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1.发明授权Optical apparatus for forming correlation spectrometers and optical processors 失效用于形成相关光谱仪和光学处理器的光学装置
公开(公告)号：US5905571A
公开(公告)日：1999-05-18
申请号：US522202
申请日：1995-08-30
CPC分类号： G06E3/005 , G01J3/18 , G01J3/457 , G02B26/0808
摘要： Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for alternately addressing each diffractive optical element thereof to produce for one unit of time a first correlation with the incident light, and to produce for a different unit of time a second correlation with the incident light that is different from the first correlation. In preferred embodiments of the invention, the optical apparatus is in the form of a correlation spectrometer; and in other embodiments, the apparatus is in the form of an optical processor. In some embodiments, the optical apparatus comprises a plurality of diffractive optical elements on a common substrate for forming first and second gratings that alternately intercept the incident light for different units of time. In other embodiments, the optical apparatus includes an electrically-programmable diffraction grating that may be alternately switched between a plurality of grating states thereof for processing the incident light. The optical apparatus may be formed, at least in part, by a micromachining process.
摘要翻译： 用于形成相关光谱仪和光学处理器的光学装置。 光学装置包括形成在基板上的一个或多个衍射光学元件，用于接收来自光源的光并处理入射光。 光学装置包括用于交替地寻址其每个衍射光学元件的寻址元件，以产生与入射光的第一相关的一个单位时间，并且产生与不同于入射光的入射光的第二相关性。 第一相关。 在本发明的优选实施例中，光学装置是相关光谱仪的形式; 并且在其他实施例中，该装置是光学处理器的形式。 在一些实施例中，光学装置包括在公共基板上的多个衍射光学元件，用于形成用于不同单位时间交替地截取入射光的第一和第二光栅。 在其他实施例中，光学装置包括电可编程衍射光栅，其可以在其多个光栅状态之间交替地切换以处理入射光。 光学装置可以至少部分地通过微加工工艺形成。
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公开(公告)号：US5757536A
公开(公告)日：1998-05-26
申请号：US521559
申请日：1995-08-30
CPC分类号： G02B5/1828 , G02B26/0808
摘要： An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).
摘要翻译： 电可编程衍射光栅。 可编程光栅包括其上形成有多个电极的基板和每个电极上方的可移动光栅元件。 光栅元件是静电可编程的，以形成衍射光栅，用于在入射光束从光栅元件的上表面反射时衍射入射光束。 通过微加工过程形成的可编程衍射光栅具有用于光学信息处理（例如光学相关器和计算机）的应用，用于对不同波长的多个光束（例如用于光纤通信）进行多路复用和解复用，并且用于形成光谱仪 例如相关和扫描光谱仪）。
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公开(公告)号：US5834627A
公开(公告)日：1998-11-10
申请号：US766142
申请日：1996-12-17
申请人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
发明人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
CPC分类号： G01N27/16
摘要： A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.
摘要翻译： 一种可燃气体传感器，其使用电阻加热的贵金属涂覆的微加工多晶硅丝来量热检测可燃气体的存在和浓度。 到目前为止测试的长丝是2μm厚的10μm宽×100,250,500或1000μm长的多晶Si; 有些被外涂了0.25μm厚的保护性CVD Si 3 N 4层。 通过CVD将Pt催化Pt薄膜从前体Pt（acac）2沉积到电阻加热至约500℃的微丝上; Pt仅在热丝上沉积。 使用恒电阻模式反馈电路，Pt涂层长丝在约 在80/20 N2 / O2混合物中，在保持恒定电阻（温度）所需的电源电流变化为100 ppm和1％之间，300°C（35 mW输入功率）线性响应。 也可以使用其它催化剂。
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公开(公告)号：US07046410B2
公开(公告)日：2006-05-16
申请号：US09975169
申请日：2001-10-11
IPC分类号： G02B26/08
CPC分类号： B82Y30/00 , G02B26/0808
摘要： A programmable MEMS diffractive optical processor having actuatable grating elements that are optically adjacent and supported at points intermediate the ends of the grating elements. The grating elements are maintained substantially flat during actuation of the grating elements.
