公开(公告)号：US08062422B2

公开(公告)日：2011-11-22

申请号：US12371138

申请日：2009-02-13

申请人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

发明人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

IPC分类号： C30B25/02

CPC分类号： C23C16/45544 ,  C23C16/18 ,  C23C16/34 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/4482 ,  C23C16/4487 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

摘要： Embodiments described herein are directed to an apparatus for generating a precursor for a semiconductor processing system. In one embodiment, an apparatus for generating a precursor gas during a vapor deposition process is described. The apparatus includes a canister containing an interior volume between a lid and a bottom, a gaseous inlet and a gaseous outlet disposed on the lid, a plurality of silos coupled to the bottom and extending from a lower region to an upper region of the interior volume, and a tantalum precursor having a chlorine concentration of about 5 ppm or less contained within the lower region of the canister.

摘要翻译： 本文描述的实施例涉及用于产生半导体处理系统的前体的装置。 在一个实施例中，描述了在气相沉积工艺期间产生前体气体的装置。 该装置包括容纳盖和底部之间的内部容积的容器，设置在盖上的气体入口和气体出口，与底部相连并从内部容积的下部区域延伸到上部区域的多个筒仓 ，以及包含在罐的下部区域内的氯浓度为约5ppm以下的钽前体。

公开(公告)号：US06905541B2

公开(公告)日：2005-06-14

申请号：US10447255

申请日：2003-05-27

申请人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

发明人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

IPC分类号： C23C16/18 ,  C23C16/34 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  H01L21/31 ,  C30B25/02

CPC分类号： C23C16/45544 ,  C23C16/18 ,  C23C16/34 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/4482 ,  C23C16/4487 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

摘要： A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The method additionally may include depositing a seed layer over the barrier layer and depositing a conductive layer over the seed layer. The precursor generally includes pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The precursor is generated in a canister having a surrounding heating element configured to reduce formation of impurities.

摘要翻译： 用于填充衬底中的特征的前体和方法。 该方法通常包括沉积阻挡层，阻挡层由具有小于约5ppm氯的五（二甲基氨基）钽形成。 该方法另外可以包括在阻挡层上沉积种子层并在种子层上沉积导电层。 前体通常包括具有小于约5ppm氯的五（二甲基氨基）钽。 在具有周围加热元件的罐中产生前体，该加热元件被配置为减少杂质的形成。

公开(公告)号：US07597758B2

公开(公告)日：2009-10-06

申请号：US11849125

申请日：2007-08-31

申请人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

发明人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

IPC分类号： C30B23/08

CPC分类号： C23C16/45544 ,  C23C16/18 ,  C23C16/34 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/4482 ,  C23C16/4487 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

摘要： Embodiments of the invention provide chemical precursor ampoules that may be used during vapor deposition processes. In one embodiment, an apparatus for generating a chemical precursor gas used in a vapor deposition processing system is provided which includes a canister having a sidewall, a top, and a bottom forming an interior volume and a solid precursor material at least partially contained within a lower region of the interior volume. The apparatus further contains an inlet port and an outlet port in fluid communication with the interior volume and an inlet tube connected to the inlet port and positioned to direct a carrier gas towards the sidewall and away form the outlet port. In one example, the solid precursor contains pentakis(dimethylamido) tantalum (PDMAT). In another example, the apparatus contains a plurality of baffles that form an extended mean flow path between the inlet port and the outlet port.

摘要翻译： 本发明的实施方案提供可在气相沉积工艺期间使用的化学前体安瓿。 在一个实施例中，提供了一种用于产生在气相沉积处理系统中使用的化学前体气体的装置，其包括具有侧壁，顶部和形成内部容积的底部的罐，以及固体前体材料，其至少部分地包含在 内部体积的较低区域。 该装置还包括与内部空间流体连通的入口端口和出口端口，以及连接到入口端口的入口管，并且定位成将载气朝向侧壁引导并从出口端口移开。 在一个实例中，固体前体含有五（二甲基氨基）钽（PDMAT）。 在另一示例中，该装置包含多个挡板，其在入口和出口之间形成延伸的平均流动路径。

公开(公告)号：US07588736B2

公开(公告)日：2009-09-15

申请号：US11383642

申请日：2006-05-16

申请人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

发明人： Ling Chen ,  Vincent W. Ku ,  Hua Chung ,  Christophe Marcadal ,  Seshadri Ganguli ,  Jenny Lin ,  Dien-Yeh Wu ,  Alan Ouye ,  Mei Chang

IPC分类号： F27B15/08

CPC分类号： C23C16/45544 ,  C23C16/18 ,  C23C16/34 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/4482 ,  C23C16/4487 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

摘要： Embodiments of an apparatus for generating a chemical precursor used in a vapor deposition processing system are provide which include a canister having a sidewall, a top, and a bottom forming an interior volume which is in fluid communication with an inlet port and an outlet port. The canister contains a plurality of baffles that extend from the bottom to an upper portion of the interior volume and form an extended mean flow path between the inlet port and the outlet port. In one embodiment, the baffles are contained on a prefabricated insert positioned on the bottom of the canister. In one example, an inlet tube may extend from the inlet port into the interior region and be positioned substantially parallel to the baffles. An outlet end of the inlet tube may be adapted to direct a gas flow away from the outlet port, such as towards the sidewall or top of the canister.

