公开(公告)号：US09190264B2

公开(公告)日：2015-11-17

申请号：US13618338

申请日：2012-09-14

Applicant: Kazuhiro Yuasa ,  Naonori Akae ,  Masato Terasaki

Inventor： Kazuhiro Yuasa ,  Naonori Akae ,  Masato Terasaki

IPC: H01L21/31 ,  H01L21/02 ,  H01L21/67 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455

CPC classification number: H01L21/022 ,  C23C16/345 ,  C23C16/402 ,  C23C16/45529 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/0228 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/67109

Abstract: A semiconductor manufacturing method includes forming an oxide film on a substrate by performing a first cycle a predetermined number of times, including supplying a first source gas, an oxidizing gas and a reducing gas to the substrate heated to a first temperature in a process container under a sub-atmospheric pressure; forming a seed layer on a surface of the oxide film by supplying a nitriding gas to the substrate in the process container, the substrate being heated to a temperature equal to or higher than the first temperature and equal to or lower than a second temperature; and forming a nitride film on the seed layer formed on the surface of the oxide film by performing a second cycle a predetermined number of times, including supplying a second source gas and the nitriding gas to the substrate heated to the second temperature in the process container.

Abstract translation: 半导体制造方法包括在基板上形成规定次数的第一循环的氧化膜，该第一循环包括向处理容器内加热到第一温度的基板供给第一源气体，氧化气体和还原气体， 低于大气压; 通过向所述处理容器中的所述基板供给氮化气体，在所述氧化物膜的表面上形成种子层，将所述基板加热至所述第一温度以上且第二温度以下的温度; 并且通过进行预定次数的第二循环，在形成在氧化物膜的表面上的种子层上形成氮化物膜，包括将第二源气体和氮化气体供给到处理容器中加热到第二温度的衬底 。

公开(公告)号：US20130157474A1

公开(公告)日：2013-06-20

申请号：US13813493

申请日：2011-08-02

Applicant: Kazuhiro Yuasa ,  Masanao Fukuda ,  Takafumi Sasaki ,  Yasuhiro Megawa ,  Masayoshi Minami

Inventor： Kazuhiro Yuasa ,  Masanao Fukuda ,  Takafumi Sasaki ,  Yasuhiro Megawa ,  Masayoshi Minami

IPC: H01L21/02

CPC classification number: H01L21/02104 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/3105 ,  H01L21/67017

Abstract: An oxygen-containing gas and a hydrogen-containing gas are supplied into a pre-reaction chamber heated to a second temperature and having the pressure set to less than an atmospheric pressure, and a reaction is induced between both gases in the pre-reaction chamber to generate reactive species, and the reactive species are supplied into the process chamber and exhausted therefrom, in which a substrate heated to the first temperature is housed and the pressure is set to less than the atmospheric pressure, and processing is applied to the substrate by the reactive species, with the second temperature set to be not less than the first temperature at this time.

Abstract translation: 将含氧气体和含氢气体供给到加热至第二温度并且压力设定为小于大气压的预反应室中，并且在预反应室内的两种气体之间产生反应 产生反应性物质，并且将反应性物质供应到处理室中并从其中排出，其中容纳加热到第一温度的基底并将压力设定为小于大气压，并且通过 此时的第二温度设定为不小于第一温度的反应物种。

公开(公告)号：US08003411B2

公开(公告)日：2011-08-23

申请号：US12656497

申请日：2010-02-01

Applicant: Kazuhiro Yuasa ,  Kazuhiro Kimura ,  Yasuhiro Megawa

Inventor： Kazuhiro Yuasa ,  Kazuhiro Kimura ,  Yasuhiro Megawa

IPC: H01L21/00

CPC classification number: H01L21/67253 ,  Y10S438/908 ,  Y10S438/913

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

公开(公告)号：US07871938B2

公开(公告)日：2011-01-18

申请号：US12403974

申请日：2009-03-13

Applicant: Takashi Ozaki ,  Kazuhiro Yuasa ,  Kiyohiko Maeda

Inventor： Takashi Ozaki ,  Kazuhiro Yuasa ,  Kiyohiko Maeda

IPC: H01L21/31 ,  H01L21/469

CPC classification number: H01L21/02238 ,  H01L21/0223 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67109

Abstract: Disclosed is a producing method of a semiconductor device produced by transferring a plurality of substrates into a processing chamber, supplying oxygen-containing gas and hydrogen-containing gas into the processing chamber which is in a heated state to process the plurality of substrates by oxidation, and transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein the hydrogen-containing gas is supplied from a plurality of locations of a region corresponding to a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber.