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5.发明授权Optical biosensor incorporating wavelength encoding of multiple unlabeled analytes 失效包含多个未标记分析物的波长编码的光学生物传感器公开(公告)号：US07505641B1
公开(公告)日：2009-03-17
申请号：US11505636
申请日：2006-08-17
CPC分类号： G02B6/124 , G01N21/774 , G02B2006/12107 , G02B2006/12138
摘要： A waveguide-based sensor is disclosed that uses one or more grating patterns of a bioreceptor on a surface of the waveguide to provide a wavelength-specific sensor response without the requirement of labeling the target molecule or the bioreceptor. Furthermore, there is provided a biosensor that, at least to a first order, is insensitive to non-specific binding.
摘要翻译： 公开了一种基于波导的传感器，其使用波导表面上的生物受体的一个或多个光栅图案来提供波长特异性传感器响应，而不需要标记靶分子或生物受体。 此外，提供了一种生物传感器，其至少对于第一级对非特异性结合不敏感。
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6.发明授权
公开(公告)号：US4899581A
公开(公告)日：1990-02-13
申请号：US351330
申请日：1989-05-04
申请人： Mark G. Allen , Stephen D. Senturia
发明人： Mark G. Allen , Stephen D. Senturia
CPC分类号： G01N19/04 , G01N2203/0091 , G01N2203/0298
摘要： A device for quantitatively measuring adherence of thin films provides a first substrate having an upper surface and a second substrate having a surface coplanar therewith. The second substrate is spaced on all sides from the first substrate by a cavity. The thin film is suspended over the cavity and adhered to the surfaces of the two substrates. A characteristic length of the area of the surface of the second substrate to which the film is adhered is made small relative to the characteristic length of the cavity. A pressure differential is applied across the thickness of the film such that the film debonds from the surface of the second substrate. Mechanical characteristics of the debonding of the film are observed and measured. The characteristics are thereafter related to provide a quantitative measurement of adherence of the thin film to the second substrate. A measurement of relative adherence between different films is obtained by testing a multilayered film structure. Other layers of various materials may be used to define a smaller area of adherence to which the film may be adhered.
摘要翻译： 用于定量测量薄膜粘附性的装置提供具有上表面的第一基底和具有与其共面的表面的第二基底。 第二基板通过空腔与第一基板的所有侧面间隔开。 薄膜悬挂在空腔上并粘附到两个基板的表面上。 相对于空腔的特征长度，薄膜附着的第二基板的表面的面积的特征长度变小。 在膜的厚度上施加压差，使得膜从第二基板的表面剥离。 观察并测量薄膜脱粘的机械特性。 此后的特征涉及提供薄膜对第二基底的粘附的定量测量。 通过测试多层膜结构获得不同膜之间的相对粘附度的测量。 可以使用各种材料的其它层来限定薄膜附着的更小的粘附面积。
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公开(公告)号：US4368480A
公开(公告)日：1983-01-11
申请号：US104641
申请日：1979-12-17
申请人： Stephen D. Senturia
发明人： Stephen D. Senturia
IPC分类号： G01N27/414 , H01L27/088 , H01L29/423 , H01L29/49 , H03K3/354 , H03K3/356 , H03K19/094 , H01L29/78 , H01L29/66
CPC分类号： H01L27/088 , G01N27/4148 , H01L29/42312 , H01L29/4966 , H01L29/4983 , H03K19/094 , H03K3/354 , H03K3/356017
摘要： Logic elements such as inverters, NAND-gates and NOR-gates that include charge-flow transistors and systems that include such logic elements, and oscillators that include such logic elements. A basic logic element includes a charge-flow transistor and a load element, in combination, the load element being connected to either the source or the drain of the charge-flow transistor.
