公开(公告)号：US06495311B1

公开(公告)日：2002-12-17

申请号：US09528226

申请日：2000-03-17

申请人： Mahbub R. Khan ,  Jane Ellyn Nealis ,  Alfred Floyd Renaldo ,  John David Westwood

发明人： Mahbub R. Khan ,  Jane Ellyn Nealis ,  Alfred Floyd Renaldo ,  John David Westwood

IPC分类号： G03C556

CPC分类号： G11B5/3153 ,  G11B5/00813 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T428/1171 ,  Y10T428/1193

摘要： The magnetic tape recording head of the present invention is formed with magnetic poles that are comprised of a laminated NiFeN/FeN structure. The method for fabricating the magnetic poles utilizes an additive photolithographic technique including a bilayer liftoff resist. In this fabrication method magnetic pole trenches are formed in the bilayer liftoff resist such that an undercut exists in the liftoff layer. Thereafter, the laminated NiFeN/FeN structure is sputter deposited into the trench, followed by the wet chemical removal of the bilayer resist.

摘要翻译： 本发明的磁带记录头形成有由NiFeN / FeN层压体构成的磁极。 用于制造磁极的方法使用包括双层剥离抗蚀剂的附加光刻技术。 在该制造方法中，在双层剥离抗蚀剂中形成磁极沟槽，使得在剥离层中存在底切。 此后，将层压的NiFeN / FeN结构溅射沉积到沟槽中，随后湿化学除去双层抗蚀剂。

公开(公告)号：US6106679A

公开(公告)日：2000-08-22

申请号：US280482

申请日：1999-03-30

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  C23C14/34 ,  C11B5/127 ,  C11B5/187

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/012 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49046

摘要： A magnetic head is provided which has first and second notches in a first pole piece layer adjacent first and second corners at the base of a gap layer wherein the gap layer does not undercut a base of a second pole tip. Field regions of the first pole piece layer which extend from the first and second notches slope upwardly from the notches for protecting components below the first pole piece layer. In one aspect of the invention a method of defining the gap layer sputter deposition and ion milling steps are employed to form a protective layer on first and second side walls of the second pole tip so that unwanted portions of the gap layer can be removed without undercutting the gap layer below the base of the second pole tip. In another aspect of the invention a method of making the first and second notches by sputter deposition and etching are employed to define a protective layer with first and second openings where the first and second notches are to be formed following by ion milling which mills through the openings through the notches until the protective layer is consumed.

摘要翻译： 提供磁头，其在第一极片层中具有第一和第二凹口，邻近第一和第二角落在间隙层的基部，其中间隙层不会削弱第二极尖的基部。 第一极片层的从第一和第二凹口延伸的场区域从凹口向上倾斜以保护在第一极片层下方的部件。 在本发明的一个方面，采用限定间隙层溅射沉积和离子铣削步骤的方法，以在第二极尖的第一和第二侧壁上形成保护层，使得间隙层的不希望的部分可以在不切割的情况下被去除 间隙层位于第二极尖的底部下方。 在本发明的另一方面，采用通过溅射沉积和蚀刻制造第一和第二凹口的方法来限定具有第一和第二开口的保护层，其中第一和第二凹口将通过离子铣削形成， 开口穿过凹口，直到保护层消耗。

公开(公告)号：US5916423A

公开(公告)日：1999-06-29

申请号：US852083

申请日：1997-05-06

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  C23C14/34 ,  G11B5/127 ,  G11B5/187

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/012 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49046

摘要： A magnetic head is provided which has first and second notches in a first pole piece layer adjacent first and second corners at the base of a gap layer wherein the gap layer does not undercut a base of a second pole tip. Field regions of the first pole piece layer which extend from the first and second notches slope upwardly from the notches for protecting components below the first pole piece layer. In one aspect of the invention a method of defining the gap layer sputter deposition and ion milling steps are employed to form a protective layer on first and second side walls of the second pole tip so that unwanted portions of the gap layer can be removed without undercutting the gap layer below the base of the second pole tip. In another aspect of the invention a method of making the first and second notches by sputter deposition and etching are employed to define a protective layer with first and second openings where the first and second notches are to be formed following by ion milling which mills through the openings through the notches until the protective layer is consumed.