Abstract translation: 本发明公开了一种半导体器件的制造方法，该半导体器件通过将多个衬底转移到处理室中，将含氧气体和含氢气体供给到处于加热状态的处理室中，以通过氧化处理多个衬底， 并且将多个氧化处理的基板从处理室转移出来，其中，从对应于多个基板布置在处理室中的基板布置区域的区域的多个位置供给含氢气体 。

公开(公告)号：US20100192855A1

公开(公告)日：2010-08-05

申请号：US12656566

申请日：2010-02-03

Applicant: Kazuhiro Yuasa ,  Yasuhiro Megawa

Inventor： Kazuhiro Yuasa ,  Yasuhiro Megawa

IPC: B05C11/00

CPC classification number: H01L21/31662 ,  H01L21/0223 ,  H01L21/02238 ,  H01L21/02255

Abstract: An object of this invention is to make it possible to suppress early-stage oxidation of a substrate surface prior to oxidation processing, and to remove a natural oxidation film. For this reason, a method is provided comprising the steps of loading a substrate into a processing chamber, supplying a hydrogen-containing gas and an oxygen-containing gas into the processing chamber, and subjecting a surface of the substrate to oxidation processing, and unloading the substrate subjected to oxidation processing from the processing chamber. In the oxidation processing step, the hydrogen-containing gas is introduced in advance into the processing chamber, with the pressure inside the processing chamber set at a pressure that is less than atmospheric pressure, and the oxygen-containing gas is then introduced in the state in which the introduction of the hydrogen-containing gas is continued.

公开(公告)号：US07534730B2

公开(公告)日：2009-05-19

申请号：US10549938

申请日：2004-08-25

Applicant: Takashi Ozaki ,  Kazuhiro Yuasa ,  Kiyohiko Maeda

Inventor： Takashi Ozaki ,  Kazuhiro Yuasa ,  Kiyohiko Maeda

IPC: H01L21/31 ,  H01L21/469

CPC classification number: H01L21/02238 ,  H01L21/0223 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67109

Abstract: Disclosed is a method for manufacturing a semiconductor device which comprises a step for carrying a plurality of substrates (1) in a process chamber (4), a step for supplying an oxygen-containing gas from the upstream side of the substrates (1) carried in the process chamber (4), a step for supplying a hydrogen-containing gas from at least one location corresponding to a position within the region where substrates (1) are placed in the process chamber (4), a step for oxidizing the substrates (1) by reacting the oxygen-containing gas with the hydrogen-containing gas in the process chamber (4), and a step for carrying the thus-processed substrates (1) out of the process chamber (4).

Abstract translation: 公开了一种半导体器件的制造方法，其包括在处理室（4）中承载多个基板（1）的步骤，从承载的基板（1）的上游侧供给含氧气体的步骤 在处理室（4）中，从对应于在基板（1）被放置在处理室（4）的区域内的位置的至少一个位置供给含氢气体的步骤，用于氧化基板 （1）通过使含氧气体与处理室（4）中的含氢气体反应，以及将处理过的基板（1）从处理室（4）运出的步骤。

公开(公告)号：US5897243A

公开(公告)日：1999-04-27

申请号：US638696

申请日：1996-04-26

Applicant: Satoru Komatsubara ,  Kazuhiro Yuasa ,  Eiji Takenaka ,  Mugijiroh Uno ,  Toshihiro Sugiyama ,  Tetsuo Yamanaka ,  Eisaku Murakami

Inventor： Satoru Komatsubara ,  Kazuhiro Yuasa ,  Eiji Takenaka ,  Mugijiroh Uno ,  Toshihiro Sugiyama ,  Tetsuo Yamanaka ,  Eisaku Murakami

