Chemical solution feeding apparatus and method for preparing slurry

    公开(公告)号:US20080214005A1

    公开(公告)日:2008-09-04

    申请号:US12076168

    申请日:2008-03-14

    IPC分类号: H01L21/461

    摘要: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

    Chemical solution feeding apparatus and method for preparing slurry

    公开(公告)号:US06659634B2

    公开(公告)日:2003-12-09

    申请号:US10282116

    申请日:2002-10-29

    IPC分类号: E03B100

    摘要: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

    Chemical solution feeding apparatus and method for preparing slurry
    3.
    发明授权
    Chemical solution feeding apparatus and method for preparing slurry 有权
    化学溶液进料装置及其制备方法

    公开(公告)号:US07419946B2

    公开(公告)日:2008-09-02

    申请号:US10662450

    申请日:2003-09-16

    IPC分类号: B24B37/04

    摘要: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

    摘要翻译: 一种用于将浆料供给到外部装置的装置。 该装置包括用于制备浆料的制备罐。 循环管连接到制备罐以使浆料循环。 供料管连接在准备罐和外部装置之间,以使外部装置与浆料一起供给。 泵将制剂罐中的化学溶液送至循环管和进料管。 浓度检测器布置在泵的下游以检测浆料的浓度。 控制器根据浓度检测器的检测值控制制剂罐中化学溶液的浓度,并控制化学溶液的供给。

    System and method for continuously reprocessing waste sulfuric acid liquid, and heater supporting structure for heating a vessel made of glass
    4.
    发明授权
    System and method for continuously reprocessing waste sulfuric acid liquid, and heater supporting structure for heating a vessel made of glass 失效
    用于连续处理废硫酸液体的系统和方法,以及由玻璃制成的加热容器的加热器支撑结构

    公开(公告)号:US06477323B2

    公开(公告)日:2002-11-05

    申请号:US09049895

    申请日:1998-03-30

    IPC分类号: F24H120

    CPC分类号: F24H9/1818 C01B17/88

    摘要: A heating vessel for concentration is formed in an elongated one, and a baffle plate is arranged to increase sulfuric acid liquid concentration at an outlet to a high level. The heating vessel for concentration and a heating vessel for distillation are installed so that the respective heating vessels have substantially the same waste sulfuric acid liquid level therein, forming continuous flow of the sulfuric acid liquid without presence of a valve or an intermediate tank in a connecting pipe. The heating vessel for distillation is formed in an elongated one with a baffle plate arranged therein to increase the impurity concentration included in concentrated sulfuric acid liquid at an outlet to a high level. In addition, a heater inserted into a heating vessel made of glass is supported at two locations of an inserting portion and a leading portion of the heating vessel formed as a bulged portion, reducing stress concentration to the heater supporting portion due to vibration of the liquid in the heating vessel and vibration of the heating vessel per se.

    摘要翻译: 用于浓缩的加热容器形成为细长的加热容器,并且设置挡板以将出口处的硫酸液体浓度提高到高水平。 用于浓缩的加热容器和用于蒸馏的加热容器被安装成使得各个加热容器在其中具有大致相同的废硫酸液位,在连接中不形成阀或中间罐的情况下形成硫酸液体的连续流动 管。 用于蒸馏的加热容器形成为具有布置在其中的挡板的细长的加热容器,以将出口处的浓硫酸液体中的杂质浓度增加到高水平。 此外,插入到由玻璃制成的加热容器中的加热器被支撑在形成为凸出部分的加热容器的插入部分和引导部分的两个位置处,由于液体的振动而减小了对加热器支撑部分的应力集中 在加热容器和加热容器本身的振动。

    Chemical solution feeding apparatus and method for preparing slurry
    5.
    发明授权
    Chemical solution feeding apparatus and method for preparing slurry 有权
    化学溶液进料装置及其制备方法

    公开(公告)号:US07863195B2

    公开(公告)日:2011-01-04

    申请号:US12076168

    申请日:2008-03-14

    IPC分类号: B24B37/04

    摘要: An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

    摘要翻译: 一种用于将浆料供给到外部装置的装置。 该装置包括用于制备浆料的制备罐。 循环管连接到制备罐以使浆料循环。 供料管连接在准备罐和外部装置之间,以便向浆料供给外部装置。 泵将制剂罐中的化学溶液送至循环管和进料管。 浓度检测器布置在泵的下游以检测浆料的浓度。 控制器根据浓度检测器的检测值控制制剂罐中化学溶液的浓度,并控制化学溶液的供给。

    Apparatus and method for distilling waste liquids
    7.
    发明授权
    Apparatus and method for distilling waste liquids 有权
    蒸馏废液的设备和方法

    公开(公告)号:US07232504B2

    公开(公告)日:2007-06-19

    申请号:US10301782

    申请日:2002-11-22

    IPC分类号: B01D3/42

    摘要: A distilling apparatus and method use a two step distillation and purification process for processing a waste liquid, such as an impure sulfuric acid solution, to form a highly concentrated sulfuric acid solution. First, the waste liquid is stored in a concentrating column, where it is heated. A condenser, which uses the waste liquid as a cooling medium, condenses the vapor generated by the heater. The condensed vapor is passed through a filter, which separates impurities out of the waste liquid, prior to feeding the waste liquid back into the concentrating column. Water is then removed from the waste liquid via a distilling process. The resulting concentrated liquid is then fed to a purifying column, where it is again heated, to remove residue, and condensed, resulting in a highly pure waste liquid. The liquid level and physical state of the waste liquid in both the concentrating column and the purifying column are monitored to insure that only an optimum amount of waste liquid for distillation is stored in each of the columns.

    摘要翻译: 蒸馏装置和方法使用两步蒸馏和净化方法来处理诸如不纯的硫酸溶液的废液,以形成高浓度的硫酸溶液。 首先,将废液储存在加热的浓缩塔中。 使用废液作为冷却介质的冷凝器冷凝由加热器产生的蒸气。 在将废液送入浓缩塔之前,冷凝的蒸气通过过滤器,该过滤器将杂质从废液中分离出来。 然后通过蒸馏过程从废液中除去水。 然后将所得浓缩液体进料至纯化塔,再次加热,除去残留物并冷凝,得到高纯度废液。 监测浓缩塔和净化塔中废液的液面和物理状态,以确保只有最佳量的用于蒸馏的废液被储存在每个塔中。