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    Method of manufacturing microstructure and manufacturing system for the same
    2.
    发明申请
    Method of manufacturing microstructure and manufacturing system for the same 审中-公开
    制造微结构和制造系统的方法

    公开(公告)号：US20050233064A1

    公开(公告)日：2005-10-20

    申请号：US11060788

    申请日：2005-02-18

    申请人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    发明人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    IPC分类号： B81C3/00 ,  B05D1/00 ,  B05D3/12 ,  B81C1/00 ,  B81C99/00 ,  C07C2/02

    CPC分类号： B81C3/008

    摘要： A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.

    摘要翻译： 公开了一种用于制造具有高成形精度的微结构和制造系统的方法和系统。 在具有预定定位精度和大行程长度的粗略运动台上，放置行程长度小且定位精度较高的微动平台。 首先，粗动作阶段移动到期望的位置。 通过使用放置在激光长度测量机和精细运动台上的反射镜，精细测量薄膜部件在微动台上的当前位置。 该测量值被馈送到载物台控制装置，并且通过误差校正单元计算当前位置与目标位置之间的差。 因此，产生误差校正指令值以将微动台移动到目标位置。 因此，校正粗略运动阶段的误差。

    Micro-structure and manufacturing method and apparatus
    3.
    发明授权
    Micro-structure and manufacturing method and apparatus 失效
    微结构及制造方法及装置

    公开(公告)号：US06245249B1

    公开(公告)日：2001-06-12

    申请号：US09064056

    申请日：1998-04-22

    申请人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    发明人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    IPC分类号： B32B3100

    CPC分类号： B81C99/008 ,  B29C64/00 ,  B33Y10/00 ,  B33Y30/00 ,  B81B2201/035 ,  B81C2201/0197 ,  Y10T156/12 ,  Y10T156/13 ,  Y10T156/14 ,  Y10T428/24355

    摘要： A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.

    摘要翻译： 其上形成有多个与微结构的横截面相对应的多个横截面的薄膜的基板被放置在基板支架上。 衬底保持器被升高以将形成在衬底上的薄膜粘合到台的表面上，并且通过降低衬底保持器，将薄膜与衬底分离并转移到平台侧。 重复转印过程以在台上层压多个薄膜并形成微结构。 因此，提供了可以由诸如陶瓷的金属或绝缘体制造的具有高尺寸精度，特别是层压方向上的高分辨率的微结构，并且可以以结构元件的组合形式一起制造，并且 制造方法及其装置。

    MICRO FLUIDIC DEVICE AND FLUID CONTROL METHOD
    4.
    发明申请
    MICRO FLUIDIC DEVICE AND FLUID CONTROL METHOD 有权
    微流体装置和流体控制方法

    公开(公告)号：US20100229987A1

    公开(公告)日：2010-09-16

    申请号：US12575136

    申请日：2009-10-07

    申请人： Mutsuya TAKAHASHI ,  Masaki HIROTA ,  Takayuki YAMADA

    发明人： Mutsuya TAKAHASHI ,  Masaki HIROTA ,  Takayuki YAMADA

    IPC分类号： B01F5/00

    CPC分类号： B01F13/0059 ,  B01F5/0644 ,  B01F2005/0017 ,  Y10T137/87652

    摘要： A micro fluidic device is provided, the micro fluidic device including: at least one first introduction pipe into which first fluid is introduced; at least one second introduction pipe into which second fluid is introduced, the second introduction pipe being disposed adjacent to the first introduction pipe; a common channel connected to the first introduction pipe and the second introduction pipe, wherein in the common channel the first fluid and the second fluid are mixed; and a first group of rectification parts, the rectification parts of the first group being provided individually for the first introduction pipe or the second introduction pipe and generating a helical flow in the first fluid and the second fluid, wherein the helical flow in the first fluid and the helical flow in the second fluid have a same circumferential direction.

    摘要翻译： 提供一种微流体装置，该微流体装置包括：至少一个第一导入管，第一流体被引入到其中; 至少一个引入第二流体的第二引入管，所述第二引入管邻近所述第一引入管布置; 连接到第一导入管和第二导入管的公共通道，其中在共同通道中混合第一流体和第二流体; 以及第一组整流部，第一组的整流部分为第一导入管或第二导入管单独设置，在第一流体和第二流体中产生螺旋流，其中，第一流体 并且第二流体中的螺旋流具有相同的圆周方向。

    METHOD OF MANUFACTURING MICROSTRUCTURE AND MANUFACTURING SYSTEM FOR THE SAME
    5.
    发明申请
    METHOD OF MANUFACTURING MICROSTRUCTURE AND MANUFACTURING SYSTEM FOR THE SAME 审中-公开
    制造微结构和制造系统的方法

    公开(公告)号：US20070256774A1

    公开(公告)日：2007-11-08

    申请号：US11779805

    申请日：2007-07-18

    申请人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    发明人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    IPC分类号： B32B38/00

    CPC分类号： B81C3/008

    摘要： A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.

