Photosensitive Composition, Pattern Forming Material, Photosensitive Laminate, Pattern Forming Apparatus, and Pattern Forming Process
    1.
    发明申请
    Photosensitive Composition, Pattern Forming Material, Photosensitive Laminate, Pattern Forming Apparatus, and Pattern Forming Process 审中-公开
    光敏组合物,图案形成材料,感光层压板,图案形成装置和图案形成工艺

    公开(公告)号:US20080268374A1

    公开(公告)日:2008-10-30

    申请号:US11632163

    申请日:2005-07-14

    CPC classification number: G03F7/031 G03F7/0045 G03F7/028 G03F7/029 G03F7/0295

    Abstract: A photosensitive composition having an extremely constant photosensitivity distribution relative to an exposure light having a wavelength of 400 nm to 410 nm, and excelling in pattern reproductivity, suppressing variations in pattern formation; a pattern forming material and a photosensitive laminate with the photosensitive composition laminated thereon; and a pattern forming apparatus and a pattern forming process.The photosensitive composition contains a binder, a polymerizable compound, and a photopolymerization initiator; the photosensitive composition has a maximum spectral sensitivity in the wavelength range of 380 nm to 420 nm; the minimum exposure dose S400 capable of forming a pattern at a wavelength of 400 nm of the photosensitive composition is 300 mJ/cm2 or less; the minimum exposure dose S410 capable of forming a pattern at a wavelength of 410 nm of the photosensitive composition is 300 mJ/cm2 or less; and S400 and S410 satisfy the relation 0.6

    Abstract translation: 相对于波长为400nm〜410nm的曝光光具有极不均匀的感光性分布,图案再现性优异的感光性组合物,抑制图案形成的变化; 图案形成材料和感光层压体,其上层压有感光组合物; 以及图案形成装置和图案形成工序。 光敏组合物含有粘合剂,可聚合化合物和光聚合引发剂; 光敏组合物在380nm至420nm的波长范围内具有最大光谱灵敏度; 能够形成光敏组合物的波长400nm的图案的最小曝光量S 400> 300mJ / cm 2以下; 能够形成感光性组合物的波长410nm的图案的最小曝光量S 410为300mJ / cm 2以下; 并且S< 400>和< S< 410<满足关系式0.6< S< 400>< 410< 1.6。

    Image forming method
    3.
    发明申请

    公开(公告)号:US20070159584A1

    公开(公告)日:2007-07-12

    申请号:US11710476

    申请日:2007-02-26

    Applicant: Morimasa Sato

    Inventor: Morimasa Sato

    CPC classification number: G03F7/0007 G02B5/201 G03F7/095

    Abstract: An image forming method of the invention is an image forming method comprising the steps of exposing, through a photo mask, a substrate, on which a first negative photosensitive resin layer and second negative photosensitive resin layer are formed, wherein the photo mask is a photo mask having at least two light transmittable patterns, and the photosensitivity ratio of the first negative photosensitive resin layer to the second negative photosensitive resin layer is more than 1. This method makes it possible to form an image easily, which is used suitably by a reflection and transmission LCD display wherein the film thickness of a colored layer is partially varied in each pixel, and to easily form a spacer and a projection for orientation control.

    Light-sensitive resin composition
    5.
    发明授权
    Light-sensitive resin composition 失效
    感光树脂组合物

    公开(公告)号:US5663212A

    公开(公告)日:1997-09-02

    申请号:US191927

    申请日:1994-02-04

    CPC classification number: G03F7/027 G03F7/091 Y10S430/111 Y10S522/907

    Abstract: A light-sensitive resin composition which can be developed in an alkaline aqueous solution and has an excellent image-forming performance and a sufficient UV absorbance after an image formation is disclosed. The light-sensitive resin composition includes (1) a photopolymerization initiator or a photopolymerization initiator system, (2) an addition-polymerizable monomer having an ethylenically unsaturated double bond, (3) a high molecular binder which is soluble in an alkaline aqueous solution and insoluble in water, and (4) at least one of the compounds which substantially do not absorb light in a specified UV region and which, when subjected to treatment with an aqueous alkali solution and/or to heating, are capable of absorbing light in that region and have substantially no absorption in the visible region.

    Abstract translation: 公开了可以在碱性水溶液中显影并且在成像后具有优异的成像性能和足够的UV吸光度的感光树脂组合物。 感光性树脂组合物包括(1)光聚合引发剂或光聚合引发剂体系,(2)具有烯属不饱和双键的可加成聚合单体,(3)可溶于碱性水溶液的高分子粘合剂和 不溶于水,以及(4)至少一种在特定UV区域基本上不吸收光的化合物中的至少一种,当用碱水溶液和/或加热处理时,其能够吸收光,因为 并且在可见光区域基本上没有吸收。

    Photosensitive transfer material
    6.
    发明授权
    Photosensitive transfer material 失效
    感光转印材料

