Method of high selectivity SAC etching
    2.
    发明授权
    Method of high selectivity SAC etching 有权
    高选择性SAC蚀刻方法

    公开(公告)号:US07329610B2

    公开(公告)日:2008-02-12

    申请号:US11203211

    申请日:2005-08-15

    申请人: Kazuo Tsuchiya

    发明人: Kazuo Tsuchiya

    IPC分类号: H01L21/302

    CPC分类号: H01L21/76897 H01L21/31116

    摘要: A method for SAC etching is provided involving a) etching a Si wafer having a nitride present thereon with a first etching gas containing a first perfluorocarbon and carbon monoxide, and b) etching the resultant Si wafer having an initially etched nitride photoresist thereon with a second etching gas containing a second perfluorocarbon in the substantial absence of carbon monoxide, wherein the etching steps a) and b) are performed at high RF power and low pressure compared to conventional processes to provide higher selectivity etching and a larger process window for SAC etching, as well as the ability to perform SAC etching and island contact etching under the same conditions with high verticality of the island contact and SAC walls.

    摘要翻译: 提供了一种用于SAC蚀刻的方法,其涉及a)用含有第一全氟化碳和一氧化碳的第一蚀刻气体蚀刻其上存在氮化物的Si晶片,以及b)用第二次蚀刻具有最初蚀刻的氮化物光刻胶的所得Si晶片 在基本上不存在一氧化碳的情况下,含有第二全氟化碳的蚀刻气体,其中与常规方法相比,以高RF功率和低压进行蚀刻步骤a)和b)以提供更高选择性蚀刻和用于SAC蚀刻的较大工艺窗口, 以及在相同条件下在岛接触和SAC壁的高垂直度下进行SAC蚀刻和岛接触蚀刻的能力。

    Process for producing a shaped electroconductive thermoplastic resin
composition article
    3.
    发明授权
    Process for producing a shaped electroconductive thermoplastic resin composition article 失效
    用于生产成形导电热塑性树脂组合物制品的方法

    公开(公告)号:US4675143A

    公开(公告)日:1987-06-23

    申请号:US814184

    申请日:1985-12-27

    CPC分类号: C08K7/06 H01B1/22

    摘要: A shaped electroconductive thermoplastic resin composition article having a preferable surface appearance is produced by a process including (1) mixing a matrix resinous material containing 100 parts by weight of a thermoplastic resin and, optionally, 120 parts by weight or less of a flame x retardant additive and 40 parts by weight or less of a flame retardant synergistic additive, with 1 to 15% based on the weight of the matrix resinous material, of stainless steel fibers having a length of 2.5 to 7.5 mm and adhered to each other with a thermoplastic resinous adhesive to form a number of bundles; (2) kneading the resultant mixture at an elevated temperature at which the matrix resinous material is melted and (3) shaping the kneaded mixture into a desired form, the kneading the shaping procedures being carried out so that the stainless steel fibers are uniformly dispersed in the melted matrix resinous material and the dispersed stainless steel fibers have an average length of 0.5 to 2.0 mm. The ratio of the average length of the dispersed and sheared stainless steel fibers to the length of the stainless steel fiber bundles is preferably in a range of 1/6 to 1/3.

    摘要翻译: 通过以下方法制造具有优选表面外观的成形导电性热塑性树脂组合物制品,该方法包括:(1)混合含有100重量份热塑性树脂的基体树脂材料和任选地120重量份或更少的阻燃剂 添加剂和40重量份或更少的阻燃协同添加剂,基于树脂材料重量的1至15重量%的长度为2.5至7.5毫米的不锈钢纤维并用热塑性材料彼此粘合 树脂粘合剂形成多个束; (2)在基体树脂材料熔融的高温下捏合所得混合物,(3)将捏合的混合物成形为所需形状,捏合进行的成形过程,使得不锈钢纤维均匀分散在 熔融的基质树脂材料和分散的不锈钢纤维的平均长度为0.5-2.0mm。 分散和剪切的不锈钢纤维的平均长度与不锈钢纤维束的长度之比优选在1/6至1/3的范围内。

    Transplant production system
    4.
    发明申请
    Transplant production system 有权
    移植生产系统

    公开(公告)号:US20060162246A1

    公开(公告)日:2006-07-27

    申请号:US10522773

    申请日:2002-09-20

    IPC分类号: A01C11/00

    摘要: A system for transplant production comprising: at least one air conditioner installed in a completely light shielding closed structure surrounded by a thermally insulated wall, the air conditioner controlling the temperature and humidity of air in the closed structure; at least one box-shaped culturing module disposed in the internal space of the closed structure, the culturing module having a front face opening which is opened to the internal space of the closed structure; a plurality of transplant production shelves arranged vertically in multi-layer in the culturing module to form a transplant production space between the upper and lower transplant production shelves; a plurality of plug trays for holding a plant growing medium mounted on each transplant production shelf; a sub-irrigation unit capable of irrigation from the bottom of the plug trays mounted on each transplant production shelf; an artificial lighting unit provided on the back of each transplant production shelf, the artificial lighting unit irradiating light to the lower plug trays; and at least one air fan fixed to the back wall of each transplant production shelf of the culturing module. By sucking the air whose temperature and humidity have been controlled by the air conditioner using the air fan from the front face opening of the culturing module and sending the air to the rear of the back wall of each transplant production shelf, temperature-controlled and humidity-controlled air can be effectively generated.

