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公开(公告)号：US20130048504A1
公开(公告)日：2013-02-28
申请号：US13221726
申请日：2011-08-30
摘要： Embodiments of the present invention include systems and methods for low-rate electrochemical (wet) etch that use a net cathodic current or potential. In particular, some embodiments achieve controlled etch rates of less than 0.1 nm/s by applying a small net cathodic current to a substrate as the substrate is submerged in an aqueous electrolyte. Depending on the embodiment, the aqueous electrolyte utilized may comprise the same type of cations as the material being etched from the substrate. Some embodiments are useful in etching thin film metals and alloys and fabrication of magnetic head transducer wafers.
摘要翻译： 本发明的实施例包括使用净阴极电流或电位的低速电化学（湿）蚀刻的系统和方法。 特别地，一些实施例通过在衬底被浸没在含水电解质中时将小的净阴极电流施加到衬底上来实现小于0.1nm / s的受控蚀刻速率。 根据实施例，所使用的水性电解质可以包括与从衬底上蚀刻的材料相同类型的阳离子。 一些实施例在蚀刻薄膜金属和合金以及制造磁头换能器晶片方面是有用的。
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2.发明授权Magnetic recording head with high saturation magnetic flux density CoNiFe thin film composition 失效磁记录头具有高饱和磁通密度CoNiFe薄膜组成公开(公告)号：US07333295B1
公开(公告)日：2008-02-19
申请号：US10815494
申请日：2004-03-31
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , C25D3/562 , C25D5/50 , C25D7/123 , G11B5/3109
摘要： A method and system for plating CoNiFe is disclosed. The method and system include providing a plating solution including hydroxymethyl-p-tolylsulfone and plating the CoNiFe film on a substrate in the plating solution. The plating solution is configured to provide a CoNiFe film having a high saturation magnetic flux density and having a composition of 50-70 weight percent of Fe and 3-8 weight percent of Ni. In another aspect, the method and system include plating at least a portion of a first and/or second pole of a write head using the plating solution including hydroxymethyl-p-tolylsulfone and configured to plate the CoNiFe film having a high saturation magnetic flux density and a composition of 50-70 weight percent of Fe and 3-8 weight percent of Ni.
摘要翻译： 公开了一种用于电镀CoNiFe的方法和系统。 该方法和系统包括提供包含羟甲基对甲苯砜的电镀溶液，并在电镀溶液中的基底上镀覆CoNiFe膜。 电镀溶液配置为提供具有高饱和磁通密度并具有50-70重量％Fe和3-8重量％Ni的组成的CoNiFe膜。 另一方面，所述方法和系统包括使用包含羟甲基对甲苯砜的电镀溶液电镀写入头的第一和/或第二极的至少一部分，并且被配置为将具有高饱和磁通密度的CoNiFe膜 并且组成为Fe的50-70重量％和Ni的3-8重量％。
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3.发明授权公开(公告)号：US08670211B1
公开(公告)日：2014-03-11
申请号：US13164991
申请日：2011-06-21
申请人： Ming Sun , Jose A. Medina , Keith Y. Sasaki , Ming Jiang
发明人： Ming Sun , Jose A. Medina , Keith Y. Sasaki , Ming Jiang
CPC分类号： G11B5/3143 , C25D3/562 , C25D5/18 , C25D7/001 , G11B5/3163 , H01F41/26
摘要： A method and system plates CoFeX, where X is an insertion metal. The method and system include providing a plating solution including hydroxymethyl-p-tolylsulfone (HPT). The plating solution being configured to provide a CoFeX film having a high saturation magnetic flux density of greater than 2.3 Tesla and not more than 3 weight percent of X. The method and system also include plating the CoFeX film on a substrate in the plating solution. In some aspects, the plated CoFeX film may be used in structures such as main poles of a magnetic recording head.
