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公开(公告)号:US20070243707A1
公开(公告)日:2007-10-18
申请号:US11686501
申请日:2007-03-15
Applicant: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert , Lothar Bauch , Stefan Blawid , Manuela Gutsch , Ludovic Lattard , Martin Roessiger , Mirko Vogt
Inventor: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert , Lothar Bauch , Stefan Blawid , Manuela Gutsch , Ludovic Lattard , Martin Roessiger , Mirko Vogt
IPC: H01L21/44 , G03F1/00 , H01L21/302
CPC classification number: H01L21/32139 , H01L21/0332 , H01L27/105 , H01L27/112
Abstract: A hard mask layer stack for patterning a layer to be patterned includes a carbon layer disposed on top of the layer to be patterned, a first layer of a material selected from the group of SiO2 and SiON disposed on top of the carbon layer and a silicon layer disposed on top of the first layer. A method of patterning a layer to be patterned includes providing the above described hard mask layer stack on the layer to be patterned and patterning the silicon hard mask layer in accordance with a pattern to be formed in the layer that has to be patterned.
Abstract translation: 用于图案化待图案化层的硬掩模层叠层包括设置在待图案化层的顶部上的碳层,选自第二层由选自SiO 2和SiON中的SiON的材料 碳层顶部和设置在第一层顶部的硅层。 图案化待图案化层的方法包括在待图案化的层上提供上述硬掩模层堆叠,并根据要在图案层中形成的图案来图案化硅硬掩模层。
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公开(公告)号:US20120161561A1
公开(公告)日:2012-06-28
申请号:US13335599
申请日:2011-12-22
Applicant: Thorsten Kuhnen , Karl-Heinz Rosenthal , Matthias Markert , Uwe Christian
Inventor: Thorsten Kuhnen , Karl-Heinz Rosenthal , Matthias Markert , Uwe Christian
CPC classification number: H02K5/148 , H02K7/1166 , H02K11/026 , H02K11/215 , H02K11/38 , H02K11/40
Abstract: An electric-motor adjustment drive is provided for an adjustment element in a motor vehicle, in particular a window lifter, that has a drive module, which includes a pole pot that supports a motor shaft, and having an electronic module having a circuit board, which can be inserted into a housing of a brush holder, which housing is connected to the drive module. The circuit board is retained in an insertion plane perpendicular to the motor shaft by the housing of the brush holder in a form- and/or force-closed manner, wherein a number of contact elements for motor contacting and/or for interference suppression are arranged in the housing, which contact elements are contacted within the housing when the circuit board is inserted.
Abstract translation: 本发明提供一种电动机调节驱动装置,用于具有驱动模块的机动车辆,特别是车窗升降机中的调节元件,所述驱动模块包括支撑电动机轴的极柱,并且具有电路板, 其可以插入电刷架的壳体中,该壳体连接到驱动模块。 电路板通过电刷架的壳体以形式和/或强制关闭的方式保持在垂直于电动机轴的插入平面中,其中多个用于电机接触和/或用于干扰抑制的接触元件被布置 在壳体中,当插入电路板时,接触元件在壳体内接触。
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公开(公告)号:US20070215986A1
公开(公告)日:2007-09-20
申请号:US11376645
申请日:2006-03-15
Applicant: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert
Inventor: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert
IPC: H01L23/58 , H01L21/467
CPC classification number: H01L21/32139 , H01L21/0332 , H01L27/105 , H01L27/112
Abstract: A hard mask layer stack for patterning a layer to be patterned includes a carbon layer disposed on top of the layer to be patterned, a first layer of a material selected from the group of SiO2 and SiON disposed on top of the carbon layer and a silicon layer disposed on top of the first layer. A method of patterning a layer to be patterned includes providing the above described hard mask layer stack on the layer to be patterned and patterning the silicon hard mask layer in accordance with a pattern to be formed in the layer that has to be patterned.
Abstract translation: 用于图案化待图案化层的硬掩模层叠层包括设置在待图案化层的顶部上的碳层,选自第二层由选自SiO 2和SiON中的SiON的材料 碳层顶部和设置在第一层顶部的硅层。 图案化待图案化层的方法包括在待图案化的层上提供上述硬掩模层堆叠,并根据要在图案层中形成的图案来图案化硅硬掩模层。
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4.
