公开(公告)号：US08094428B2

公开(公告)日：2012-01-10

申请号：US12259216

申请日：2008-10-27

Applicant: Yi Xiang Wang ,  Juying Dou ,  Kenichi Kanai ,  Jun Jiang ,  Zheng Fan ,  Qingyu Meng ,  Jay Chen

Inventor： Yi Xiang Wang ,  Juying Dou ,  Kenichi Kanai ,  Jun Jiang ,  Zheng Fan ,  Qingyu Meng ,  Jay Chen

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0044 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/24564

Abstract: An apparatus for increasing electric conductivity to a wafer substrate, when exposed to electron beam irradiation, is disclosed. More specifically, a methodology to breakdown the insulating layer on wafer backside is provided to significantly reduce the damage on the wafer backside while proceeding with the grounding process.

Abstract translation: 公开了当暴露于电子束照射时增加对晶片衬底的导电性的装置。 更具体地，提供了在晶片背面上击穿绝缘层的方法，以在继续进行接地工艺的同时显着减少晶片背面的损坏。

公开(公告)号：US08908348B2

公开(公告)日：2014-12-09

申请号：US12552270

申请日：2009-09-01

Applicant: Yi-Xiang Wang ,  Juying Dou ,  Kenichi Kanai

Inventor： Yi-Xiang Wang ,  Juying Dou ,  Kenichi Kanai

IPC: H01L21/683 ,  H01J37/317 ,  H01J37/20 ,  H01J37/28 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: H01J37/20 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0044 ,  H01J2237/2008

Abstract: A wafer grounding apparatus and method adaptable to a charged particle beam apparatus is disclosed. A wafer substrate is supported by a wafer mount. A grounding pin is arranged to be in contact with a backside film formed on a backside of the wafer substrate. A grounding pulse generator provides at least one pulse to drive the grounding pin such that dielectric breakdown occurring at the backside film leads to establishment of a current path through the backside films. Accordingly, a current flows in the wafer substrate through this current path and then flows out of the wafer substrate via at least one current return path formed from capacitive coupling between the wafer substrate and the wafer mount.

Abstract translation: 公开了适用于带电粒子束装置的晶片接地装置和方法。 晶片基板由晶片支架支撑。 接地销布置成与形成在晶片衬底的背面上的背面膜接触。 接地脉冲发生器提供至少一个脉冲来驱动接地引脚，使得在背面薄膜处发生的电介质击穿导致建立通过背面薄膜的电流路径。 因此，电流通过该电流路径流过晶片衬底，然后通过由晶片衬底和晶片座之间的电容耦合形成的至少一个电流返回路径流出晶片衬底。

公开(公告)号：US06566897B2

公开(公告)日：2003-05-20

申请号：US10033845

申请日：2001-12-27

Applicant: Chiwoei Wayne Lo ,  Kenichi Kanai

Inventor： Chiwoei Wayne Lo ,  Kenichi Kanai

IPC: G01R31305

CPC classification number: G01R31/307 ,  H01J2237/2594 ,  H01J2237/2817 ,  Y10S977/849

Abstract: Defects in a patterned substrate are detected by inspection with a charged particle beam inspection tool which generates an image of a portion of the patterned substrate and compares the image with a reference in order to identify any defects in the patterned substrate. Parameters of the tool are optimized to improve image uniformity and contrast, particularly voltage contrast. Prior to imaging an area of the substrate, the tool charges an area surrounding the image area to eliminate or reduce the effects caused by asymmetrical charging in the surrounding area. The tool alternates between charging the surrounding area and imaging the image area to produce a plurality of images of the image area, which are then averaged. The result is a highly uniform image with improved contrast for accurate defect detection.

公开(公告)号：US4995490A

公开(公告)日：1991-02-26

申请号：US405093

申请日：1989-09-08

Applicant: Kenichi Kanai

Inventor： Kenichi Kanai

IPC: F16D41/06 ,  F16D41/067

CPC classification number: F16D41/067

Abstract: A roller-synchronized one-way clutch assembly includes a ring-shaped first retainer element, a ring-shaped second retainer element, a plurality of rollers and at least one spring extending between the first and second retainer elements. In the preferred embodiment, each of the first and second retainer elements is generally U-shaped and different in size and one of the first and second retainer elements is received in a U-shaped channel of the other. The first and second retainer elements are operatively coupled together such that they may move relative to each other in a circumferential direction over a predetermined angle. Alll of the rollers are movably supported by a retainer sub-assembly to provide a complete full phase function.