摘要翻译： 提供磁头，其在第一极片层中具有第一和第二凹口，邻近第一和第二角落在间隙层的基部，其中间隙层不会削弱第二极尖的基部。 第一极片层的从第一和第二凹口延伸的场区域从凹口向上倾斜以保护在第一极片层下方的部件。 在本发明的一个方面，采用限定间隙层溅射沉积和离子铣削步骤的方法，以在第二极尖的第一和第二侧壁上形成保护层，使得间隙层的不希望的部分可以在不切割的情况下被去除 间隙层位于第二极尖的底部下方。 在本发明的另一方面，采用通过溅射沉积和蚀刻制造第一和第二凹口的方法来限定具有第一和第二开口的保护层，其中第一和第二凹口将通过离子铣削形成， 开口穿过凹口，直到保护层消耗。

公开(公告)号：US5827414A

公开(公告)日：1998-10-27

申请号：US900771

申请日：1997-07-25

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： C23C14/34 ,  C23C14/35

CPC分类号： H01J37/3423 ,  C23C14/3407 ,  H01J37/3426

摘要： Disclosed is a target for a ferromagnetic sputtering apparatus formed of a single piece of ferromagnetic target material. The target has a circular central area, an annular outer area, and a plurality of interconnected slots of specified width in the single piece extending in circumferential directions about the central area, forming a plurality of specified width radial gaps between the circular central area and the annular outer area. The slots of the sputtering target may be arranged to provide tabs crossing the slots to provide structural support to the specified width slots.

摘要翻译： 公开了由单片铁磁靶材料形成的铁磁溅射装置的目标。 目标具有环形中心区域，环形外部区域和在单个区段中具有特定宽度的多个相互连接的狭槽，其围绕中心区域在圆周方向上延伸，在圆形中心区域和第二区域之间形成多个特定宽度的径向间隙 环形外部区域。 溅射靶的槽可以被布置成提供跨越槽的突出部，以向特定的宽度槽提供结构支撑。

公开(公告)号：US06902826B1

公开(公告)日：2005-06-07

申请号：US09642620

申请日：2000-08-18

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： B32B5/00 ,  B32B15/00 ,  C23C14/06 ,  C23C14/35 ,  C23C26/00 ,  C23C28/00

CPC分类号： C23C14/0676 ,  C23C14/0641 ,  C23C14/352 ,  C23C26/00 ,  C23C28/042 ,  C23C28/044 ,  C23C28/42 ,  C23C28/44 ,  Y10T428/11 ,  Y10T428/12611 ,  Y10T428/12861 ,  Y10T428/265

摘要： A film structure and deposition method for creating laminated Fe—M—N and Fe—M—O—N films which retain good anisotropy after HA annealing are provided. Interleaved layers of thin alumina laminations between the Fe—M—[O]—N layers and sublayer alumina nanolaminations within the Fe—M—[O]—N layers create stable magnetic anisotropy in the film. The magnetic anisotropy in the film survives HA annealing at hardbake resist curing conditions in wafer manufacturing processes for GMR magnetic recording heads.

摘要翻译： 提供了一种用于产生在HA退火后保持良好各向异性的层叠Fe-M-N和Fe-M-O-N膜的膜结构和沉积方法。 Fe-M- [O] -N层和Fe-M- [O] -N层内的亚层氧化铝Nanoaminations之间的薄氧化铝叠层的交织层在膜中产生稳定的磁各向异性。 在用于GMR磁记录头的晶片制造过程中，膜中的磁各向异性在耐硬化固化条件下经受HA退火。

公开(公告)号：US08982507B2

公开(公告)日：2015-03-17

申请号：US12879791

申请日：2010-09-10

申请人： Eric Meloche ,  Bin Lu ,  Lixin Jia ,  Jianhua Xue ,  John David Westwood ,  Mark Anthony Gubbins ,  Alexandru Cazacy

发明人： Eric Meloche ,  Bin Lu ,  Lixin Jia ,  Jianhua Xue ,  John David Westwood ,  Mark Anthony Gubbins ,  Alexandru Cazacy

IPC分类号： G11B5/127 ,  G11B5/31

CPC分类号： G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315

摘要： Data storage systems having barriers that may reduce erasure flux and increase write-ability are provided. Data storage systems include a writing element. The writing element has a write pole with a flare region. A magnetic flux barrier is located along the write pole flare region. The magnetic flux barrier is illustratively made from an in-plane magnetically anisotropic material that has an easy plane of magnetization. In another embodiment, a data storage system includes a writing element having an air bearing surface and a shield at the air bearing surface. The shield has a magnetic permeability of approximately zero. The shield illustratively includes alternating layers of positive and negative permeabilities. The shield optionally includes a plurality of shields that may include top, bottom, and side shields.