IPC: G03G15/06 ,  G03G15/08

CPC classification number: G03G15/0808

Abstract: In an electrophotographic image recording apparatus of the type using a single-ingredient type developer, i.e., toner, a latent image is electrostatically formed on a photoconductive drum or similar image carrier. A developing unit has a developing roller for conveying the toner deposited thereon, and an intermediate roller for conveying the toner transferred thereto from the developing roller and depositing it on the latent image to thereby produce a corresponding toner image. An image transfer unit transfers the toner image to a cut sheet. During the development of an area of the image carrier other than a latent image area, at least one of biases assigned to the developing roller and intermediate roller, respectively, is switched over to thereby form an electric field different in direction from an electric field assigned to the formation of the toner image between the two rollers. As a result, the toner existing on the intermediate roller is collected by the developing roller. This successfully prevents the toner from depositing on the intermediate roller except when required, and frees the image transfer unit from the deposition of the toner.

Abstract translation: 在使用单一成分型显影剂即调色剂的电子照相图像记录装置中，在感光鼓或类似图像载体上静电地形成潜像。 显影单元具有用于输送沉积在其上的调色剂的显影辊和用于输送从显影辊转印到其上的调色剂并将其沉积在潜像上从而产生相应调色剂图像的中间辊。 图像转印单元将调色剂图像转印到切割片。 在除了潜像区域之外的图像载体的区域的显影期间，分别分配给显影辊和中间辊的偏压中的至少一个被切换，从而形成与指定的电场不同的方向的电场 以形成两个辊之间的调色剂图像。 结果，存在于中间辊上的调色剂由显影辊收集。 这成功地防止了调色剂沉积在中间辊上，除非需要，并且使图像转印单元免于调色剂的沉积。

公开(公告)号：US5689782A

公开(公告)日：1997-11-18

申请号：US485772

申请日：1995-06-07

Applicant: Eisaku Murakami ,  Kazuhiro Yuasa ,  Shuichi Endoh ,  Iwao Matsumae ,  Yoshiaki Tanaka ,  Hiroshi Hosokawa ,  Mugiziroh Uno ,  Hiroshi Saitoh ,  Eizi Takenaka ,  Toshihiro Sugiyama ,  Tetsuo Yamanaka ,  Satoru Komatsubara

Inventor： Eisaku Murakami ,  Kazuhiro Yuasa ,  Shuichi Endoh ,  Iwao Matsumae ,  Yoshiaki Tanaka ,  Hiroshi Hosokawa ,  Mugiziroh Uno ,  Hiroshi Saitoh ,  Eizi Takenaka ,  Toshihiro Sugiyama ,  Tetsuo Yamanaka ,  Satoru Komatsubara

IPC: G03G15/08

CPC classification number: G03G15/0808 ,  G03G2215/0869

Abstract: A developing apparatus is capable of providing stable charging ability for a developer and stable transfer ability for transferring the developer to a photoreceptor for electronic photography to prevent residual positive images and stain of texture which appear on a toner image. A first toner transfer roller 23 has a core supported to be rotatable and a sheet type insulation layer wound around the outer periphery of the core. The insulation layer is made of elastic rubber in which magnetic material having a specified particle size is uniformly dispersed and the magnetic material is formed with ferromagnetic substance such as magnet and magnetized in advance. The first toner transfer roller 23 attracts toner T by actuating magnetism on the insulation layer since the magnetic material added to the insulation layer is magnetized.

Abstract translation: 显影装置能够为显影剂提供稳定的充电能力，并且具有稳定的转印能力，用于将显影剂转印到用于电子摄影的感光体上，以防止出现在调色剂图像上的残留的正像和污点。 第一调色剂转印辊23具有被支撑为可旋转的芯和围绕芯的外周缠绕的片状绝缘层。 绝缘层由弹性橡胶制成，其中具有特定粒度的磁性材料均匀分散，并且磁性材料由磁铁等铁磁性物质形成，并预先磁化。 由于添加到绝缘层的磁性材料被磁化，所以第一调色剂转印辊23通过驱动绝缘层上的磁性来吸引调色剂T.