    摘要翻译： 公开了一种用于制造具有高成形精度的微结构和制造系统的方法和系统。 在具有预定定位精度和大行程长度的粗略运动台上，放置行程长度小且定位精度较高的微动平台。 首先，粗动作阶段移动到期望的位置。 通过使用放置在激光长度测量机和精细运动台上的反射镜，精细测量薄膜部件在微动台上的当前位置。 该测量值被馈送到载物台控制装置，并且通过误差校正单元计算当前位置与目标位置之间的差。 因此，产生误差校正指令值以将微动台移动到目标位置。 因此，校正粗略运动阶段的误差。

    Manufacturing method of a micro structure
    6.
    发明授权
    Manufacturing method of a micro structure 失效
    微结构的制造方法

    公开(公告)号：US06890788B2

    公开(公告)日：2005-05-10

    申请号：US10793906

    申请日：2004-03-08

    申请人： Hiroyuki Hotta ,  Takayuki Yamada ,  Mutsuya Takahashi

    发明人： Hiroyuki Hotta ,  Takayuki Yamada ,  Mutsuya Takahashi

    IPC分类号： B81C99/00 ,  B29C67/00 ,  H01L21/00 ,  H01L21/44

    CPC分类号： B81C1/0046

    摘要： A release layer is formed on a substrate, and plural thin-film patterns are formed on the release layer. The release layer is etched back at a prescribed depth at least in regions close to the circumferences of the thin-film patterns. The thin-film patterns are transferred sequentially to a counter substrate to be laminated on the counter substrate and to thereby form a micro structure. This manufacturing method is employed in a case that the combination of thin-film patterns and are lease layer is such that when a prescribed pressure is applied to each of the thin-film patterns on the release layer in the transferring, the height of a raised portion of the release layer that would be appeared in a region close to the circumference of the thin-film pattern if the release layer were not be etched back is greater than or equal to the thickness of the thin-film pattern.

    摘要翻译： 剥离层形成在基板上，在剥离层上形成有多个薄膜图案。 至少在靠近薄膜图案的周边的区域中，以规定的深度回蚀剥离层。 将薄膜图案顺序地转印到相对基板上，以层叠在相对基板上，从而形成微结构。 这种制造方法是在薄膜图案和租赁层的组合是这样的情况下使得当在转印中向剥离层上的每个薄膜图案施加规定的压力时，升高的高度 如果剥离层未被回蚀而出现在靠近薄膜图案的周边的区域中的剥离层的部分大于或等于薄膜图案的厚度。

    Manufacturing method of a micro structure
    8.
    发明申请
    Manufacturing method of a micro structure 失效

    公开(公告)号：US20050020005A1

    公开(公告)日：2005-01-27

    申请号：US10793906

    申请日：2004-03-08

    申请人： Hiroyuki Hotta ,  Takayuki Yamada ,  Mutsuya Takahashi

    发明人： Hiroyuki Hotta ,  Takayuki Yamada ,  Mutsuya Takahashi

    IPC分类号： B81C99/00 ,  B29C67/00 ,  H01L21/00 ,  H01L21/44

    CPC分类号： B81C1/0046

    摘要： A release layer is formed on a substrate, and plural thin-film patterns are formed on the release layer. The release layer is etched back at a prescribed depth at least in regions close to the circumferences of the thin-film patterns. The thin-film patterns are transferred sequentially to a counter substrate to be laminated on the counter substrate and to thereby form a micro structure. This manufacturing method is employed in a case that the combination of thin-film patterns and are lease layer is such that when a prescribed pressure is applied to each of the thin-film patterns on the release layer in the transferring, the height of a raised portion of the release layer that would be appeared in a region close to the circumference of the thin-film pattern if the release layer were not be etched back is greater than or equal to the thickness of the thin-film pattern.

    Micro-structure formed of thin films
    9.
    发明申请
    Micro-structure formed of thin films 审中-公开
    薄膜微结构

    公开(公告)号：US20070065595A1

    公开(公告)日：2007-03-22

    申请号：US11601780

    申请日：2006-11-20

    申请人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    发明人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    IPC分类号： C23C14/02

    CPC分类号： B81C99/008 ,  B29C64/00 ,  B33Y10/00 ,  B33Y30/00 ,  B81B2201/035 ,  B81C2201/0197 ,  Y10T156/12 ,  Y10T156/13 ,  Y10T156/14 ,  Y10T428/24355

    摘要： A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.

    摘要翻译： 其上形成有多个与微结构的横截面相对应的多个横截面的薄膜的基板被放置在基板支架上。 衬底保持器被升高以将形成在衬底上的薄膜粘合到台的表面上，并且通过降低衬底保持器，将薄膜与衬底分离并转移到平台侧。 重复转印过程以在台上层压多个薄膜并形成微结构。 因此，提供了可以由诸如陶瓷的金属或绝缘体制造的具有高尺寸精度，特别是层压方向上的高分辨率的微结构，并且可以以结构元件的组合形式一起制造，并且 制造方法及其装置。