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1.发明申请公开(公告)号：US20130122707A1
公开(公告)日：2013-05-16
申请号：US13656589
申请日：2012-10-19
申请人： Daisuke Shimizu , Jong Mun Kim
发明人： Daisuke Shimizu , Jong Mun Kim
IPC分类号： H01L21/31 , H01L21/302
CPC分类号： H01L21/02118 , B05D1/62 , B05D5/00 , H01L21/02274 , H01L21/0273 , H01L21/0332 , H01L21/0337
摘要： Methods of polymer deposition for forming reduced critical dimensions are described. In one embodiment, a substrate is provided into a chamber, the substrate having a patterned layer disposed on an underlying layer formed thereon. The patterned layer includes a plurality of openings, each opening having a sidewall, a bottom, and a critical dimension. A gas mixture is provided into the chamber, the gas mixture having an etching gas and a polymer control gas. The polymer control gas includes a polymerizing fluorocarbon CxFy gas and a C—H bond containing gas. A plasma is formed with the gas mixture and a conformal polymer layer is deposited in the presence of the plasma on the patterned layer to form a reduced critical dimension in each opening. The reduced critical dimension is smaller than the corresponding critical dimension of the opening.
摘要翻译： 描述了用于形成降低的临界尺寸的聚合物沉积的方法。 在一个实施例中，将衬底提供到腔室中，衬底具有设置在其上形成的下层上的图案层。 图案化层包括多个开口，每个开口具有侧壁，底部和临界尺寸。 气体混合物被提供到室中，气体混合物具有蚀刻气体和聚合物控制气体。 聚合物控制气体包括聚合碳氟化合物CxFy气体和含C-H键的气体。 用气体混合物形成等离子体，并且在等离子体存在下在图案化层上沉积保形聚合物层，以在每个开口中形成减小的临界尺寸。 减小的临界尺寸小于开口的相应临界尺寸。
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公开(公告)号：US08205849B2
公开(公告)日：2012-06-26
申请号：US12396742
申请日：2009-03-03
申请人： Daisuke Shimizu
发明人： Daisuke Shimizu
IPC分类号： A47G29/00
CPC分类号： F16M11/10 , F16M11/18 , F16M11/2014 , F16M2200/08 , Y10S248/917 , Y10S248/919 , Y10S248/923
摘要： This display screen turning apparatus includes a first support member of metal supporting a display screen portion and a second support member of metal supporting the first support member to be anteroposteriorly rotatable by a prescribed angle with respect to a vertical plane, and either the first support member or the second support member has a receiving hole, while either the second support member or the first support member integrally has a platelike support shaft of metal inserted into the receiving hole.
摘要翻译： 该显示屏幕转动装置包括支撑显示屏部分的金属的第一支撑构件和支撑第一支撑构件的金属的第二支撑构件，以相对于垂直平面前后旋转预定角度，以及第一支撑构件 或第二支撑构件具有接收孔，而第二支撑构件或第一支撑构件整体地具有插入到容纳孔中的金属板状支撑轴。
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公开(公告)号：US07940428B2
公开(公告)日：2011-05-10
申请号：US11652038
申请日：2007-01-11
申请人： Daisuke Shimizu
发明人： Daisuke Shimizu
CPC分类号： B65H1/14 , B65H2402/31 , B65H2403/40 , B65H2403/51 , B65H2405/11162
摘要： A push-up member of this image generating apparatus includes a first push-up member integrally having a first assembly engaging portion provided between a first spring clip portion and a first engaging portion and a second push-up member integrally having a second assembly engaging portion rotatably engaging with the first assembly engaging portion, and the first engaging portion and the second engaging portion are engaged with each other in assembling by engaging the first assembly engaging portion and the second assembly engaging portion with each other while mounting first and second ends of a spring member on the first push-up member and the second push-up member respectively and rotating the second push-up member about the engaging position between the first assembly engaging portion and the second assembly engaging portion against urging force of the spring member.
