, and focusing and deflecting the electron beam such that the focused and deflected electron beam scans the surface of the workpiece and the characteristic identification pattern; detecting backscattered electrons and secondary electrons; and detection signals; and receives the receiving detection signals and performs performing an image process on the detection signals to obtain an electronic image of the characteristic identification pattern, and measuring a drift degree by comparing the electronic image with the predetermined shape of the characteristic identification pattern.

Abstract translation: 提供一种电子束漂移检测装置和电子束漂移检测方法，其中包括将预定的特征识别图案放置在工件的表面上; 发射电子束，并聚焦和偏转电子束，使得聚焦和偏转的电子束扫描工件的表面和特征识别图案; 检测反向散射电子和二次电子; 和检测信号; 并接收接收检测信号，并对检测信号执行图像处理，以获得特征识别图案的电子图像，并且通过将电子图像与特征识别图案的预定形状进行比较来测量漂移度。

公开(公告)号：US08121167B2

公开(公告)日：2012-02-21

申请号：US12436324

申请日：2009-05-06

Applicant: Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu ,  Chang-Cherng Wu

Inventor： Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu ,  Chang-Cherng Wu

IPC: H01S5/00

CPC classification number: H01S5/02288 ,  H01S5/02212 ,  H01S5/02252 ,  H01S5/4087

Abstract: A dual wavelength laser device including a cap, a header, a first laser chip and a second laser chip. The cap includes a cap body and a lens embedded on the cap body. The header forms an accommodating space with the cap. The first laser chip is arranged in the accommodating space and emitting a first laser beam toward the lens. The second laser chip is arranged in the accommodating space and emitting a second laser beam toward the lens.

Abstract translation: 一种双波长激光装置，包括盖，头，第一激光芯片和第二激光芯片。 盖包括盖体和埋在盖体上的透镜。 头部与帽盖形成容纳空间。 第一激光芯片布置在容纳空间中并朝向透镜发射第一激光束。 第二激光芯片布置在容纳空间中并朝向透镜发射第二激光束。

公开(公告)号：US20110121323A1

公开(公告)日：2011-05-26

申请号：US12657161

申请日：2010-01-14

Applicant: Cheng Ju Wu ,  Hung-Che Chen ,  I Han Wu ,  Shang-Cheng Liu ,  Jin Shan Pan

Inventor： Cheng Ju Wu ,  Hung-Che Chen ,  I Han Wu ,  Shang-Cheng Liu ,  Jin Shan Pan

IPC: H01L33/00

CPC classification number: H01L33/486 ,  H01L27/156 ,  H01L33/64 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2224/49111 ,  H01L2924/19107 ,  H01S5/02216 ,  H01S5/423 ,  H01L2924/00

Abstract: A packaging device for matrix-arrayed semiconductor light-emitting elements of high power and high directivity comprises a metal base, an array chip and a plurality of metal wires. The metal base is of highly heat conductive copper or aluminum, and a first electrode area and at least one second electrode area which are electrically isolated are disposed on the metal base. The array chip is disposed on the first electrode area, on which multiple matrix-arranged semiconductor light-emitting elements and at least one wire bond pad adjacent to the light-emitting elements are disposed. The light-emitting element is a VCSEL element, an HCSEL element or an RCLED element. The metal wires are connected between the wire bond pad and the second electrode area to transmit power signals. Between the bottom surface and the first electrode area is disposed a conductive adhesive to bond and facilitate electrical connection between the two.

Abstract translation: 用于矩阵排列的高功率和高方向性的半导体发光元件的封装装置包括金属基底，阵列芯片和多个金属线。 金属基底是高度导热的铜或铝，并且电绝缘的第一电极区域和至少一个第二电极区域设置在金属基底上。 阵列芯片设置在第一电极区域上，多个矩阵排列的半导体发光元件和与发光元件相邻的至少一个引线接合焊盘设置在该第一电极区域上。 发光元件是VCSEL元件，HCSEL元件或RCLED元件。 金属线连接在引线接合焊盘和第二电极区之间以传输功率信号。 在底表面和第一电极区域之间设置导电粘合剂以结合并促进两者之间的电连接。

公开(公告)号：US20090279898A1

公开(公告)日：2009-11-12

申请号：US12387797

申请日：2009-05-07

Applicant: Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu

Inventor： Jin-Shan Pan ,  Shang-Cheng Liu ,  Cheng-Ju Wu

IPC: H04B10/24

CPC classification number: G02B6/4246 ,  H04B10/40

Abstract: A bi-directional optical device includes: a TO cap; a TO header defining a receiving space together with the TO cap; a laser chip provided on the TO header and in the receiving space; and a light-receiving chip provided on the TO header and in the receiving space. The TO cap has a cap body and a lens embeddedly mounted on the cap body. The laser chip emits a first laser beam toward the lens. The light-receiving chip faces the lens and receives a second laser beam transmitted through the lens. The laser chip and the light-receiving chip are packaged together within the receiving space defined by the TO cap and the TO header, so as to effectuate a bi-directional optical device for emitting and receiving light of different wavelengths.