摘要翻译： 一种方法和系统板CoFeX，其中X是插入金属。 该方法和系统包括提供包含羟甲基对甲苯砜（HPT）的电镀溶液。 电镀溶液被配置为提供具有大于2.3特斯拉的高饱和磁通密度和不大于X重量百分比的X的高的饱和磁通密度的CoFeX膜。该方法和系统还包括在电镀液中的基底上电镀CoFeX膜。 在一些方面，电镀CoFeX膜可以用于诸如磁记录头的主极的结构中。
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4.发明授权Method for providing a pole in a magnetic recording transducer using a cathodic etch 有权使用阴极蚀刻在磁记录传感器中提供极点的方法公开(公告)号：US08555486B1
公开(公告)日：2013-10-15
申请号：US13312932
申请日：2011-12-06
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for fabricating a magnetic recording transducer is described. The transducer has an ABS location and a nonmagnetic intermediate layer having a pole trench. The method includes depositing at least one magnetic pole layer having a top surface and a pole tip portion proximate to the ABS location. A first portion of the magnetic pole layer(s) resides in the pole trench. The magnetic pole layer(s) have a seam in the pole tip portion that extends to the top surface. The method also includes cathodically etching a second portion of the magnetic pole layer(s) from the seam at a rate of not more than 0.1 nanometers/second, thereby forming a seam trench in the magnetic pole layer(s). The method also includes refilling the seam trench with at least one magnetic refill layer. At least an additional magnetic pole layer is deposited on the top surface and the magnetic refill layer(s).
摘要翻译： 描述了制造磁记录换能器的方法。 换能器具有ABS位置和具有极沟槽的非磁性中间层。 该方法包括沉积至少一个磁极层，其具有靠近ABS位置的顶表面和极尖部分。 磁极层的第一部分位于极沟槽中。 磁极层在极尖部分中具有延伸到顶表面的接缝。 该方法还包括以不大于0.1纳米/秒的速率从接缝阴极蚀刻磁极层的第二部分，从而在磁极层中形成接缝沟槽。 该方法还包括用至少一个磁性填充层重新填充接缝沟槽。 至少另外的磁极层沉积在顶表面和磁性填充层上。
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公开(公告)号：US08524068B2
公开(公告)日：2013-09-03
申请号：US13221726
申请日：2011-08-30
摘要： Embodiments of the present invention include systems and methods for low-rate electrochemical (wet) etch that use a net cathodic current or potential. In particular, some embodiments achieve controlled etch rates of less than 0.1 nm/s by applying a small net cathodic current to a substrate as the substrate is submerged in an aqueous electrolyte. Depending on the embodiment, the aqueous electrolyte utilized may comprise the same type of cations as the material being etched from the substrate. Some embodiments are useful in etching thin film metals and alloys and fabrication of magnetic head transducer wafers.
摘要翻译： 本发明的实施例包括使用净阴极电流或电位的低速电化学（湿）蚀刻的系统和方法。 特别地，一些实施例通过在衬底被浸没在含水电解质中时将小的净阴极电流施加到衬底上来实现小于0.1nm / s的受控蚀刻速率。 根据实施例，所使用的水性电解质可以包括与从衬底上蚀刻的材料相同类型的阳离子。 一些实施例在蚀刻薄膜金属和合金以及制造磁头换能器晶片方面是有用的。
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公开(公告)号：US08441756B1
公开(公告)日：2013-05-14
申请号：US12970423
申请日：2010-12-16
申请人： Ming Sun , Dehua Han , Jose A. Medina , Ming Jiang , Ying Hong , Feng Liu , Jian X. Shen
发明人： Ming Sun , Dehua Han , Jose A. Medina , Ming Jiang , Ying Hong , Feng Liu , Jian X. Shen
IPC分类号： G11B5/39
CPC分类号： G11B5/187 , G11B5/3116 , G11B5/3163
摘要： A method and system for fabricating a magnetic transducer are described. The magnetic transducer includes a pole and a nonmagnetic intermediate layer adjacent to the pole. The pole has a paddle and a pole tip including a plurality of sidewalls. The pole includes a first magnetic pole layer, at least one antiferromagnetic coupling (AFC) structure on the first magnetic pole layer, and a second magnetic pole layer on the AFC structure(s). At least a portion of the first magnetic pole layer resides on the sidewalls of the pole tip. The paddle has a paddle width in a track width direction. The pole tip has a pole tip width in a track width direction that is less than the paddle width.
摘要翻译： 描述了用于制造磁换能器的方法和系统。 磁换能器包括极和邻近极的非磁性中间层。 极具有桨和包括多个侧壁的极尖。 所述极包括第一磁极层，在所述第一磁极层上的至少一个反铁磁耦合（AFC）结构和所述AFC结构上的第二磁极层。 第一磁极层的至少一部分位于极尖的侧壁上。 桨叶在轨道宽度方向上具有桨叶宽度。 极尖具有小于桨宽度的轨道宽度方向上的极尖宽度。
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