摘要翻译： 该图像产生装置的上推构件包括第一上推构件，该第一上推构件整体地具有设置在第一弹簧夹部分和第一接合部分之间的第一组合接合部分和一体地具有第二组合接合部分的第二上推构件 可旋转地与第一组合件接合部分接合，并且第一接合部分和第二接合部分通过将第一组件接合部分和第二组件接合部分彼此接合而相互接合，同时安装第一和第二接合部分的第一和第二端部 分别在第一上推构件和第二上推构件上弹性构件，并且克服弹簧构件的推压力使第二上推构件围绕第一组合件接合部分和第二组合件接合部分之间的接合位置旋转。
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4.发明授权公开(公告)号：US07644920B2
公开(公告)日：2010-01-12
申请号：US11217314
申请日：2005-09-02
IPC分类号： B65H9/16
CPC分类号： B65H3/5215 , B65H3/06 , B65H2511/22
摘要： The image forming apparatus includes a chassis, a paper guide, a paper feed roller, and a paper supply portion from which the paper feed roller is configured to supply paper. The paper guide is supported within the chassis and has a base portion and a first separation portion that projects from the base portion. The paper feed roller is rotatably supported by the chassis. The paper supply portion has a guide projection on its first lateral side portion. The widthwise center of the paper feed roller is offset toward the first lateral side relative to the widthwise center of the first separation portion.
摘要翻译： 图像形成装置包括底盘，纸张引导件，进纸辊和供纸部，供纸辊从该供纸部构成供纸。 纸引导件支撑在底盘内，并且具有从基部突出的基部和第一分离部。 供纸辊由底盘可旋转地支撑。 供纸部在其第一侧面侧具有引导突起。 供纸辊的宽度方向中心相对于第一分离部分的宽度方向中心偏向第一侧面。
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公开(公告)号：US20090274977A1
公开(公告)日：2009-11-05
申请号：US12519519
申请日：2008-01-08
CPC分类号： C07C39/17 , C07C43/23 , C07C69/712 , G03F7/004 , G03F7/0392 , Y10S430/115 , Y10S430/12 , Y10S430/122
摘要： A compound shown by the following formula (1) can be used as a material for a radiation-sensitive composition capable of forming a resist film which effectively responds to electron beams or the like, exhibits low roughness, and can form a high precision minute pattern in a stable manner.
摘要翻译： 由下式（1）表示的化合物可以用作能够形成有效响应电子束等的抗蚀剂膜的放射线敏感性组合物的材料，显示出低的粗糙度，并且可以形成高精度的微小图案 以稳定的方式。
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公开(公告)号：US07488566B2
公开(公告)日：2009-02-10
申请号：US11391257
申请日：2006-03-29
申请人： Takayuki Tsuji , Tomoki Nagai , Kentarou Harada , Daisuke Shimizu
发明人： Takayuki Tsuji , Tomoki Nagai , Kentarou Harada , Daisuke Shimizu
CPC分类号： G03F7/0045 , G03F7/0392 , Y10S430/114
摘要： A positive type radiation-sensitive resin composition suitable as a chemically-amplified resist sensitive to active radiation particularly to deep ultraviolet rays represented by a KrF excimer laser, an ArF excimer laser, or an F2 excimer laser, excelling particularly in a process margin for the KrF excimer laser is provided. The positive type radiation-sensitive resin composition comprises a photoacid generator and an acid-labile group-containing resin which is insoluble or scarcely soluble in alkali, but becomes alkali-soluble by the action of an acid, wherein the photoacid generator is a mixed photoacid generator containing a photoacid generator of the following formula (1) and a photoacid generator which is at least one compound selected from sulfonyloxyimide and disulfonyldiazomethane.
摘要翻译： 适合作为对活性辐射敏感的化学放大抗蚀剂的正型辐射敏感性树脂组合物，特别是由KrF准分子激光器，ArF准分子激光器或F2准分子激光器表示的深紫外线，特别优选在 提供KrF准分子激光器。 正型辐射敏感性树脂组合物包含光酸产生剂和不溶于或几乎不溶于碱的酸不稳定基团的树脂，但通过酸的作用而变成碱溶性，其中光酸产生剂是混合的光酸 含有下式（1）的光致酸产生剂和光酸产生剂，其为选自磺酰氧基酰亚胺和二磺酰基重氮甲烷中的至少一种化合物。
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公开(公告)号：US20080272534A1
公开(公告)日：2008-11-06
申请号：US12110066
申请日：2008-04-25
申请人： Daisuke Shimizu
发明人： Daisuke Shimizu
IPC分类号： B65H1/04
CPC分类号： B65H1/266 , B65H2405/1134 , B65H2405/115 , B65H2405/31
摘要： In this image generating apparatus, a paper cassette mounted on an apparatus body includes a pressing portion employed for pressing a first side surface of a paper rearward with respect to a first direction for feeding the paper and so arranged that the distance from a second roller is smaller than the length of the paper in the first direction when the paper cassette is mounted on the apparatus body.
