公开(公告)号：US20060291312A1

公开(公告)日：2006-12-28

申请号：US11494027

申请日：2006-07-27

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： G11C7/02

CPC分类号： H03F3/45183 ,  H03F1/08 ,  H03F1/14 ,  H03F3/45273 ,  H03F2203/45264 ,  H03F2203/45332

摘要： The frequency and transient responses of a CMOS differential amplifier are improved by employing one or more compensating capacitors. A compensating capacitor coupled to a differential input of the CMOS differential amplifier is used to inject current into the differential input, such that the net current flow through the gate-to-drain capacitance of a MOS input transistor approaches zero. Thus, the Miller effect with respect to that MOS input transistor is substantially reduced or eliminated, resulting in increased frequency and transient responses for the CMOS differential amplifier. In one embodiment, the CMOS differential amplifier is a CMOS current mirror differential amplifier.

摘要翻译： CMOS差分放大器的频率和瞬态响应通过采用一个或多个补偿电容来改善。 耦合到CMOS差分放大器的差分输入的补偿电容器用于将电流注入到差分输入端中，使得通过MOS输入晶体管的栅 - 漏电容的净电流流过零。 因此，相对于该MOS输入晶体管的米勒效应被显着降低或消除，导致CMOS差分放大器的频率和瞬态响应增加。 在一个实施例中，CMOS差分放大器是CMOS电流镜差分放大器。

公开(公告)号：US20060268140A1

公开(公告)日：2006-11-30

申请号：US11135520

申请日：2005-05-24

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H04N5/335

CPC分类号： H04N5/378 ,  H04N5/3575 ,  H04N5/3651

摘要： A technique for reducing 1/f noise in an imager, in which the source follower transistor in a pixel circuit is turned off prior to a correlated double sampling (CDS) operation, thereby reducing 1/f noise in the source follower transistor for up to 100 ms. The source follower transistor is then reactivated and a CDS operation and readout is performed normally. This technique substantially reduces the contributions of 1/f noise. The invention also provides a reduction of 1/f noise in an analog amplifier circuit which may process pixel output signals, or more generally, other analog signals, whereby the analog amplifier is turned off during an amplifier reset operation prior to signal amplification. The analog amplifier circuit may be a differential amplifier or a switched capacitor analog amplifier circuit.

摘要翻译： 用于降低成像器中1 / f噪声的技术，其中像素电路中的源极跟随器晶体管在相关双采样（CDS）操作之前被截止，从而减少源极跟随器晶体管中的1 / f噪声，直到 100毫秒 源极跟随器晶体管然后被重新激活，并且正常执行CDS操作和读出。 该技术大大降低了1 / f噪声的贡献。 本发明还提供可以处理像素输出信号或更一般地，其它模拟信号的模拟放大器电路中的1 / f噪声的减小，由此在信号放大之前的放大器复位操作期间模拟放大器被关断。 模拟放大器电路可以是差分放大器或开关电容器模拟放大器电路。

公开(公告)号：US20060261896A1

公开(公告)日：2006-11-23

申请号：US11493966

申请日：2006-07-27

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H03F1/14

CPC分类号： H03F3/45183 ,  H03F1/08 ,  H03F1/14 ,  H03F3/45273 ,  H03F2203/45264 ,  H03F2203/45332

摘要： The frequency and transient responses of a CMOS differential amplifier are improved by employing one or more compensating capacitors. A compensating capacitor coupled to a differential input of the CMOS differential amplifier is used to inject current into the differential input, such that the net current flow through the gate-to-drain capacitance of a MOS input transistor approaches zero. Thus, the Miller effect with respect to that MOS input transistor is substantially reduced or eliminated, resulting in increased frequency and transient responses for the CMOS differential amplifier. In one embodiment, the CMOS differential amplifier is a CMOS current mirror differential amplifier.

公开(公告)号：US06248485B1

公开(公告)日：2001-06-19

申请号：US09356638

申请日：1999-07-19

申请人： John David Cuthbert

发明人： John David Cuthbert

IPC分类号： G03F900

CPC分类号： G03F7/70625

摘要： A method and controller for controlling a process and system for patterning a feature in a photoresist on a semiconductor wafer. The present invention characterizes various components (both individually and collectively) of an image transfer system, including the illumination source, lens and product reticle, with regard to dimensional errors introduced into the image transfer process by these components. The collective error data or information provided in accordance with the present invention may be communicated to the image transfer system to control the image transfer system and the image transfer process and to ensure that the actual dimension of features patterned in the photoresist are within acceptable dimensional limits for these features.