Abstract translation: 辊同步单向离合器组件包括环形第一保持器元件，环形第二保持器元件，多个辊子和在第一和第二保持器元件之间延伸的至少一个弹簧。 在优选实施例中，第一和第二保持器元件中的每一个大体上为U形并且尺寸不同，并且第一和第二保持器元件中的一个被容纳在另一个的U形通道中。 第一和第二保持器元件可操作地联接在一起，使得它们可以在圆周方向上相对于彼此在预定角度上移动。 所有的辊都由保持器子组件可移动地支撑，以提供完整的全相功能。

公开(公告)号：US5638005A

公开(公告)日：1997-06-10

申请号：US488650

申请日：1995-06-08

Applicant: Suresh N. Rajan ,  Kenichi Kanai

Inventor： Suresh N. Rajan ,  Kenichi Kanai

IPC: G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/78 ,  G01R31/02

CPC classification number: G01R31/305

Abstract: A tester exercises a DUT with a repetitive signal pattern, supplying a trigger signal for each repetition. The waveform on a conductor of the DUT is to be acquired by repeatedly measuring voltage at each of a number of sample points following the trigger, using a charged-particle probe system having an integrator-filter loop for analyzing energy of secondary particles. Before measurement at a sample point, integrator is reset and the filter voltage needed to settle the loop for the sample point is set using a predictive scheme. When the measurement is made, the predicted filter voltage is summed with the integrator output voltage to produce the actual filter voltage. The integrator then measures the error between the predicted filter voltage and the actual filter voltage needed to settle the loop. The time needed to settle the loop is thereby minimized. Various predictive schemes can be used. An adaptive predictive scheme uses the error measured by the integrator to update the filter voltage prediction for the next measurement at the same sample point. The predicted filter voltage can be a previous measurement or an average of previous measurements taken at that sample point or an average of previous measurements taken over some time interval or a value determined by any other desired predictive scheme.

Abstract translation: 测试人员使用重复的信号模式对DUT进行操作，为每次重复提供触发信号。 DUT的导体上的波形将通过使用具有用于分析二次粒子的能量的积分器 - 滤波器回路的带电粒子探针系统重复测量触发后的多个采样点中的每一个处的电压来获取。 在采样点进行测量之前，积分器被复位，并且使用预测方案来设置为采样点设定环路所需的滤波器电压。 当进行测量时，将预测的滤波电压与积分器输出电压相加以产生实际的滤波电压。 然后，积分器测量预测的滤波器电压和结束所需的实际滤波器电压之间的误差。 从而最小化了解循环所需的时间。 可以使用各种预测方案。 自适应预测方案使用积分器测量的误差来更新相同采样点下次测量的滤波电压预测。 预测的滤波器电压可以是先前的测量或在该采样点获得的先前测量的平均值或在一段时间间隔内获得的先前测量的平均值或由任何其它所需预测方案确定的值。

公开(公告)号：US5187161A

公开(公告)日：1993-02-16

申请号：US842752

申请日：1992-02-27

Applicant: Kiyoto Goto ,  Kinji Hashimoto ,  Kenichi Kanai

Inventor： Kiyoto Goto ,  Kinji Hashimoto ,  Kenichi Kanai

IPC: C07C215/82 ,  C07C251/22 ,  C07D213/74 ,  C07D237/22 ,  C07D239/42 ,  C07D241/20 ,  C07D253/07 ,  C07D277/42

CPC classification number: C07D213/74 ,  C07C215/82 ,  C07C251/22 ,  C07D237/22 ,  C07D239/42 ,  C07D241/20 ,  C07D253/07 ,  C07D277/42 ,  C07C2101/16

Abstract: A p-aminophenol derivative having anti-inflammatory activity, represented by the formula ##STR1## wherein each of R.sup.1 and R.sup.2 is independently a hydrogen atom or a C.sub.1-6 acyl group; Ar is a pyrazine, pyrazine N-oxide, thiazole, benzene, pyridine, pyridazine, pyrimidine or triazine ring; R.sup.3 is a hydrogen atom, a C.sub.1-6 alkyl group, a C.sub.1-6 alkoxy-carbonyl-C.sub.1-6 alkyl group, a C.sub.1-6 alkoxy group, a halogen atom or a carboxy-C.sub.1-6 alkyl group; A is a C.sub.1-6 alkylene group; and B is a C.sub.1-6 alkyl group, or a salt thereof.

Abstract translation: 具有抗炎活性的对氨基苯酚衍生物，由式“IMAGE”表示，其中R 1和R 2各自独立地为氢原子或C 1-6酰基; Ar是吡嗪，吡嗪N-氧化物，噻唑，苯，吡啶，哒嗪，嘧啶或三嗪环; R 3为氢原子，C 1-6烷基，C 1-6烷氧基 - 羰基-C 1-6烷基，C 1-6烷氧基，卤素原子或羧基-C 1-6烷基; A是C 1-6亚烷基; 和B是C 1-6烷基，或其盐。

公开(公告)号：US06853941B2

公开(公告)日：2005-02-08

申请号：US10136710

申请日：2002-04-30

Applicant: Hui Wang ,  Kenichi Kanai ,  Hiroyasu Koike

Inventor： Hui Wang ,  Kenichi Kanai ,  Hiroyasu Koike

IPC: G01R31/305 ,  G01R31/00

CPC classification number: G01R31/305

Abstract: Methods and apparatus, including computer program products, implementing and using techniques for open-loop waveform acquisition. In general, in one aspect, the invention provides a method for open-loop waveform acquisition. The method includes acquiring an S-curve of an acquisition loop of an electron-beam probe system. The S-curve represents a response of the acquisition loop to changes of potential differences between the acquisition loop and a device under test. The method includes calibrating the acquisition loop to obtain a linear region in the acquired S-curve and using the linear portion of the acquired S-curve to calculate voltage at a probe point of the device under test.