公开(公告)号：USRE35528E

公开(公告)日：1997-06-10

申请号：US269452

申请日：1994-06-30

Applicant: Yozo Matsuura ,  Shiroh Kondoh ,  Kazuhiro Yuasa ,  Hiroshi Saitoh ,  Hiroyuki Kiyoi ,  Masanori Yoshimura ,  Masahiro Kawabe ,  Yoshiya Itoh

Inventor： Yozo Matsuura ,  Shiroh Kondoh ,  Kazuhiro Yuasa ,  Hiroshi Saitoh ,  Hiroyuki Kiyoi ,  Masanori Yoshimura ,  Masahiro Kawabe ,  Yoshiya Itoh

IPC: G03G15/00 ,  G03G15/08 ,  G03G21/00 ,  G03G21/10 ,  G03G21/16

CPC classification number: G03G21/12 ,  G03G15/0868 ,  G03G15/0875 ,  G03G21/105 ,  G03G2215/068 ,  G03G2215/0685 ,  Y10S222/01

Abstract: A xerographic image recording apparatus includes a photosensitive body moved along a circuitous path, an electric discharging unit for eliminating electric charges from the photosensitive body, a precharging unit for charging the photosensitive body electrically, an image writing unit for writing an image on the photosensitive body, an image developing unit for coating the photosensitive body by the toner to form a toner image on the photosensitive body; a recording sheet feeding unit for feeding a recording sheet along a sheet path, an image transfer unit for transferring the toner image onto a recording sheet, a cleaning unit for removing the toner remaining on the photosensitive body after the transfer of image on the recording sheet is completed, a toner supply tank for supplying the toner to the image developing unit, and a toner recovery tank for collecting the toner removed by the cleaning unit from the photosensitive body, wherein the toner supply tank and the toner recovery tank are assembled into a unitary body to form a detachable magazine.

Abstract translation: 静电摄影图像记录装置包括沿着迂回路径移动的感光体，用于消除来自感光体的电荷的放电单元，用于对感光体电气充电的预充电单元，用于在感光体上写入图像的图像写入单元 图像显影单元，用于通过调色剂涂覆感光体以在感光体上形成调色剂图像; 用于沿着片材路径馈送记录片材的记录片材馈送单元，用于将调色剂图像转印到记录片材上的图像转印单元，用于在记录片材上转印图像之后去除残留在感光体上的调色剂的清洁单元 完成了将调色剂供给到图像显影单元的调色剂供应箱和用于将由清洁单元移除的调色剂从感光体收集的调色剂回收罐，其中调色剂供应箱和调色剂回收罐被组装成 整体形成一个可拆卸的杂志。

公开(公告)号：US5625441A

公开(公告)日：1997-04-29

申请号：US633453

申请日：1996-04-17

Applicant: Toshihiro Sugiyama ,  Kazuhiro Yuasa ,  Shuichi Endoh ,  Iwao Matsumae ,  Yoshiaki Tanaka ,  Hiroshi Hosokawa ,  Mugijiroh Uno ,  Hiroshi Saitoh ,  Eiji Takenaka ,  Tetsuo Yamanaka ,  Eisaku Murakami ,  Satoru Komatsubara

Inventor： Toshihiro Sugiyama ,  Kazuhiro Yuasa ,  Shuichi Endoh ,  Iwao Matsumae ,  Yoshiaki Tanaka ,  Hiroshi Hosokawa ,  Mugijiroh Uno ,  Hiroshi Saitoh ,  Eiji Takenaka ,  Tetsuo Yamanaka ,  Eisaku Murakami ,  Satoru Komatsubara

IPC: G03G9/08 ,  G03G9/083 ,  G03G13/08 ,  G03G15/08 ,  G03G15/09

CPC classification number: G03G13/08 ,  G03G15/0806 ,  G03G15/0808 ,  G03G15/09 ,  G03G9/0819 ,  G03G9/0823 ,  G03G9/0838 ,  G03G2215/0869

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract translation: 在图像形成装置中，可用调色剂或单组分型显影剂操作的显影装置具有硬的第一显影辊和软的第二显影辊。 细磁N-S极形成在第一辊的周边上。 第二辊将从第一辊静电转印的调色剂传送到图像载体。 该装置使调色剂图像不会由于调色剂颗粒被充电到与预期极性相反的极性而劣化。 调色剂在第一辊上形成均匀的薄层并均匀带电。 还公开了与这种显影装置一起使用的调色剂。