公开(公告)号：US20070262428A1

公开(公告)日：2007-11-15

申请号：US11433435

申请日：2006-05-15

申请人： Jeffery Summers

发明人： Jeffery Summers

IPC分类号： H01L21/00

CPC分类号： H01L23/26 ,  B81B7/0038 ,  G01J5/045 ,  H01L2924/0002 ,  H01L2924/09701 ,  Y10T29/41 ,  H01L2924/00

摘要： A method for providing improved gettering in a vacuum encapsulated device is described The method includes forming a plurality of small indentation features in a device cavity formed in a lid wafer. The gettering material is then deposited over the indentation features. The indentation features increase the surface area of the getter material, thereby increasing the volume of gas that the getter material can absorb. This may improve the vacuum maintained within the vacuum cavity over the lifetime of the vacuum encapsulated device.

摘要翻译： 描述了一种用于在真空封装装置中提供改进的吸气的方法。该方法包括在形成在盖子晶片中的器件空腔中形成多个小凹陷特征。 然后将吸气材料沉积在压痕特征上。 凹陷特征增加吸气材料的表面积，从而增加吸气剂材料可吸收的气体体积。 这可以在真空密封装置的寿命期内改善在真空腔内保持的真空。

公开(公告)号：US20070048898A1

公开(公告)日：2007-03-01

申请号：US11304601

申请日：2005-12-16

申请人： Gregory Carlson ,  David Erlach ,  Alok Paranjpye ,  Jeffery Summers

发明人： Gregory Carlson ,  David Erlach ,  Alok Paranjpye ,  Jeffery Summers

IPC分类号： H01L21/00

CPC分类号： B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate, along with a raised feature formed on the first or the second substrate. At least one of the metal layers may be deposited conformally over the raised feature. The raised feature penetrates the molten material of the first or the second metal layers during formation of the alloy, and produces a spectrum of stoichiometries for the formation of the desired alloy, as a function of the distance from the raised feature. At some distance from the raised feature, the proper ratio of the first metal to the second metal exists to form an alloy of the preferred stoichiometry.

摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封是由两个金属层的合金形成的，一个沉积在第一基板上，另一个沉积在第二基板上，以及形成在第一或第二基板上的凸起特征。 至少一个金属层可以在凸起特征上保形地沉积。 凸起的特征​​在形成合金期间渗透第一或第二金属层的熔融材料，并且作为与凸起特征的距离的函数产生用于形成所需合金的化学计量谱。 在与凸起特征相距一定距离处，存在第一金属与第二金属的适当比率以形成优选化学计量的合金。

公开(公告)号：US20070048887A1

公开(公告)日：2007-03-01

申请号：US11211622

申请日：2005-08-26

申请人： David Erlach ,  Jeffery Summers ,  Douglas Thompson

发明人： David Erlach ,  Jeffery Summers ,  Douglas Thompson

IPC分类号： H01L21/00

CPC分类号： B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  Y10T29/5317

摘要： Systems and methods for forming an encapsulated MEMS device include a hermetic seal which seals an insulating gas between two substrates, one of which supports the MEMS device. The hermetic seal may be formed by heating at least two metal layers, in order to melt at least one of the metal layers. The first melted metal material flows into and forms an alloy with a second metal material, forming a hermetic seal which encapsulates the MEMS device.

摘要翻译： 用于形成封装的MEMS器件的系统和方法包括密封两个衬底之间的绝缘气体的气密密封件，其中之一支撑MEMS器件。 可以通过加热至少两个金属层来形成气密密封，以便熔化至少一个金属层。 第一熔化的金属材料流入并与第二金属材料形成合金，形成封装MEMS装置的气密密封。

公开(公告)号：US20060063307A1

公开(公告)日：2006-03-23

申请号：US11272689

申请日：2005-11-15

申请人： Patrick Feierabend ,  John Foster ,  Richard Martin ,  Paul Rubel ,  John Stocker ,  Jeffery Summers ,  Andrew Wallis

发明人： Patrick Feierabend ,  John Foster ,  Richard Martin ,  Paul Rubel ,  John Stocker ,  Jeffery Summers ,  Andrew Wallis

IPC分类号： G02B6/26

CPC分类号： B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electromechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

摘要翻译： 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US20070215448A1

公开(公告)日：2007-09-20

申请号：US11378340

申请日：2006-03-20

申请人： Alok Paranjpye ,  Jeffery Summers

发明人： Alok Paranjpye ,  Jeffery Summers

IPC分类号： H01H1/00 ,  H01H11/00

CPC分类号： B81B3/0024 ,  B81B2201/018 ,  B81B2201/0278 ,  H01H2037/008 ,  H01H2061/008 ,  Y10T29/49105 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/53248

摘要： A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.

摘要翻译： 公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。 刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳 具有很大的剪切力。 结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

公开(公告)号：US20050003631A1

公开(公告)日：2005-01-06

申请号：US10866123

申请日：2004-06-12

申请人： Patrick Feierabend ,  Richard Martin ,  Jeffery Summers ,  Andrew Wallis ,  Paul Rubel ,  John Foster ,  John Stocker

发明人： Patrick Feierabend ,  Richard Martin ,  Jeffery Summers ,  Andrew Wallis ,  Paul Rubel ,  John Foster ,  John Stocker