    公开(公告)号:US5409800A

    公开(公告)日:1995-04-25

    申请号:US217754

    申请日:1994-03-25

    CPC classification number: G03F7/161 G03F3/10 G03F7/346 H05K3/0079

    Abstract: A photosensitive transfer material comprises a temporary substrate having provided thereon an alkali-soluble thermoplastic resin layer, an intermediate layer, and a photosensitive resin layer in this order, the interlaminar adhesion in the transfer material being the smallest at the interface between the thermoplastic resin layer and the temporary substrate. The photosensitive resin layer can be transferred to a permanent substrate without involving failure due to fine dust, air bubbles or unevenness of the permanent substrate. An image can be formed with the transfer material by adhering the transfer material to a permanent substrate at least under heat and, after stripping the temporary substrate, imagewise exposing the photosensitive resin layer to light, and processing the transferred layers to develop the photosensitive resin layer. If the thermoplastic resin layer and the intermediate layer are first removed with a processing method with which the photosensitive resin layer is not substantially developed and then the photosensitive resin layer is developed using a processing solution other than used for revmoving the thermoplastic resin layer and the intermediate layer, excessive fatigue of the developing solution for the photosensitive resin layer and unevenness of development can be prevented.

    Abstract translation: 光敏转印材料包括依次设置有碱溶性热塑性树脂树脂层,中间层和感光性树脂层的临时基材,在热塑性树脂层之间的界面处,转印材料中的层间粘合力最小 和临时衬底。 可以将感光性树脂层转印到永久性基板上,而不会由于细小的灰尘,气泡或永久基板的不均匀性而导致故障。 可以通过至少在加热下将转印材料粘附到永久性基板上,并且在剥离临时基板之后,使感光性树脂层成像曝光,并且处理转印层以显影感光性树脂层 。 如果首先用感光性树脂层未显影的处理方法去除热塑性树脂层和中间层,然后使用除了用于将热塑性树脂层和中间体的旋转以外的处理溶液使感光性树脂层显影 可以防止感光性树脂层的显影液的过度疲劳和显影不均匀。

    Pattern Forming Material, Pattern Forming Apparatus, And Pattern Forming Process
    8.
    发明申请
    Pattern Forming Material, Pattern Forming Apparatus, And Pattern Forming Process 审中-公开
    图案形成材料,图案形成装置和图案形成工艺

    公开(公告)号:US20080118867A1

    公开(公告)日:2008-05-22

    申请号:US11596056

    申请日:2005-05-09

    Abstract: The objects of the present invention are to provide pattern forming materials capable of effectively suppressing sensitivity drop of photosensitive layers as well as capable of forming highly fine and precise patterns, pattern forming apparatuses equipped with the pattern forming materials, and pattern forming processes utilizing the pattern forming materials. In order to attain the objects, a pattern forming material is provided which comprises a support, and a photosensitive layer on the support, wherein the photosensitive layer comprises a polymerization inhibitor, a binder, a polymerizable compound, and a photopolymerization initiator, the photosensitive layer is exposed by means of a laser beam and developed by means of a developer to form a pattern, and the minimum energy of the laser beam is 0.1 mJ/cm2 to 10 mJ/cm2, which is required to yield substantially the same thickness of photosensitive layer subsequent to the developing as the thickness of the photosensitive layer prior to the exposing.

    Abstract translation: 本发明的目的是提供能够有效抑制感光层的灵敏度下降以及能够形成高精度和精确图案的图案形成材料,配备有图案形成材料的图案形成装置和利用图案的图案形成工艺 成型材料。 为了达到上述目的,提供了一种图案形成材料,其包括载体和载体上的感光层,其中感光层包含聚合抑制剂,粘合剂,可聚合化合物和光聚合引发剂,感光层 通过激光束曝光并通过显影剂显影以形成图案,并且激光束的最小能量为0.1mJ / cm 2至10mJ / cm 2 需要在曝光之前在感光层的厚度显影之后产生基本上相同厚度的感光层。

    Image forming method
    9.
    发明授权
    Image forming method 有权
    图像形成方法

    公开(公告)号:US07195847B2

    公开(公告)日:2007-03-27

    申请号:US10372231

    申请日:2003-02-25

    Applicant: Morimasa Sato

    Inventor: Morimasa Sato

    CPC classification number: G03F7/0007 G02B5/201 G03F7/095

    Abstract: An image forming method of the invention is an image forming method comprising the steps of exposing, through a photo mask, a substrate, on which a first negative photosensitive resin layer and second negative photosensitive resin layer are formed, wherein the photo mask is a photo mask having at least two light transmittable patterns, and the photosensitivity ratio of the first negative photosensitive resin layer to the second negative photosensitive resin layer is more than 1. This method makes it possible to form an image easily, which is used suitably by a reflection and transmission LCD display wherein the film thickness of a colored layer is partially varied in each pixel, and to easily form a spacer and a projection for orientation control.

    Abstract translation: 本发明的图像形成方法是一种图像形成方法,包括以下步骤:通过光掩模曝光形成有第一负感光性树脂层和第二负型感光性树脂层的基板,其中,所述光掩模为照片 具有至少两个可透光图案的掩模,并且第一负感光性树脂层与第二负型感光性树脂层的光敏比大于1.该方法使得可以容易地形成图像,其被适当地用于反射 以及透明LCD显示器,其中着色层的膜厚度在每个像素中部分变化,并且容易地形成间隔件和用于取向控制的突起。

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