公开(公告)号：US08623765B2

公开(公告)日：2014-01-07

申请号：US12542063

申请日：2009-08-17

申请人： Jun Ozawa ,  Gaku Takahashi

发明人： Jun Ozawa ,  Gaku Takahashi

IPC分类号： H01L21/306 ,  H01L21/67

CPC分类号： H01L21/67207 ,  C23C16/54 ,  H01L21/67063 ,  H01L21/67069 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67201

摘要： A processed object processing apparatus which enables a plurality of processes to be carried out efficiently. A plurality of treatment systems are communicably connected together in a line and in which the objects to be processed are processed. A load lock system is communicably connected to the treatment systems and has a transfer mechanism that transfers the objects to be processed into and out of each of the treatment systems. At least one of the treatment systems is a vacuum treatment system, and the load lock system is disposed in a position such as to form a line with the treatment systems.

摘要翻译： 一种能够有效地执行多个处理的处理对象处理装置。 多个处理系统以一行的方式可通信地连接在一起，并且处理被处理物体。 负载锁定系统可通信地连接到处理系统，并且具有将被处理物体转移到每个处理系统中的传送机构。 处理系统中的至少一个是真空处理系统，并且负载锁定系统被设置在与处理系统形成线的位置。

公开(公告)号：US07435984B2

公开(公告)日：2008-10-14

申请号：US11456115

申请日：2006-07-07

申请人： Koichi Sentoku ,  Gaku Takahashi ,  Hideki Ina ,  Yoshinori Miwa

发明人： Koichi Sentoku ,  Gaku Takahashi ,  Hideki Ina ,  Yoshinori Miwa

IPC分类号： G01N21/86

CPC分类号： G03F7/70883 ,  G02B13/143 ,  G02B17/0844 ,  G03F7/70275 ,  G03F9/7096

摘要： An imaging optical system for imaging a pattern of an object plane onto an image plane includes a first imaging optical system for imaging at a first imaging position, the first imaging optical system having a magnification α in a vacuum atmosphere, and a second imaging optical system for imaging at a second imaging position, the second imaging optical system having a magnification β in the vacuum atmosphere, wherein when an environment in which the imaging optical system is placed changes from the vacuum atmosphere to an air atmosphere or vise versa, a direction of the first imaging position that moves along an optical axis is opposite to a direction of the second imaging position that moves along the optical axis.

摘要翻译： 用于将物平面图案成像到图像平面上的成像光学系统包括用于在第一成像位置成像的第一成像光学系统，具有在真空气氛中的α倍的第一成像光学系统和第二成像光学系统 为了在第二成像位置进行成像，第二成像光学系统在真空气氛中具有放大率β，其中当放置成像光学系统的环境从真空气氛改变到空气气氛或反之亦然时，方向 沿着光轴移动的第一成像位置与沿着光轴移动的第二成像位置的方向相反。

公开(公告)号：US20090301525A1

公开(公告)日：2009-12-10

申请号：US12542063

申请日：2009-08-17

申请人： Jun OZAWA ,  Gaku Takahashi

发明人： Jun OZAWA ,  Gaku Takahashi

IPC分类号： B08B5/04

CPC分类号： H01L21/67207 ,  C23C16/54 ,  H01L21/67063 ,  H01L21/67069 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67201

摘要： A processed object processing apparatus which enables a plurality of processes to be carried out efficiently. A plurality of treatment systems are communicably connected together in a line and in which the objects to be processed are processed. A load lock system is communicably connected to the treatment systems and has a transfer mechanism that transfers the objects to be processed into and out of each of the treatment systems. At least one of the treatment systems is a vacuum treatment system, and the load lock system is disposed in a position such as to form a line with the treatment systems.