    摘要翻译: 一种用于移植生产的系统,包括:至少一个安装在由隔热壁包围的完全遮光闭合结构中的空调器,所述空调器控制所述封闭结构中的空气的温度和湿度; 至少一个盒形培养模块,设置在所述封闭结构的内部空间中,所述培养模块具有向所述封闭结构的内部空间开口的正面开口; 多个在培养模块中多层排列的移植生产架,在上下移植生产架之间形成移植生产空间; 用于保持安装在每个移植生产架上的植物生长介质的多个插塞托盘; 能够从安装在每个移植生产架上的塞盘的底部进行灌溉的子冲洗单元; 设置在每个移植生产架的背面的人造照明单元,人造照明单元将光照射到下塞盘; 以及至少一个风扇,其固定到所述培养模块的每个移植生产架的后壁。 通过从培养模块的正面开口吸入空调使用空气风扇吸入温度和湿度的空气,并将空气送至每个移植生产架的后壁后部,温度控制和湿度 可以有效地产生控制空气。

    Information processing apparatus for improved intuitive scrolling utilizing an enhanced cursor
    5.
    发明授权
    Information processing apparatus for improved intuitive scrolling utilizing an enhanced cursor 失效
    信息处理装置,用于利用增强光标改善直观滚动

    公开(公告)号:US06259432B1

    公开(公告)日:2001-07-10

    申请号:US09119299

    申请日:1998-07-20

    IPC分类号: G09G534

    CPC分类号: G06F3/038 G06F3/0485 G09G5/08

    摘要: An information processing apparatus that can adjust the scrolling speed for data displayed in an application window on a display and display a visual scrolling speed indicator. When the user manipulates a mouse to request scrolling of data in a window, the display form of the mouse cursor is changed. That is, in addition to the mouse cursor, one or more speed indicators appears in the scrolling direction. The number of speed indicators which are displayed corresponds to the scrolling speed. The speed indicators are arranged from the center of the mouse cursor in the scrolling direction. A speed indicator is shaped like a small isosceles triangle, and as its vertex is facing in the scrolling direction, it is a very effective visual aid for a user. Preferably, one speed indicator is displayed for a low scrolling speed, two for a moderate scrolling speed and three for a high speed scrolling. Since the speed indicators are extended in the scrolling direction in accordance with the current scrolling speed, a user can intuitively and quantitatively comprehend the scrolling speed and direction. Since the speed indicator is displayed in the vicinity of the mouse cursor, a user does not need to remove his or her eyes from a focus point on the display screen and the continuity of the operation can be maintained.

    摘要翻译: 一种信息处理装置,其能够调整在显示器上的应用窗口中显示的数据的滚动速度,并且显示视觉滚动速度指示器。 当用户操纵鼠标以请求在窗口中滚动数据时,改变鼠标光标的显示形式。 也就是说,除了鼠标光标之外,还有一个或多个速度指示符出现在滚动方向。 显示的速度指示器数量对应于滚动速度。 速度指示器从滚动方向从鼠标光标的中心排列。 速度指示器的形状像一个小的等腰三角形,并且当其顶点朝向滚动方向时,对于用户而言,它是非常有效的视觉辅助。 优选地,以低滚动速度显示一个速度指示器,两个用于适度的滚动速度,三个用于高速滚动。 由于速度指示符根据当前滚动速度在滚动方向上延伸,所以用户可以直观地和定量地理解滚动速度和方向。 由于速度指示器显示在鼠标光标附近,所以用户不需要从显示屏上的对焦点去除他或她的眼睛,并且可以保持操作的连续性。

    Flexible pipe coupling
    7.
    发明授权
    Flexible pipe coupling 失效
    柔性管接头

    公开(公告)号:US4401325A

    公开(公告)日:1983-08-30

    申请号:US251842

    申请日:1981-04-08

    IPC分类号: F16L27/10 F16L27/113

    CPC分类号: F16L27/113 Y10S285/915

    摘要: A flexible pipe coupling is disclosed. This coupling comprises a large diameter cylindrical hollow body, a pair of small diameter cylindrical hollow bodies each having one end portion disposed inside each end of the large diameter cylindrical hollow body on the same axial line, and an elastic sleeve member for connecting each end of the large diameter cylindrical hollow body to one end of each of the small diameter cylindrical hollow bodies. The elastic sleeve member is provided at its both ends adjacent to the cylindrical hollow bodies with protrusions each extending outwardly in the widthwise direction of the sleeve member at a radius of curvature corresponding to 0.1.about.0.4 times the thickness of the sleeve member, whereby the durability of the coupling is further improved.

