Thin film transistor, production method thereof and liquid crystal display device
    1.
    发明申请
    Thin film transistor, production method thereof and liquid crystal display device 审中-公开
    薄膜晶体管及其制造方法和液晶显示装置

    公开(公告)号:US20060267015A1

    公开(公告)日:2006-11-30

    申请号:US11411119

    申请日:2006-04-26

    Abstract: A gate electrode of a thin film transistor is composed by a three layer structure obtained by laminating a titanium nitride layer as an upper layer on an aluminum layer as a base layer and by laminating an unalloyed titanium layer as a lower layer under the base layer. An ion implantation is used as an ion doping into a source region and drain region as an active layer of the thin film transistor. The source region and the drain region are annealed at a low temperature of 350° C. to 450° C. to be activated. A chemical reaction between the base layer and the upper layer and between the base layer and the lower layer can be suppressed. The rise of the resistance value in the gate electrode can be suppressed. The resistance of the gate electrode can be reduced. The fluctuation of the threshold voltage of the thin film transistor can be suppressed.

    Abstract translation: 薄膜晶体管的栅极由通过在作为基底层的铝层上层叠氮化钛层作为上层而获得的三层结构,并且在基底层下层叠作为下层的非合金化钛层而构成。 使用离子注入作为源极区和漏极区中的离子掺杂作为薄膜晶体管的有源层。 源极区域和漏极区域在350℃至450℃的低温下退火以被激活。 可以抑制基层与上层之间以及基层与下层之间的化学反应。 可以抑制栅电极中的电阻值的上升。 可以减小栅电极的电阻。 可以抑制薄膜晶体管的阈值电压的波动。

    Control method of strip travel and tandem strip rolling mill
    3.
    发明授权
    Control method of strip travel and tandem strip rolling mill 失效
    钢带行走和串联钢带轧机控制方法

    公开(公告)号:US5722279A

    公开(公告)日:1998-03-03

    申请号:US436351

    申请日:1995-07-06

    CPC classification number: B21B37/68

    Abstract: A control method of strip travel for ensuring, in a tandem rolling operation for metal strips, stable positioning of rolled work during the rolling process including the rolling of the leading and trailing ends of the work, and a tandem rolling mill in which the method is used are disclosed. In the control method of strip travel for the tandem strip rolling equipment comprising at least two roll stands and including between the roll stands a rolled work tension measuring device having independent tension detectors on both working and driving sides and a lateral position measuring device for measuring the lateral position of rolled work, the lateral position of the rolled work at the position of the rolled work tension measuring device is detected directly or estimated from an output of the lateral position measuring device, a tension difference representing the difference between tensions actually acting on the working and driving sides of the rolled work at the position of the rolled work tension measuring device is computed from the detected or estimated lateral position and the outputs of the working-side and driving-side detectors of the rolled work tension measuring device, and the difference between screwdown settings on the working and driving sides of each roll stand is controlled aiming at reducing the tension difference to zero.

    Abstract translation: PCT No.PCT / JP94 / 01522 Sec。 371日期:1995年7月6日 102(e)日期1995年7月6日PCT 1994年9月14日PCT公布。 出版物WO95 / 07776 日期1995年3月23日一种剥离行进的控制方法,用于确保在金属带的串列轧制操作中,在轧制过程中轧制工件的稳定定位,包括工件的前端和后端的轧制以及串联轧机 公开了使用该方法的方法。 在包括至少两个辊架并且包括在辊架之间的串联带轧制设备的带材行进控制方法中,在工作和驱动侧上具有独立的张力检测器的轧制作业张力测量装置和用于测量 轧制作业的横向位置,轧制作业张力测量装置的位置处的轧制工件的横向位置被直接检测或从横向位置测量装置的输出估计,表示实际作用于 根据轧制作业张力测量装置的工作侧和驱动侧检测器的检测或估计的横向位置和输出来计算在轧制作业张力测量装置的位置处的轧制工作的工作和驱动侧, 每个卷的工作和驾驶侧的拧紧设置之间的差异 控制目标是将张力差减小到零。

Patent Agency Ranking