Abstract translation: 双向光学装置包括：TO盖; TO头与TO帽一起定义接收空间; 设置在TO头部和接收空间中的激光芯片; 以及设置在TO头部和接收空间中的光接收芯片。 TO盖具有盖体和嵌入式安装在盖体上的透镜。 激光芯片朝向透镜发射第一激光束。 光接收芯片面向透镜并接收透过透镜的第二激光束。 激光芯片和光接收芯片在由TO盖和TO头限定的接收空间内封装在一起，以实现用于发射和接收不同波长的光的双向光学装置。

公开(公告)号：US20090279578A1

公开(公告)日：2009-11-12

申请号：US12436324

申请日：2009-05-06

Applicant: Jin-Shan PAN ,  Shang-Cheng LIU ,  Cheng-Ju WU ,  Chang-Cherng WU

Inventor： Jin-Shan PAN ,  Shang-Cheng LIU ,  Cheng-Ju WU ,  Chang-Cherng WU

IPC: H01S5/40

CPC classification number: H01S5/02288 ,  H01S5/02212 ,  H01S5/02252 ,  H01S5/4087

Abstract: A dual wavelength laser device including a cap, a header, a first laser chip and a second laser chip. The cap includes a cap body and a lens embedded on the cap body. The header forms an accommodating space with the cap. The first laser chip is arranged in the accommodating space and emitting a first laser beam toward the lens. The second laser chip is arranged in the accommodating space and emitting a second laser beam toward the lens.

Abstract translation: 一种双波长激光装置，包括盖，头，第一激光芯片和第二激光芯片。 盖包括盖体和埋在盖体上的透镜。 头部与帽盖形成容纳空间。 第一激光芯片布置在容纳空间中并朝向透镜发射第一激光束。 第二激光芯片布置在容纳空间中并朝向透镜发射第二激光束。

公开(公告)号：US08436581B2

公开(公告)日：2013-05-07

申请号：US12763158

申请日：2010-04-19

Applicant: Kai-Chen Kuo ,  Jia-Yush Yen ,  Ping-Kun Lee ,  Yi-Chih Lai ,  Cheng-Ju Wu

Inventor： Kai-Chen Kuo ,  Jia-Yush Yen ,  Ping-Kun Lee ,  Yi-Chih Lai ,  Cheng-Ju Wu

IPC: H02J7/00

CPC classification number: G01R33/072 ,  G01R33/0029 ,  H01L43/06

Abstract: A system for testing electromagnetic characteristics of an electromagnetic steel sheet includes: a driving unit operable based on a non-sinusoidal wave control signal from a control unit and a floating voltage to output a control output; a power output unit operable based on the control output from the driving unit to output a voltage output at an output side coupled across a first winding wound around the electromagnetic steel sheet such that an exciting current flowing through the first winding is generated in response to the voltage output, thereby resulting in an induced voltage across a second winding wound around the electromagnetic steel sheet; and a measuring unit outputting to the control unit an output corresponding to the exciting current and the induced voltage measured thereby such that the control unit obtains the electromagnetic characteristics of the electromagnetic steel sheet based on the output.

Abstract translation: 一种用于测试电磁钢板的电磁特性的系统，包括：驱动单元，其基于来自控制单元的非正弦波控制信号和浮动电压进行操作，以输出控制输出; 功率输出单元，其基于来自所述驱动单元的控制输出可操作，以输出耦合在围绕所述电磁钢板的第一绕组上的输出侧的电压输出，使得响应于所述第一绕组而产生流过所述第一绕组的励磁电流 电压输出，从而在缠绕在电磁钢板上的第二绕组上产生感应电压; 以及测量单元，向控制单元输出与由其测量的励磁电流和感应电压相对应的输出，使得控制单元基于输出获得电磁钢板的电磁特性。