Abstract translation: 方法和设备，包括计算机程序产品，实现和使用开环波形采集技术。 通常，一方面，本发明提供了一种开环波形采集方法。 该方法包括获取电子束探针系统的采集环路的S曲线。 S曲线表示采集环路对采集环路和被测器件之间的电位差的变化的响应。 该方法包括校准采集环路以获得所获得的S曲线中的线性区域，并且使用获取的S曲线的线性部分来计算被测器件的探针点处的电压。

公开(公告)号：US4786869A

公开(公告)日：1988-11-22

申请号：US927137

申请日：1986-11-05

Applicant: Kenichi Kanai ,  Osamu Shimoe

Inventor： Kenichi Kanai ,  Osamu Shimoe

IPC: G01F23/26 ,  G03G15/08 ,  G01B7/06

CPC classification number: G03G15/0856 ,  G03G15/086 ,  Y10S222/01

Abstract: A toner level sensor for detecting the presence or absence or the level of residual amount of the toner of an electronic copier or the like. In order to secure stable operation regardless of changes of external environmental conditions such as temperature and humidity, a pair of transformers are provided with primary coils and secondary coils respectively wound on magnetic cores having a magnetic gap. When a magnetic member is present in the vicinity of a magnetic gap, the phases of the outputs of the secondary coils are opposite to each other, so that the differential output of the secondary coils is phase detected to determine the presence or absence of the residual toner amount or the level of residual amount.

Abstract translation: 一种用于检测电子复印机等的调色剂的残留量的存在或不存在或水平的调色剂水平传感器。 为了确保稳定的运行而不管外部环境条件如温度和湿度的变化，一对变压器设置有初级线圈和次级线圈，分别缠绕在具有磁隙的磁芯上。 当磁性部件存在于磁隙附近时，次级线圈的输出的相位彼此相反，从而相位检测次级线圈的差分输出，以确定是否存在残留 调色剂量或残留量。

公开(公告)号：US4592645A

公开(公告)日：1986-06-03

申请号：US624688

申请日：1984-06-14

Applicant: Kenichi Kanai ,  Osamu Shimoe ,  Sadaji Tashiro

Inventor： Kenichi Kanai ,  Osamu Shimoe ,  Sadaji Tashiro

IPC: G03G15/08

CPC classification number: G03G15/0853

Abstract: An apparatus for controlling the toner concentration of a developer includes a detector 14, 15 disposed at a predetermined position in a container containing a developer 5 having magnetic carrier and color toner, whereby the color toner is replenished into the container depending on the output of the detector until the toner concentration of the developer lies within a predetermined range. The detector has a plurality of magnetic circuits each having magnetic gaps, and the coupling coefficient of one of the magnetic circuits is set at a value equivalent to the coupling coefficient exhibited when the toner concentration of the developer lies within a predetermined range, while the coupling coefficient of another magnetic circuit is changeable in response to the actual toner concentration. The differential output of the two magnetic circuits is subjected to phase detection for comparing the coupling coefficient values of the two magnetic circuits and thereby detecting the toner concentration.

Abstract translation: PCT No.PCT / JP83 / 00422 Sec。 371日期1984年6月14日 102（e）日期1984年6月14日PCT提交1983年11月28日PCT公布。 出版物WO84 / 02202 日本1984年6月7日。用于控制显影剂的调色剂浓度的设备包括设置在容纳具有磁性载体的显影剂5和彩色调色剂的容器中的预定位置处的检测器14,15，由此将彩色调色剂补充到 容器取决于检测器的输出，直到显影剂的调色剂浓度在预定范围内。 检测器具有各自具有磁隙的多个磁路，并且一个磁路的耦合系数被设定为当显影剂的调色剂浓度处于预定范围内时显示的耦合系数的值，而耦合 另一个磁路的系数可以响应于实际的调色剂浓度而变化。 对两个磁路的差分输出进行相位检测，以比较两个磁路的耦合系数值，从而检测调色剂浓度。

公开(公告)号：US08445862B2

公开(公告)日：2013-05-21

申请号：US12968221

申请日：2010-12-14

Applicant: Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

Inventor： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

IPC: H01J37/143

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

Abstract translation: 设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。 在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。 每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。 该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。 在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场 每个子透镜到样品表面。