摘要翻译： 提供了具有可能减少擦除通量并增加写入能力的障碍的数据存储系统。 数据存储系统包括写入元件。 写入元件具有带闪光区域的写入极。 磁通势垒位于写磁极耀斑区域。 磁通势垒示意性地由具有易磁化平面的面内磁各向异性材料制成。 在另一个实施例中，数据存储系统包括具有空气轴承表面和在空气支承表面处的屏蔽的书写元件。 屏蔽具有大约零的磁导率。 屏蔽件示例性地包括正和负磁导率的交替层。 屏蔽件可选地包括可以包括顶部，底部和侧部屏蔽件的多个屏蔽件。

公开(公告)号：US20120063032A1

公开(公告)日：2012-03-15

申请号：US12879791

申请日：2010-09-10

申请人： Eric Meloche ,  Bin Lu ,  Lixin Jia ,  Jianhua Xue ,  John David Westwood ,  Mark Anthony Gubbins ,  Alexandru Cazacu

发明人： Eric Meloche ,  Bin Lu ,  Lixin Jia ,  Jianhua Xue ,  John David Westwood ,  Mark Anthony Gubbins ,  Alexandru Cazacu

IPC分类号： G11B5/127

CPC分类号： G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315

摘要： Data storage systems having barriers that may reduce erasure flux and increase write-ability are provided. Data storage systems include a writing element. The writing element has a write pole with a flare region. A magnetic flux barrier is located along the write pole flare region. The magnetic flux barrier is illustratively made from an in-plane magnetically anisotropic material that has an easy plane of magnetization. In another embodiment, a data storage system includes a writing element having an air bearing surface and a shield at the air bearing surface. The shield has a magnetic permeability of approximately zero. The shield illustratively includes alternating layers of positive and negative permeabilities. The shield optionally includes a plurality of shields that may include top, bottom, and side shields.

摘要翻译： 提供了具有可能减少擦除通量并增加写入能力的障碍的数据存储系统。 数据存储系统包括写入元件。 写入元件具有带闪光区域的写入极。 磁通势垒位于写磁极耀斑区域。 磁通势垒示意性地由具有易磁化平面的面内磁各向异性材料制成。 在另一个实施例中，数据存储系统包括具有空气轴承表面和在空气支承表面处的屏蔽的书写元件。 屏蔽具有大约零的磁导率。 屏蔽件示例性地包括正和负磁导率的交替层。 屏蔽件可选地包括可以包括顶部，底部和侧部屏蔽件的多个屏蔽件。

公开(公告)号：US06224719B1

公开(公告)日：2001-05-01

申请号：US09311238

申请日：1999-05-13

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： C23C1434

CPC分类号： G11B5/3903 ,  C23C14/0676 ,  G11B5/3109 ,  G11B5/313 ,  G11B5/3967 ,  Y10T29/49044

摘要： A shield and/or pole piece layer for a magnetoresistive (MR) head made of a high moment Fe—Al—N—O laminated film is disclosed. The Fe—Al—N—O laminated film is manufactured using N2O as the reactive gas, making a laminated film that has a high intrinsic anisotropic (HK) and can better withstand the processing fields employed during the various processing and annealing steps in the construction of the head. Accordingly, the magnetic domains of the first shield layer, the second shield layer and/or the pole piece layers do not change position from a desired parallel position to the ABS. By maintaining their parallel position, applied fields during the operation of the head, such as from the write head or the media, do not move the domain walls around to cause Barkhausen noise.

摘要翻译： 公开了一种用高磁矩Fe-Al-N-O层压薄膜制成的磁阻（MR）磁头的屏蔽和/或极片层。 使用N 2 O作为反应性气体制造Fe-Al-NO层压膜，制成具有高固有各向异性（HK）的层叠膜，并且能够更好地承受在各种加工和退火步骤期间所采用的加工领域 头。 因此，第一屏蔽层，第二屏蔽层和/或极片层的磁畴不会从位于ABS的期望的平行位置改变位置。 通过保持它们的平行位置，诸如从写头或介质的操作期间施加的磁场不会使畴壁移动以引起Barkhausen噪声。