摘要翻译： 一种用于控制用于图案化半导体晶片上的光致抗蚀剂中的特征的工艺和系统的方法和控制器。 本发明的特征在于涉及通过这些部件引入到图像转印过程中的尺寸误差的包括照明源，透镜和产品掩模版的图像传送系统的各种组件（单独地和集体地）。 根据本发明提供的集体误差数据或信息可以被传送到图像传送系统以控制图像传输系统和图像传送过程，并且确保在光致抗蚀剂中图案化的特征的实际尺寸在可接受的尺寸限度内 对于这些功能。

公开(公告)号：US4050821A

公开(公告)日：1977-09-27

申请号：US726603

申请日：1976-09-27

申请人： John David Cuthbert ,  David Farnham Munro

发明人： John David Cuthbert ,  David Farnham Munro

IPC分类号： G01B11/02 ,  G01B11/28 ,  G01N21/22

CPC分类号： G01B11/28 ,  G01B11/02

摘要： Very rapid and accurate linewidth measurements in selected subregions of an LSI mask or wafer are made by means of a low-cost apparatus. The apparatus embodies the recognition that an accurate linewidth determination can be made for any particular feature among a variety of features in a repeated array by a calibrated and normalized measurement of the average light transmission or reflection of a subregion that includes the feature. In turn, the measurement is automatically converted to a linewidth reading by analog computing circuitry.

摘要翻译： 通过低成本设备制造在LSI掩模或晶片的选定子区域中的非常快速和准确的线宽测量。 该装置体现了通过对包括特征的子区域的平均光透射或反射的校准和归一化测量，可以对重复阵列中的各种特征中的任何特征进行精确线宽确定的认识。 反过来，测量由模拟计算电路自动转换为线宽读数。

公开(公告)号：US3944369A

公开(公告)日：1976-03-16

申请号：US473233

申请日：1974-05-24

申请人： John David Cuthbert ,  Delmer Lee Fehrs ,  David Farnham Munro

发明人： John David Cuthbert ,  Delmer Lee Fehrs ,  David Farnham Munro

IPC分类号： G01N21/956 ,  G01B11/24

CPC分类号： G01N21/95607

摘要： In an optical comparison inspection system a single beam from a scanning light source is split to produce a pair of synchronously scanning focused light beams. One of the beams is directed onto a reference, light affecting patterned workpiece and the other beam is directed onto a similar patterned workpiece to be inspected. Both workpieces are mounted in optically equivalent positions on a traverse table which has a direction of travel orthogonal to parallel planes containing the scanning light beams. Pattern differences are represented by differences in photodetected representations of the two light beams, which are intensity modulated by the patterned workpieces. By electronically gating preselected combinations of the two modulated signals with circuitry employing multiple threshold detection elements, a resultant signal is produced which enables allowable edge aberrations to be discriminated from unacceptable defects in the patterns. Suitable display of the resultant signal permits an operator to rapidly ascertain both the number and location of only unacceptable defects.

摘要翻译： 在光学比较检查系统中，来自扫描光源的单个光束被分割以产生一对同步扫描的聚焦光束。 一个光束被引导到参考光，影响图案化的工件的光，另一个光束被引导到待检查的类似的图案化工件上。 两个工件安装在横向工作台上的光学等效位置上，该横动台具有与包含扫描光束的平行平面垂直的行进方向。 图案差异由两个光束的光电检测表示的差异表示，两个光束被图案化工件强度调制。 通过使用多个阈值检测元件的电路将两个调制信号的预选组合电门选通，产生得到的信号，其使允许的边缘像差与图案中不可接受的缺陷区分开。 所得信号的适当显示允许操作者快速地确定仅有不可接受的缺陷的数量和位置。

公开(公告)号：US20080007359A1

公开(公告)日：2008-01-10

申请号：US11900812

申请日：2007-09-13

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H03B5/24

CPC分类号： H03K3/3545 ,  G06F1/10 ,  H03K5/14 ,  H03K5/15013

摘要： One aspect relates to an oscillator, and various oscillator embodiments comprise an amplifier and line driver with an input and an output and a transmission line with a predetermined transmission signal time delay. The output is adapted to produce an inverted signal with respect to a signal received at the input. The transmission line has a first end connected to the output and a second end connected to the input. Other aspects and embodiments are provided herein.

