SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
    基板处理装置和基板处理方法

    公开(公告)号:US20090239384A1

    公开(公告)日:2009-09-24

    申请号:US12369874

    申请日:2009-02-12

    IPC分类号: H01L21/306

    CPC分类号: H01L21/67057

    摘要: A discharge hole of a lower nozzle is directed at an angle of 5 degrees to 40 degrees slanting inward with respect to a normal to the upper surface of a bottom plate. Thus, the flow pressure of a processing solution discharged through the discharge hole is not excessively reduced. Further, a circulation area of the processing solution does not expand widely in an inner bath. As a result, the processing solution in the inner bath is effectively displaced while the processing solution smoothly flows into gaps between substrates.

    摘要翻译: 下喷嘴的排出孔相对于底板的上表面的法线向内倾斜5度至40度的角度。 因此,通过排出孔排出的处理液的流量压力不会过度降低。 此外,处理液的循环区域在内槽中不会广泛扩大。 结果,内浴中的处理液有效地移位,同时处理溶液顺利地流入基板之间的间隙。

    Ozone removing material and method for preparing the same
    2.
    发明授权
    Ozone removing material and method for preparing the same 失效
    除臭材料及其制备方法

    公开(公告)号:US07291312B2

    公开(公告)日:2007-11-06

    申请号:US10333337

    申请日:2001-07-17

    IPC分类号: B01J41/12 D04H1/00 B01D50/00

    摘要: An object of the present invention is to solve problems of conventional ozone-scavenging materials and to provide an ozone-scavenging material capable of effectively decomposing/removing ozone at low cost. To attain the above object, the present invention provides an ozone-scavenging material characterized in that a metal having ozone-decomposing ability or an oxide thereof is supported on an organic polymer base having a polymer side chain having an ion exchange group on the backbone of a polymer. Said ozone-scavenging material can be prepared by introducing a polymer side chain having an ion exchange group onto the backbone of an organic polymer base, bringing the resulting organic polymer material into contact with a salt of a metal having ozone-decomposing ability to support the ion of said metal on the ion exchange group, and then precipitating fine particles of said metal or an oxide of said metal on the organic polymer material by oxidation or reduction.

    摘要翻译: 本发明的目的是解决常规的臭氧清除材料的问题,并提供能够以低成本有效地分解/除去臭氧的臭氧清除材料。 为了实现上述目的,本发明提供了一种臭氧清除材料,其特征在于具有臭氧分解能力的金属或其氧化物负载在具有离子交换基团的聚合物侧链的有机聚合物基体上, 一种聚合物。 所述臭氧清除材料可以通过将具有离子交换基团的聚合物侧链引入有机聚合物基质的主链上来制备,使得到的有机聚合物材料与具有臭氧分解能力的金属的盐接触,以支持 离子交换基团上的所述金属的离子,然后通过氧化或还原在所述有机聚合物材料上沉淀所述金属的微粒或所述金属的氧化物。

    Moisture adsorbing and desorbing material
    4.
    发明授权
    Moisture adsorbing and desorbing material 失效
    水分吸附和解吸材料

    公开(公告)号:US06703432B1

    公开(公告)日:2004-03-09

    申请号:US10110736

    申请日:2002-08-07

    IPC分类号: C08F3600

    摘要: An object of the present invention is to provide a water adsorbing/desorbing organic polymer material having excellent water adsorbing/desorbing performance and which is inexpensive and readily disposable by incineration or the like. In order to attain this object, water adsorbing/desorbing organic polymer materials of the present invention are characterized by having a polymer side chain containing a hydrophilic group on the backbone of an organic polymer base.

    摘要翻译: 本发明的目的是提供具有优异的吸水/脱附性能的水吸附/解吸有机聚合物材料,其通过焚烧等廉价且容易一次性。 为了达到这个目的,本发明的水吸附/解吸有机聚合物材料的特征在于在有机聚合物基体的主链上具有含有亲水基团的聚合物侧链。

    Method for evaluating performance of chemical filter for cleaning gas
    5.
    发明授权
    Method for evaluating performance of chemical filter for cleaning gas 失效
    清洁气体化学过滤器性能评估方法

    公开(公告)号:US6009739A

    公开(公告)日:2000-01-04

    申请号:US993988

    申请日:1997-12-18

    CPC分类号: B01D53/0454

    摘要: A method for evaluating performance of a chemical filter element is disclosed. A moisture content, a weight or a pressure loss of a filter element including an ion exchanger is determined, and the determined value is compared with a prescribed value. Alternatively, the determined value is converted into a residual ion exchange capacity of the filter element, and the residual ion exchange capacity is compared with a prescribed value. When the determined value or the residual ion exchange capacity is equal to or less than the prescribed value, the filter element is exchanged. On the other hand, when the determined value or the residual ion exchange capacity is more than the prescribed value, after waiting a prescribed period, the determining step and the comparing step are repeated.

    摘要翻译: 公开了一种评价化学过滤元件性能的方法。 确定包括离子交换剂的过滤元件的含水量,重量或压力损失,并将所确定的值与规定值进行比较。 或者,将所确定的值转换为过滤元件的残留离子交换容量,并将剩余离子交换容量与规定值进行比较。 当确定值或残留离子交换容量等于或小于规定值时,更换过滤元件。 另一方面,当确定值或残留离子交换容量大于规定值时,在等待规定期间之后,重复确定步骤和比较步骤。

    High frequency induction coupled plasma torch with concentric pipes
having flanges thereon
    8.
    发明授权
    High frequency induction coupled plasma torch with concentric pipes having flanges thereon 失效
    具有同心管的高频感应耦合等离子体焰炬在其上具有凸缘

    公开(公告)号:US4578560A

    公开(公告)日:1986-03-25

    申请号:US532937

    申请日:1983-09-16

    CPC分类号: H05H1/30

    摘要: A high frequency induction coupled plasma torch is disclosed. The torch is comprised of a multi-pipe structure and is used for forming a plasma flame by high frequency power induction. The torch is comprised of a plurality of pipes which are coaxially arranged within each other. Each of the pipes has one or more flanged openings positioned on its surface whereby it is interconnected to the adjacent pipe. By means of the flanged openings any given pipe may be interconnected with any number of outer pipes. The torch can be economically produced and maintained.

    摘要翻译: 公开了一种高频感应耦合等离子体焰炬。 手电筒由多管结构组成,用于通过高频功率感应形成等离子火焰。 手电筒由多个彼此同轴布置的管道组成。 每个管道具有位于其表面上的一个或多个凸缘开口,由此其与相邻的管道互连。 通过法兰开口,任何给定的管可以与任何数量的外管相互连接。 火炬可以经济地生产和维护。