公开(公告)号：US6163442A

公开(公告)日：2000-12-19

申请号：US268551

申请日：1999-03-15

申请人： Hardayal Singh Gill ,  Edward HinPong Lee ,  Michael Salo ,  Joseph Francis Smyth ,  John David Westwood ,  Samuel Wonder Yuan

发明人： Hardayal Singh Gill ,  Edward HinPong Lee ,  Michael Salo ,  Joseph Francis Smyth ,  John David Westwood ,  Samuel Wonder Yuan

IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  G11B19/04 ,  G11B5/127 ,  G11B5/33

CPC分类号： G11B5/3156 ,  G11B5/012 ,  G11B5/3113 ,  G11B5/3967 ,  G11B19/04 ,  G11B2005/0008

摘要： A high moment bilayer first pole piece layer of a write head has high magnetic stability for promoting read signal symmetry of a read sensor of a read head. The bilayer first pole piece layer has a first layer of nickel iron and a second layer of iron nitride. The iron nitride has a high magnetic moment for conducting more flux per volume than the nickel iron first layer. In a first aspect of the invention, the nickel iron first layer is highly stabilized by providing it with a negative magnetostriction so that a stress induced anisotropy (H.sub.K) supports an intrinsic uniaxial anisotropy (H.sub.K) of the nickel iron first layer. The iron nitride second layer is formed directly on the nickel iron first layer so that by magnetic coupling the iron nitride second layer has significantly improved magnetic stability. In a second aspect of the invention the iron nitride second layer is provided with a positive magnetostriction which still further increases the magnetic stability of the bilayer first pole piece layer. In a preferred embodiment a net magnetostriction is zero or near zero. Each aspect of the invention improves the asymmetry sigma of the read head.

摘要翻译： 写头的高倍数双层第一极片层具有高的磁稳定性，用于提高读取头的读取传感器的读取信号对称性。 双层第一极片层具有第一层镍铁和第二层氮化铁。 氮化铁具有高的磁矩，用于比镍铁第一层传导更多的磁通量。 在本发明的第一方面，镍铁第一层通过提供负磁致伸缩来高度稳定，使得应力诱导各向异性（HK）支持镍铁第一层的固有单轴各向异性（HK）。 氮化铁第二层直接形成在镍铁第一层上，使得通过磁耦合，氮化铁第二层具有显着提高的磁稳定性。 在本发明的第二方面，氮化铁第二层被提供有正磁致伸缩，其进一步增加了双层第一极片层的磁稳定性。 在优选实施例中，净磁致伸缩为零或接近零。 本发明的每个方面改善了读取头的不对称性。

公开(公告)号：US6072672A

公开(公告)日：2000-06-06

申请号：US281249

申请日：1999-03-30

申请人： John David Westwood

发明人： John David Westwood

IPC分类号： G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  G11B1/00

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/012 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49046

摘要： A magnetic head is provided which has first and second notches in a first pole piece layer adjacent first and second corners at the base of a gap layer wherein the gap layer does not undercut a base of a second pole tip. Field regions of the first pole piece layer which extend from the first and second notches slope upwardly from the notches for protecting components below the first pole piece layer. In one aspect of the invention a method of defining the gap layer sputter deposition and ion milling steps are employed to form a protective layer on first and second side walls of the second pole tip so that unwanted portions of the gap layer can be removed without undercutting the gap layer below the base of the second pole tip. In another aspect of the invention a method of making the first and second notches by sputter deposition and etching are employed to define a protective layer with first and second openings where the first and second notches are to be formed following by ion milling which mills through the openings through the notches until the protective layer is consumed.

摘要翻译： 提供磁头，其在第一极片层中具有第一和第二凹口，邻近第一和第二角落在间隙层的基部，其中间隙层不会削弱第二极尖的基部。 第一极片层的从第一和第二凹口延伸的场区域从凹口向上倾斜以保护在第一极片层下方的部件。 在本发明的一个方面，采用限定间隙层溅射沉积和离子铣削步骤的方法，以在第二极尖的第一和第二侧壁上形成保护层，使得间隙层的不希望的部分可以在不切割的情况下被去除 间隙层位于第二极尖的底部下方。 在本发明的另一方面，采用通过溅射沉积和蚀刻制造第一和第二凹口的方法来限定具有第一和第二开口的保护层，其中第一和第二凹口将通过离子铣削形成， 开口穿过凹口，直到保护层消耗。