摘要翻译： 一个方面涉及振荡器，并且各种振荡器实施例包括具有输入和输出的放大器和线路驱动器以及具有预定传输信号时间延迟的传输线。 该输出适于产生相对于在输入处接收到的信号的反相信号。 传输线具有连接到输出的第一端和连接到输入的第二端。 本文提供了其它方面和实施例。

公开(公告)号：US20070182482A1

公开(公告)日：2007-08-09

申请号：US11728537

申请日：2007-03-26

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H03F1/36

CPC分类号： H03F3/005 ,  H03F1/26 ,  H03F1/38 ,  H03F3/45183 ,  H03F2203/45166 ,  H03F2203/45224 ,  H03F2203/45514 ,  H03F2203/45551 ,  H03F2203/45674 ,  H03F2203/45722

摘要： The present invention comprises switched capacitor amplifiers including positive feedback on semiconductor devices, wafers, and systems incorporating same and methods for amplifying signals using positive feedback, while maintaining a stable gain and producing an improved signal-to-noise ratio. One embodiment includes a switched capacitor amplifier comprising a CMOS amplifier, a feed-in switched capacitor, and a feedback switched capacitor. The feed-in switched capacitor couples an input signal to the non-inverting input of the CMOS amplifier. Similarly, the feedback switched capacitor couples the amplifier output to the non-inverting input to create a positive feedback loop. A capacitance of the feedback switched capacitor relative to a capacitance of the feed-in switched capacitor comprises a feedback proportion. This feedback proportion may be configured to maintain a stable gain of the switched capacitor amplifier and increase a signal-to-noise ratio of the switched capacitor amplifier, even with the switched capacitor amplifier in a positive feedback arrangement.

摘要翻译： 本发明包括开关电容放大器，其包括对半导体器件的正反馈，晶圆及其结合的系统以及使用正反馈放大信号的方法，同时保持稳定的增益并产生改善的信噪比。 一个实施例包括具有CMOS放大器，馈入开关电容器和反馈开关电容器的开关电容放大器。 馈入开关电容将输入信号耦合到CMOS放大器的非反相输入。 类似地，反馈开关电容器将放大器输出耦合到非反相输入端以产生正反馈回路。 反馈开关电容器相对于馈入开关电容器的电容的电容包括反馈比例。 该反馈比例可以被配置为保持开关电容放大器的稳定增益，并且即使开关电容放大器处于正反馈布置中，也可提高开关电容放大器的信噪比。

公开(公告)号：US20070139115A1

公开(公告)日：2007-06-21

申请号：US11699953

申请日：2007-01-30

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H03F3/45

CPC分类号： H03F3/45183 ,  H03F1/08 ,  H03F1/14 ,  H03F3/45273 ,  H03F2203/45264 ,  H03F2203/45332

摘要： The frequency and transient responses of a CMOS differential amplifier are improved by employing one or more compensating capacitors. A compensating capacitor coupled to a differential input of the CMOS differential amplifier is used to inject current into the differential input, such that the net current flow through the gate-to-drain capacitance of a MOS input transistor approaches zero. Thus, the Miller effect with respect to that MOS input transistor is substantially reduced or eliminated, resulting in increased frequency and transient responses for the CMOS differential amplifier. In one embodiment, the CMOS differential amplifier is a CMOS current mirror differential amplifier.

公开(公告)号：US20070046385A1

公开(公告)日：2007-03-01

申请号：US11215665

申请日：2005-08-29

申请人： Leonard Forbes ,  David Cuthbert

发明人： Leonard Forbes ,  David Cuthbert

IPC分类号： H03B5/18

CPC分类号： H03K3/3545 ,  G06F1/10 ,  H03K5/14 ,  H03K5/15013

摘要： One aspect relates to an oscillator, and various oscillator embodiments comprise an amplifier and line driver with an input and an output and a transmission line with a predetermined transmission signal time delay. The output is adapted to produce an inverted signal with respect to a signal received at the input. The transmission line has a first end connected to the output and a second end connected to the input. Other aspects and embodiments are provided herein.