摘要:
An apparatus for manufacturing semiconductor devices includes: a cabinet having an opening section on a front surface thereof; a front door that is provided at the opening section of the cabinet in a manner to be freely opened and closed; a low oxygen gas intake port for introducing nitrogen gas or gas with an oxygen concentration lower than a concentration of oxygen contained in an air atmosphere; a gas exhaust port for exhausting the gas from within the cabinet; a ventilation system that introduces the air atmosphere or oxygen into the cabinet; a lock system that is capable of locking the front door in a closed state; and a detector that detects oxygen concentration within the cabinet, wherein the lock system unlocks the front door when the oxygen concentration detected by the detector becomes a predetermined value or higher.
摘要:
Silicon tetrachloride is effectively and efficiently produced at a relatively low temperature and at a high yield by (1) feeding a mixture of a silicon dioxide containing substance and carbon to the top of a reactor in which a reaction mixture forms a downwardly flowing moving bed, (2) feeding gaseous boron trichloride to an intermediate portion of the reactor, (3) feeding gaseous chlorine to a portion of the reactor located below the boron trichloride feed portion, and (4) feeding an inert gas to a portion of the reactor located below the chlorine feed portion, whereby a silicon tetrachloride formation reaction is carried out in the moving bed and the formed silicon tetrachloride is recovered from a gas mixture discharged from the top of the reactor.
摘要:
The chlorides of elements of Groups III, IV and V of the Periodic Table, such as, boron trichloride, silicon tetrachloride, zirconium tetrachloride and vanadium tetrachloride are prepared by heating activated carbon particles having a supported aqueous solution of compounds of the elements of Groups III, IV and V of the Periodic Table thereon at a temperature of from 300.degree. through 1000.degree. C. and, then, reacting the resultant activated carbon particles with chlorine.
摘要:
A controller that controls a registered mark sensor stores, in a storing unit, a registered mark setting (239) which indicates a setting of the detecting sensitivity of the registered mark sensor in association with a bar code number (231). Upon reception of the bar code number (231) from a bar code reader, the controller reads out the registered mark setting (239) associated with the bar code number (231). Then the controller sets the registered mark sensor to the detecting sensitivity associated with the registered mark setting (239) thus read out.
摘要:
A circuit breaker includes a movable contact, a fixed contact, a switching device, a switching operation handle, and an over-current tripping device. The switching device has a switching lever connected to the handle, a toggle linkage having an upper link and a lower link for connecting to the movable contact, a tripping mechanism for activating the toggle linkage in response to over-current, and an operation spring tightly stretched between the switching lever and the toggle linkage. A locking member is provided in the switching device for interconnecting the toggle linkage and the switching lever and for restricting a movement range of the switching lever according to an operational position of the toggle linkage. When main-circuit contact points are stuck, the locking member restricts the movement of the switching lever and prevents the handle from moving to the OFF position.
摘要:
A circuit breaker comprises a container made of electrically insulating material, the container being constituted by a casing and a cover; a switching mechanism contained in the container; partition walls defining a recess in the casing, the recess being separated from an interior of the container by the partition walls; and a base made of electrically insulating material, on which an accessory which is in the form of a cassette is detachably mounted, the base being detachably mounted in the recess formed in the cover.
摘要:
An arc quenching device for a circuit breaker having a stationary contact member and a moving contact member includes a magnetic element formed of an arc quenching core and a base plate. The arc quenching core includes a back wall, and two side walls extending from lateral sides of the back wall. The base plate extends substantially perpendicularly from a lower side of the back wall in a direction as in the side walls, and is fixed to the stationary contact member. The base plate includes a U-shaped magnetic driving core situated near a stationary contact point and extending upwardly from the base plate to surround the stationary contact point, and an arc horn integrally formed with the base plate and obliquely extending toward the back wall from a portion near the stationary contact point. Arc formed between the stationary contact member and the moving contact member is moved by magnetic driving force formed by the magnetic driving core to the arc quenching core to be quenched therein through the arc horn.
摘要:
The present invention is directed toward a circuit breaker having an open-and-close shaft; holding member coupled to the open-and-close shaft; at least one movable contactor coupled to the holding member; support member for rotatably supporting the open-and-close shaft; and stopper member coupled with the support member so as to restrict an open-and-separation position of the movable contactor, wherein the circuit breaker is disposed within a case, the stopper member are formed on side faces of between-phase partitions of the case and a portion of the holding member contacts the stopper member. Thereby, it is possible to improve an insulation function and to lessen the impact between the holding member and the stopper member.
摘要:
In a method of foreseeing or detecting break-through of a gas in a gas-adsorbing apparatus utilizing a gas-adsorbing material, the improvement in which the break-through is foreseen or detected by detecting a weight of the gas adsorbed by the gas-adsorbing material. When the gas to be detected contains boron trichloride, the break-through can be foreseen or detected by detecting a color change of a detecting agent such as 1,1'-dianthrimide or a combination of caraminic acid, hydrochloric acid and sulfuric acid, the detecting agent being arranged in a lower stream following the gas-adsorbing material and which shows a color change upon contact with boron trichloride.
摘要:
An under-voltage tripping device installed on a main body of a circuit breaker includes an electromagnetic under-voltage tripping mechanism; an early-operation auxiliary switch for switching a conductive path of an electromagnet of the electromagnetic under-voltage tripping mechanism in connection with a handle mechanism of the circuit breaker; and a unit case having two opposite ends and external connection terminals at the two opposite ends thereof. The unit case is shaped to fit an outward frame of the main body. The wiring circuits for the electromagnet and the early-operation auxiliary switch are separated from each other in the unit case. The early-operation auxiliary switch is connected between the external connection terminals of the unit case, and the electromagnet has leads emerging directly from the unit case and connected to an external wiring.