IPC分类号： G02B6/35 ,  H01L21/30 ,  H01L21/44 ,  H01L29/06

CPC分类号： B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

摘要翻译： 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US20110132922A1

公开(公告)日：2011-06-09

申请号：US12581874

申请日：2009-10-19

申请人： Jeffery Summers ,  Cody Summers

发明人： Jeffery Summers ,  Cody Summers

IPC分类号： A47G19/22 ,  B67D7/58

CPC分类号： A47G19/2266 ,  A47G21/18 ,  A47G2400/027 ,  B67D1/0004 ,  B67D1/10

摘要： Apparatuses are disclosed for a small group to drink a potable liquid, such as an alcoholic beverage, or other beverage. A container preferably made of glass, metal, and/or ceramic material, and having an aperture, is provided to accommodate the potable liquid. A substance with a selected temperature is added to the container. A prefilled canister of potable liquid can then be inserted through the aperture so that the canister comes in contact with the first substance, whereby the selected temperature of the substance is allowed to influence the temperature of the canister, and thus the temperature of the potable liquid as well. A dispenser assembly with one or more hoses, pumps, and mouthpieces are also provided. Each such hose, pump, and mouthpiece facilitates a corresponding consumer in consuming the potable liquid. In a preferred embodiment, the pump dispenses a predetermined volume of the beverage to the consumer in a controlled unidirectional flow.

摘要翻译： 公开了用于小组饮用诸如酒精饮料或其他饮料的饮用液体的装置。 提供优选由玻璃，金属和/或陶瓷材料制成并且具有孔的容器以容纳饮用液体。 将具有选定温度的物质添加到容器中。 然后，可以将预先填充的饮用液体罐插入孔中，使得罐与第一物质接触，从而允许物质的选定温度影响罐的温度，并因此影响饮用液体的温度 以及。 还提供了具有一个或多个软管，泵和吸嘴的分配器组件。 每个这样的软管，泵和接口器件有助于相应的消费者消费饮用液体。 在优选实施例中，泵以受控的单向流量将预定体积的饮料分配给消费者。

公开(公告)号：US20070045781A1

公开(公告)日：2007-03-01

申请号：US11211625

申请日：2005-08-26

申请人： Gregory Carlson ,  Jeffery Summers

发明人： Gregory Carlson ,  Jeffery Summers

IPC分类号： H01L23/58 ,  H01L21/469

CPC分类号： B81B7/007 ,  H01L23/10 ,  H01L23/49894 ,  H01L2924/16235

摘要： A hermetic interconnect is fabricated on a substrate by forming a stud of conductive material over a metallization layer, and then overcoating the stud of conductive material and the metallization layer with a layer of compliant dielectric material. In one embodiment, the layer of compliant dielectric material is low Young's modulus silicon dioxide, formed by sputter-deposition at low temperature, in a low pressure argon atmosphere. The interconnect may provide electrical access to a micromechanical device, which is enclosed with a capping wafer hermetically sealed to the substrate with an AuInx alloy bond.

摘要翻译： 通过在金属化层上形成导电材料柱，然后用导电材料柱和金属化层用柔性电介质材料层覆盖，在衬底上制造气密互连。 在一个实施例中，柔性介电材料层是低杨氏模量二氧化硅，通过在低温氩气气氛中在低温下溅射沉积而形成。 互连可以提供对微机械装置的电接入，该微机械装置用与金属合金接头密封在衬底上的封盖晶片封闭。

公开(公告)号：US20060186128A1

公开(公告)日：2006-08-24

申请号：US11060935

申请日：2005-02-18

申请人： Jeffery Summers

发明人： Jeffery Summers

IPC分类号： A47G19/22

CPC分类号： B67D1/0004 ,  A47G19/2266 ,  A47G21/18 ,  A47G2400/027 ,  B67D1/10

摘要： Apparatus are disclosed for a small group to drink a beverage, such as an alcoholic beverage. A container preferably made of glass or ceramic material holds the beverage and includes at least one aperture. A plurality of flexible hoses are provided, each hose of sufficient length for installation extending through the aperture so that a proximal end of each hose is located inside the container to access the beverage and a distal end of each hose is located outside the container for a corresponding use to drink from the container by applying suction. A preferred embodiment also includes a shot pump on the hose to dispense a predetermined volume of the beverage to the user in response to a squeeze and release action.

摘要翻译： 公开了用于小组喝饮料的装置，例如酒精饮料。 优选由玻璃或陶瓷材料制成的容器保持饮料并且包括至少一个孔。 提供多个柔性软管，每个软管具有足够的长度，用于安装延伸穿过孔，使得每个软管的近端位于容器内部以接近饮料，并且每个软管的远端位于容器的外部，用于 相应的用途是通过吸力从容器中饮用。 优选实施例还包括在软管上的喷射泵，以响应于挤压和释放动作向使用者分配预定量的饮料。

公开(公告)号：US20070238262A1

公开(公告)日：2007-10-11

申请号：US11390085

申请日：2006-03-28

申请人： Jeffery Summers

发明人： Jeffery Summers

IPC分类号： H01L21/46

CPC分类号： H01L23/10 ,  B81C1/00269 ,  B81C2203/0109 ,  B81C2203/019 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

摘要： A material for bonding a lid wafer to a device wafer, which includes an adhesive substance with rigid particles embedded in the adhesive substance. The rigid particles may be particles or spheres of alumina, silica, or diamond, for example. The adhesive substance may be glass frit, epoxy, glue, cement or solder, for example. When the adhesive is applied and melted, and pressure is applied between the lid wafer and the device wafer, the lid wafer approaches the device wafer until a minimum separation is reached, which is defined by the rigid particles.

摘要翻译： 用于将盖晶片接合到器件晶片的材料，其包括具有嵌入粘合物质中的刚性粒子的粘合物质。 刚性颗粒可以是例如氧化铝，二氧化硅或金刚石的颗粒或球体。 粘合剂物质可以是例如玻璃料，环氧树脂，胶水，水泥或焊料。 当粘合剂被施加和熔化并且在盖晶片和器件晶片之间施加压力时，盖晶片接近器件晶片，直到达到由刚性粒子限定的最小间隔。