摘要翻译： 诸如逆变器，NAND门和NOR门的逻辑元件包括电荷流量晶体管和包括这种逻辑元件的系统，以及包括这种逻辑元件的振荡器。 基本逻辑元件包括电荷流量晶体管和负载元件，组合地，负载元件连接到电荷流量晶体管的源极或漏极。
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公开(公告)号：US4317084A
公开(公告)日：1982-02-23
申请号：US76038
申请日：1979-09-17
申请人： Stephen D. Senturia , Kou Togashi
发明人： Stephen D. Senturia , Kou Togashi
IPC分类号： G01N27/414 , H01L29/423 , H01L29/49 , H03B25/00
CPC分类号： H01L29/4991 , G01N27/4148 , H01L29/42312 , H01L29/4983
摘要： An oscillator having a logic element that includes a charge-flow transistor and a load element, in combination, and that further includes a Schmitt trigger or the like connected to receive as input thereto an output from the logic element and to provide an output that is fed back as input to the logic element.
摘要翻译： 具有组合的包括电荷流量晶体管和负载元件的逻辑元件的振荡器，并且还包括施密特触发器等，其连接到作为输入接收来自逻辑元件的输出并提供输出 作为逻辑元件的输入反馈。
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公开(公告)号：US07196789B2
公开(公告)日：2007-03-27
申请号：US10752212
申请日：2004-01-06
摘要： A light processor (such as a spectrometer) providing wavelength equalization for a sample pathway and a reference pathway by actuation of a light amplitude modulator. A chemometric processor including a light amplitude modulator capable of performing chemical analysis by applying weights to wavelengths of light, thereby reducing the need for electronic post processing.
摘要翻译： 通过致动光振幅调制器来提供样品路径的波长均衡和参考路径的光处理器（例如光谱仪）。 一种化学计量处理器，包括能够通过对光波长施加加权来执行化学分析的光振幅调制器，从而减少对电子后处理的需要。
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公开(公告)号：US06392313B1
公开(公告)日：2002-05-21
申请号：US09354544
申请日：1999-07-15
申请人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
发明人： Alan H. Epstein , Stephen D. Senturia , Ian A. Waitz , Jeffrey H. Lang , Stuart A. Jacobson , Fredric F. Ehrich , Martin A. Schmidt , G. K. Ananthasuresh , Mark S. Spearing , Kenneth S. Breuer , Steven F. Nagle
IPC分类号： H01L2984
CPC分类号： F23R3/42 , F01D5/28 , F01D15/06 , F01D25/20 , F01K13/00 , F02C3/05 , F02K9/48 , F05D2220/50 , F05D2230/14 , F05D2250/82 , F05D2250/84 , F05D2300/2261 , F05D2300/2283 , F05D2300/607 , F23C2900/03001
摘要： The invention overcomes limitations of conventional power and thermodynamic sources by with micromachinery components that enable production of significant power and efficient operation of thermodynamic systems in the millimeter and micron regime to meet the efficiency, mobility, modularity, weight, and cost requirements of many modern applications. A micromachine of the invention has a rotor disk journalled for rotation in a stationary structure by a journal bearing. A plurality of radial flow rotor blades, substantially untapered in height, are disposed on a first rotor disk face, and an electrically conducting region is disposed on a rotor disk face. A plurality of stator electrodes that are electrically interconnected to define multiple electrical stator phases are disposed on a wall of the stationary structure located opposite the electrically conducting region of the rotor disk. A first orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially central of the rotor blades, and a second orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially peripheral of the rotor blades. An electrical connection to the stator electrode configuration is provided for stator electrode excitation and for power transfer with the stator electrode configuration as the rotor disk rotates.
摘要翻译： 本发明克服了常规功率和热力学源的限制，其中微机械组件能够在毫米和微米范围内产生显着功率和热力系统的有效运行，以满足许多现代应用的效率，移动性，模块化，重量和成本要求 。 本发明的微型机械具有转轴，该转子盘通过轴颈轴承在静止结构中旋转。 基本上没有高度的多个径流式转子叶片设置在第一转子盘面上，导电区域设置在转子盘面上。 电气互连以限定多个电定子相的多个定子电极设置在固定结构的与转子盘的导电区域相对的位置的壁上。 固定结构中的第一孔口在转子叶片的径向中心的位置处提供与第一转子盘面的流体连通，并且固定结构中的第二孔口在第一转子盘面的径向周边的位置处提供与第一转子盘面的流体连通 转子叶片。 提供与定子电极配置的电连接用于定子电极激励和用于当转子盘旋转时具有定子电极配置的功率传递。
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