摘要翻译： 提供了一种用于生成在气相沉积处理系统中使用的化学前体的装置的实施例，其包括具有侧壁，顶部和底部的罐，该罐形成与入口端口和出口端口流体连通的内部容积。 罐包含多个挡板，其从内部容积的底部延伸到上部，并且在入口和出口之间形成延伸的平均流动路径。 在一个实施例中，挡板包含在位于罐底部的预制插入件上。 在一个示例中，入口管可以从入口端口延伸到内部区域中并且基本平行于挡板定位。 入口管的出口端可以适于将气流引导离开出口，例如朝向罐的侧壁或顶部。

公开(公告)号：US20070151861A1

公开(公告)日：2007-07-05

申请号：US11682005

申请日：2007-03-05

申请人： MING XI ,  Paul Smith ,  Ling Chen ,  Michael Yang ,  Mei Chang ,  Fusen Chen ,  Christophe Marcadal ,  Jenny Lin

发明人： MING XI ,  Paul Smith ,  Ling Chen ,  Michael Yang ,  Mei Chang ,  Fusen Chen ,  Christophe Marcadal ,  Jenny Lin

IPC分类号： C23C28/00 ,  C23C28/02

CPC分类号： H01L21/76804 ,  C25D5/02 ,  H01L21/2855 ,  H01L21/28556 ,  H01L21/28562 ,  H01L21/76831 ,  H01L21/76843 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76877 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： Embodiments of the present invention provide a process sequence and related hardware for filling a patterned feature on a substrate with a metal, such as copper. The sequence comprises first forming a reliable barrier layer in the patterned feature to prevent diffusion of the metal into the dielectric layer through which the patterned feature is formed. One sequence comprises forming a generally conformal barrier layer over a patterned dielectric, etching the barrier layer at the bottom of the patterned feature, depositing a second barrier layer, and then filling the patterned feature with a metal, such as copper.

摘要翻译： 本发明的实施例提供了用金属（例如铜）在衬底上填充图案化特征的工艺顺序和相关硬件。 序列包括首先在图案化特征中形成可靠的阻挡层，以防止金属扩散到通过其形成图案化特征的电介质层。 一个序列包括在图案化电介质上形成大致共形的阻挡层，在图案化特征的底部蚀刻阻挡层，沉积第二阻挡层，然后用诸如铜的金属填充图案化的特征。

公开(公告)号：US5856655A

公开(公告)日：1999-01-05

申请号：US062229

申请日：1998-04-16

申请人： Jenny Lin

发明人： Jenny Lin

IPC分类号： D06F75/26 ,  H05B1/02

CPC分类号： D06F75/26

摘要： A power control device for a pressing iron includes a position sensor that has a casing, an optical coupler and a shielding plate. The optical coupler is mounted in a lower part of the casing, and has a photoemitter and a photoreceiver that faces the photoemitter and that forms a clearance therewith. The shielding plate is received in the casing, and has an upper plate portion pivoted to an upper part of the casing, and a lower plate portion that extends into the clearance of the optical coupler. The lower plate portion is formed with a notch to permit light transmission between the photoemitter and the photoreceiver when the pressing iron is in an ironing position. The shielding plate pivots by virtue of gravity such that the notch is moved out of alignment with the photoemitter and the photoreceiver, and such that the lower plate portion blocks the light transmission between the photoemitter and the photoreceiver when the pressing iron is in a resting position.

摘要翻译： 用于熨烫熨斗的电力控制装置包括具有壳体，光耦合器和屏蔽板的位置传感器。 光耦合器安装在壳体的下部，并且具有面向光电发射器并与其形成间隙的光电转换器和光接收器。 屏蔽板被容纳在壳体中，并且具有枢转到壳体的上部的上板部分和延伸到光耦合器的间隙中的下板部分。 下板部形成有凹口，以在熨烫熨斗处于熨烫位置时允许光电转换器和光接收器之间的光透射。 屏蔽板由于重力而枢转，使得凹口移动离开发光器和光接收器不对准，并且当压熨铁处于静止位置时，下板部分阻挡光发射器和光接收器之间的光透射 。

公开(公告)号：US5829341A

公开(公告)日：1998-11-03

申请号：US81628

申请日：1998-05-19

申请人： Jenny Lin

发明人： Jenny Lin

IPC分类号： F24C7/02 ,  A21B7/00 ,  A47J27/62 ,  F24C7/04 ,  H05B6/68 ,  A47J27/00 ,  A47J37/01 ,  H05B1/02

CPC分类号： H05B6/6438 ,  A21B7/005 ,  H05B6/6435 ,  Y10S366/601

摘要： An automatic cooker is capable of cooking food according to automatic cooking data stored in a control card. The automatic cooker includes a cooking container for receiving raw food therein, a cooking implement assembly for performing at least one cooking operation on the food in the cooking container, a housing formed with a card slot for insertion of the control card, and a card-type controller mounted in the housing and connected to the cooking implement assembly. The controller receives removably the control card that is inserted from an exterior of the housing via the card slot, and reads the automatic cooking data stored in the control card so as to control operation of the cooking implement assembly in accordance with the automatic cooking data read from the control card in order to cook the food in the cooking container.

