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公开(公告)号：US09310229B2
公开(公告)日：2016-04-12
申请号：US13757300
申请日：2013-02-01
CPC分类号： G01D11/245 , G01D11/30 , G01L19/0084 , Y10T29/49004
摘要： A sensor system having a sensor element, a housing in which sensor element is situated and which seals the sensor element from the outside world, at least one first electrical contact element which is electrically coupled with the sensor element; a plug connector, which has at least one second electrical contact element, and at least one spring element which is coupled between the at least one second electrical contact element and the at least one first electrical contact element for electrical contacting, so that the sensor element is electrically connected to the second electrical contact element of the plug connector.
摘要翻译： 一种具有传感器元件的传感器系统，其中传感器元件位于其中并且将传感器元件与外界密封的壳体，至少一个与传感器元件电耦合的第一电接触元件; 插头连接器，其具有至少一个第二电接触元件，以及至少一个弹簧元件，其连接在所述至少一个第二电接触元件和所述至少一个第一电接触元件之间用于电接触，使得所述传感器元件 电连接到插头连接器的第二电接触元件。
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公开(公告)号：US08528402B2
公开(公告)日：2013-09-10
申请号：US13402626
申请日：2012-02-22
申请人： Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
发明人： Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
CPC分类号： G01P1/023 , B81B3/0078 , B81B7/0077 , B81B2201/0235 , B81B2201/0264
摘要： A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
摘要翻译： 描述了一种用于制造微机械部件的方法，该微机械部件具有介质。 介质具有可设定和可变的体积弹性特性，并且通常完全包围传感器模块和/或模块壳体。 该介质优选具有低通响应。
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3.发明授权Method for manufacturing a micromechanical component having a volume-elastic medium and micromechanical component 有权用于制造具有体积弹性介质和微机械部件的微机械部件的方法公开(公告)号：US08148187B2
公开(公告)日：2012-04-03
申请号：US12270087
申请日：2008-11-13
申请人： Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
发明人： Wolf-Ingo Ratzel , Christian Ohl , Juergen Kurle
IPC分类号： H01L23/24
CPC分类号： G01P1/023 , B81B3/0078 , B81B7/0077 , B81B2201/0235 , B81B2201/0264
摘要： A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
摘要翻译： 描述了一种用于制造微机械部件的方法，该微机械部件具有介质。 介质具有可设定和可变的体积弹性特性，并且通常完全包围传感器模块和/或模块壳体。 该介质优选具有低通响应。
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公开(公告)号：US20090027861A1
公开(公告)日：2009-01-29
申请号：US12217301
申请日：2008-07-02
申请人： Christian Ohl , Frieder Haag , Juergen Kurle , Ingbert Gerngross
发明人： Christian Ohl , Frieder Haag , Juergen Kurle , Ingbert Gerngross
IPC分类号： H05K7/00
CPC分类号： H05K5/0078 , H01L2924/181 , H01L2924/00012
摘要： A module includes an electrical component having an inner enclosure which surrounds the electrical component and which has first electrical contact means at least on one outer side; having an outer enclosure in the interior of which the inner enclosure is situated, the outer enclosure having second electrical contact means, the second electrical contact means extending from the interior to at least one outer side of the outer enclosure. The first and second contact means are interconnected.
摘要翻译： 模块包括电气部件，其具有围绕电气部件的内部外壳，并且具有至少一个外侧上的第一电接触装置; 在其内部具有外壳的外壳中，外壳具有第二电接触装置，第二电接触装置从内部延伸到外壳的至少一个外侧。 第一和第二接触装置相互连接。
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公开(公告)号：US5721377A
公开(公告)日：1998-02-24
申请号：US681243
申请日：1996-07-22
申请人： Juergen Kurle , Kurt Weiblen , Horst Muenzel , Helmut Baumann , Klaus Heyers , Markus Lutz
发明人： Juergen Kurle , Kurt Weiblen , Horst Muenzel , Helmut Baumann , Klaus Heyers , Markus Lutz
CPC分类号： G01C19/5712 , G01P2015/0814
摘要： In an angular velocity sensor, an acceleration sensor is arranged on a resonator formed of a multilayer substrate and attached to a resonating bar. The multilayer substrate includes a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer. An excitor causes the resonator to vibrate while a limit stop, configured out of the multilayer substrate, limits the movement of the resonator.
摘要翻译： 在角速度传感器中，加速度传感器布置在由多层基板形成并且附接到谐振杆的谐振器上。 多层基板包括顶部硅层，布置在顶部硅层下方的绝缘牺牲层和布置在绝缘牺牲层下方的底部硅层。 激励器使谐振器振动，而由多层基板构成的极限停止限制了谐振器的移动。
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公开(公告)号：US5369060A
公开(公告)日：1994-11-29
申请号：US70141
申请日：1993-06-01
申请人： Helmut Baumann , Juergen Kurle , Peter Eiberger
发明人： Helmut Baumann , Juergen Kurle , Peter Eiberger
IPC分类号： B28D5/02 , H01L21/301 , H01L21/304 , H01L29/84 , H01L21/302
CPC分类号： H01L21/304 , B28D5/029 , Y10S148/028 , Y10T83/0581
摘要： In a method for dicing multi-layer composite wafers, proceeding from an upper side of the wafer, cuts are introduced into an upper layer of the wafer and, proceeding from a lower side of the wafer, cuts are introduced into a lower layer of the wafer.