公开(公告)号:US08009477B2
公开(公告)日:2011-08-30
申请号:US12182714
申请日:2008-07-30
Applicant: Christoph Kleint , Nicolas Nagel , Dominik Olligs , Matthias Markert
Inventor: Christoph Kleint , Nicolas Nagel , Dominik Olligs , Matthias Markert
IPC: G11C11/40 , H01L27/088 , H01L29/78 , H01L21/4763
CPC classification number: G11C5/063 , H01L21/76804 , H01L21/76807 , H01L21/76813
Abstract: An integrated circuit and a method of forming an integrated circuit. One embodiment includes a conductive line formed above a surface of a carrier. A slope of the sidewalls of the conductive line in a direction perpendicular to the surface of the carrier reveals a discontinuity and a width of the conductive line in an upper portion thereof is larger than the corresponding width in the lower portion.
Abstract translation: 集成电路和形成集成电路的方法。 一个实施例包括形成在载体的表面上方的导线。 在垂直于载体表面的方向上的导线的侧壁的斜面显示出不连续性,并且导电线的上部的宽度大于下部的对应宽度。
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公开(公告)号:US07662721B2
公开(公告)日:2010-02-16
申请号:US11376645
申请日:2006-03-15
Applicant: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert
Inventor: Dirk Manger , Hocine Boubekeur , Martin Verhoeven , Nicolas Nagel , Thomas Tatry , Dirk Caspary , Matthias Markert
IPC: H01L21/461
CPC classification number: H01L21/32139 , H01L21/0332 , H01L27/105 , H01L27/112
Abstract: A hard mask layer stack for patterning a layer to be patterned includes a carbon layer disposed on top of the layer to be patterned, a first layer of a material selected from the group of SiO2 and SiON disposed on top of the carbon layer and a silicon layer disposed on top of the first layer. A method of patterning a layer to be patterned includes providing the above described hard mask layer stack on the layer to be patterned and patterning the silicon hard mask layer in accordance with a pattern to be formed in the layer that has to be patterned.
Abstract translation: 用于图案化待图案化层的硬掩模层堆叠包括设置在待图案化层的顶部上的碳层,选自设置在碳层顶部上的SiO 2和SiON中的第一层材料和硅 层设置在第一层的顶部。 图案化待图案化层的方法包括在待图案化的层上提供上述硬掩模层堆叠,并根据要在图案层中形成的图案来图案化硅硬掩模层。
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公开(公告)号:US08536746B2
公开(公告)日:2013-09-17
申请号:US13335599
申请日:2011-12-22
Applicant: Thorsten Kuhnen , Karl-Heinz Rosenthal , Matthias Markert , Uwe Christian
Inventor: Thorsten Kuhnen , Karl-Heinz Rosenthal , Matthias Markert , Uwe Christian
CPC classification number: H02K5/148 , H02K7/1166 , H02K11/026 , H02K11/215 , H02K11/38 , H02K11/40
Abstract: An electric-motor adjustment drive is provided for an adjustment element in a motor vehicle, in particular a window lifter, that has a drive module, which includes a pole pot that supports a motor shaft, and having an electronic module having a circuit board, which can be inserted into a housing of a brush holder, which housing is connected to the drive module. The circuit board is retained in an insertion plane perpendicular to the motor shaft by the housing of the brush holder in a form- and/or force-closed manner, wherein a number of contact elements for motor contacting and/or for interference suppression are arranged in the housing, which contact elements are contacted within the housing when the circuit board is inserted.
Abstract translation: 本发明提供一种电动机调节驱动装置,用于具有驱动模块的机动车辆,特别是车窗升降机中的调节元件,所述驱动模块包括支撑电动机轴的极柱,并且具有电路板, 其可以插入电刷架的壳体中,该壳体连接到驱动模块。 电路板通过电刷架的壳体以形式和/或强制关闭的方式保持在垂直于电动机轴的插入平面中,其中多个用于电机接触和/或用于干扰抑制的接触元件被布置 在壳体中,当插入电路板时,接触元件在壳体内接触。
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7.
公开(公告)号:US20100027311A1
公开(公告)日:2010-02-04
申请号:US12182714
申请日:2008-07-30
Applicant: Christoph Kleint , Nicolas Nagel , Dominik Olligs , Matthias Markert
Inventor: Christoph Kleint , Nicolas Nagel , Dominik Olligs , Matthias Markert
IPC: H01L21/768 , G11C5/06
CPC classification number: G11C5/063 , H01L21/76804 , H01L21/76807 , H01L21/76813
Abstract: An integrated circuit and a method of forming an integrated circuit. One embodiment includes a conductive line formed above a surface of a carrier. A slope of the sidewalls of the conductive line in a direction perpendicular to the surface of the carrier reveals a discontinuity and a width of the conductive line in an upper portion thereof is larger than the corresponding width in the lower portion.
Abstract translation: 集成电路和形成集成电路的方法。 一个实施例包括形成在载体的表面上方的导线。 在垂直于载体表面的方向上的导线的侧壁的斜面显示出不连续性,并且导电线的上部的宽度大于下部的对应宽度。
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