摘要翻译： 在该图像生成装置中，安装在装置主体上的纸盒包括用于将纸张的第一侧表面相对于用于供给纸的第一方向向后方按压的按压部，并且布置成距离第二辊的距离为 小于当纸盒安装在设备主体上时纸张在第一方向上的长度。
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公开(公告)号：US20060166138A1
公开(公告)日：2006-07-27
申请号：US11340741
申请日：2006-01-27
IPC分类号： G03C1/76
CPC分类号： C09D125/18 , C08F8/12 , C08F212/14 , C08K5/42 , C08K5/43 , G03F7/0392 , C08F212/08
摘要： A radiation-sensitive resin composition is provided which exhibits improved resolution, sensitivity, and focal depth allowance (process margin) and can eliminate development residues when forming a resist pattern. The radiation-sensitive resin composition comprises an acid-labile group-containing resin (A) which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator (B), the acid-labile group-containing resin (A) comprises a copolymer prepared by anionic polymerization of monomers including a substituted or unsubstituted styrene and have a terminal shown by the following formula (x). wherein R14 and R15 individually represent a hydrogen atom or a linear or branched saturated hydrocarbon group having 1-6 carbon atoms.
摘要翻译： 提供了一种辐射敏感性树脂组合物，其表现出改进的分辨率，灵敏度和焦深度余量（工艺余量），并且可以在形成抗蚀剂图案时消除显影残留。 该辐射敏感性树脂组合物包含不溶于碱性或几乎不溶于碱的酸不稳定基团的树脂（A），但通过酸作用而变成碱溶性的光致酸性发生剂（B），酸不稳定性 含有基团的树脂（A）包含由包含取代或未取代的苯乙烯的单体的阴离子聚合制备的共聚物，并且具有下式（x）所示的末端。 其中R 14和R 15各自表示氢原子或具有1-6个碳原子的直链或支链饱和烃基。
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公开(公告)号：US06990939B2
公开(公告)日：2006-01-31
申请号：US10655591
申请日：2003-09-05
申请人： Katsuji Wada , Kazuya Yamamoto , Daisuke Shimizu
发明人： Katsuji Wada , Kazuya Yamamoto , Daisuke Shimizu
IPC分类号： F01L1/34
CPC分类号： F02D13/0219 , F01L1/3442 , F01L13/0026 , F01L2013/0073 , F02D13/0261 , F02D41/006 , F02D41/0065 , F02D2041/001 , F02M26/01 , F02M26/48 , Y02T10/18 , Y02T10/47
摘要： There is provided a valve timing control system for an internal combustion engine, which makes it possible to secure a right amount of combustion gases in a combustion chamber, irrespective of whether an EGR device is in operation or not, thereby obtaining a sufficient effect of reduced exhaust emissions by reduction of NOx. A crank angle position sensor and an intake pipe absolute pressure sensor detect operating conditions of the engine. An ECU determines whether the EGR device is in operation or not. A target cam phase is set in dependence on the detected operating conditions of the engine and a result of the determination as to whether the EGR device is in operation or not, and the cam phase is controlled to the target cam phase.
摘要翻译： 提供了一种用于内燃机的气门正时控制系统，其使得可以在燃烧室中确保适量的燃烧气体，而不管EGR装置是否在运行，从而获得足够的减小的效果 通过减少NOx排放废气。 曲柄角位置传感器和进气管绝对压力传感器检测发动机的运行状况。 ECU判断EGR装置是否在运转。 目标凸轮相位根据检测到的发动机的运转状态和关于EGR装置是否运转的判定结果而设定，凸轮相位被控制到目标凸轮相位。
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公开(公告)号：US5913299A
公开(公告)日：1999-06-22
申请号：US906998
申请日：1997-08-06
申请人： Daisuke Shimizu , Norio Suzuki
发明人： Daisuke Shimizu , Norio Suzuki
CPC分类号： F02D41/1486 , F02D41/068 , F02D41/1475 , F02D41/1498 , F02D2200/1015 , F02D41/1456
摘要： There is provided a fuel supply control system for an internal combustion engine installed on an automotive vehicle. The engine has an exhaust system, and an exhaust gas-purifying device arranged in the exhaust system. A start of the engine is detected. A combustion stability of the engine is detected. The air-fuel ratio of a mixture supplied to the engine is leaned over a predetermined time period from the start of the engine depending on the detected combustion stability.
摘要翻译： 提供了一种用于安装在机动车辆上的内燃机的燃料供应控制系统。 发动机具有排气系统和布置在排气系统中的废气净化装置。 检测到发动机的起动。 检测发动机的燃烧稳定性。 供给发动机的混合物的空燃比根据检测到的燃烧稳定性而从发动机起动起预定的时间段倾斜。
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