摘要翻译： 自动烹调器能够根据存储在控制卡中的自动烹饪数据烹饪食物。 自动烹调器包括用于在其中接收生食物的烹饪容器，用于对烹饪容器中的食物进行至少一次烹饪操作的烹饪器具组件，形成有用于插入控制卡的卡槽的壳体， 类型的控制器安装在壳体中并连接到烹饪器具组件。 控制器可移除地接收经由卡插槽从壳体的外部插入的控制卡，并读取存储在控制卡中的自动烹饪数据，以便根据读取的自动烹饪数据来控制烹饪器具组件的操作 从控制卡，以便在烹饪容器中烹饪食物。

公开(公告)号：US4763657A

公开(公告)日：1988-08-16

申请号：US34531

申请日：1987-04-06

申请人： Chen-Wei Chen ,  Jenny Lin

发明人： Chen-Wei Chen ,  Jenny Lin

IPC分类号： A61N1/34 ,  A61N1/36 ,  A61N1/00

CPC分类号： A61N1/36021 ,  A61N1/3756 ,  A61N1/403 ,  Y10S128/907

摘要： An electronic acupuncturer includes a casing having a handle stored with a low-frequency current generator and a head portion for fixing two acupuncturing conductors which are electrically connected with the positive and negative polarities of the current generator, and a heater also powered by the current generator adapted for producing heat auxiliarily thermally treating a patient as acupunctured by the two conductors.

摘要翻译： 电子针灸器包括具有存储有低频电流发生器的手柄的壳体和用于固定与电流发生器的正极性和负极性电连接的两个针刺导体的头部，以及还由电流发生器供电的加热器 适用于对由两根导体针刺的患者进行热辅助热处理。

公开(公告)号：US09611368B2

公开(公告)日：2017-04-04

申请号：US13879516

申请日：2011-10-17

申请人： Juchui Ray Lin ,  Jenny Lin

发明人： Juchui Ray Lin

IPC分类号： C08J5/22 ,  B01D67/00 ,  B01D69/10 ,  B01D71/28 ,  B01D71/82 ,  B01D61/42 ,  H01M8/1018

CPC分类号： C08J5/2275 ,  B01D61/422 ,  B01D67/0006 ,  B01D69/10 ,  B01D71/28 ,  B01D71/82 ,  B01D2323/34 ,  B01D2323/345 ,  B01D2323/36 ,  B01D2325/42 ,  C08J5/2206 ,  H01M8/1018 ,  H01M2300/0082 ,  Y02A20/134 ,  Y02P70/56

摘要： A method of making a monomer solution of styrene sulfonic acid or the pyridine salt of styrene sulfonic acid or mixtures of both in an organic solvent, said solution being suitable for producing cation exchange membranes. The method comprises the steps of dissolving a metal salt of styrene sulfonate in said organic solvent and pyridinium styrene sulfonate. The mixture solution is reacted under conditions that generate a salt byproduct precipitate and the reactant product solution is collected. Embodiments of the present invention provide for cation exchange membranes and processes for their manufacture. Membranes made by the processes described herein combine low resistance and high permselectivity which make them highly effective for membrane components in desalination of water by electrodialysis (ED), as a power generating sources in reverse electrodialysis and as separators in fuels cells.

公开(公告)号：US09540261B2

公开(公告)日：2017-01-10

申请号：US14433933

申请日：2013-03-15

申请人： EVOQUA WATER TECHNOLOGIES LLC ,  Jenny Lin

发明人： Juchui Ray Lin

IPC分类号： C02F1/46 ,  B01D61/46 ,  B01D67/00 ,  C08J5/22 ,  C08J7/04 ,  C02F1/469 ,  B01D61/44 ,  B01D61/48

CPC分类号： C02F1/4695 ,  B01D61/44 ,  B01D61/46 ,  B01D61/48 ,  B01D67/0088 ,  C08J5/2231 ,  C08J7/047 ,  C08J2333/14 ,  C08J2439/08 ,  C08J2483/06 ,  Y02W10/33 ,  Y02W10/37 ,  Y10T29/49886

摘要： Ion exchange membranes may include a polymeric microporous substrate, a cross-linked ion transferring polymeric layer on the substrate, and a hydrophobic coating on the cross-linked ion transferring polymer. The hydrophobic coating may comprise at least one of a weak base copolymer and an organosilicate compound.

摘要翻译： 离子交换膜可以包括聚合物微孔基底，基底上的交联离子转移聚合物层，以及交联离子转移聚合物上的疏水涂层。 疏水涂层可以包含弱碱共聚物和有机硅酸盐化合物中的至少一种。