    摘要翻译: 公开了一种柔性管接头。 该联接器包括大直径的圆柱形中空体,一对小直径的圆柱形中空体,每个小直径的圆柱形中空体的一端部设置在同一轴线上的大直径圆柱形中空体的每个端部的内侧,弹性套筒部件用于连接 大直径圆柱形中空体到每个小直径圆柱形中空体的一端。 弹性套筒构件在其两端附近设置有圆柱形中空体,其突出部沿着套筒构件的宽度方向向外延伸,其曲率半径对应于套筒构件的厚度的0.1倍,从而耐久性 的耦合进一步提高。

    Metal Double-Layer Structure and Method For Manufacturing the Same and Regeneration Method of Sputtering Target Employing That Method
    8.
    发明申请
    Metal Double-Layer Structure and Method For Manufacturing the Same and Regeneration Method of Sputtering Target Employing That Method 审中-公开
    金属双层结构及其制造方法及使用该方法的溅射靶的再生方法

    公开(公告)号:US20080135405A1

    公开(公告)日:2008-06-12

    申请号:US11884878

    申请日:2006-02-28

    IPC分类号: C23C14/34 B23K20/12 B32B15/01

    摘要: Provided is a metal double-layer structure in which a modified metallic member modified from a flat plate metallic member is bonded to be stuck to a plate material, manufacturing method thereof, and a method of regenerating a sputtering target using the method. The method includes the steps of: overlapping the plate material with the metallic member; inserting a rotary tool having a rotor and a probe projecting from a bottom surface of the rotor into a surface of the metallic member while rotated; bringing a distal end of the probe to a position close to a mating plane between the metallic member and the plate material to generate friction heat and stir the distal end, and moving the rotary tool to form adjacent motion tracks on the surface of the metallic member; and forming stirred areas along the mating plane to bond the metallic member and the plate material together, and modifying the metallic member into a modified metallic member.

    摘要翻译: 提供一种金属双层结构,其中将从平板金属构件改性的改性金属构件粘合到板材上,其制造方法以及使用该方法再生溅射靶的方法。 该方法包括以下步骤:将板材与金属构件重叠; 将具有转子的旋转工具和从所述转子的底面突出的探针旋转时插入所述金属构件的表面; 将探头的远端带到靠近金属构件和板材之间的配合平面的位置以产生摩擦热并搅拌远端,并移动旋转工具以在金属构件的表面上形成相邻的运动轨迹 ; 并且沿着配合平面形成搅拌区域,以将金属构件和板材结合在一起,并将金属构件改性为改性金属构件。

    Plasma processing apparatus and method
    9.
    再颁专利
    Plasma processing apparatus and method 有权
    等离子体处理装置及方法

    公开(公告)号:USRE36810E

    公开(公告)日:2000-08-08

    申请号:US165545

    申请日:1998-10-02

    摘要: A plasma processing apparatus comprises a first passage opened in a top of suscepter at a peripheral area thereof, a first gas supply source for supplying heat exchange gas into a small clearance between the suscepter and a wafer through the first passage, a first vacuum pump for exhausting the clearance through the first passage, a second passage opened in the top of the suscepter at a center area thereof, a second gas supply source for supplying heat exchange gas into the clearance through the second passage, a second vacuum pump for exhausting the clearance through the second passage, and a controller for controlling the first and second gas supply sources and the first and second vacuum pumps independently of the others in such a way that backpressure caused in the second passage by the second gas supply source and vacuum pump can become lower than backpressure caused in the first passage by the first gas supply source and vacuum pump.

    摘要翻译: 一种等离子体处理装置,包括:在其周边区域的开口的顶部开口的第一通路;第一气体供给源,其通过第一通路将热交换气体供给到所述容器和晶片之间的小间隙;第一真空泵, 通过第一通道排出间隙,第二通道在其中心区域处在容器的顶部开口,第二气体供应源,用于通过第二通道将热交换气体供应到间隙中;第二真空泵,用于排出间隙 通过第二通道,以及用于独立于其他方式控制第一和第二气体供给源以及第一和第二真空泵的控制器,使得由第二气体供应源和真空泵在第二通道中产生的背压可以变成 低于由第一气体供应源和真空泵在第一通道中引起的背压。