摘要翻译： 一种能够有效地执行多个处理的处理对象处理装置。 多个处理系统以一行的方式可通信地连接在一起，并且处理被处理物体。 负载锁定系统可通信地连接到处理系统，并且具有将被处理物体转移到每个处理系统中的传送机构。 处理系统中的至少一个是真空处理系统，并且负载锁定系统被设置在与处理系统形成线的位置。

公开(公告)号：US20070007471A1

公开(公告)日：2007-01-11

申请号：US11456115

申请日：2006-07-07

申请人： Koichi SENTOKU ,  Gaku Takahashi ,  Hideki Ina ,  Yoshinori Miwa

发明人： Koichi SENTOKU ,  Gaku Takahashi ,  Hideki Ina ,  Yoshinori Miwa

IPC分类号： G01N21/86

CPC分类号： G03F7/70883 ,  G02B13/143 ,  G02B17/0844 ,  G03F7/70275 ,  G03F9/7096

摘要： An imaging optical system for imaging a pattern of an object plane onto an image plane includes a first imaging optical system for imaging at a first imaging position, the first imaging optical system having a magnification α in a vacuum atmosphere, and a second imaging optical system for imaging at a second imaging position, the second imaging optical system having a magnification β in the vacuum atmosphere, wherein when an environment in which the imaging optical system is placed changes from the vacuum atmosphere to an air atmosphere or vise versa, a direction of the first imaging position that moves along an optical axis is opposite to a direction of the second imaging position that moves along the optical axis.

摘要翻译： 用于将物平面图案成像到图像平面上的成像光学系统包括用于在第一成像位置成像的第一成像光学系统，具有在真空气氛中的α倍的第一成像光学系统和第二成像光学系统 为了在第二成像位置进行成像，第二成像光学系统在真空气氛中具有放大率β，其中当放置成像光学系统的环境从真空气氛改变到空气气氛或反之亦然时，方向 沿着光轴移动的第一成像位置与沿着光轴移动的第二成像位置的方向相反。

公开(公告)号：US07586582B2

公开(公告)日：2009-09-08

申请号：US11462175

申请日：2006-08-03

申请人： Hideki Ina ,  Koichi Sentoku ,  Gaku Takahashi ,  Yoshinori Miwa

发明人： Hideki Ina ,  Koichi Sentoku ,  Gaku Takahashi ,  Yoshinori Miwa

IPC分类号： G03B27/42

CPC分类号： G03F9/7026 ,  G03F9/7046 ,  G03F9/7088 ,  G03F9/7096

摘要： At least one exemplary embodiment is directed to an exposure apparatus which includes a chamber, an evacuating device configured to evacuate the chamber, a sensor configured to measure at least any one of the position and the height of a substrate, and a cover for hermetically sealing at least part of the sensor.

摘要翻译： 至少一个示例性实施例涉及一种曝光装置，其包括腔室，被构造成抽空腔室的抽空装置，构造成测量基底的位置和高度中的至少任何一个的传感器，以及用于气密密封的盖 传感器的至少一部分。

公开(公告)号：US20070035708A1

公开(公告)日：2007-02-15

申请号：US11462175

申请日：2006-08-03

申请人： Hideki Ina ,  Koichi Sentoku ,  Gaku Takahashi ,  Yoshinori Miwa

发明人： Hideki Ina ,  Koichi Sentoku ,  Gaku Takahashi ,  Yoshinori Miwa

IPC分类号： G03B27/52

CPC分类号： G03F9/7026 ,  G03F9/7046 ,  G03F9/7088 ,  G03F9/7096

摘要： At least one exemplary embodiment is directed to an exposure apparatus which includes a chamber, an evacuating device configured to evacuate the chamber, a sensor configured to measure at least any one of the position and the height of a substrate, and a cover for hermetically sealing at least part of the sensor.

摘要翻译： 至少一个示例性实施例涉及一种曝光装置，其包括腔室，构造成抽空腔室的抽空装置，构造成测量基底的位置和高度中的至少任何一个的传感器和用于气密密封的盖 传感器的至少一部分。