摘要翻译： 在用于切割多层复合晶片的方法中，从晶片的上侧开始，切割被引入晶片的上层，并且从晶片的下侧开始将切口引入到 晶圆。
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公开(公告)号：US08813578B2
公开(公告)日：2014-08-26
申请号：US13325577
申请日：2011-12-14
申请人： Udo Kaess , Axel Kaschner , Juergen Kurle , Lars Sodan , Holger Behrens
发明人： Udo Kaess , Axel Kaschner , Juergen Kurle , Lars Sodan , Holger Behrens
CPC分类号： B62D6/10 , B62D15/0215 , G01B7/30 , G01D5/2497 , G01L3/104
摘要： A sensor system has a rotational angle sensor for detecting a rotational angle and a torque sensor for detecting a torque. The rotational angle sensor has a rotatable rotational angle transmitter having index elements. The torque sensor has a rotatable torque transmitter having magnets, which generate a magnetic field, and a magnetic flux unit for amplifying the magnetic field. The index elements and the magnetic flux unit are connected to one another in a rotationally fixed manner.
摘要翻译： 传感器系统具有用于检测旋转角度的旋转角度传感器和用于检测扭矩的扭矩传感器。 旋转角传感器具有可旋转的旋转角度发射器，其具有折射元件。 扭矩传感器具有可产生磁场的磁体的可旋转扭矩传递器和用于放大磁场的磁通单元。 索引元件和磁通单元以旋转固定的方式彼此连接。
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公开(公告)号：US08448512B2
公开(公告)日：2013-05-28
申请号：US12734687
申请日：2008-11-11
申请人： Reinhold Jocham , Juergen Kurle , Franz Schmich
发明人： Reinhold Jocham , Juergen Kurle , Franz Schmich
IPC分类号： G01P1/02
CPC分类号： G01C19/00 , G01C19/5783 , G01C21/16 , G01D11/30 , Y10T29/49002
摘要： A sensor system is provided having a base plate, a sensor module, a damping element and a support frame, the base plate having a main plane of extension and a recess that is perpendicular to the main plane of extension; the support frame being fastened in the recess; the damping element being situated between the support frame and the recess; and the sensor module further being pressed into the support frame in a form-locking and a force-locking manner.
摘要翻译： 本发明提供一种具有基板，传感器模块，阻尼元件和支撑框架的传感器系统，所述基板具有主平面延伸部和垂直于延伸主平面的凹部; 所述支撑框架被紧固在所述凹部中; 所述阻尼元件位于所述支撑框架和所述凹部之间; 并且传感器模块进一步以形式锁定和力锁定的方式被压入支撑框架中。
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公开(公告)号：US20110041602A1
公开(公告)日：2011-02-24
申请号：US12734687
申请日：2008-11-11
申请人： Reinhold Jocham , Juergen Kurle , Franz Schmich
发明人： Reinhold Jocham , Juergen Kurle , Franz Schmich
CPC分类号： G01C19/00 , G01C19/5783 , G01C21/16 , G01D11/30 , Y10T29/49002
摘要： A sensor system is provided having a base plate, a sensor module, a damping element and a support frame, the base plate having a main plane of extension and a recess that is perpendicular to the main plane of extension; the support frame being fastened in the recess; the damping element being situated between the support frame and the recess; and the sensor module further being pressed into the support frame in a form-locking and a force-locking manner.
摘要翻译： 本发明提供一种具有基板，传感器模块，阻尼元件和支撑框架的传感器系统，所述基板具有主平面延伸部和垂直于延伸主平面的凹部; 所述支撑框架被紧固在所述凹部中; 所述阻尼元件位于所述支撑框架和所述凹部之间; 并且传感器模块进一步以形式锁定和力锁定的方式被压入支撑框架中。
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公开(公告)号：US6030850A
公开(公告)日：2000-02-29
申请号：US030414
申请日：1998-02-25
申请人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
发明人： Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
IPC分类号： G01L1/18 , B81B3/00 , B81C1/00 , G01P15/08 , G01P15/125 , H01L29/84 , G01L1/00 , H01L21/461
CPC分类号： B81B7/007 , B81C1/0019 , G01P15/0802 , G01P15/125 , B81B2201/0235 , B81B2203/033 , B81C2201/0136 , B81C2203/0118 , G01P2015/0814
摘要： In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
摘要翻译： 在传感器和制造传感器的方法中，可移动元件被图案化为硅层并固定到基底。 导电层被细分成彼此电绝缘的各个区域。 通过布置在第一和第二绝缘层之间的导电层来建立硅层的各个区域之间的电连接。
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