Abstract:
The present invention relates to a sapphire/gallium nitride laminate, wherein a curvature radius thereof is positioned on the right side of a first curve plotted from the following functional formula (I): Y=Y0+A·e−(x−1)/T (I) wherein Y is the curvature radius (m) of a sapphire/gallium nitride laminate, X is the thickness (μm) of a gallium nitride film, Y0 is 5.47±0.34, A is 24.13±0.50, and T is 0.56±0.04. The inventive laminate can be advantageously used in the manufacture of a high quality electronic device.
Abstract translation:蓝宝石/氮化镓层压板本发明涉及蓝宝石/氮化镓层压板,其曲率半径位于从以下功能式(I)绘制的第一曲线的右侧:<?in-line-formula description =“In-line 公式“end =”lead“?> Y = Y <0> Ae - (x-1)/ T(I)<?in-line-formula description =” 其中Y是蓝宝石/氮化镓层叠体的曲率半径(μm),X是氮化镓膜的厚度(mum),Y <0 sub >为5.47±0.34,A为24.13±0.50,T为0.56±0.04。 本发明的层压板可以有利地用于制造高质量的电子设备。
Abstract:
The present invention relates to a gallium nitride/sapphire thin film, wherein a curvature radius thereof is positioned on the right side of a curve plotted from the following functional formula (I): Y=Y0+A·e−(x1−1)/T1+B·(1−e−x2/T2) (I) wherein Y is the curvature radius (m) of a gallium nitride/sapphire thin film, x1 is the thickness (μm) of a gallium nitride layer, x2 is the thickness (mm) of a sapphire substrate, Y0 is −107±2.5, A is 24.13±0.50, B is 141±4.5, T1 is 0.56±0.04, and T2 is 0.265±0.5.
Abstract translation:本发明涉及一种氮化镓/蓝宝石薄膜,其曲率半径位于从以下函数式(I)绘制的曲线的右侧:<?in-line-formula description =“In-line 公式“end =”lead“?> Y = Y0 + Ae-(x 1)/ T + B。(1-ex / sub2> / T 2 sub2>)(I)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中Y是a的曲率半径 氮化镓/蓝宝石薄膜,x1是氮化镓层的厚度(mum),x2是蓝宝石衬底的厚度(mm),Y0为-107±2.5,A为24.13±0.50,B为141±4.5 ,T1为0.56±0.04,T2为0.265±0.5。
Abstract:
The present invention relates to a gallium nitride/sapphire thin film, wherein a curvature radius thereof is positioned on the right side of a curve plotted from the following functional formula (I): Y=Y0+A·e−(x1−1)/T1+B·(1−e−x2/T2) (I) wherein Y is the curvature radius (m) of a gallium nitride/sapphire thin film, x1 is the thickness (μm) of a gallium nitride layer, x2 is the thickness (mm) of a sapphire substrate, Y0 is −107±2.5, A is 24.13±0.50, B is 141±4.5, T1 is 0.56±0.04, and T2 is 0.265±0.5.
Abstract:
A nitride semiconductor template having nano-voids at an interface between a substrate having one embossed surface and a nitride semiconductor layer can be rapidly prepared by hydride vapor phase epitaxy (HVPE) growth of the nitride semiconductor layer on the embossed surface of the substrate.